CN102255102B - 用于制造薄层电池的方法和相应的薄层电池 - Google Patents
用于制造薄层电池的方法和相应的薄层电池 Download PDFInfo
- Publication number
- CN102255102B CN102255102B CN201110127423.6A CN201110127423A CN102255102B CN 102255102 B CN102255102 B CN 102255102B CN 201110127423 A CN201110127423 A CN 201110127423A CN 102255102 B CN102255102 B CN 102255102B
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- CN
- China
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- substrate
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 74
- 238000009413 insulation Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 4
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 13
- 238000000151 deposition Methods 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000003698 laser cutting Methods 0.000 description 3
- 229910001416 lithium ion Inorganic materials 0.000 description 3
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000006071 cream Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 239000006182 cathode active material Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000006263 metalation reaction Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
- H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Secondary Cells (AREA)
- Primary Cells (AREA)
- Connection Of Batteries Or Terminals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010029060A DE102010029060A1 (de) | 2010-05-18 | 2010-05-18 | Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie |
| DE102010029060.2 | 2010-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102255102A CN102255102A (zh) | 2011-11-23 |
| CN102255102B true CN102255102B (zh) | 2016-03-23 |
Family
ID=44898714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110127423.6A Active CN102255102B (zh) | 2010-05-18 | 2011-05-17 | 用于制造薄层电池的方法和相应的薄层电池 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5975605B2 (ja) |
| CN (1) | CN102255102B (ja) |
| DE (1) | DE102010029060A1 (ja) |
| FR (1) | FR2960346B1 (ja) |
| IT (1) | ITMI20110836A1 (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014209263A1 (de) * | 2014-05-15 | 2015-11-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikrobatterie und Verfahren zum Herstellen einer Mikrobatterie |
| TW201622228A (zh) * | 2014-08-27 | 2016-06-16 | 應用材料股份有限公司 | 三維薄膜電池 |
| DE102015204844A1 (de) * | 2015-03-18 | 2016-09-22 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Verbinden von Batteriezellen sowie Batteriepack, Batteriemodul, Batterie sowie Fahrzeug |
| JP6287946B2 (ja) * | 2015-05-08 | 2018-03-07 | トヨタ自動車株式会社 | 電池用積層体の製造方法 |
| FR3039005A1 (fr) * | 2015-07-13 | 2017-01-20 | St Microelectronics Tours Sas | Batterie en couches minces autosupportee et procede de fabrication d'une telle batterie |
| DE102016118755B4 (de) | 2015-10-05 | 2019-08-14 | Lpkf Laser & Electronics Ag | 3D-Dünnschichtbatterie und ein Verfahren und Substrat zu deren Herstellung |
| JP6683001B2 (ja) * | 2016-05-10 | 2020-04-15 | トヨタ自動車株式会社 | 固体電池の製造方法 |
| US10833296B2 (en) | 2017-09-26 | 2020-11-10 | International Business Machines Corporation | Thin film solid-state microbattery packaging |
| US10658702B2 (en) * | 2017-10-02 | 2020-05-19 | International Business Machines Corporation | High-performance thin-film battery with an interfacial layer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101517793A (zh) * | 2006-07-18 | 2009-08-26 | 西姆贝特公司 | 用于固态微电池光刻制造、切单和钝化的方法和设备 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3612018B2 (ja) * | 1992-12-04 | 2005-01-19 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| FR2862437B1 (fr) * | 2003-11-14 | 2006-02-10 | Commissariat Energie Atomique | Procede de fabrication d'une micro-batterie au lithium |
| SE0402471D0 (sv) * | 2004-10-12 | 2004-10-12 | Anders Lundblad | Electrochemical device |
| CN101496218A (zh) * | 2006-07-25 | 2009-07-29 | 皇家飞利浦电子股份有限公司 | 三维基板上薄层电池堆叠体的制造方法 |
| KR101773498B1 (ko) * | 2007-10-25 | 2017-09-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 배터리들의 대량 생산을 위한 방법 |
| FR2952477B1 (fr) * | 2009-11-06 | 2011-12-09 | St Microelectronics Tours Sas | Procede de formation d'une batterie de type lithium-ion en couches minces |
-
2010
- 2010-05-18 DE DE102010029060A patent/DE102010029060A1/de not_active Ceased
-
2011
- 2011-05-13 IT IT000836A patent/ITMI20110836A1/it unknown
- 2011-05-17 CN CN201110127423.6A patent/CN102255102B/zh active Active
- 2011-05-17 FR FR1154261A patent/FR2960346B1/fr not_active Expired - Fee Related
- 2011-05-18 JP JP2011111705A patent/JP5975605B2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101517793A (zh) * | 2006-07-18 | 2009-08-26 | 西姆贝特公司 | 用于固态微电池光刻制造、切单和钝化的方法和设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102255102A (zh) | 2011-11-23 |
| JP2011243577A (ja) | 2011-12-01 |
| ITMI20110836A1 (it) | 2011-11-19 |
| JP5975605B2 (ja) | 2016-08-23 |
| FR2960346B1 (fr) | 2019-08-23 |
| FR2960346A1 (fr) | 2011-11-25 |
| DE102010029060A1 (de) | 2011-11-24 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |