CN102152007A - Precision vibration mirror correction system and method - Google Patents
Precision vibration mirror correction system and method Download PDFInfo
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- CN102152007A CN102152007A CN2011100614921A CN201110061492A CN102152007A CN 102152007 A CN102152007 A CN 102152007A CN 2011100614921 A CN2011100614921 A CN 2011100614921A CN 201110061492 A CN201110061492 A CN 201110061492A CN 102152007 A CN102152007 A CN 102152007A
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Abstract
The invention is applicable to the technical field of laser processing, and provides a precision vibration mirror correction system and a precision vibration mirror correction method. The vibration mirror correction system comprises a vibration mirror correction target, a charge coupled device (CCD) image acquisition device, a two-dimensional motion platform device and a correction processing module, wherein an appointed mark point is marked on the correction target by a vibration mirror scanning module through laser reflection; the CCD image acquisition device performs image acquisition on a standard mark point marked by a vibration mirror; the two-dimensional motion platform device executes a high-precision positioning motion so as to guarantee the positioning precision; and the correction processing module calculates an image acquired by the CCD image acquisition device, finds out a position deflection of the mark point of the vibration mirror correction target and generates a vibration mirror compensation file to correct the vibration mirror. The vibration mirror correction system can realize high-precision correction of the vibration mirror conveniently and quickly.
Description
Technical field
The invention belongs to technical field of laser processing, be specifically related to a kind of galvanometer corrective system and bearing calibration of precision.
Background technology
A large amount of galvanometers that use scan processing in field of laser processing, because galvanometer is installed and other a variety of causes can cause the manuscript in the scanning area to look like to have various distortion, and traditional method with manual measurement is proofreaied and correct, and is difficult to reach the positioning accuracy below 0.1 millimeter.
Open day is on August 26th, 2009, application number is that 200910105786.2 Chinese invention patent application discloses a kind of galvanometer corrective system and bearing calibration, this method positions matrix target with the ccd image harvester, with proofreading and correct the compensation file that processing module output galvanometer is used.
This method has higher precision than traditional bearing calibration of manually carrying out, but still having deficiency. its shortcoming is: this method is directly with all gauge points in the ccd image harvester collection galvanometer correction target, because the lens distortion of ccd image harvester causes the position deviation error of calculation of each gauge point bigger, and then galvanometer proofreaied and correct impact.
Summary of the invention
Exist the error of calculation of position deviation of each gauge point bigger in order to overcome existing galvanometer corrective system, galvanometer is proofreaied and correct the deficiency that causes adverse effect, the objective of the invention is to: a kind of galvanometer corrective system and bearing calibration of precision are provided, this corrective system and bearing calibration can be carried out high-precision correction to galvanometer, and it is simple in structure, simple and efficient to handle.
The technical solution adopted for the present invention to solve the technical problems is as follows:
A kind of galvanometer corrective system of precision, it comprises galvanometer correction target, the galvanometer corrective system of described precision also comprises:
A two-dimension moving platform, this two-dimension moving platform are located at the bottom that galvanometer is proofreaied and correct target;
Galvanometer is proofreaied and correct the ccd image harvester that each gauge point on the target carries out IMAQ, and this ccd image harvester is installed in the top of two-dimension moving platform;
Be used to control the motion of two-dimension moving platform, each gauge point that galvanometer is proofreaied and correct on the target moves to theoretical position, the image calculation of gathering the position deviation of each gauge point, and output galvanometer correction file gives the galvanometer control system, the correction processing module that galvanometer is proofreaied and correct.
The certainty of measurement of the galvanometer corrective system of described precision is the positioning accuracy of 0.02-0.1 millimeter.
Described galvanometer corrective system is installed in fixedly on the support; Described two-dimension moving platform comprises Y linear electric motors, X linear electric motors and workbench; Described Y linear electric motors are arranged on the Y direction in the plane coordinates system, and the X linear electric motors are located at directions X and are arranged on the top of Y linear electric motors, and workbench is located at the top of Y linear electric motors.
The method that a kind of galvanometer corrective system of using above-mentioned precision is proofreaied and correct galvanometer, its bearing calibration comprises the steps:
(1) earlier the galvanometer that will proofread and correct being proofreaied and correct the target subscript at the processing galvanometer remembers and all gauge points;
(2) galvanometer being proofreaied and correct target is fixed on the workbench of two-dimension moving platform;
(3) control mobile Y linear electric motors, X linear electric motors by proofreading and correct processing module, make the galvanometer that is installed on the workbench proofread and correct target and move to theoretical gauge point position;
(4) gather current gauge point image by the ccd image harvester;
(5) by proofreading and correct processing module the image of gathering is calculated, draw the site error of real marking point and theoretical gauge point;
(6) if also have gauge point not have acquisition process to finish, then return step (3), re-execute the collection and the processing of next gauge point;
(7) after all gauge point disposes, give the galvanometer control system, galvanometer is proofreaied and correct by proofreading and correct processing module output galvanometer compensation file.
Owing to adopt technique scheme, the present invention is compared with existing direct corrective system with all gauge points in the ccd image harvester collection galvanometer target, have following beneficial effect:
1, the precision height that galvanometer is proofreaied and correct
Because prior art is directly to use galvanometer directly to proofread and correct, and the lens distortion meeting of image collecting device causes the position deviation error of calculation of each gauge point bigger, makes the positioning accuracy of galvanometer be difficult to reach 0.05 millimeter; The present invention is by the motion of control two-dimension moving platform, each gauge point that galvanometer is proofreaied and correct on the target moves to theoretical position, the image calculation of gathering the position deviation of each gauge point, and output galvanometer correction file is given the galvanometer control system, galvanometer is proofreaied and correct, thereby the precision of proofreading and correct wants high.And the present invention adopt precision be 0.005 millimeter linear electric motors as the correcting measuring workpiece, guarantee certainty of measurement.
2, frame for movement is simple, mechanism stable, and temperature is waftd little
Because the positioning accuracy of galvanometer is easy to be subjected to the influence of environment temperature and variation, the present invention adopts positioning accuracy little linear electric motors influenced by ambient temperature to measure, and makes the precision can be guaranteed.
3, the software module flow process is clear simple, realizes easy operating easily.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the modular structure schematic diagram of the accurate galvanometer corrective system of the present invention.
Fig. 2 is the modular structure figure that proofreaies and correct processing module among Fig. 1.
Fig. 3 is the assembly structure schematic diagram of the accurate galvanometer corrective system of the present invention.
Fig. 4 is the gauge point schematic diagram on the galvanometer correction target among Fig. 3.
Fig. 5 is the bearing calibration flow chart of the accurate galvanometer corrective system of the present invention.
Among the figure, 1. galvanometer control system, 2. vibration mirror scanning module, 3. galvanometer corrective system, 31. galvanometer is proofreaied and correct target, 311. gauge points, 32. two-dimension moving platforms, 321.Y linear electric motors, 322.X linear electric motors, 323. workbenches, 33.CCD image collecting device, 331.CCD, 332. pick-up lens, 333. light source, 34. proofread and correct processing module, 341. motion-control modules, 342. the position deviation computing module, 343. galvanometer compensating modules, 4. fixing support.
The specific embodiment
Figure 1 shows that the embodiment of modular structure of the galvanometer corrective system of precision of the present invention, Figure 3 shows that an embodiment of the assembly structure of accurate galvanometer corrective system among Fig. 1.As shown in figures 1 and 3, this galvanometer corrective system 3 comprises galvanometer correction target 31, two-dimension moving platform 32, ccd image harvester 33 and proofreaies and correct processing module 34.Galvanometer corrective system 3 is installed in fixedly on the support 4, and the bottom of proofreading and correct target 31 at galvanometer is provided with a two-dimension moving platform 32, and this two-dimension moving platform 32 comprises Y linear electric motors 321, X linear electric motors 322 and workbench 323.Y linear electric motors 321 are arranged on the Y direction in the plane coordinates system, and X linear electric motors 322 are arranged on directions X and are located at the top of Y linear electric motors 321, and workbench 323 is located at the top of Y linear electric motors 321.This two-dimension moving platform 32 adopts linear electric motors or servomotor or stepper motor as drive motors.Adopting positioning accuracy in the present embodiment is that 0.005 millimeter linear electric motors guarantee certainty of measurement, and the certainty of measurement of the galvanometer corrective system of precision of the present invention is the positioning accuracy of 0.02-0.1 millimeter.
Among Fig. 1, galvanometer control system 1 makes laser proofread and correct on the target 31 at galvanometer by control vibration mirror scanning module 2 and marks the standard gauge point 311 that is used to proofread and correct, and the figure of the gauge point on this target 31 as shown in Figure 4.Galvanometer is proofreaied and correct on the target 31 a lot of gauge points 311, in trimming process, the gauge point that uses is many more, the rectification building-out that generates is more accurate, the galvanometer correction accuracy is directly proportional with gauge point quantity, and in the present embodiment, what gauge point 311 used is the cross figure, also can use a little or other pattern images, the embodiment of the invention is an example with the cross figure.The galvanometer that marks all gauge points is proofreaied and correct target 31 be fixed on the two-dimension moving platform 32, by the motion of proofreading and correct processing module 34 control two-dimension moving platforms 32, each gauge point that galvanometer is proofreaied and correct on the target 31 moves to theoretical position.
Galvanometer is proofreaied and correct the top that ccd image harvester 33 that each gauge point on the target 31 carries out IMAQ is installed in two dimensional motion workbench 323, and as shown in Figure 3, the ccd image harvester comprises CCD331, pick-up lens 332 and light source 333.One end of pick-up lens 332 is fixed on the end of CCD331, the side of CCD (Charged Coupled Device charge-coupled image sensor) 331 is fixedly mounted on the support 4, and gathering for the CCD331 shooting provides the light source 333 of light illumination to be fixedly mounted on the support 4.The image calculation of proofreading and correct 34 pairs of collections of processing module goes out the position deviation of each gauge point, exports the galvanometer correction file then and gives galvanometer control system 1, and galvanometer is compensated correction.
As shown in Figure 2, the correction processing module 34 among the present invention comprises and is used to control the motion-control module 341 that two-dimension moving platform 32 accurately moves to assigned address; Be used for the image that ccd image harvester 33 is gathered is calculated, calculate the position deviation computing module 342 of deviation of the position of the position of real marking point and theoretical gauge point; Be used for the result that position deviation computing module 342 generates is exported, be used for the galvanometer compensating module 343 of the compensation file of galvanometer correction.
The embodiment of the method step that flow chart shown in Figure 5 is proofreaied and correct galvanometer for the galvanometer corrective system of using the invention described above precision.
In step Step1, the galvanometer that will proofread and correct is proofreaied and correct on the target 31 at the processing galvanometer marked all gauge points earlier;
In step Step2, galvanometer is proofreaied and correct target 31 install and fix on the precise 2-D motion workbench 323;
In step Step3, the mobile Y linear electric motors 321 of correction processing module 34 controls, X linear electric motors 322 make the galvanometers that are installed in above the workbench 323 proofread and correct targets 31 and move to theoretical gauge point position;
In step Step4, ccd image harvester 33 is gathered current gauge point image;
In step Step5, the image of proofreading and correct 34 pairs of collections of processing module calculates the site error of real marking point and theoretical gauge point;
In step Step6, if gauge point does not have acquisition process to finish then returns collection and the processing that step Step3 re-executes next gauge point in addition, the site error of all gauge points of circle collection like this;
In step Step7, whole gauge points dispose, and proofread and correct processing module 34 output galvanometers compensation files to galvanometer control control system 1, add importing compensation in man-hour file galvanometer is carried out error compensation, in scanning processing, just can guarantee to add the hi-Fix in man-hour like this.
IMAQ among the present invention, data are handled and the operation of motion control is prior art.
The above inventive embodiments only is a reasonable scheme of this bearing calibration, is not limited to the present invention, and all any change, replacement and improvement of being done within principle of the present invention etc. all should be included within protection scope of the present invention.
Claims (7)
1. the galvanometer corrective system of a precision, it comprises that galvanometer proofreaies and correct target (31), it is characterized in that: the galvanometer corrective system of described precision also comprises:
A two-dimension moving platform (32), this two-dimension moving platform (32) are located at the bottom that galvanometer is proofreaied and correct target (31);
Galvanometer is proofreaied and correct target (31) go up the ccd image harvester (33) that each gauge point carries out IMAQ, this ccd image harvester (33) is installed in the top of two-dimension moving platform (32);
Be used to control the motion of two-dimension moving platform (32), each gauge point that galvanometer is proofreaied and correct on the target (31) moves to theoretical position, the image calculation of gathering the position deviation of each gauge point, and output galvanometer correction file gives galvanometer control system (1), the correction processing module (34) that galvanometer is proofreaied and correct.
2. the galvanometer corrective system of a kind of precision according to claim 1, it is characterized in that: the certainty of measurement of the galvanometer corrective system of described precision is the positioning accuracy of 0.02-0.1 millimeter.
3. the galvanometer corrective system of a kind of precision according to claim 1, it is characterized in that: described correction processing module (34) comprising:
Be used to control the motion-control module (341) that described two-dimension moving platform (32) accurately moves to assigned address;
Be used for the image that ccd image harvester (33) is gathered is calculated, calculate the position deviation computing module (342) of deviation of the position of the position of real marking point and theoretical gauge point;
The result who is used for described position deviation computing module (342) is generated exports, and is used for the galvanometer compensating module (343) of the compensation file of galvanometer correction.
4. the galvanometer corrective system of a kind of precision according to claim 1 is characterized in that: described galvanometer corrective system is installed in fixedly on the support (4); Described two-dimension moving platform (32) comprises Y linear electric motors (321), X linear electric motors (322) and workbench (323); Described Y linear electric motors (321) are arranged on the Y direction in the plane coordinates system, and X linear electric motors (322) are located at directions X and are arranged on the top of Y linear electric motors (321), and workbench (323) is located at the top of Y linear electric motors (321).
5. the galvanometer corrective system of a kind of precision according to claim 4 is characterized in that: it is drive motors that described two-dimension moving platform (32) adopts linear electric motors or servomotor or stepper motor.
6. the galvanometer corrective system of a kind of precision according to claim 1, it is characterized in that: described ccd image harvester (33) comprises CCD (331), pick-up lens (332) and light source (333), one end of described pick-up lens (332) is fixed on the end of CCD (331), the side of CCD (331) is fixedly mounted on fixedly on the support (4), gathers the light source (333) that light illumination is provided for CCD (331) shooting and is fixedly mounted on fixedly on the support (4).
7. method that application rights requires the galvanometer corrective system of 1 described a kind of precision that galvanometer is proofreaied and correct, it is characterized in that: described bearing calibration comprises the steps:
(1) earlier the galvanometer that will proofread and correct is marked all gauge points on processing galvanometer correction target (31);
(2) galvanometer being proofreaied and correct target (31) is fixed on the workbench (323) of two-dimension moving platform (32);
(3) by proofreading and correct processing module (34) control mobile Y linear electric motors (321), X linear electric motors (322), make the galvanometer that is installed on the workbench (323) proofread and correct target (31) and move to theoretical gauge point position;
(4) gather current gauge point image by ccd image harvester (33);
(5) by proofreading and correct processing module (34) image of gathering is calculated, draw the site error of real marking point and theoretical gauge point;
(6) if also have gauge point not have acquisition process to finish, then return step (3), re-execute the collection and the processing of next gauge point;
(7) after all gauge point disposes, give galvanometer control system (1), galvanometer is proofreaied and correct by proofreading and correct processing module (34) output galvanometer compensation file.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004276101A (en) * | 2003-03-18 | 2004-10-07 | Sumitomo Heavy Ind Ltd | Laser beam machining method and laser beam machining apparatus |
| KR20040098849A (en) * | 2003-05-16 | 2004-11-26 | 삼성에스디아이 주식회사 | Wide band scan lens and laser marking apparatus employing the same and correction method of distortion |
| CN101513693A (en) * | 2009-03-17 | 2009-08-26 | 深圳市大族激光科技股份有限公司 | Oscillating mirror correcting system and correcting method thereof |
| CN101804521A (en) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | Galvanometer system correction device and correction method thereof |
-
2011
- 2011-03-15 CN CN2011100614921A patent/CN102152007A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004276101A (en) * | 2003-03-18 | 2004-10-07 | Sumitomo Heavy Ind Ltd | Laser beam machining method and laser beam machining apparatus |
| KR20040098849A (en) * | 2003-05-16 | 2004-11-26 | 삼성에스디아이 주식회사 | Wide band scan lens and laser marking apparatus employing the same and correction method of distortion |
| CN101513693A (en) * | 2009-03-17 | 2009-08-26 | 深圳市大族激光科技股份有限公司 | Oscillating mirror correcting system and correcting method thereof |
| CN101804521A (en) * | 2010-04-15 | 2010-08-18 | 中国电子科技集团公司第四十五研究所 | Galvanometer system correction device and correction method thereof |
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| CN109596064B (en) * | 2018-12-07 | 2020-06-05 | 哈尔滨工业大学 | Binocular confocal stereoscopic vision scanning galvanometer position error correction device and method |
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| CN109827505B (en) * | 2019-03-26 | 2020-05-19 | 北京航空航天大学 | High-precision laser scanning galvanometer position sensor calibration system |
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| CN110653489A (en) * | 2019-09-18 | 2020-01-07 | 西安铂力特增材技术股份有限公司 | Multi-galvanometer rapid calibration method |
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Application publication date: 20110817 |