CN102234785A - 衬底涂层及其形成方法 - Google Patents
衬底涂层及其形成方法 Download PDFInfo
- Publication number
- CN102234785A CN102234785A CN2010101701299A CN201010170129A CN102234785A CN 102234785 A CN102234785 A CN 102234785A CN 2010101701299 A CN2010101701299 A CN 2010101701299A CN 201010170129 A CN201010170129 A CN 201010170129A CN 102234785 A CN102234785 A CN 102234785A
- Authority
- CN
- China
- Prior art keywords
- layer
- carbon
- fluorine
- substrate
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 44
- 239000011248 coating agent Substances 0.000 title claims abstract description 42
- 239000000758 substrate Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 53
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 53
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 229910052731 fluorine Inorganic materials 0.000 claims description 26
- 239000011737 fluorine Substances 0.000 claims description 26
- 238000005229 chemical vapour deposition Methods 0.000 claims description 18
- 229920001296 polysiloxane Polymers 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- 229910000838 Al alloy Inorganic materials 0.000 claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910000861 Mg alloy Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- -1 pottery Inorganic materials 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000000376 reactant Substances 0.000 claims description 2
- 238000004062 sedimentation Methods 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 10
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 11
- 238000004140 cleaning Methods 0.000 abstract description 4
- 238000007790 scraping Methods 0.000 abstract 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 16
- 238000012360 testing method Methods 0.000 description 11
- 230000003670 easy-to-clean Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 230000003678 scratch resistant effect Effects 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Abstract
Description
测试 | 结果 |
清洁测试(清除指纹的测试) | 擦拭一次即可清除 |
摩擦测试(参考ISO2409及DIN53151的规范) | 摩擦40,000次后涂层仍未剥落 |
附着度测试(十字割线,参考ISO2409的规范) | 0个割痕 |
热测试(温度冲击,参考IEC60068-2-14的规范+清洁测试) | 通过 |
湿热测试(参考IEC68-2-30的规范+清洁测试) | 通过 |
棍棒刮痕测试(参考ISO1518的规范) | 10到12次后出现第一道可目视的刮痕 |
Claims (18)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201010170129 CN102234785B (zh) | 2010-04-30 | 2010-04-30 | 衬底涂层及其形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201010170129 CN102234785B (zh) | 2010-04-30 | 2010-04-30 | 衬底涂层及其形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102234785A true CN102234785A (zh) | 2011-11-09 |
CN102234785B CN102234785B (zh) | 2013-08-21 |
Family
ID=44885897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201010170129 Active CN102234785B (zh) | 2010-04-30 | 2010-04-30 | 衬底涂层及其形成方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102234785B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103374697A (zh) * | 2012-04-20 | 2013-10-30 | 深圳富泰宏精密工业有限公司 | 类金刚石膜层的表面处理方法及制品 |
CN112030145A (zh) * | 2020-11-05 | 2020-12-04 | 苏州香榭轩表面工程技术咨询有限公司 | 一种金刚石表面改性的方法及应用 |
CN115087590A (zh) * | 2020-02-13 | 2022-09-20 | 永恒科技有限公司 | 自行车框架 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020098285A1 (en) * | 1999-11-30 | 2002-07-25 | Hakovirta Marko J. | Method for producing fluorinated diamond-like carbon films |
CN1782123A (zh) * | 2004-12-03 | 2006-06-07 | 馗鼎奈米科技股份有限公司 | 类金刚石碳膜及其制备方法 |
-
2010
- 2010-04-30 CN CN 201010170129 patent/CN102234785B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020098285A1 (en) * | 1999-11-30 | 2002-07-25 | Hakovirta Marko J. | Method for producing fluorinated diamond-like carbon films |
CN1782123A (zh) * | 2004-12-03 | 2006-06-07 | 馗鼎奈米科技股份有限公司 | 类金刚石碳膜及其制备方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103374697A (zh) * | 2012-04-20 | 2013-10-30 | 深圳富泰宏精密工业有限公司 | 类金刚石膜层的表面处理方法及制品 |
CN115087590A (zh) * | 2020-02-13 | 2022-09-20 | 永恒科技有限公司 | 自行车框架 |
CN112030145A (zh) * | 2020-11-05 | 2020-12-04 | 苏州香榭轩表面工程技术咨询有限公司 | 一种金刚石表面改性的方法及应用 |
Also Published As
Publication number | Publication date |
---|---|
CN102234785B (zh) | 2013-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602005002635D1 (de) | Verfahren zur abscheidung von galliumoxidbeschichtungen auf flachglas | |
WO2009085958A3 (en) | Passivation layer formation by plasma clean process to reduce native oxide growth | |
DE602007005017D1 (de) | Verfahren für leicht zu reinigende substrate und artikel daraus | |
CN102234785B (zh) | 衬底涂层及其形成方法 | |
US9219803B2 (en) | Housing and electronic device using the same | |
CN103382549B (zh) | 一种多层结构高阻隔薄膜的制备方法 | |
TW202113148A (zh) | 電子設備及其鋼化加強膜和製備方法及應用 | |
WO2012106791A8 (pt) | Componente de motor | |
CN101768740A (zh) | 触控元件表面加工方法 | |
Damasceno et al. | Optical and mechanical properties of DLC-Si coatings on polycarbonate | |
US9249499B2 (en) | Coated article and method for making same | |
CN208121181U (zh) | 一种土豪金颜色pvd薄膜 | |
CN105102674A (zh) | 具有黑色硬质覆膜的装饰品 | |
TWI432595B (zh) | 基板塗層及其形成方法 | |
Kopustinskas et al. | Synthesis of the silicon and silicon oxide doped aC: H films from hexamethyldisiloxane vapor by DC ion beam | |
CN107587121B (zh) | 类金刚石薄膜和镜片的制备方法 | |
CN105977391A (zh) | 图案化的刚性载体基板及用于有机发光装置的组合基板 | |
Matsutani et al. | Deposition of SiO2 films by low-energy ion-beam induced chemical vapor deposition using hexamethyldisiloxane | |
CN110465203A (zh) | 提高抗污膜的附着力的方法 | |
JP5170788B2 (ja) | 新規金属窒素酸化物プロセス | |
TW200615393A (en) | Raw material liquid for metal organic chemical vapor deposition and method of producing hf-si containing complex oxide film using the raw material liquid | |
CN103895288A (zh) | 镀膜件及其制作方法 | |
TWI699441B (zh) | 大氣常壓低溫電漿鍍製抗刮疏水層的方法 | |
Picciotto et al. | Influence of interfaces density and thermal processes on mechanical stress of PECVD silicon nitride | |
CN109487234A (zh) | 超疏油涂层及其制备方法和应用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Wu Jieling Inventor after: Duan Xinchao Inventor after: Chen Buqing Inventor after: Chen Shaoyang Inventor before: Chen Shaoyang |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: CHEN SHAOYANG TO: WU JIELING DUAN XINCHAO CHEN BUQING CHEN SHAOYANG |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160331 Address after: 18 floor, south central building, 1 Lockhart Road, Wan Chai, Hongkong, China Patentee after: Million Technology Co., Ltd. Address before: 18 floor, south central building, 1 Lockhart Road, Wan Chai, Hongkong, China Patentee before: Kun Hsin Technology Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20170619 Address after: Guangdong province Shenzhen city Longgang District Bantian Street Graceland Road No. 3 South Industrial Park Patentee after: Weidali Industry (Shenzhen) Co. Ltd. Address before: 18 floor, south central building, 1 Lockhart Road, Wan Chai, Hongkong, China Patentee before: Million Technology Co., Ltd. |
|
TR01 | Transfer of patent right |