CN105698726B - Measure and calibrate the method and apparatus of motion platform positioning accuracy - Google Patents

Measure and calibrate the method and apparatus of motion platform positioning accuracy Download PDF

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Publication number
CN105698726B
CN105698726B CN201610073230.XA CN201610073230A CN105698726B CN 105698726 B CN105698726 B CN 105698726B CN 201610073230 A CN201610073230 A CN 201610073230A CN 105698726 B CN105698726 B CN 105698726B
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motion platform
motion
step pitch
graduation mark
calibration
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CN105698726A (en
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武杰杰
赵华龙
石涛
张挺
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Guangdong Zhongke Weijing Photonics Manufacturing Technology Co ltd
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Shenzhen Micromach Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness

Abstract

A kind of device measured and calibrate motion platform positioning accuracy, including motion platform, the high-precision calibrating ruler being fixed on the motion platform, measurement camera above the high-precision calibrating ruler, and the motion-control module for controlling the motion platform, the motion platform is operated according to the preset step pitch of the motion-control module, the graduation mark change information of the high-precision calibrating ruler during the default step pitch of measurement camera intake, the motion-control module calculates practical travel distance during certain predetermined step pitch by the graduation mark change information of the high-precision calibrating ruler and presets step pitch according to the deviation adjustment between the practical travel distance and default step pitch, technical scheme is simple and practical, greatly reduce measurement cost.

Description

Measure and calibrate the method and apparatus of motion platform positioning accuracy
Technical field
The present invention relates to precision measure fields, more particularly to the method and dress for measuring and calibrating motion platform positioning accuracy It sets.
Background technology
In some automation equipments, the requirement of processing precision of products is higher and higher, the positioning accurate of motion platform in equipment Degree will determine whether product quality is qualified, and positioning accuracy deficiency will cause fraction defective to rise.The positioning accuracy of motion platform is to certainly The overall performance of dynamicization equipment plays the role of conclusive.Motion platform such as in laser cutting device is cut to workpiece It cuts in process, needs the position for being accurately positioned workpiece that could realize that high-precision cutting, the positioning accuracy of motion platform are straight Connect the machining accuracy affected to workpiece.
Currently, the positioning accuracy of motion platform is generally measured and calibrated using laser interferometer, but laser interferometer It is expensive, complicated for operation, not portable, be not suitable for the batch production and inspection of equipment.
Invention content
Based on this, it is necessary to a kind of method and apparatus measured and calibrate motion platform positioning accuracy is provided, it is existing to solve The problem for having technology measuring instrument expensive, complicated for operation, not portable.
A kind of device of measurement and calibration motion platform positioning accuracy, including motion platform, it is fixed on the motion platform On calibration scale, the measurement camera above the calibration scale and the motion-control module for controlling the motion platform, The positioning accuracy of the calibration scale is higher than the positioning accuracy of the motion platform;The motion platform is according to the motion control mould The preset step pitch of block operates, the graduation mark change information of the calibration scale, institute during the default step pitch of measurement camera intake It states motion-control module and calculates reality during certain predetermined step pitch by the graduation mark change information of the calibration scale Travel distance simultaneously presets step pitch according to the deviation adjustment between the practical travel distance and default step pitch.
Preferably, the graduation mark of the calibration scale includes a central point and from the sideline that the central point extends out.
Preferably, the graduation mark graphic designs in the calibration scale are "×" shape.
Preferably, if the direction of motion of the calibration scale and the motion platform is inconsistent:First measure the "×" shape The length in the sideline that graduation mark extends length value corresponding with the direction of motion, then by Pythagorean theorem calculate the direction of motion with Angle theta between the "×" shape graduation mark;Then, the cosine value that the range ability of the calibration scale is multiplied by angle theta is to move The actual motion distance of platform.
Preferably, the measurement camera is 1600x1200 using global exposure CCD camera, the pixel for measuring camera, The size of each pixel is 4.4um, the microlens that configuration enlargement ratio is 10 times.
A method of motion platform positioning accuracy is measured and calibrates, including:
Send enabled instruction makes motion platform to set step pitch operating to motion platform;
Obtain graduation mark change information of the calibration scale during certain predetermined step pitch being fixed on motion platform;
The graduation mark information of calibration scale according to the acquisition calculates the reality of the motion platform in certain predetermined step pitch Travel distance, the positioning accuracy of the calibration scale are higher than the positioning accuracy of the motion platform;
The practical travel distance is compared acquisition deviation with the default step pitch;
The step pitch of the motion platform is adjusted using the deviation value calibration of acquisition.
Preferably, the motion platform is equipped with driving motor and is controlled by motion-control module, the movement control Molding block is for starting, closing the motion platform and set step pitch for the motion platform.
Preferably, the graduation mark graphic designs in the calibration scale are "×" shape.
Preferably, the graduation mark information according to the calibration scale of the acquisition calculates the practical row in certain predetermined step pitch Into distance, including:
Measure the length length value corresponding with the direction of motion in the sideline that the "×" shape graduation mark extends;
Using two obtained length values are measured the direction of motion and the "×" shape graduation mark are calculated according to Pythagorean theorem Between angle theta;
By the practical travel distance of the calibration scale be multiplied by angle theta cosine value obtain motion platform actual motion away from From.
Preferably, the step pitch of the motion platform is adjusted using the deviation value calibration of acquisition, including:
The stride value of the motion platform setting is adjusted by the deviation;
The motor that stride value instruction after the adjustment is sent to the motion platform executes.
Above-mentioned at least one technical solution that the embodiment of the present application uses can reach following advantageous effect:In motion platform On fix a high-precision calibrating ruler, pass through calculate in certain predetermined step pitch the high-precision calibrating ruler practical displacement distance The practical displacement distance for calculating the motion platform in default step pitch, to obtain the practical displacement distance and default step Deviation away between, and the precision of the motion platform is calibrated with this deviation, solve laser interference in the prior art Instrument is not expensive, complicated for operation, portable, the problem of not being suitable for the batch production and inspection of equipment.
Description of the drawings
Fig. 1 is the schematic layout pattern that the application measured and calibrated motion platform positioning accuracy device;
Fig. 2 is the plan view for the calibration scale that the application measured and calibrated motion platform positioning accuracy;
Fig. 3 is the flow chart that the application measured and calibrated motion platform positioning accuracy method.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention Specific implementation mode be described in detail.Many details are elaborated in the following description in order to fully understand this hair It is bright.But the invention can be embodied in many other ways as described herein, those skilled in the art can be not Similar improvement is done in the case of violating intension of the present invention, therefore the present invention is not limited by following public specific embodiment.
It should be noted that when element is referred to as " being fixed on ", " being set to " another element, it can be directly another On a element or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be It is directly connected to another element or may be simultaneously present centering elements.Term as used herein " vertically ", " level ", "left", "right" and similar statement for illustrative purposes only, be not offered as being unique embodiment.
Embodiment 1
As shown in Figure 1, the measurement of the embodiment of the present application 1 and the device for calibrating motion platform positioning accuracy include motion platform 301, it is fixed on the high-precision calibrating ruler 101 on the motion platform 301, the survey above the high-precision calibrating ruler 101 Measure camera 201 and the motion-control module C1 for controlling the motion platform 301.The motion-control module C1 has fortune It calculates and control function, the motion platform 301 is moved in a straight line by motor driving, the motion-control module C1 receives to test oneself It measures the measurement data of camera 201 and calculates the kinematic error value of motion platform, then error amount is sent to the electricity of motion platform 301 Machine is to calibrate the mobile accuracy of motion platform 301.
After the high-precision calibrating ruler 101 is fixed on the motion platform 301, the amount of movement of the motion platform 301 It is the amount of movement of high-precision calibrating ruler 101.The accuracy class of the high-precision calibrating ruler 101 is higher than the motion platform 301 Positioning accuracy, most preferred embodiment is that the positioning accuracy of the high-precision calibrating ruler 101 is ten times of motion platform 301, this reality The gauge block for using microscope calibration in example is applied, other types of calibrating block can also be used in other embodiment.
It please refers to shown in Fig. 2, the positioning pattern on the high-precision calibrating ruler 101 is designed as "×" shape, when the height Precision calibration ruler 101 when mounted with 301 direction of motion of motion platform is not parallel leads to that there are when measurement error:Pass through survey first The angle theta between the sideline and the direction of motion of the "×" shape graduation mark is measured, that is, measures what the "×" shape graduation mark extended The length in sideline length value corresponding with the direction of motion then calculates the direction of motion by Pythagorean theorem and is carved with the "×" shape Spend the angle theta between line;At this point, the range ability L*cos θ of the high-precision calibrating ruler 101 are the reality of motion platform 301 Range ability.
In other embodiments, the graduation mark on the high-precision calibrating ruler 101 is not limited to "×" shape, and graduation mark has One central point and from the sideline that the central point extends outward.
It only needs to revolve high-precision calibrating ruler 101 when needing to measure the positioning accuracy of motion platform 301 in other directions It is retightened after gyration.
The camera 201 that measures can capture swiftly passing object, motion platform using the CCD camera of global exposure 301 can continuously move without one step pitch of every stepping stop, improve measurement with calibration motion platform positioning accuracy Efficiency.The pixel for measuring camera 201 is 1600x1200, and the size of each pixel is 4.4um, and configures enlargement ratio For 10 times of microlens, in this way, it is 4.4um/10=that each pixel, which corresponds to the size on high-precision calibrating ruler 101, 0.44um, i.e. the pixel class resolution ratio of system are 0.44um.So the measurement visual field for measuring camera is:1600x4.4um =7040um, 1200x4.4um=5280um.
After the motor drive motion platform 301 that the motion-control module C1 starts the motion platform 301 operates, institute Motion platform 301 is stated to operate according to the step pitch that motion-control module C1 is set;The measurement camera 201 shoots the high-precision scale The graduation mark change information of scale 101, and it is sent to motion-control module C1;The motion-control module C1 is according to the scale Line change information calculates practical travel distance of the high-precision calibrating ruler 101 after the motion platform 301 presets step pitch action, And the practical travel distance is compared with the motion-control module C1 step pitches set to obtain deviation Σ δ d;The fortune Dynamic control module C1 compensates the motion platform 301 using deviation Σ δ d, i.e., deviation is negated post-compensation to the fortune In dynamic control module C1, if the setting stride value of motion-control module C1 is 10mm, the practical travel distance obtained after measurement is 10.05mm, then deviation Σ δ d are 0.05mm, and motion-control module C1 is given to for -0.05mm then negating 0.05mm, movement Control module C1 sends 10-0.05=9.95mm instructions, and then calibrates and promoted the positioning accurate of the motion platform 301 Degree.
Embodiment 2
The measurement of the offer of the embodiment of the present application 2 is provided and calibrates the flow of the method for motion platform positioning accuracy Figure refers to being higher than the high-precision calibrating ruler 101 of the motion platform 301 by fixing a precision on motion platform 301, then lead to Cross measure camera 201 measure preset step pitch in high-precision calibrating ruler 101 practical travel distance, and calculate deviation supplement to The motion platform 301 is with calibration accuracy.Include the following steps:
S11, transmission enabled instruction make motion platform to set step pitch operating to motion platform.
Motion platform described in this step is driven by motor, and the motion-control module controls the movement by the motor The operating of platform, including start, close the motion platform and set step pitch etc. for the motion platform.
S12, acquisition are fixed on graduation mark variation of the high-precision calibrating ruler on motion platform during certain predetermined step pitch Information.
High-precision table scale described in this step is fixed in the movement direction on the motion platform, this step is to pass through Measurement camera shooting above the high-precision calibrating ruler obtains the high-precision table scale in certain predetermined step pitch Graduation mark change information.The certain predetermined step pitch can be the motion platform operate a default step pitch during or During several default step pitches.
The precision of the high-precision calibrating ruler is more than the precision of the motion platform, is demarcated using microscope in the present embodiment Other types of calibrating block can also be used in other embodiment in gauge block.
The camera 201 that measures can capture swiftly passing object, motion platform using the CCD camera of global exposure 301 can continuously move without one step pitch of every stepping stop, improve measurement with calibration motion platform positioning accuracy Efficiency.The pixel for measuring camera 201 is 1600x1200, and the size of each pixel is 4.4um, and configures enlargement ratio For 10 times of microlens, in this way, it is 4.4um/10=that each pixel, which corresponds to the size on high-precision calibrating ruler 101, 0.44um, i.e. the pixel class resolution ratio of system are 0.44um.So the measurement visual field for measuring camera is:1600x4.4um =7040um, 1200x4.4um=5280um.
S13, the reality in certain predetermined step pitch is calculated according to the graduation mark information of the high-precision calibrating ruler of the acquisition Border travel distance.
In this step, when the distance between graduation mark on the high-precision calibrating ruler, is known, according to the graduation mark Mobile quantity can calculate the practical travel distance in the step pitch.
S14, the practical travel distance is compared acquisition deviation with the default step pitch.
This step is to obtain difference after being compared the practical travel distance with the default step pitch, and the difference can It can just bear, the positive or negative difference is deviation Σ δ d.
S15, the step pitch that the motion platform is adjusted using the deviation value calibration of acquisition.
This step includes:
The stride value of the motion platform setting is adjusted by the deviation;
The motor that stride value instruction after the adjustment is sent to the motion platform executes.
It please refers to shown in Fig. 2, the positioning pattern on the high-precision calibrating ruler 101 is designed as "×" shape, when the height Precision calibration ruler 101 when mounted with 301 direction of motion of motion platform is not parallel leads to that there are when measurement error:Pass through survey first The angle theta between the sideline and the direction of motion of the "×" shape graduation mark is measured, that is, measures what the "×" shape graduation mark extended The length in sideline length value corresponding with the direction of motion then calculates the direction of motion by Pythagorean theorem and is carved with the "×" shape Spend the angle theta between line;At this point, the range ability L*cos θ of the high-precision calibrating ruler 101 are the reality of motion platform 301 Range ability.
In other embodiments, the graduation mark on the high-precision calibrating ruler 101 is not limited to "×" shape, and graduation mark has One central point and from the sideline that the central point extends outward.
The application measure and calibration motion platform positioning accuracy method and apparatus fix on the moving platform one it is high-precision Scale scale is calculated by calculating the practical displacement distance of the high-precision calibrating ruler in certain predetermined step pitch in default step Practical displacement distance away from the interior motion platform, to obtain the deviation between the practical displacement distance and default step pitch Value, and calibrate with this deviation the precision of the motion platform, solves that laser interferometer in the prior art is expensive, behaviour Make complicated, not portable, the problem of not being suitable for the batch production and inspection of equipment.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (4)

1. the device of a kind of measurement and calibration motion platform positioning accuracy, which is characterized in that including motion platform, be fixed on it is described Calibration scale on motion platform, the measurement camera above the calibration scale and the movement for controlling the motion platform Control module, the positioning accuracy of the calibration scale are higher than the positioning accuracy of the motion platform;The motion platform is according to described The preset step pitch of motion-control module operates, and the graduation mark of the calibration scale becomes during the default step pitch of measurement camera intake Change information, the motion-control module is calculated by the graduation mark change information of the calibration scale during certain predetermined step pitch Interior practical travel distance simultaneously presets step pitch according to the deviation adjustment between the practical travel distance and default step pitch;
The graduation mark of the calibration scale includes a central point and from the sideline that the central point extends out;
Graduation mark graphic designs in the calibration scale are "×" shape;
If when the calibration scale and the inconsistent direction of motion of the motion platform:The "×" shape graduation mark is first measured to extend Sideline length length value corresponding with the direction of motion, then the direction of motion and the "×" shape are calculated by Pythagorean theorem and carved Spend the angle theta between line;Then, the cosine value that the range ability of the calibration scale is multiplied by angle theta is the practical fortune of motion platform Row distance.
2. the device of measurement according to claim 1 and calibration motion platform positioning accuracy, which is characterized in that the measurement Camera is using global exposure CCD camera, and the pixel for measuring camera is 1600x1200, and the size of each pixel is 4.4um, Configure the microlens that enlargement ratio is 10 times.
3. a kind of method of measurement and calibration motion platform positioning accuracy, which is characterized in that including:
Send enabled instruction makes motion platform to set step pitch operating to motion platform;
Obtain graduation mark change information of the calibration scale during certain predetermined step pitch being fixed on motion platform;
The graduation mark information of calibration scale according to the acquisition calculates the practical traveling of the motion platform in certain predetermined step pitch Distance;The positioning accuracy of the calibration scale is higher than the positioning accuracy of the motion platform;
The practical travel distance is compared acquisition deviation with the default step pitch;
The step pitch of the motion platform is adjusted using the deviation value calibration of acquisition;
The motion platform is equipped with driving motor and is controlled by motion-control module, and the motion-control module is for opening It moves, close the motion platform and set step pitch for the motion platform;
Graduation mark graphic designs in the calibration scale are "×" shape;
The graduation mark information of calibration scale according to the acquisition calculates the practical travel distance in certain predetermined step pitch, packet It includes:
Measure the length length value corresponding with the direction of motion in the sideline that the "×" shape graduation mark extends;
It is calculated between the direction of motion and the "×" shape graduation mark according to Pythagorean theorem using two obtained length values are measured Angle theta;
The cosine value that the practical travel distance of the calibration scale is multiplied by angle theta obtains the actual motion distance of motion platform.
4. the method for measurement according to claim 3 and calibration motion platform positioning accuracy, which is characterized in that utilize acquisition Deviation value calibration adjust the step pitch of the motion platform, including:
The stride value of the motion platform setting is adjusted by the deviation;
The motor that stride value instruction after the adjustment is sent to the motion platform executes.
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