CN102205311B - 具有宽束超声波换能器的短距离超声波装置 - Google Patents
具有宽束超声波换能器的短距离超声波装置 Download PDFInfo
- Publication number
- CN102205311B CN102205311B CN201110045691.3A CN201110045691A CN102205311B CN 102205311 B CN102205311 B CN 102205311B CN 201110045691 A CN201110045691 A CN 201110045691A CN 102205311 B CN102205311 B CN 102205311B
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- China
- Prior art keywords
- transducer
- ultrasonic
- opening
- ultrasonic transducer
- equipment
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/223—Supports, positioning or alignment in fixed situation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/27—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the material relative to a stationary sensor
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/710,724 | 2010-02-23 | ||
US12/710,724 US8258678B2 (en) | 2010-02-23 | 2010-02-23 | Short range ultrasonic device with broadbeam ultrasonic transducers |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102205311A CN102205311A (zh) | 2011-10-05 |
CN102205311B true CN102205311B (zh) | 2014-06-11 |
Family
ID=44475920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110045691.3A Active CN102205311B (zh) | 2010-02-23 | 2011-02-23 | 具有宽束超声波换能器的短距离超声波装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8258678B2 (zh) |
CN (1) | CN102205311B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7888844B2 (en) * | 2009-06-30 | 2011-02-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Temperature control of micromachined transducers |
JP5963253B2 (ja) * | 2011-09-29 | 2016-08-03 | 日立Geニュークリア・エナジー株式会社 | 超音波センサ |
US20150358740A1 (en) * | 2014-06-04 | 2015-12-10 | Invensense, Inc. | Electrical tuning of parameters of piezoelectric actuated transducers |
EP3317617B1 (en) * | 2015-06-30 | 2020-06-17 | Micro Motion Inc. | Magnetic flowmeter with automatic in-situ self-cleaning |
US11329098B2 (en) * | 2018-11-08 | 2022-05-10 | Vanguard International Semiconductor Singapore Pte. Ltd. | Piezoelectric micromachined ultrasonic transducers and methods for fabricating thereof |
US11696507B2 (en) * | 2018-12-14 | 2023-07-04 | Stmicroelectronics S.R.L. | Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2949772A (en) * | 1954-12-10 | 1960-08-23 | Kritz Jack | Flowmeter |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2875355A (en) | 1954-05-24 | 1959-02-24 | Gulton Ind Inc | Ultrasonic zone plate focusing transducer |
US2943278A (en) | 1958-11-17 | 1960-06-28 | Oskar E Mattiat | Piezoelectric filter transformer |
US2976501A (en) | 1959-07-30 | 1961-03-21 | Oskar E Mattiat | Impedance transformer |
US3384767A (en) | 1964-05-11 | 1968-05-21 | Stanford Research Inst | Ultrasonic transducer |
US4129799A (en) | 1975-12-24 | 1978-12-12 | Sri International | Phase reversal ultrasonic zone plate transducer |
JPS5919384A (ja) | 1982-07-23 | 1984-01-31 | Omron Tateisi Electronics Co | 圧電バイモルフ |
JPS59146298A (ja) | 1983-02-09 | 1984-08-22 | Matsushita Electric Ind Co Ltd | 貼り合せ型圧電振動子 |
GB2137056B (en) | 1983-03-16 | 1986-09-03 | Standard Telephones Cables Ltd | Communications apparatus |
US4868446A (en) | 1987-01-22 | 1989-09-19 | Hitachi Maxell, Ltd. | Piezoelectric revolving resonator and ultrasonic motor |
US4985296A (en) | 1989-03-16 | 1991-01-15 | W. L. Gore & Associates, Inc. | Polytetrafluoroethylene film |
DE4008470A1 (de) | 1990-03-16 | 1991-09-19 | Hoechst Ceram Tec Ag | Piezoelektrische keramische wandlerscheibe und verfahren zu ihrer herstellung |
US5214343A (en) * | 1991-03-11 | 1993-05-25 | Joseph Baumoel | Fluoroether grease acoustic couplant |
JPH05232241A (ja) | 1991-08-29 | 1993-09-07 | Matsushita Electric Works Ltd | 超音波センサー |
JP3141645B2 (ja) | 1993-08-23 | 2001-03-05 | 株式会社村田製作所 | 圧力センサ |
JPH0946794A (ja) | 1995-07-31 | 1997-02-14 | Taiyo Yuden Co Ltd | 圧電音響装置 |
CH691519A5 (fr) | 1997-08-15 | 2001-07-31 | Ebauchesfabrik Eta Ag | Transformateur piézo-électrique. |
US5814922A (en) | 1997-11-18 | 1998-09-29 | The Penn State Research Foundation | Annular piezoelectric transformer |
US6362559B1 (en) | 1999-02-12 | 2002-03-26 | Face International Corp. | Piezoelectric transformer with segmented electrodes |
CA2268415A1 (en) | 1999-04-09 | 2000-10-09 | Igor A. Sherman | Single element ultrasonic collimating transducers and a method and apparatus utilizing ultrasonic transducers in 3d tomography |
JP2001244778A (ja) | 1999-12-22 | 2001-09-07 | Toyo Commun Equip Co Ltd | 高周波圧電振動子 |
KR100349126B1 (ko) | 2000-05-04 | 2002-08-17 | 삼성전기주식회사 | 형광등용 압전트랜스포머 |
US6346764B1 (en) | 2000-12-15 | 2002-02-12 | Face International Corp. | Multilayer piezoelectric transformer |
ATE311610T1 (de) | 2001-05-21 | 2005-12-15 | Shigeo Ohtsuki | Gerät und verfahren zur echobilderzeugung |
US6919669B2 (en) | 2002-03-15 | 2005-07-19 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Electro-active device using radial electric field piezo-diaphragm for sonic applications |
US6788620B2 (en) * | 2002-05-15 | 2004-09-07 | Matsushita Electric Ind Co Ltd | Acoustic matching member, ultrasound transducer, ultrasonic flowmeter and method for manufacturing the same |
DE602004014631D1 (de) * | 2003-10-15 | 2008-08-07 | Axsensor Ab | Messeinrichtung für fluidpegel |
EP1533896B1 (en) | 2003-11-20 | 2011-11-02 | Panasonic Corporation | Piezoelectric element, composite piezoelectric element, and filter, duplexer and communication equipment using the same |
JP4496091B2 (ja) | 2004-02-12 | 2010-07-07 | 株式会社東芝 | 薄膜圧電アクチュエータ |
US6912918B1 (en) * | 2004-03-10 | 2005-07-05 | General Electric Company | Mass flow sensor and methods of determining mass flow of a fluid |
US7538477B2 (en) | 2006-11-27 | 2009-05-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Multi-layer transducers with annular contacts |
US7579753B2 (en) | 2006-11-27 | 2009-08-25 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Transducers with annular contacts |
CN201110773Y (zh) | 2007-08-28 | 2008-09-03 | 南京申瑞电气系统控制有限公司 | 多声路时差式超声波流量计 |
JP4959526B2 (ja) | 2007-11-30 | 2012-06-27 | 株式会社トクヤマ | BaLiF3単結晶体 |
US20100164433A1 (en) * | 2008-12-30 | 2010-07-01 | Motorola, Inc. | Wireless Battery Charging Systems, Battery Systems and Charging Apparatus |
US7888844B2 (en) * | 2009-06-30 | 2011-02-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Temperature control of micromachined transducers |
-
2010
- 2010-02-23 US US12/710,724 patent/US8258678B2/en active Active
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2011
- 2011-02-23 CN CN201110045691.3A patent/CN102205311B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2949772A (en) * | 1954-12-10 | 1960-08-23 | Kritz Jack | Flowmeter |
Also Published As
Publication number | Publication date |
---|---|
US20110204749A1 (en) | 2011-08-25 |
US8258678B2 (en) | 2012-09-04 |
CN102205311A (zh) | 2011-10-05 |
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Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) CORPORAT Free format text: FORMER OWNER: AVAGO TECHNOLOGIES WIRELESS IP Effective date: 20130508 |
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Effective date of registration: 20130508 Address after: Singapore Singapore Applicant after: Avago Technologies Fiber IP Singapore Pte. Ltd. Address before: Singapore Singapore Applicant before: Avago Technologies Wireless IP |
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Effective date of registration: 20181011 Address after: Singapore Singapore Patentee after: Annwa high tech Limited by Share Ltd Address before: Singapore Singapore Patentee before: Avago Technologies Fiber IP Singapore Pte. Ltd. |