CN102172867A - Parameter adjustable type polishing clamp device for heavy-calibre plane optical element - Google Patents
Parameter adjustable type polishing clamp device for heavy-calibre plane optical element Download PDFInfo
- Publication number
- CN102172867A CN102172867A CN 201110038719 CN201110038719A CN102172867A CN 102172867 A CN102172867 A CN 102172867A CN 201110038719 CN201110038719 CN 201110038719 CN 201110038719 A CN201110038719 A CN 201110038719A CN 102172867 A CN102172867 A CN 102172867A
- Authority
- CN
- China
- Prior art keywords
- hydraulic
- piston device
- oil
- hydraulic piston
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a parameter adjustable type polishing clamp device for a heavy-calibre plane optical element, relating to a polishing clamp device. The polishing clamp device comprises a mass block, a clamp flat plate, an upper hydraulic piston device, a lower hydraulic piston device, a hydraulic oil transmission and return device, a pressure sensor, a servo magnifier and an industrial personal computer, wherein the mass block is sleeved in a center shaft on the upper surface of the clamp flat plate, the upper hydraulic piston device and the lower hydraulic piston device are separated by a partition plate, are respectively adsorbed on the lower surface of the clamp flat plate and an upper surface of a workpiece by adsorption base membranes, and are respectively provided with a hydraulic cylinder, hydraulic oil, a piston, a push rod, a sealing ring, a spring, an oil transmission hole and an oil return hole, wherein the lower end of the push rod is connected with the piston through the spring, the upper end of the push rod is connected with a basic body of each adsorption base membrane, the oil transmission hole and the oil return hole are connected with an oil transmission hole and an oil return hole of the hydraulic oil transmission and return device, the sensor is embedded in a polishing gasket, the pressure signals of the sensor are put into a data acquisition card after passing through the servo amplifier, and the data acquisition card is installed on the industrial personal computer. The polishing clamp device is simple and practical in structure.
Description
Technical field
The present invention relates to a kind of polishing clamp device, especially relate to a kind of parameter adjustable type heavy-calibre planar optical elements polishing clamp device.
Background technology
At present, how to make the high-precision heavy-caliber optical element particularly the heavy-calibre planar element realize the processing of efficient mass, be pendulum is made the field at optics a important topic.Heavy-calibre planar optical elements, is requiring through polishing after the stage through corase grind, fine grinding or accurate grinding, to improve the element surface surface precision, to reduce surface roughness and subsurface defect.At present, the development of optical element polishing technology has obtained significant progress, but for heavy-calibre planar optical elements, particularly the size heavy-calibre planar optical elements that is not less than 430mm * 430mm makes little progress, traditional endless polishing processing heavy-calibre planar optical elements, the uncontrollability of element and polishing pad contact zone pressure and uncertain crudy and the working (machining) efficiency that has seriously restricted element.(referring to document: 1, Zhu Haibo, " the numerical control polishing technical research of heavy-calibre planar element, " [D]. Master of engineering academic dissertation, Sichuan University, 2005; 2, J.Luo and D.A.Dornfeld, " Material removal mechanism in chemical mechanical polishing:theory and modeling; " [J] .IEEE Transactions on Semiconductor Manufacturing, Vol.14, No, 2, pp.112-123,2001).
Summary of the invention
The objective of the invention is at traditional endless polishing processing heavy-calibre planar optical elements, the uncontrollability of element and polishing pad contact zone pressure and uncertain, shortcoming such as working (machining) efficiency is low provide a kind of simple in structure and adjustable heavy-calibre planar optical elements polishing clamp of practical parameter device.
The present invention is provided with mass, anchor clamps flat board, last hydraulic piston device, following hydraulic piston device, hydraulic pressure oil transportation and oil return apparatus, pressure sensor, servo amplifier and industrial computer; Mass is inserted in the dull and stereotyped upper surface central shaft of anchor clamps, last hydraulic piston device and following hydraulic piston device separate by division board, last hydraulic piston device is adsorbed on the dull and stereotyped lower surface of anchor clamps by the absorption basement membrane, following hydraulic piston device is adsorbed on workpiece surface by the absorption basement membrane, last hydraulic piston device and following hydraulic piston device are equipped with hydraulic cylinder, hydraulic oil, piston, push rod, sealing ring, spring, oil transportation hole and spill port, the push rod lower end links to each other with piston by spring, the push rod upper end links the matrix of absorption basic mode, the oil transportation hole is connected with spill port with the oil transportation hole of oil return apparatus with the hydraulic pressure oil transportation with spill port, the oil transportation hole of last hydraulic piston device and following hydraulic piston device is used for the input of hydraulic oil, and the spill port of last hydraulic piston device and following hydraulic piston device is used for the backflow of hydraulic oil; Hydraulic pressure oil transportation and oil return apparatus provide the oil transportation and the oil return of bidirectional hydraulic piston device; By adjusting the oil pressure of hydraulic pressure oil transportation and oil return apparatus, hydraulic oil is input to hydraulic piston device and following hydraulic piston device, and in last hydraulic piston device and following hydraulic piston device, the hydraulic pressure of hydraulic oil changes the promotion piston and moves, telescopic spring is adjusted the pressure that is applied on the element surface; Sensor is imbedded in the polishing pad, and the cell pressure signal is input to data collecting card after by servo amplifier, and data collecting card is installed on the industrial computer.
Described absorption basic mode is made up of matrix and film.
The present invention has following outstanding feature:
1. become uncontrollable influence factor into controlled.The present invention has overcome the uncontrollable shortcoming of annular polishing processing heavy-calibre planar optical elements pressure, and hydraulic drive piston, push rod, spring by bidirectional hydraulic piston device hydraulic oil produces can apply different pressure intensity parameters by different parts on element.According to Preston formula: MRR=k * p * v, wherein MRR is the element material clearance, and p is the pressure of certain point on the element, and v is the speed of the relative polishing disk of element.After optical element fine grinding finished, element surface was uneven.Enter the polishing stage, can apply big pressure, apply little pressure, so just can polish and process the good element of type of appearing in the low place of element surface in the high place of element surface.
2. material removing rate height.The present invention has overcome the inefficient shortcoming of annular polishing processing heavy-calibre planar optical elements, adopts the outside method that applies pressure of increase to heighten material removing rate.According to Preston formula: MRR=k * p * v, wherein MRR is the element material clearance, and p is the pressure of certain point on the element, and v is the speed of the relative polishing disk of element.As long as the extraneous pressure intensity parameter that applies generally at element surface is big, material removing rate is also just big.Therefore can increase the external world by the method that increases mass and apply pressure.
3. Kong Zhi scope is big and thin.Bidirectional hydraulic piston device among the present invention is alternative to be installed, and processing that can element surface face type need be installed the bidirectional hydraulic piston device at diverse location.And the adsorbent thin film of bidirectional hydraulic piston device is replaceable, can be according to processing needs and the size that is adsorbed on the area needs replacing adsorbent thin film on the element.
4. polish the precision height.The anchor clamps of the present invention's design do not change the flexible polishing character of polishing area, can not produce inferior surface breakdown layer in polishing process, and can obtain nano level surface roughness.
5. processing stability height.The present invention adopts hydraulic control system, but the balance anchor clamps are dull and stereotyped and the gravity of mass, guaranteed the dynamic equilibrium in the processing, and can apply different pressure at the element different parts.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention is formed schematic diagram.
Fig. 2 is that the last hydraulic piston device and the following hydraulic piston device structure of the embodiment of the invention formed schematic diagram.
Fig. 3 is that the hydraulic pressure oil transportation and the oil return apparatus structure of the embodiment of the invention formed schematic diagram.
The specific embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
Referring to Fig. 1, polishing pad 8 and polishing disk 9 are symmetrical among Fig. 1, and the left-hand component of only drawing is not all drawn, and has omitted a part.Mass 1 can be inserted in by the dull and stereotyped 2 upper surface central shafts of anchor clamps according to the processing needs.Sensor 7 is imbedded in the polishing pad 8, and pressure signal is input to data collecting card after by servo amplifier, and data collecting card is installed on the industrial computer.According to the pressure data that collects, be applied to initial hydraulic piston device and the following hydraulic piston device gone up of design that the pressure of various piece compares on the element surface, adjust hydraulic pressure by hydraulic pressure oil transportation and oil return apparatus, change the pressure intensity parameter that is applied to various piece on the element surface.
Referring to Fig. 1 and 2, two hydraulic piston devices independently separated by division board 18 about last hydraulic piston device 4 and following hydraulic piston device were provided with.Last hydraulic piston device 4 is made up of hydraulic cylinder 15, sealing ring 14, piston 17, push rod 13, spring 16, absorption basic mode 3 (being made up of matrix 12 and film 11), oil transportation and spill port 19.Last hydraulic piston device 4 is adsorbed on dull and stereotyped 2 lower surfaces of anchor clamps by the film 11 of absorption basic mode 3.Piston 17 and push rod 13 link together by brute spring 16, and push rod 13 bottoms link brute spring 16, and push rod 13 upper ends link the matrix 12 of absorption basement membrane.Following hydraulic piston device is adsorbed on element 6 upper surfaces with identical structure by absorption basement membrane 5.Element 6 lower surfaces are in polishing pad 8 surface finish, and polishing pad 8 usefulness seccotines are bonded in polishing disk 9 surfaces.Oil transportation hole 19 is used for the input/backflow of hydraulic oil.By adjusting the oil pressure of hydraulic pressure oil transportation and oil return apparatus, hydraulic oil is input to the bidirectional hydraulic device.In the bidirectional hydraulic device, the hydraulic pressure of hydraulic oil changes promotion piston 17 and moves, and brute spring 16 is flexible, adjusts the pressure that is applied on the element surface.Have two to go into vent hole 10 respectively on absorption basic mode 3 and the absorption basic mode 5, after process finishing, go into vent hole 10 and go into gas, can make absorption basic mode 5 break away from element 6 upper surfaces, absorption basic mode 3 breaks away from dull and stereotyped 2 lower surfaces of anchor clamps.
Fig. 3 provides the hydraulic pressure oil transportation of the embodiment of the invention and the structure of oil return apparatus A is formed schematic diagram, and the bidirectional hydraulic piston device of different numbers can be installed as required, must be symmetrically distributed with the element center, thus the balance of implementation space power and moment.
Pressure signal is input to data collecting card after by servo amplifier, and data collecting card is installed on the industrial computer.According to the pressure data that collects, be applied to design initial two-way hydraulic piston device that the pressure of various piece compares on the element surface, adjust hydraulic pressure by hydraulic pressure oil transportation and oil return apparatus, change is applied to the pressure of various piece on the element surface.
Claims (2)
1. parameter adjustable type heavy-calibre planar optical elements polishing clamp device is characterized in that being provided with mass, anchor clamps flat board, last hydraulic piston device, following hydraulic piston device, hydraulic pressure oil transportation and oil return apparatus, pressure sensor, servo amplifier and industrial computer; Mass is inserted in the dull and stereotyped upper surface central shaft of anchor clamps, last hydraulic piston device and following hydraulic piston device separate by division board, last hydraulic piston device is adsorbed on the dull and stereotyped lower surface of anchor clamps by the absorption basement membrane, following hydraulic piston device is adsorbed on workpiece surface by the absorption basement membrane, last hydraulic piston device and following hydraulic piston device are equipped with hydraulic cylinder, hydraulic oil, piston, push rod, sealing ring, spring, oil transportation hole and spill port, the push rod lower end links to each other with piston by spring, the push rod upper end links the matrix of absorption basic mode, the oil transportation hole is connected with spill port with the oil transportation hole of oil return apparatus with the hydraulic pressure oil transportation with spill port, the oil transportation hole of last hydraulic piston device and following hydraulic piston device is used for the input of hydraulic oil, and the spill port of last hydraulic piston device and following hydraulic piston device is used for the backflow of hydraulic oil; Hydraulic pressure oil transportation and oil return apparatus provide the oil transportation and the oil return of bidirectional hydraulic piston device; By adjusting the oil pressure of hydraulic pressure oil transportation and oil return apparatus, hydraulic oil is input to hydraulic piston device and following hydraulic piston device, and in last hydraulic piston device and following hydraulic piston device, the hydraulic pressure of hydraulic oil changes the promotion piston and moves, telescopic spring is adjusted the pressure that is applied on the element surface; Sensor is imbedded in the polishing pad, and the cell pressure signal is input to data collecting card after by servo amplifier, and data collecting card is installed on the industrial computer.
2. parameter adjustable type heavy-calibre planar optical elements polishing clamp device as claimed in claim 1 is characterized in that described absorption basic mode is made up of matrix and film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110038719A CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110038719A CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102172867A true CN102172867A (en) | 2011-09-07 |
| CN102172867B CN102172867B (en) | 2012-10-10 |
Family
ID=44516209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110038719A Expired - Fee Related CN102172867B (en) | 2011-02-16 | 2011-02-16 | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102172867B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102490119A (en) * | 2011-12-09 | 2012-06-13 | 厦门大学 | Auxiliary up-and-down feeding mechanism of surface-grinding machine |
| CN105598837A (en) * | 2016-03-25 | 2016-05-25 | 吉林大学 | Intelligent grinding polishing clamp based on real-time online force measurement |
| CN107363730A (en) * | 2017-09-11 | 2017-11-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | eddy current testing device and system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0567894A1 (en) * | 1992-05-01 | 1993-11-03 | Loh Engineering Ag | Device for guiding a workpiece or a tool while machining toric or spheric surfaces of ophtalmic lenses on grinding or polishing machines |
| JPH06155265A (en) * | 1992-11-12 | 1994-06-03 | Olympus Optical Co Ltd | Holding of work and holding device |
| CN1163815A (en) * | 1996-03-12 | 1997-11-05 | 佳能株式会社 | Lens holding method and apparatus and lens working method |
| JP2000225550A (en) * | 1999-02-08 | 2000-08-15 | Mitsubishi Electric Corp | Method and device for regenerating color cathode-ray tube glass panel |
| CN1796048A (en) * | 2004-12-27 | 2006-07-05 | 株式会社春近精密 | Lens automatic lapping device and lens delivery organization |
| CN1798633A (en) * | 2003-04-14 | 2006-07-05 | 泰科普蒂克公司 | System for visualisation of optical marking on an opthalmic lens, stmap-marking device and method for orientation of lenses using such a system |
-
2011
- 2011-02-16 CN CN201110038719A patent/CN102172867B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0567894A1 (en) * | 1992-05-01 | 1993-11-03 | Loh Engineering Ag | Device for guiding a workpiece or a tool while machining toric or spheric surfaces of ophtalmic lenses on grinding or polishing machines |
| JPH06155265A (en) * | 1992-11-12 | 1994-06-03 | Olympus Optical Co Ltd | Holding of work and holding device |
| CN1163815A (en) * | 1996-03-12 | 1997-11-05 | 佳能株式会社 | Lens holding method and apparatus and lens working method |
| JP2000225550A (en) * | 1999-02-08 | 2000-08-15 | Mitsubishi Electric Corp | Method and device for regenerating color cathode-ray tube glass panel |
| CN1798633A (en) * | 2003-04-14 | 2006-07-05 | 泰科普蒂克公司 | System for visualisation of optical marking on an opthalmic lens, stmap-marking device and method for orientation of lenses using such a system |
| CN1796048A (en) * | 2004-12-27 | 2006-07-05 | 株式会社春近精密 | Lens automatic lapping device and lens delivery organization |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102490119A (en) * | 2011-12-09 | 2012-06-13 | 厦门大学 | Auxiliary up-and-down feeding mechanism of surface-grinding machine |
| CN105598837A (en) * | 2016-03-25 | 2016-05-25 | 吉林大学 | Intelligent grinding polishing clamp based on real-time online force measurement |
| CN105598837B (en) * | 2016-03-25 | 2017-11-14 | 吉林大学 | Based on the measurable intelligent grinding and polishing fixture of real-time online power |
| CN107363730A (en) * | 2017-09-11 | 2017-11-21 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | eddy current testing device and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102172867B (en) | 2012-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103317422B (en) | A kind of dynamic pressure floats off burnishing device | |
| CN103659520B (en) | Ultra-precision machining device and method for off-axis thin-wall aspherical optical element | |
| CN102172867B (en) | Parameter adjustable type polishing clamp device for heavy-calibre plane optical element | |
| CN107457616B (en) | A kind of diamond crystal surface chemical mechanical polishing method based on nano-nickel powder | |
| CN105364641A (en) | Micro semi-ring female die array-mode lapping and polishing method and device | |
| CN102139465B (en) | High-efficiency ultra-precision machining method for parts with aspheric curved surfaces and high-efficiency ultra-precision machining device therefor | |
| CN201227764Y (en) | Double-disk rotation eccentric V shaped groove grinding miller | |
| CN101279434A (en) | Double-disk rotation eccentric V shaped groove grinding miller | |
| CN101204786A (en) | High accuracy ball double autorotation grinding tray high-efficiency grinding device | |
| CN101524824A (en) | Efficient grinding device of double autorotation grinding disc of high precision ball | |
| CN101518886A (en) | High-precision ball double-rotation V-shaped groove efficient grinding unit | |
| CN110052917A (en) | A kind of sapphire polishing processing method based on concretion abrasive technology | |
| CN109622991A (en) | A kind of precision turning processing method of monocrystalline silicon lens | |
| CN104308728A (en) | Polishing head with vacuum suction cup | |
| CN102179758A (en) | Flexible and controllable ball-shaped air-pressure grinding wheel finishing tool | |
| CN105364640B (en) | A kind of chemical mechanical classification composite manufacturing method of micro- semi-ring cavity plate array | |
| CN201455763U (en) | High-efficiency grinding device for dual autorotation grinding discs of high-precision ball | |
| CN104515714A (en) | High-speed high-temperature hydraulic load-adjustable knife-chip friction device and friction measuring method | |
| CN102172868B (en) | Air floating big-calibre plane optical element polishing clamp | |
| CN206567926U (en) | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device | |
| CN201058407Y (en) | High-efficiency grinding device of high-precision ball double axial rotation abrasive disk | |
| CN2721313Y (en) | Flexible polisher of non-spherical optical component | |
| Wang et al. | Experimental study on reciprocating magnetorheological polishing | |
| CN105415117A (en) | Specific pressure regulating device for mechanically-grinded end face of sealing ring | |
| CN204843825U (en) | Abrasive disc of vertical roller mill ball machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121010 Termination date: 20150216 |
|
| EXPY | Termination of patent right or utility model |