CN102176391B - 开关结构 - Google Patents

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Publication number
CN102176391B
CN102176391B CN201010258366.0A CN201010258366A CN102176391B CN 102176391 B CN102176391 B CN 102176391B CN 201010258366 A CN201010258366 A CN 201010258366A CN 102176391 B CN102176391 B CN 102176391B
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CN
China
Prior art keywords
contact
conductive element
contact position
disposed
equal
Prior art date
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Active
Application number
CN201010258366.0A
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English (en)
Chinese (zh)
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CN102176391A (zh
Inventor
王雪峰
M·F·艾米
S·班萨尔
C·F·凯梅尔
K·V·S·R·基肖尔
K·苏尔布拉马尼安
D·帕特罗
V·K·辛哈
O·普拉卡什
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General Electric Co
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General Electric Co
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Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN102176391A publication Critical patent/CN102176391A/zh
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Publication of CN102176391B publication Critical patent/CN102176391B/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
CN201010258366.0A 2009-08-14 2010-08-13 开关结构 Active CN102176391B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/541321 2009-08-14
US12/541,321 US7928333B2 (en) 2009-08-14 2009-08-14 Switch structures

Publications (2)

Publication Number Publication Date
CN102176391A CN102176391A (zh) 2011-09-07
CN102176391B true CN102176391B (zh) 2013-08-21

Family

ID=43034285

Family Applications (1)

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CN201010258366.0A Active CN102176391B (zh) 2009-08-14 2010-08-13 开关结构

Country Status (5)

Country Link
US (1) US7928333B2 (https=)
EP (1) EP2315227A1 (https=)
JP (1) JP2011040385A (https=)
KR (1) KR101766482B1 (https=)
CN (1) CN102176391B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
US9829550B2 (en) 2012-12-27 2017-11-28 General Electric Company Multi-nuclear receiving coils for magnetic resonance imaging (MRI)
GB2526454B (en) * 2013-03-14 2018-10-03 Intel Corp Nanowire-based mechanical switching device
CN103943420B (zh) * 2014-04-15 2017-06-23 清华大学 Mems继电器、悬臂梁开关及其形成方法
CN104064407B (zh) * 2014-06-12 2016-04-20 清华大学 微机电系统开关
FR3027448B1 (fr) * 2014-10-21 2016-10-28 Airmems Commutateur microelectromecanique robuste
US9362608B1 (en) 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
GB2564434B (en) 2017-07-10 2020-08-26 Ge Aviat Systems Ltd Power distribution switch for a power distribution system
US20230068451A1 (en) * 2021-08-30 2023-03-02 Texas Instruments Incorporated Methods and apparatus to thermally actuate microelectromechanical structures devices

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
CN2303373Y (zh) * 1997-08-08 1999-01-06 北京东方电子集团股份有限公司 一种真空开关管
CN1217557A (zh) * 1997-10-22 1999-05-26 尹顿公司 用于真空开关管的蒸气罩
CN101086933A (zh) * 2007-07-17 2007-12-12 北京京东方真空电器有限责任公司 真空开关管触头和真空开关管

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264798A (en) 1976-01-12 1981-04-28 Graf Ronald E Electrostatic switch
JP2713801B2 (ja) * 1990-06-26 1998-02-16 松下電工株式会社 静電リレーおよびその製造方法
JPH052972A (ja) * 1991-06-21 1993-01-08 Matsushita Electric Works Ltd 静電リレー
JP4966448B2 (ja) 1998-06-04 2012-07-04 キャベンディッシュ キネティクス リミテッド マイクロメカニカル素子
JP2000173375A (ja) * 1998-12-07 2000-06-23 Omron Corp マイクロリレー用接点構造
CA2323189A1 (en) * 1999-10-15 2001-04-15 Cristian A. Bolle Dual motion electrostatic actuator design for mems micro-relay
US6731492B2 (en) * 2001-09-07 2004-05-04 Mcnc Research And Development Institute Overdrive structures for flexible electrostatic switch
JP2003242850A (ja) 2002-02-20 2003-08-29 Omron Corp 電気開閉器用接点およびその製造方法並びに電気開閉器
JP4212046B2 (ja) * 2003-03-20 2009-01-21 株式会社リコー 指向性可変アンテナおよび該アンテナを用いた電子機器、ならびに該アンテナを用いたアンテナ指向性制御方法
JP4643316B2 (ja) * 2005-03-11 2011-03-02 株式会社東芝 マイクロマシンスイッチ及びその駆動方法
US8628055B2 (en) * 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US7471439B2 (en) * 2005-11-23 2008-12-30 Miradia, Inc. Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
KR100734884B1 (ko) 2006-07-11 2007-07-03 한국전자통신연구원 Ｉｅｅｅ ８０２．１６／와이브로 망상의 네이버 탐색프로토콜 메시지 전송 방법
US20080190748A1 (en) * 2007-02-13 2008-08-14 Stephen Daley Arthur Power overlay structure for mems devices and method for making power overlay structure for mems devices
JP2009009884A (ja) * 2007-06-29 2009-01-15 Mitsubishi Electric Corp Ｍｅｍｓスイッチ及びその製造方法
US20100096678A1 (en) * 2008-10-20 2010-04-22 University Of Dayton Nanostructured barium strontium titanate (bst) thin-film varactors on sapphire
US8054147B2 (en) * 2009-04-01 2011-11-08 General Electric Company High voltage switch and method of making

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
CN2303373Y (zh) * 1997-08-08 1999-01-06 北京东方电子集团股份有限公司 一种真空开关管
CN1217557A (zh) * 1997-10-22 1999-05-26 尹顿公司 用于真空开关管的蒸气罩
CN101086933A (zh) * 2007-07-17 2007-12-12 北京京东方真空电器有限责任公司 真空开关管触头和真空开关管

Also Published As

Publication number Publication date
US20110036690A1 (en) 2011-02-17
JP2011040385A (ja) 2011-02-24
EP2315227A1 (en) 2011-04-27
KR101766482B1 (ko) 2017-08-08
CN102176391A (zh) 2011-09-07
KR20110017838A (ko) 2011-02-22
US7928333B2 (en) 2011-04-19

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