CN102194869A - 一种抗辐照性能增强的超陡倒掺杂mos器件 - Google Patents
一种抗辐照性能增强的超陡倒掺杂mos器件 Download PDFInfo
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- CN102194869A CN102194869A CN 201010128023 CN201010128023A CN102194869A CN 102194869 A CN102194869 A CN 102194869A CN 201010128023 CN201010128023 CN 201010128023 CN 201010128023 A CN201010128023 A CN 201010128023A CN 102194869 A CN102194869 A CN 102194869A
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CN 201010128023 CN102194869B (zh) | 2010-03-16 | 2010-03-16 | 一种抗辐照性能增强的超陡倒掺杂mos器件 |
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CN102194869A true CN102194869A (zh) | 2011-09-21 |
CN102194869B CN102194869B (zh) | 2013-02-20 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103367128A (zh) * | 2012-03-29 | 2013-10-23 | 中国科学院微电子研究所 | 超陡倒掺杂沟道的形成方法、半导体器件及其制造方法 |
CN103871836A (zh) * | 2012-12-11 | 2014-06-18 | 北大方正集团有限公司 | 一种处理半导体芯片的方法 |
CN104541375A (zh) * | 2012-08-13 | 2015-04-22 | 德克萨斯仪器股份有限公司 | 具有减少泄露阱衬底结的mos晶体管 |
CN105514169A (zh) * | 2016-01-13 | 2016-04-20 | 西安电子科技大学 | 基于65nm工艺的超陡倒掺杂抗辐照MOS场效应管 |
CN114664919A (zh) * | 2022-03-14 | 2022-06-24 | 电子科技大学 | 一种沟道重掺杂的抗总剂量nmos器件 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6426279B1 (en) * | 1999-08-18 | 2002-07-30 | Advanced Micro Devices, Inc. | Epitaxial delta doping for retrograde channel profile |
US20030008462A1 (en) * | 2001-06-12 | 2003-01-09 | Hitachi, Ltd. | Insulated gate field effect transistor and manufacturing thereof |
US6881987B2 (en) * | 2002-12-30 | 2005-04-19 | Hynix Semiconductor Inc. | pMOS device having ultra shallow super-steep-retrograde epi-channel with dual channel doping and method for fabricating the same |
CN1728402A (zh) * | 2004-07-30 | 2006-02-01 | 国际商业机器公司 | 超薄型本体超陡后退阱(ssrw)场效应晶体管器件 |
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2010
- 2010-03-16 CN CN 201010128023 patent/CN102194869B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6426279B1 (en) * | 1999-08-18 | 2002-07-30 | Advanced Micro Devices, Inc. | Epitaxial delta doping for retrograde channel profile |
US20030008462A1 (en) * | 2001-06-12 | 2003-01-09 | Hitachi, Ltd. | Insulated gate field effect transistor and manufacturing thereof |
US6881987B2 (en) * | 2002-12-30 | 2005-04-19 | Hynix Semiconductor Inc. | pMOS device having ultra shallow super-steep-retrograde epi-channel with dual channel doping and method for fabricating the same |
CN1728402A (zh) * | 2004-07-30 | 2006-02-01 | 国际商业机器公司 | 超薄型本体超陡后退阱(ssrw)场效应晶体管器件 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103367128A (zh) * | 2012-03-29 | 2013-10-23 | 中国科学院微电子研究所 | 超陡倒掺杂沟道的形成方法、半导体器件及其制造方法 |
CN104541375A (zh) * | 2012-08-13 | 2015-04-22 | 德克萨斯仪器股份有限公司 | 具有减少泄露阱衬底结的mos晶体管 |
CN104541375B (zh) * | 2012-08-13 | 2019-08-09 | 德克萨斯仪器股份有限公司 | 具有减少泄露阱衬底结的mos晶体管 |
CN103871836A (zh) * | 2012-12-11 | 2014-06-18 | 北大方正集团有限公司 | 一种处理半导体芯片的方法 |
CN105514169A (zh) * | 2016-01-13 | 2016-04-20 | 西安电子科技大学 | 基于65nm工艺的超陡倒掺杂抗辐照MOS场效应管 |
CN105514169B (zh) * | 2016-01-13 | 2018-08-10 | 西安电子科技大学 | 基于65nm工艺的超陡倒掺杂抗辐照MOS场效应管 |
CN114664919A (zh) * | 2022-03-14 | 2022-06-24 | 电子科技大学 | 一种沟道重掺杂的抗总剂量nmos器件 |
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CN102194869B (zh) | 2013-02-20 |
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