CN102172867B - Parameter adjustable type polishing clamp device for heavy-calibre plane optical element - Google Patents
Parameter adjustable type polishing clamp device for heavy-calibre plane optical element Download PDFInfo
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- CN102172867B CN102172867B CN201110038719A CN201110038719A CN102172867B CN 102172867 B CN102172867 B CN 102172867B CN 201110038719 A CN201110038719 A CN 201110038719A CN 201110038719 A CN201110038719 A CN 201110038719A CN 102172867 B CN102172867 B CN 102172867B
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Abstract
The invention provides a parameter adjustable type polishing clamp device for a heavy-calibre plane optical element, relating to a polishing clamp device. The polishing clamp device comprises a mass block, a clamp flat plate, an upper hydraulic piston device, a lower hydraulic piston device, a hydraulic oil transmission and return device, a pressure sensor, a servo magnifier and an industrial personal computer, wherein the mass block is sleeved in a center shaft on the upper surface of the clamp flat plate, the upper hydraulic piston device and the lower hydraulic piston device are separated by a partition plate, are respectively adsorbed on the lower surface of the clamp flat plate and an upper surface of a workpiece by adsorption base membranes, and are respectively provided with a hydraulic cylinder, hydraulic oil, a piston, a push rod, a sealing ring, a spring, an oil transmission hole and an oil return hole, wherein the lower end of the push rod is connected with the piston through the spring, the upper end of the push rod is connected with a basic body of each adsorption base membrane, the oil transmission hole and the oil return hole are connected with an oil transmission hole and an oil return hole of the hydraulic oil transmission and return device, the sensor is embedded in a polishing gasket, the pressure signals of the sensor are put into a data acquisition card after passing through the servo amplifier, and the data acquisition card is installed on the industrial personal computer. The polishing clamp device is simple and practical in structure.
Description
Technical field
The present invention relates to a kind of polishing clamp device, especially relate to a kind of parameter adjustable type heavy-calibre planar optical elements polishing clamp device.
Background technology
At present, how to make the high-precision heavy-caliber optical element particularly the heavy-calibre planar element realize the processing of efficient mass, be pendulum is made the field at optics a important topic.Heavy-calibre planar optical elements, is requiring through polishing after the stage through corase grind, fine grinding or accurate grinding, to improve the element surface surface precision, to reduce surface roughness and subsurface defect.At present; The development of optical element polishing technology has obtained significant progress; But for heavy-calibre planar optical elements; Particularly the size heavy-calibre planar optical elements that is not less than 430mm * 430mm makes little progress, traditional endless polishing processing heavy-calibre planar optical elements, and the uncontrollability of element and polishing pad contact zone pressure and uncertainty have seriously restricted the crudy and the working (machining) efficiency of element.(referring to document: 1, Zhu Haibo, " the numerical control polishing technical research of heavy-calibre planar element, " [D]. Master of engineering academic dissertation, Sichuan University, 2005; 2, J.Luo and D.A.Dornfeld; " Material removal mechanism in chemical mechanical polishing:theory and modeling, " [J] .IEEE Transactions on Semiconductor Manufacturing, Vol.14; No; 2, pp.112-123,2001).
Summary of the invention
The objective of the invention is to traditional endless polishing processing heavy-calibre planar optical elements; The uncontrollability of element and polishing pad contact zone pressure and shortcoming such as uncertain, that working (machining) efficiency is low provide a kind of simple in structure and adjustable heavy-calibre planar optical elements polishing clamp of practical parameter device.
The present invention is provided with mass, dull and stereotyped, the last hydraulic piston device of anchor clamps, following hydraulic piston device, hydraulic pressure oil transportation and oil return apparatus, pressure sensor, servo amplifier and industrial computer; Mass is inserted in the dull and stereotyped upper surface central shaft of anchor clamps; Last hydraulic piston device separates through division board with following hydraulic piston device; Last hydraulic piston device is adsorbed on the dull and stereotyped lower surface of anchor clamps through the absorption basement membrane; Following hydraulic piston device is adsorbed on workpiece surface through the absorption basement membrane, and last hydraulic piston device is equipped with hydraulic cylinder, hydraulic oil, piston, push rod, sealing ring, spring, oil transportation hole and spill port with following hydraulic piston device, and the push rod lower end links to each other with piston through spring; The push rod upper end links the matrix of absorption basic mode; The oil transportation hole is connected with spill port with the oil transportation hole of oil return apparatus with the hydraulic pressure oil transportation with spill port, and the oil transportation hole of last hydraulic piston device and following hydraulic piston device is used for the input of hydraulic oil, and the spill port of last hydraulic piston device and following hydraulic piston device is used for the backflow of hydraulic oil; Hydraulic pressure oil transportation and oil return apparatus provide the oil transportation and the oil return of bidirectional hydraulic piston device; Oil pressure through adjustment hydraulic pressure oil transportation and oil return apparatus; Hydraulic oil is input to hydraulic piston device and following hydraulic piston device, and in last hydraulic piston device and following hydraulic piston device, the hydraulic pressure of hydraulic oil changes the promotion piston and moves; Telescopic spring, adjustment is applied to the pressure on the element surface; Sensor is imbedded in the polishing pad, and the cell pressure signal is input to data collecting card after through servo amplifier, and data collecting card is installed on the industrial computer.
Said absorption basic mode is made up of matrix and film.
The present invention has following outstanding feature:
1. become uncontrollable influence factor into controlled.The present invention has overcome the uncontrollable shortcoming of annular polishing processing heavy-calibre planar optical elements pressure, and hydraulic drive piston, push rod, spring through bidirectional hydraulic piston device hydraulic oil produces can apply different pressure intensity parameters by different parts on element.According to Preston formula: MRR=k * p * v, wherein MRR is the element material clearance, and p is the pressure of certain point on the element, and v is the speed of the relative polishing disk of element.After optical element fine grinding finished, element surface was uneven.Get into the polishing stage, can apply big pressure, apply little pressure, so just can polish and process the good element of type of appearing in the low place of element surface in the high place of element surface.
2. material removing rate is high.The present invention has overcome the inefficient shortcoming of annular polishing processing heavy-calibre planar optical elements, adopts the outside method that applies pressure of increase to heighten material removing rate.According to Preston formula: MRR=k * p * v, wherein MRR is the element material clearance, and p is the pressure of certain point on the element, and v is the speed of the relative polishing disk of element.As long as the extraneous pressure intensity parameter that applies generally at element surface is big, material removing rate is also just big.Therefore can increase the external world through the method that increases mass and apply pressure.
3. the scope of control is big and thin.Bidirectional hydraulic piston device among the present invention is alternative to be installed, and processing that can element surface face type need be installed the bidirectional hydraulic piston device at diverse location.And the adsorbent thin film of bidirectional hydraulic piston device is replaceable, can be according to processing needs and the size that is adsorbed on the area needs replacing adsorbent thin film on the element.
4. the polishing precision is high.The anchor clamps of the present invention's design do not change the flexible polishing character of polish, in polishing process, can not produce inferior surface breakdown layer, and can obtain nano level surface roughness.
5. processing stability is high.The present invention adopts hydraulic control system, but the balance anchor clamps are dull and stereotyped and the gravity of mass, guaranteed the dynamic equilibrium in the processing, and can apply different pressure at the element different parts.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention is formed sketch map.
Fig. 2 is that the last hydraulic piston device of the embodiment of the invention is formed sketch map with following hydraulic piston device structure.
Fig. 3 is that the hydraulic pressure oil transportation and the oil return apparatus structure of the embodiment of the invention formed sketch map.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is further described.
Referring to Fig. 1, polishing pad 8 is symmetrical with polishing disk 9 among Fig. 1, and the left-hand component of only drawing is not all drawn, and has omitted a part.Mass 1 can be inserted in by the dull and stereotyped 2 upper surface central shafts of anchor clamps according to the processing needs.Sensor 7 is imbedded in the polishing pad 8, and pressure signal is input to data collecting card after through servo amplifier, and data collecting card is installed on the industrial computer.According to the pressure data that collects; Be applied on the element surface pressure of various piece and do comparison with initial hydraulic piston device and the following hydraulic piston device gone up of design; Through hydraulic pressure oil transportation and oil return apparatus adjustment hydraulic pressure, change the pressure intensity parameter that is applied to various piece on the element surface.
Referring to Fig. 1 and 2, two hydraulic piston devices independently separated through division board 18 about last hydraulic piston device 4 was provided with following hydraulic piston device.Last hydraulic piston device 4 is made up of hydraulic cylinder 15, sealing ring 14, piston 17, push rod 13, spring 16, absorption basic mode 3 (being made up of matrix 12 and film 11), oil transportation and spill port 19.Last hydraulic piston device 4 is adsorbed on dull and stereotyped 2 lower surfaces of anchor clamps through the film 11 of absorption basic mode 3.Piston 17 links together through brute spring 16 with push rod 13, and push rod 13 bottoms link brute spring 16, and push rod 13 upper ends link the matrix 12 of absorption basement membrane.Following hydraulic piston device is adsorbed on element 6 upper surfaces with identical structure through absorption basement membrane 5.Element 6 lower surfaces are in polishing pad 8 surface finish, and polishing pad 8 usefulness seccotines are bonded in polishing disk 9 surfaces.Oil transportation hole 19 is used for the input/backflow of hydraulic oil.Oil pressure through adjustment hydraulic pressure oil transportation and oil return apparatus is input to the bidirectional hydraulic device with hydraulic oil.In the bidirectional hydraulic device, the hydraulic pressure of hydraulic oil changes promotion piston 17 and moves, and brute spring 16 is flexible, and adjustment is applied to the pressure on the element surface.Absorption basic mode 3 has two to go into vent hole 10 respectively with adsorbing on the basic mode 5, after process finishing, goes into vent hole 10 and goes into gas, can make absorption basic mode 5 break away from elements 6 upper surfaces, and absorption basic mode 3 breaks away from anchor clamps flat board 2 lower surfaces.
Fig. 3 provides the hydraulic pressure oil transportation of the embodiment of the invention and the structure of oil return apparatus A is formed sketch map, and the bidirectional hydraulic piston device of different numbers can be installed as required, must be symmetrically distributed with the element center, thus the balance of implementation space power and moment.
Pressure signal is input to data collecting card after through servo amplifier, and data collecting card is installed on the industrial computer.According to the pressure data that collects, be applied on the element surface pressure of various piece with design initial two-way hydraulic piston device and do comparison, through hydraulic pressure oil transportation and oil return apparatus adjustment hydraulic pressure, change is applied to the pressure of various piece on the element surface.
Claims (2)
1. parameter adjustable type heavy-calibre planar optical elements polishing clamp device is characterized in that being provided with mass, dull and stereotyped, the last hydraulic piston device of anchor clamps, following hydraulic piston device, hydraulic pressure oil transportation and oil return apparatus, pressure sensor, servo amplifier and industrial computer; Mass is inserted in the dull and stereotyped upper surface central shaft of anchor clamps; Last hydraulic piston device separates through division board with following hydraulic piston device; Last hydraulic piston device is adsorbed on the dull and stereotyped lower surface of anchor clamps through last absorption basement membrane; Following hydraulic piston device through under adsorb basement membrane and be adsorbed on workpiece surface, last hydraulic piston device is equipped with hydraulic cylinder, hydraulic oil, piston, push rod, sealing ring, spring, oil transportation hole and spill port with following hydraulic piston device, the push rod lower end is passed through spring and is linked to each other with piston; The push rod upper end links the matrix of absorption basic mode; The oil transportation hole is connected with spill port with the oil transportation hole of oil return apparatus with the hydraulic pressure oil transportation with spill port, and the oil transportation hole of last hydraulic piston device and following hydraulic piston device is used for the input of hydraulic oil, and the spill port of last hydraulic piston device and following hydraulic piston device is used for the backflow of hydraulic oil; Hydraulic pressure oil transportation and oil return apparatus provide the oil transportation and the oil return of bidirectional hydraulic piston device; Oil pressure through adjustment hydraulic pressure oil transportation and oil return apparatus; Hydraulic oil is input to hydraulic piston device and following hydraulic piston device, and in last hydraulic piston device and following hydraulic piston device, the hydraulic pressure of hydraulic oil changes the promotion piston and moves; Telescopic spring, adjustment is applied to the pressure on the element surface; Sensor is imbedded in the polishing pad, and the cell pressure signal is input to data collecting card after through servo amplifier, and data collecting card is installed on the industrial computer.
2. parameter adjustable type heavy-calibre planar optical elements polishing clamp device as claimed in claim 1 is characterized in that said absorption basic mode is made up of matrix and film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110038719A CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110038719A CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
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| CN102172867A CN102172867A (en) | 2011-09-07 |
| CN102172867B true CN102172867B (en) | 2012-10-10 |
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| CN201110038719A Expired - Fee Related CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102490119B (en) * | 2011-12-09 | 2013-11-13 | 厦门大学 | Auxiliary up-and-down feeding mechanism of surface-grinding machine |
| CN105598837B (en) * | 2016-03-25 | 2017-11-14 | 吉林大学 | Based on the measurable intelligent grinding and polishing fixture of real-time online power |
| CN107363730A (en) * | 2017-09-11 | 2017-11-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | eddy current testing device and system |
Citations (4)
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|---|---|---|---|---|
| EP0567894A1 (en) * | 1992-05-01 | 1993-11-03 | Loh Engineering Ag | Device for guiding a workpiece or a tool while machining toric or spheric surfaces of ophtalmic lenses on grinding or polishing machines |
| CN1163815A (en) * | 1996-03-12 | 1997-11-05 | 佳能株式会社 | Lens holding method and apparatus and lens working method |
| CN1796048A (en) * | 2004-12-27 | 2006-07-05 | 株式会社春近精密 | Lens automatic lapping device and lens delivery organization |
| CN1798633A (en) * | 2003-04-14 | 2006-07-05 | 泰科普蒂克公司 | System for visualisation of optical marking on an opthalmic lens, stmap-marking device and method for orientation of lenses using such a system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06155265A (en) * | 1992-11-12 | 1994-06-03 | Olympus Optical Co Ltd | Holding of work and holding device |
| JP2000225550A (en) * | 1999-02-08 | 2000-08-15 | Mitsubishi Electric Corp | Method and device for regenerating color cathode-ray tube glass panel |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0567894A1 (en) * | 1992-05-01 | 1993-11-03 | Loh Engineering Ag | Device for guiding a workpiece or a tool while machining toric or spheric surfaces of ophtalmic lenses on grinding or polishing machines |
| CN1163815A (en) * | 1996-03-12 | 1997-11-05 | 佳能株式会社 | Lens holding method and apparatus and lens working method |
| CN1798633A (en) * | 2003-04-14 | 2006-07-05 | 泰科普蒂克公司 | System for visualisation of optical marking on an opthalmic lens, stmap-marking device and method for orientation of lenses using such a system |
| CN1796048A (en) * | 2004-12-27 | 2006-07-05 | 株式会社春近精密 | Lens automatic lapping device and lens delivery organization |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2000-225550A 2000.08.15 |
| JP特开平6-155265A 1994.06.03 |
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