CN102167227A - 基片传输设备 - Google Patents
基片传输设备 Download PDFInfo
- Publication number
- CN102167227A CN102167227A CN 201110084316 CN201110084316A CN102167227A CN 102167227 A CN102167227 A CN 102167227A CN 201110084316 CN201110084316 CN 201110084316 CN 201110084316 A CN201110084316 A CN 201110084316A CN 102167227 A CN102167227 A CN 102167227A
- Authority
- CN
- China
- Prior art keywords
- substrate
- transmission equipment
- rubber strip
- power wheel
- substrate carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 80
- 230000005540 biological transmission Effects 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000000741 silica gel Substances 0.000 claims description 11
- 229910002027 silica gel Inorganic materials 0.000 claims description 11
- 230000033001 locomotion Effects 0.000 claims description 7
- 238000010276 construction Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 3
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 2
- 235000011613 Pinus brutia Nutrition 0.000 description 2
- 241000018646 Pinus brutia Species 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110084316A CN102167227B (zh) | 2011-04-02 | 2011-04-02 | 基片传输设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110084316A CN102167227B (zh) | 2011-04-02 | 2011-04-02 | 基片传输设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102167227A true CN102167227A (zh) | 2011-08-31 |
CN102167227B CN102167227B (zh) | 2012-09-05 |
Family
ID=44488588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110084316A Expired - Fee Related CN102167227B (zh) | 2011-04-02 | 2011-04-02 | 基片传输设备 |
Country Status (1)
Country | Link |
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CN (1) | CN102167227B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103381965B (zh) * | 2013-07-02 | 2016-02-03 | 深圳市华星光电技术有限公司 | 一种液晶面板的气浮式导向轮传送装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0864564A (ja) * | 1994-08-22 | 1996-03-08 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN101211756A (zh) * | 2006-12-27 | 2008-07-02 | 东京毅力科创株式会社 | 基板处理装置 |
CN101580179A (zh) * | 2009-06-04 | 2009-11-18 | 东莞宏威数码机械有限公司 | 基片传输机构 |
CN101676181A (zh) * | 2008-09-18 | 2010-03-24 | 大日本网屏制造株式会社 | 基板搬运装置、基板定位方法及装置 |
US20100272550A1 (en) * | 2007-10-05 | 2010-10-28 | Evatech Co., Ltd. | Substrate holding mechanism, substrate delivering/receiving mechanism, and substrate processing apparatus |
CN202072288U (zh) * | 2011-04-02 | 2011-12-14 | 东莞宏威数码机械有限公司 | 基片传输装置 |
-
2011
- 2011-04-02 CN CN201110084316A patent/CN102167227B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0864564A (ja) * | 1994-08-22 | 1996-03-08 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN101211756A (zh) * | 2006-12-27 | 2008-07-02 | 东京毅力科创株式会社 | 基板处理装置 |
US20100272550A1 (en) * | 2007-10-05 | 2010-10-28 | Evatech Co., Ltd. | Substrate holding mechanism, substrate delivering/receiving mechanism, and substrate processing apparatus |
CN101676181A (zh) * | 2008-09-18 | 2010-03-24 | 大日本网屏制造株式会社 | 基板搬运装置、基板定位方法及装置 |
CN101580179A (zh) * | 2009-06-04 | 2009-11-18 | 东莞宏威数码机械有限公司 | 基片传输机构 |
CN202072288U (zh) * | 2011-04-02 | 2011-12-14 | 东莞宏威数码机械有限公司 | 基片传输装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102167227B (zh) | 2012-09-05 |
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