CN102335644A - Head unit of fluid discharge apparatus - Google Patents

Head unit of fluid discharge apparatus Download PDF

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Publication number
CN102335644A
CN102335644A CN2010102782240A CN201010278224A CN102335644A CN 102335644 A CN102335644 A CN 102335644A CN 2010102782240 A CN2010102782240 A CN 2010102782240A CN 201010278224 A CN201010278224 A CN 201010278224A CN 102335644 A CN102335644 A CN 102335644A
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CN
China
Prior art keywords
along
mobile
head unit
moves
nozzle
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Pending
Application number
CN2010102782240A
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Chinese (zh)
Inventor
崔丁元
裵哲晤
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Top Engineering Co Ltd
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Top Engineering Co Ltd
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Publication date
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Publication of CN102335644A publication Critical patent/CN102335644A/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60Arrangements for mounting, supporting or holding spraying apparatus
    • B05B15/65Mounting arrangements for fluid connection of the spraying apparatus or its outlets to flow conduits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/08Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
    • B05B7/0861Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with one single jet constituted by a liquid or a mixture containing a liquid and several gas jets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02225Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/76Apparatus for connecting with build-up interconnects
    • H01L2224/7615Means for depositing
    • H01L2224/7618Means for blanket deposition
    • H01L2224/76184Means for blanket deposition for spray coating, i.e. nozzle

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Ink Jet (AREA)

Abstract

The invention discloses a head unit of a fluid discharge apparatus. The head unit can use a simple structure to adjust the position of a nozzle relative to a substrate.

Description

The head unit of fluid discharging apparatus
Technical field
The present invention relates to a kind of head unit of fluid discharging apparatus, this head unit discharges the fluid in on the substrate in the process of making semiconductor or liquid crystal panel.
Background technology
Generally speaking, flat-panel monitor (FPD) is meant than the conventional television or the thin and light video display of monitor that use cathode-ray tube.The example of the FPD that has researched and developed and used is LCD (LCD), plasma display (PDP), field-emitter display (FED) and Organic Light Emitting Diode (OLED).
Among them, LCD provides based on the data of image information signal to the liquid crystal cells that is arranged as matrix independently, controls the light transmission of liquid crystal cells with this, thereby shows the display of expection image.Because LCD has thin, light and the advantage low and that operating voltage is low that consumes energy, so they are used widely.Below the manufacturing approach that generally is used in the liquid crystal panel among the LCD will be described.
At first, on upper substrate, form colored filter and common electrode, and on the infrabasal plate relative, form thin film transistor (TFT) (TFT) and pixel electrode with upper substrate.Thereafter, after alignment film was applied to substrate, the friction matching film was so that be that the liquid crystal molecule that will be formed in the liquid crystal layer between the alignment film provides tilt angle and alignment direction.
Further, for keep between the substrate predetermined gap, prevent the gap between liquid crystal leakage and the hermetic sealing substrate, with predetermined pattern fluid sealant is applied in the substrate at least one to form sealant pattern.After this, liquid crystal is discharged at least one in the substrate.With the method, produce liquid crystal panel.
When making liquid crystal panel, use fluid discharging apparatus that liquid crystal or fluid sealant (back literary composition will be called fluid) are discharged on the substrate.Fluid discharging apparatus comprises saddle, head unit and head support member, and substrate is installed on the saddle, and head unit is equipped with the nozzle of exhaust fluid, head support member supporting member unit.Fluid discharging apparatus discharges the fluid in on the substrate when changing the position of nozzle with respect to substrate.That is to say; Fluid discharging apparatus is in the consistent gap between the discharge orifice that keeps nozzle through the nozzle that moves up and down head unit along Z-direction and the substrate; Move horizontally nozzle and/or substrate along X-direction and Y direction, and discharge the fluid in on the substrate.
In this fluid discharging apparatus, one of key factor of optimum discharge fluid is the position of the discharge orifice of nozzle with respect to substrate.Therefore, utilizing before fluid discharging apparatus discharges the fluid in to substrate, with the discharge orifice of nozzle with respect to the position correction of substrate for being positioned at optimum range.Through whether being positioned at the optimum range on the substrate and repeating aforesaid operations in the position of the position of the discharge orifice of gaging nozzle in the moving nozzle, the nozzle discharge orifices confirming to have measured subtly, adjust the position of the discharge orifice of nozzle with respect to substrate along X, Y and Z-direction.
The problem of traditional fluid discharging apparatus is that head unit is provided with multiple arrangement, and these devices are along all directions moving nozzle independently, with along above-mentioned all directions adjustment nozzle location, makes to be used to control structure of nozzle and method is complicated.
Summary of the invention
Therefore, the present invention is devoted to solve the problems referred to above that exist in the prior art, and the purpose of this invention is to provide a kind of head unit of fluid discharging apparatus, and head unit can utilize the position of simple structure control nozzle with respect to substrate.
To achieve these goals, the present invention provides a kind of head unit of fluid discharging apparatus, and head unit comprises: first member, and it is connected to head support member with the mode that moves along X-direction; Second member, it is to be provided with along the mode that Y direction moves with respect to first member; The 3rd member, it is connected to second member with the mode that moves along Z-direction; The 4th member, it is connected to the 3rd member with the mode that moves along Z-direction, and the 4th member is provided with nozzle with exhaust fluid; First driver element, it is arranged between second member and the 3rd member to move the 3rd member with respect to second member along Z-direction; And second driver element, it moves second member along Y direction, and moves the 4th member along Z-direction with respect to the 3rd member.
Second driver element can comprise: CD-ROM drive motor, and it is supported on first member; Mobile member, it is connected to CD-ROM drive motor, and moves along Y direction through the driving force of CD-ROM drive motor; And driven member, it is arranged on the 4th member, and moves along Z-direction through the Y axle motion of mobile member.
When Y direction moved, driven member moved along Z-direction when can on mobile member, slide at mobile member.For this purpose, the cam surface with predetermined curvature can be set, and driven member can be included in the roller that slides on the cam surface of mobile member on mobile member.
Head unit also can comprise first fixed cell, and first fixed cell optionally is fixed to the 3rd member with mobile member.First fixed cell can comprise electromagnet.
Head unit also can comprise second fixed cell, and second fixed cell optionally is fixed to the 3rd member with the 4th member.Second fixed cell can comprise electromagnet.
Description of drawings
From the following detailed description that combines accompanying drawing, will more know and understand above-mentioned and other purpose, characteristic and advantage of the present invention, wherein:
Fig. 1 is the stereogram of diagram according to fluid discharging apparatus of the present invention;
Fig. 2 is the side view of head unit of the fluid discharging apparatus of pictorial image 1;
Fig. 3 is the side view of operation of head unit of the fluid discharging apparatus of pictorial image 1;
Fig. 4 is the cutaway view of first fixed cell of the fluid discharging apparatus of pictorial image 1; And
Fig. 5 to 8 is side views of the operation of the head unit of the fluid discharging apparatus of pictorial image 1 in order.
The specific embodiment
Hereinafter will illustrate and describe the head unit of the fluid discharging apparatus of the preferred embodiment for the present invention.
As shown in Figure 1, fluid discharging apparatus according to the present invention comprises that pedestal 10, saddle 20, pair of engage members move guide member 30, head support member 40, head unit 50 and control module (not shown).Saddle 20 is installed on the pedestal 10, and substrate S places on the saddle 20.Support member moves guide member 30 and is arranged on the opposite side of saddle 20 with the mode of extending along Y direction.Head support member 40 is installed in saddle 20 tops with the opposed end of head support member 40 by the mode that above-mentioned paired support member moves guide member 30 supports, and extends along X-direction.Head unit 50 to be being installed to head support member 40 along the mobile mode of X-direction, and comprises the nozzle 61 that is used for exhaust fluid.Control module control fluid emissions operation.
Be used for moving unit 21 and can be installed in pedestal 10 with the y-axis shift moving cell 22 that is used for moving saddle 20 along Y direction along the X axle that X-direction moves saddle 20.
Support member moves on the opposed end that unit 41 is installed in head support member 40, moves guide member 30 to be connected to support member.Support member moves the interaction that guide member 30 and support member move between the unit 41 and allows that head support member 40 moves vertically promptly moving along Y direction of guide member 30 along each support member.Therefore, head unit 50 can move along Y direction through the Y axle motion of head support member 40.
Mobile guide member 42 is arranged on the head support member 40 with the mode of extending along X-direction, and a mobile unit 43 is arranged between head support member 40 and the head unit 50, vertically being X-direction slip-on head unit 50 along head support member 40.
As shown in Figure 2, head unit 50 comprises first member 51, second member 52, the 3rd member 53, the 4th member 54, first driver element 55 and second driver element 70.First member 51 is to be connected to head support member 40 along the mobile mode of X-direction.Second member 52 is arranged to can move along Y direction with respect to first member 51.The 3rd member 53 is to be connected to second member 52 along the mobile mode of Z-direction.The 4th member 54 to be being connected to the 3rd member 53 along the mobile mode of Z-direction, and the nozzle 61 that is used for exhaust fluid is installed to the 4th member 54.First driver element 55 is arranged between second member 52 and the 3rd member 53, to move the 3rd member 53 with respect to second member 52 along Z-direction.Second driver element 70 is supported on first member 51, and moves second member 52 along Y direction, and also moves the 4th member 54 with respect to the 3rd member 53 along Z-direction.
Nozzle 61 can be integrally formed with the storage container 62 of storing fluid in it, and can be fastened to the 4th member 54 by means of clamp structure 63.
First member 51 can move unit 43 by means of head and be connected to head support member 40.Therefore; When moving unit 43 through driving head when X-direction moves first member 51, be connected to second member 52 of first member 51, the 4th member 54 that is connected to the 3rd member 53 of second member 52 and is connected to the 3rd member 53 can move along X-direction together.
Second member 52 by means of the guide rail 78 that extends along Y direction to be connected to first member 51 along the mobile mode of Y direction.When second member 52 when Y direction moves, the 4th member 54 that is connected to the 3rd member 53 of second member 52 and is connected to the 3rd member 53 can move along Y direction together.
The 3rd member 53 can be supported on second member 52 by means of first driver element 55, and when first driver element 55 is driven, can move along Z-direction with respect to second member 52.Make the 3rd member 53 when Z-direction moves when driving first driver element 55, the 4th member 54 that is connected to the 3rd member 53 also can move along Z-direction.
For example, first driver element 55 can comprise motor 551 and axle 552, and motor 551 is arranged on second member 52, and axle 552 is couple to the 3rd member 53 together with motor 551.As shown in Figure 3, when CD-ROM drive motor 551, the 3rd member 53 can move along Z-direction with respect to second member 52, and the 4th member 54 can move along Z-direction with the 3rd member 53.Thus, can adjust the position of nozzle 61 along Z-direction.This first driver element 55 act as according to the inhomogeneous upper surface that places the substrate S on the saddle 20 along Z-direction moving nozzle 61, therefore in the fluid discharge process, keeps the interval between substrate S and the nozzle 61 constant.
Second driver element 70 comprises CD-ROM drive motor 71, guide member 72, coupler member 73, mobile member 74, driven member 75, first fixed cell 80 and second fixed cell 90.CD-ROM drive motor 71 is supported on first member 51.Guide member 72 extends along Y direction.Through driving CD-ROM drive motor 71, coupler member 73 moves along guide member 72 on Y direction.Mobile member 74 is couple to coupler member 73, and moves along Y direction through the Y axle motion of coupler member 73.Driven member 75 is arranged on the 4th member 54 with the mode that driven member 75 can touch mobile member 74.When mobile member 74 when Y direction moves, driven member 75 touches mobile member 74 and moves along Z-direction.First fixed cell 80 optionally is fixed to the 3rd member 53 with mobile member 74.Second fixed cell 90 optionally is fixed to the 3rd member 53 with the 4th member 54.
In second driver element 70, the structure that moves mobile member 74 along Y direction can adopt ball-screw.That is to say that CD-ROM drive motor 71 produces revolving forces, and the revolving force of guide member 72 through CD-ROM drive motor 71 rotate, make coupler member 73 move along Y direction.Yet the present invention is not limited to this structure, and can use linear motor.That is to say that CD-ROM drive motor 71 comprises rotor and stator, make coupler member 73 on Y direction, to move through the electrical interaction between rotor and the stator along guide member 72.In addition, the present invention can use like lower device, and this device comprises hydraulic cylinder or the pneumatic cylinder that moves coupler member 73 along Y direction, perhaps is used for moving along Y direction the various linear feeding mechanism of mobile member 74.
Cam surface 741 with predetermined curvature is to be arranged on the side of mobile member 74 with driven member 75 relative modes.In addition, driven member 75 can be included in the roller that slides on the cam surface 741 of mobile member 74.Yet the present invention is not limited to this structure.That is to say, can on driven member 75, form cam surface, make the cam surface 741 of mobile member 74 slide with respect to the cam surface of driven member 75 with cam surface 741 relative modes with mobile member 74.In addition, can on mobile member 74, roller be provided, and can on driven member 75, form cam surface.Like this, can between mobile member 74 and driven member 75, use various structures, convert the Z axle driving force of driven member 75 with Y axle driving force to mobile member 74.
Simultaneously, driven member 75 mode that can adjust its Y shaft position and Z shaft position is arranged on the 3rd member 53.
As shown in Figure 4, first fixed cell 80 can comprise first fixed part 81 that is arranged on the mobile member 74 and be arranged on second fixed part 82 on the 3rd member 53.First fixed part 81 and second fixed part 82 can comprise the electromagnet that when input electrical signal, has opposed polarity.Yet the present invention is not limited to said structure.That is to say, any the comprised electromagnet in first fixed part 81 or second fixed part 82, and another can be processed by the material that can be attached to this electromagnet.Like this, first fixed cell 80 comprises electromagnet, makes mobile member 74 can automatically be fixed to the 3rd member 53.Further, the present invention is not limited to this structure that first fixed cell 80 comprises electromagnet.That is to say; The present invention can use the various structures that mobile member 74 optionally are fixed to the 3rd member 53; For example, be arranged at clamp structure between mobile member 74 and the 3rd member 53 such as bolt or nut, or comprise through electric or electronics handover operation and the locking key device of mobile bar.Simultaneously, first fixed part 81 can be arranged on the extension 742 that a side of mobile member 74 is extended, but and second fixed part 82 can be arranged on the connecting portion 531 that one is connected to the 3rd member 53.Second fixed part 82 can be arranged on mobile member 74 along on the mobile alignment of Y direction.This structure is allowed through the motion of mobile member 74 and is moved first fixed part 81 and first fixed part 81 is placed on second fixed part 82.Further, when prearranged signals being applied to first fixed part 81 and second fixed part 82, can mobile member 74 be fixed to the 3rd member 53 through the interaction between first fixed part 81 and second fixed part 82.
Second fixed cell 90 can comprise the electromagnet that is arranged between the 3rd member 53 and the 4th member 54.Like this, when second fixed cell 90 comprised electromagnet, the 3rd member 53 and the 4th member 54 can automatically be secured together each other.Yet the present invention is not limited to the structure that second fixed cell 90 comprises electromagnet.That is to say; The present invention can use the various structures that the 4th member 54 optionally are fixed to the 3rd member 53; For example; Place the clamp structure between the 3rd member 53 and the 4th member 54, perhaps comprise through electric or electronics handover operation and the locking key device of mobile bar such as bolt or nut.This structure is allowed must be fixed to the 3rd member 53 with the 4th member 54 when the 4th member 54 with the 3rd member 53 when Z-direction moves from the process of nozzle 61 exhaust fluid.In addition, when needs are adjusted or proofreaied and correct the Z shaft position of nozzle 61, the 3rd member 53 is discharged from the 4th member 54, make the 4th member 54 to move independently along Z-direction with respect to the 3rd member 53.
Hereinafter will be described the operation according to fluid discharging apparatus of the present invention with reference to Fig. 5 to 8.
Before the use fluid discharging apparatus discharges the fluid in to the operation on the substrate S, can the discharge orifice of nozzle 61 be preset optimum range along the position correction of Y direction and Z-direction to being positioned at respect to substrate S.Adjustment nozzle 61 discharge orifices are following with respect to the mode of the position of substrate S.When along Y direction and Z-direction subtly during moving nozzle 61, the position of the discharge orifice of gaging nozzle 61, and whether the measuring position of the discharge orifice of definite nozzle 61 is positioned at preset optimum range with respect to substrate S.
When the position of adjustment nozzle 61, at first as shown in Figure 5, drive CD-ROM drive motor 71, make mobile member 74 75 move along Y direction towards driven member.At this moment, the 3rd member 53 is not fixed to the 4th member 54 by second fixed cell 90.Further; When mobile member 74 touches driven member 75 and mobile member 74 continues to move thereafter; Driven member 75 slides on the cam surface 741 of mobile member 74; Driven member 75 moves along Z-direction (direction makes progress in Fig. 5), and the 4th member 54 moves along Z-direction through the motion of driven member 75.Therefore, the adjustable Z shaft position (in Fig. 5, A changes to position B to the discharge orifice of nozzle 61 from the position) of putting in order the discharge orifice of the nozzle 61 that is fixed to the 4th member 54.
Further, after the Z shaft position of the discharge orifice of trained nozzle 61, the 4th member 54 is fixed to the 3rd member 53 by second fixed cell 90.Next, as shown in Figure 6, when moving mobile member 74 through driving second driver element 70 along Y direction (in Fig. 6, promptly mobile member 74 moves apart the direction of driven member 75), first fixed part 81 moves to the position corresponding to second fixed part 82.At this moment, because the 4th member 54 is fixed to the 3rd member 53, therefore when mobile member 74 moved, the 4th member 54 can not change with the position of nozzle 61 along Z-direction.
After first fixed part 81 moved to the position corresponding to second fixed part 82, through the interaction between first fixed part 81 and second fixed part 82, mobile member 74 was fixed to the 3rd member 53.In this state, as shown in Figure 7, mobile member 74 moves along Y direction (in Fig. 7, promptly mobile member 74 moves apart the direction of driven member 75).At this moment, because the 3rd member 53 is fixed to mobile member 74 by first fixed cell 80 and the 4th member 54 is fixed to the 3rd member 53 by second fixed cell 90, therefore when mobile member 74 moved, the 3rd member 53 and the 4th member 54 also moved.Therefore, the adjustable Y shaft position (in Fig. 7, B changes to position C from the position in the position of the discharge orifice of nozzle 61) of putting in order the discharge orifice of the nozzle 61 that is fixed to the 4th member 54.
Simultaneously, as shown in Figure 8 since in the fluid discharge process operation first driver element 55, so mobile member 74 can be moved to and not hinder the 3rd member 53 and the 4th member 54 position of moving along Z-direction.
The position of the discharge orifice of adjustment nozzle 61 along Y direction and Z-direction allowed in this operation.
Above-mentionedly can in the process of the position of the discharge orifice of proofreading and correct nozzle 61, utilize the position of the discharge orifice of single CD-ROM drive motor 71 adjustment nozzles 61 along Y direction and Z-direction according to fluid discharging apparatus of the present invention.Therefore, compare with the conventional fluid tapping equipment along all directions moving nozzle 61 with having a plurality of CD-ROM drive motors that are positioned on the head unit 50, fluid discharging apparatus according to the present invention has the effect of structure and control method simplification.
Embodiment of the present invention is used for when making liquid crystal panel, being used to discharging the head unit of the fluid discharging apparatus of liquid crystal or fluid sealant.Yet, can be applicable to the various fluid discharging apparatus that in the process of making semiconductor and liquid crystal panel, use according to the head unit of fluid discharging apparatus of the present invention, for example, be used for the resin bringing device of semiconductor fabrication.
As stated; The present invention provides the head unit of fluid discharging apparatus; This head unit can use the position of single CD-ROM drive motor control nozzle with respect to substrate in the process of the position of the discharge orifice of proofreading and correct nozzle, therefore simplified structure and the method that is used to control nozzle location.
The technological purport of embodiment of the present invention can independently be implemented or interosculate.

Claims (8)

1. the head unit of a fluid discharging apparatus comprises:
First member, said first member is connected to head support member with the mode that moves along X-direction;
Second member, said second member is to be provided with along the mode that Y direction moves with respect to said first member;
The 3rd member, said the 3rd member is connected to said second member with the mode that moves along Z-direction;
The 4th member, said the 4th member is connected to said the 3rd member with the mode that moves along Z-direction, and said the 4th member is provided with nozzle with exhaust fluid;
First driver element, said first driver element are arranged between said second member and said the 3rd member to move said the 3rd member with respect to said second member along Z-direction; And
Second driver element, said second driver element moves said second member along Y direction, and moves said the 4th member along Z-direction with respect to said the 3rd member.
2. head unit as claimed in claim 1, wherein, said second driver element comprises:
CD-ROM drive motor, said CD-ROM drive motor are supported on said first member;
Mobile member, said mobile member is connected to said CD-ROM drive motor, and moves along Y direction through the driving force of said CD-ROM drive motor; And
Driven member, said driven member are arranged on said the 4th member, and move along Z-direction through the Y axle motion of said mobile member.
3. head unit as claimed in claim 2, wherein, when Y direction moved, said driven member moved along Z-direction when on said mobile member, sliding at said mobile member.
4. head unit as claimed in claim 3, wherein, said mobile member is provided with the cam surface with predetermined curvature, and said driven member is included in the roller that slides on the cam surface of said mobile member.
5. like each described head unit in the claim 1 to 4, also comprise first fixed cell that said mobile member optionally is fixed to said the 3rd member.
6. head unit as claimed in claim 5, wherein, said first fixed cell comprises electromagnet.
7. like each described head unit in the claim 1 to 4, also comprise second fixed cell that said the 4th member optionally is fixed to said the 3rd member.
8. head unit as claimed in claim 7, wherein, said second fixed cell comprises electromagnet.
CN2010102782240A 2010-07-14 2010-09-10 Head unit of fluid discharge apparatus Pending CN102335644A (en)

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Application Number Priority Date Filing Date Title
KR1020100068040A KR101723376B1 (en) 2010-07-14 2010-07-14 Head unit of fluid discharge apparatus
KR10-2010-0068040 2010-07-14

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CN102335644A true CN102335644A (en) 2012-02-01

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CN201380132Y (en) * 2009-02-11 2010-01-13 李永年 Numerically controlled spraying machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103894863A (en) * 2012-12-27 2014-07-02 北京谊安医疗系统股份有限公司 Automatic feeding machine
CN109865612A (en) * 2019-02-28 2019-06-11 佛山市保利来建材实业有限公司 A kind of imitative stone aluminum plate spreads a spray equipment and its spraying process
CN109865612B (en) * 2019-02-28 2024-03-19 佛山市保利来建材实业有限公司 Spreading point spraying device and spraying process of stone-like aluminum plate

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