CN101677078B - Substrate positioning device - Google Patents
Substrate positioning device Download PDFInfo
- Publication number
- CN101677078B CN101677078B CN200810304588.4A CN200810304588A CN101677078B CN 101677078 B CN101677078 B CN 101677078B CN 200810304588 A CN200810304588 A CN 200810304588A CN 101677078 B CN101677078 B CN 101677078B
- Authority
- CN
- China
- Prior art keywords
- main body
- conveyer belts
- gears
- base positioner
- driver element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T24/00—Buckles, buttons, clasps, etc.
- Y10T24/44—Clasp, clip, support-clamp, or required component thereof
- Y10T24/44068—Clasp, clip, support-clamp, or required component thereof having gripping member actuated by fluid force
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T24/00—Buckles, buttons, clasps, etc.
- Y10T24/44—Clasp, clip, support-clamp, or required component thereof
- Y10T24/44966—Clasp, clip, support-clamp, or required component thereof having gripping member shifted by operator
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The invention relates to a substrate positioning device, which includes a first driving unit and a plurality of first butting columns. The first driving unit includes a first excitation unit, two first gears, and two first transfer belts. The two first gears are mutually engaged, the first excitation unit is mechanically coupled to one of the two first gears in order to drive the two first gears to rotate. The two first transfer belts are pivotally connected the two first gears and driven thereby to rotate along the reverse direction. The plurality of first butting columns are respectively connected to the two first transfer belts and driven thereby to move towards or apart along a first direction. The substrate positioning device is simple in structure, easy for maintenance and adjustment.
Description
Technical field
The present invention relates to a kind of positioner, particularly a kind of being used for made flat-panel monitor (Flat Panel Display, the base positioner of location substrate in the time of FPD).
Background technology
Flat-panel monitor mainly comprises LCD (Liquid Crystal Display, LCD), plasma display (Plasma Display Panel, PDP) and Organic Light Emitting Diode (Organic Electroluminescent, OEL) type such as display.Above-mentioned flat-panel monitor is by to by substrate, processes madely as glass substrate, and processing, the testing process of substrate is needed earlier substrate to be positioned usually, to ensure the processing and the accuracy of detection of substrate.Specifically can consult Cresswell, M.W. wait the people at document Microelectronic Test Structures, " Test structure for the in-plane locations of project features with nanometer-level accuracy traceable to a coordinate measurement system " literary composition of delivering among the 1993.ICMTS 1993.Proceedings of the 1993 International Conference on (in March, 1993).
Usually, substrate is positioned employing to be reached by the mode that the side of substrate carries out fixing, as shown in Figure 1, described base positioner 2 comprises that post 3 is supported in two in left side and post 5 is supported on two on right side, when needs carry out fixing when location to substrate 7, support post 3,5 respectively by in opposite directions first, second direction I, II this substrate 7 of conflicting.Yet, in the prior art, the described post 3,5 that supports adopts mutually independently that mechanical structure drives its substrate 7 of conflicting, on the one hand, for firm this substrate 7 of fixing, base positioner 2 need to adopt at least one pair of in opposite directions support post 3,5, this makes that the mechanism design of base positioner is too complicated, and causes maintenance to be difficult for adjusting; On the other hand, described support post 3,5 moving to the inconsistent process of substrate 7 in, its distance that moves is difficult to accomplish mutual coordination, act in agreement, therefore, described substrate 7 is in by the fixing location process, it is subjected to displacement variation easily, thereby causes the location inaccurate.
In view of this, provide that a kind of structure is simple, base positioner is real in necessary more accurately in the location.
Summary of the invention
To illustrate that a kind of structure is simpler with embodiment below, the location is base positioner more accurately.
A kind of base positioner, it comprises that one first driver element and a plurality of first supports post.Described first driver element comprises one first exciting unit, two first gears, two first conveyer belts, these two first gears are meshing with each other, this first exciting unit mechanical couplings in these two first one of them persons of gear driving this two first gears rotation, these two first conveyer belts pivotally connected with these two first gears respectively and by these two first gear drive its by opposite direction rotation.Described a plurality of first supports post is connected to these two first conveyer belts and drives it by these two first conveyer belts respectively and do in opposite directions or opposing moving along first direction.
With respect to prior art, described base positioner is by two first gears, and two first conveyer belts drive a plurality of first and support post move toward one another or opposing motion, should a plurality of first supports post and substrate is carried out fixing locatees to utilize.Because these two first gears, and two first conveyer belt linkage transferring power, so that the transmission of power of first exciting unit extremely a plurality of first is supported post, therefore, this base positioner can reduce and is used to drive a plurality of first and supports the required mechanism of post motion complexity is set, make base positioner simple in structure, thereby be convenient to maintenance and adjust.In addition, this a plurality of first speed when supporting the post motion can be set to identical, preventing substrate occurrence positions skew when the substrate of location, thereby ensures the setting accuracy of substrate.
Description of drawings
Fig. 1 is the operation principle schematic diagram of prior art base positioner.
Fig. 2 is the structural representation of the base positioner that provides of first embodiment of the invention.
Fig. 3 is the local enlarged diagram of first driver element of base positioner shown in Figure 2.
Fig. 4 is the structural representation of the base positioner that provides of second embodiment of the invention.
Fig. 5 is the structural representation of second driver element of base positioner shown in Figure 4.
Fig. 6 is the local enlarged diagram of second driver element shown in Figure 5.
Fig. 7 is the operating principle schematic diagram of base positioner shown in Figure 4.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is described in further detail.
See also Fig. 2, the base positioner 100 that the embodiment of the invention provides, it comprises that one first driver element 10 and a plurality of first supports post 18.
This first driver element 10 comprises one first main body 12, first exciting unit 14 and a plurality of first gear unit 16.This first exciting unit 14 can be a motor, or revolving cylinder etc.These a plurality of first gear units 16 comprise 160,162, two first conveyer belts 164,166 of intermeshing a pair of first gear.This first exciting unit 14 is connected on this first main body 12, and itself and first gear, 160 mechanical couplings, driving first gear 160, and first gear, 162 rotations that are meshed with first gear 160.Particularly, this first exciting unit 14 is a motor or a revolving cylinder.
This first gear 160,162 connects this first conveyer belt 164,166 by a belt wheel 180,182 respectively, this first conveyer belt 164 further is connected to belt wheel 184 away from an end of this belt wheel 180, and this first conveyer belt 166 further is connected to belt wheel 186 away from an end of this belt wheel 182.Above-mentioned belt wheel 180,182,184,186 is connected with this first main body 12 respectively.
Please consult Fig. 3 together, this first main body 12 is provided with two first supporting brackets 13 along the directions X setting on it, and this first supports post 18 and be arranged on this first supporting bracket 13.Particularly, these two first supporting brackets 13 are connected to this first conveyer belt 164,166 by a brace 15 respectively, and the one end offers a slide rail (not indicating).Accordingly, offer the guide rail suitable on this first main body 12, make this first supporting bracket 13 be slidably disposed on this first main body 12 with this slide rail.
Be appreciated that, when this first exciting unit 14 during along the rotation of clockwise direction shown in Fig. 2 arrow, can judge according to this first gear 160,162 and first conveyer belt, 164,166 ways of connecting, these two first supporting brackets 13 will be under the drive of first conveyer belt 164,166 move toward one another.When this first exciting unit 14 during along the rotation of counterclockwise direction, these two first supporting brackets 13 will opposing motion under the drive of first conveyer belt 164,166.When this two first supporting brackets 13 in opposite directions or during opposing motion, it drives and should a plurality of first be synchronized with the movement to post 18 (its number shown in the figure is four).Thus, can a plurality of first support post 18 by this, substrate is carried out the fixing location by the substrate both sides move toward one another of (figure does not show).
These first gear, 160,162 structures are identical, these first conveyer belt, 164,166 structures are also identical, support post 18 in opposite directions or during opposing motion to guarantee these two first supporting brackets 13 and a plurality of first, its movement rate is identical, preventing in the location substrate occurrence positions skew during substrate, thereby ensure the setting accuracy of substrate.
In addition, this first driver element can further comprise two stoppers 191 and two Tension Control portions 192, and the edge that this stopper 191 is fixed on the guide rail of this first main body 12 skids off this first main body 12 to prevent this first supporting bracket 13.These two Tension Control portions 192 comprise a lock-screw respectively, these two lock screws respectively with these belt wheel 184,186 mechanical connections, this belt wheel 184,186 of its scalable respectively along away from or move near an end of belt wheel 180,182, thereby reach the effect of the tension force of regulating first conveyer belt 164,166.
See also Fig. 4, the base positioner 300 that second embodiment of the invention provides, it first driver element 10 and a plurality of first that comprises first embodiment of the invention base positioner 100 supports post 18, and one second driver element 20, a plurality of second supports post 18.
Please consult Fig. 5 together, the structure of this second driver element 20 and this first driver element 10 are similar, and it includes one second main body 22, second exciting unit 24, a plurality of second gear unit 26 and a plurality of second support post 28.This second exciting unit 24 can be motor, or revolving cylinder etc.These a plurality of second gear units 26 comprise 260,262, three second conveyer belts 264,266,268 of intermeshing a pair of second gear.This second exciting unit 24 is fixed on this second main body 22, and itself and second gear, 260 mechanical couplings, driving second gear 260, and second gear, 262 rotations that are meshed with second gear 260.
This second gear 260,262 connects this second conveyer belt 264,268 by a belt wheel 280,282 respectively, and this second conveyer belt 268 further connects this second conveyer belt 266 by a belt wheel 284.In addition, this second conveyer belt 264 further is connected to a belt wheel 286 away from an end of this belt wheel 284, and this second conveyer belt 266 also further is connected to a belt wheel 288 away from an end of this belt wheel 284.Above-mentioned belt wheel 280,282,284,286,288 is connected with this second main body 22 respectively.
Two second supporting brackets 23 are set on this second main body 22.Particularly, these two second supporting brackets 23 are connected to this second conveyer belt 264,266 by a brace 25 respectively, and the one end offers a slide rail (not indicating), and this slide rail and this second main body 22 are suitable, make this second supporting bracket 23 be slidably disposed on this second main body 22.Further, a pneumatic cylinder 27 is set on this second supporting bracket 23, this pneumatic cylinder 27 is provided with these two second to post 28 away from an end of this second main body 22.
Be appreciated that, when this second exciting unit 24 during along the rotation of clockwise direction shown in Fig. 5 arrow, can judge according to described second conveyer belt, 264,266,268 ways of connecting, these two second supporting brackets 23 will be under the drive of second conveyer belt 264,266 move toward one another.Certainly, when this second exciting unit 24 during along the rotation of counterclockwise direction, these two second supporting brackets 23 will opposing motion under the drive of second conveyer belt 264,266.When this two second supporting brackets 23 in opposite directions or during opposing motion, it drives and should a plurality of second be synchronized with the movement to post 28 (its number shown in the figure is four).Further, these second gear, 260,262 structures are identical, and these second conveyer belt, 264,266 structures are also identical, support post 28 in opposite directions or during opposing motion, its movement rate is identical to guarantee these two second supporting brackets 23 and a plurality of second.
In addition, this second driver element 20 also can further comprise two stoppers 291 and two Tension Control portions 292, and the guide rail edges at two ends that this stopper 291 is fixed on this second main body 22 skids off this second main body 12 to prevent this second supporting bracket 23.These two Tension Control portions 292 comprise a lock-screw respectively, these two lock screws respectively with these belt wheel 286,288 mechanical connections, this belt wheel 286,288 of its scalable respectively along away from or move near an end of belt wheel 280,284, thereby reach the effect of the tension force of regulating second conveyer belt 264,268.
These first main body 12 and these second main body, 22 perpendicular settings, promptly this first main body 12 is along the directions X setting, and the perpendicular Y direction of these second main body, 22 edges and directions X is provided with, and this second main body 22 is positioned at the below of first main body 12.
This base positioner 300 can be used to locate substrate 200, as glass plate etc.Fig. 7 illustrates the operation principle of this base positioner 300.This glass plate 200 drives it by the roller 40 of a plurality of array arrangements and moves along Y direction.Be appreciated that when glass plate 200 enters base positioner 300 places regional two second of this second driver element 20 support post 28 and driven by these two pneumatic cylinders 27 and descend, in order to avoid this second supports post 28 and withstand this glass plate 200.When this roller 40 drove these glass plates 200 and moves on this first, second main body 12,22, this a plurality of second supported post 23 and is driven by these two pneumatic cylinders 27 and rise.Further, these first, second exciting unit 14,24 clockwise starts, this a plurality of first supports post 18 along the directions X move toward one another, thereby live this glass plate 200 by the sandwich of this glass plate 200, in addition, this a plurality of second supports post 28 along Y direction move toward one another, thereby lives this glass plate 200 by the other sandwich of this glass plate 200.Thus, relative base positioner 100, this base positioner 300 be fixing location substrate 200 more stably.
When this glass plate 200 supported 18,28 fixings of post by this a plurality of first, second, this base positioner 300 can be used as an integral body and drives this glass plate 200 and move to desired location, so that next step operation.
Certainly, glass plate 200 moved to desired location after, when needs unclamp this glass plate 200, these first, second exciting unit 14,24 starts counterclockwise, at this moment, this a plurality of first, second supports post 18,28 and unclamps this glass plate 200.
Be understandable that, the number of described conveyer belt can be selected as required, be not limited to specific embodiment, for example, first driver element 10 comprises two conveyer belts 164,166, and second driver element 20 comprises three conveyer belts 264,266 and 268, this is because the length of second main body 22 is big slightly than first main body 12, for more stably being passed to second, supports on the post 28 power that guarantees second gear 262, at belt wheel 282, many belt wheels 284 are set between 288, thereby utilize second conveyer belt 268 earlier with transmission of power to belt wheel 284, drive second conveyer belts 266 and second by this belt wheel 284 again and support post 28 motions.
Described base positioner 300, it drives a plurality of first, second respectively by a plurality of first, second gear units 16,26 and supports post 18,28 move toward one another or opposing motion, carries out the fixing location to utilize this a plurality of first, second to support 18,28 pairs of substrates 200 of post.Because these two first gears 160,162, two first conveyer belts 164,166 linkage transferring power, so that the transmission of power of first exciting unit 14 extremely a plurality of first is supported on the post 18, and these two second gears 260,262, two second conveyer belts 264,266 linkage transferring power, so that the transmission of power of second exciting unit 24 extremely a plurality of second is supported on the post 28, therefore, this base positioner 300 can reduce and is used to drive a plurality of first, second supports post 18, the required mechanism of 28 motions is provided with complexity, make that base positioner 300 is simple in structure, be convenient to maintenance and adjust.In addition, when this a plurality of first, second supported post 18,28 motions, its speed can be set to identical respectively, to prevent when locating substrate 200 skew of substrate 200 occurrence positions, thereby the setting accuracy of guarantee substrate 200.
Be understandable that, for the person of ordinary skill of the art, can technical conceive according to the present invention make the change and the distortion of other various correspondences, and all these change the protection range that all should belong to claim of the present invention with distortion.
Claims (10)
1. base positioner, it comprises:
One first driver element, it comprises one first exciting unit, two first gears, two first conveyer belts, these two first gears are meshing with each other, this first exciting unit mechanical couplings in these two first one of them persons of gear driving this two first gears rotation, these two first conveyer belts pivotally connected with these two first gears respectively and by these two first gear drive its by opposite direction rotation;
A plurality of first supports post, and it is connected to these two first conveyer belts and drives it by these two first conveyer belts respectively and does in opposite directions or opposing moving along first direction.
2. base positioner as claimed in claim 1 is characterized in that, this base positioner further comprises:
One second driver element, it comprises one second exciting unit, two second gears, two second conveyer belts, these two second gears are meshing with each other, this second exciting unit mechanical couplings in these two second one of them persons of gear driving this two second gears rotation, these two second conveyer belts pivotally connected with these two second gears respectively and by these two second gear drive its by opposite direction rotation;
A plurality of second supports post, and it is connected to these two second conveyer belts and drives it along doing in opposite directions or opposing moving with the perpendicular second direction of first direction by these two second conveyer belts respectively.
3. base positioner as claimed in claim 2 is characterized in that, this first, second exciting unit is revolving cylinder or motor.
4. base positioner as claimed in claim 2 is characterized in that, rule belt when this first, second conveyer belt is respectively.
5. base positioner as claimed in claim 2, it is characterized in that, this first, second driver element also comprises one first main body and one second main body respectively, this first exciting unit, two first gears, two first conveyer belts are arranged on this first main body, this second exciting unit, two second gears, two second conveyer belts are arranged on this second main body, and this first, second main body is provided with along first, second direction respectively, and this second main body is positioned at the below of this first main body.
6. base positioner as claimed in claim 5, it is characterized in that, this second driver element further comprises two lifting units that are arranged on this second main body, these two lifting units are connected to this two conveyer belts, and this a plurality of second supports post and be separately positioned on these two lifting units and by these two lifting units and drive its rising or decline.
7. base positioner as claimed in claim 6 is characterized in that, this lifting unit is a pneumatic cylinder.
8. base positioner as claimed in claim 5, it is characterized in that, this first driver element further comprises two first supporting brackets, this second driver element further comprises two second supporting brackets, these two first supporting brackets are connected to these two first conveyer belts and drive its motion by these two first conveyer belts, this a plurality of first supports post and is installed in respectively on these two first supporting brackets, these two second supporting brackets are connected to these two second conveyer belts and drive its motion by these two second conveyer belts, and this a plurality of second supports post and be installed in respectively on these two second supporting brackets.
9. base positioner as claimed in claim 8, it is characterized in that, this first, second main body offers guide rail respectively, these two first supporting brackets, two corresponding respectively offering and the suitable slide rail of the guide rail of this first, second main body of second supporting bracket are to be slidably disposed on this first, second main body.
10. base positioner as claimed in claim 8 is characterized in that this base positioner further comprises a plurality of stoppers, and these a plurality of stoppers are fixed on the edge of this first, second main body respectively to stop this first, second supporting bracket.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810304588.4A CN101677078B (en) | 2008-09-19 | 2008-09-19 | Substrate positioning device |
| US12/499,100 US20100071172A1 (en) | 2008-09-19 | 2009-07-08 | Clamping apparatus with positioning function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810304588.4A CN101677078B (en) | 2008-09-19 | 2008-09-19 | Substrate positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101677078A CN101677078A (en) | 2010-03-24 |
| CN101677078B true CN101677078B (en) | 2011-09-28 |
Family
ID=42029583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810304588.4A Expired - Fee Related CN101677078B (en) | 2008-09-19 | 2008-09-19 | Substrate positioning device |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20100071172A1 (en) |
| CN (1) | CN101677078B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102299196A (en) * | 2010-06-28 | 2011-12-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Carrying board positioning device and positioning method |
| TWI496233B (en) * | 2013-03-01 | 2015-08-11 | Mas Automation Corp | Substrate positioning device |
| CN105575868B (en) * | 2014-11-10 | 2018-12-07 | 上海理想万里晖薄膜设备有限公司 | Substrate calibration method and apparatus |
| CN106984729B (en) * | 2017-05-23 | 2019-02-22 | 奇瑞汽车股份有限公司 | A kind of punch line material buttress positioning mechanism |
| CN108622660B (en) * | 2018-04-09 | 2019-10-01 | 芜湖立普德机械科技有限公司 | A kind of glass fixture being automatically positioned |
| CN108962813B (en) * | 2018-09-06 | 2023-07-18 | 重庆科技学院 | Adjustable chip clamp |
| CN111307416B (en) * | 2020-04-13 | 2021-11-02 | 董乐融 | AMOLED display panel detects with location frock |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020054962A (en) * | 2000-12-28 | 2002-07-08 | 전형구 | Tantal Measuring Device |
-
2008
- 2008-09-19 CN CN200810304588.4A patent/CN101677078B/en not_active Expired - Fee Related
-
2009
- 2009-07-08 US US12/499,100 patent/US20100071172A1/en not_active Abandoned
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020054962A (en) * | 2000-12-28 | 2002-07-08 | 전형구 | Tantal Measuring Device |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100071172A1 (en) | 2010-03-25 |
| CN101677078A (en) | 2010-03-24 |
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Granted publication date: 20110928 Termination date: 20120919 |