CN109738164A - A kind of laser index carving galvanometer high-precision correction system and method - Google Patents
A kind of laser index carving galvanometer high-precision correction system and method Download PDFInfo
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- CN109738164A CN109738164A CN201910046542.5A CN201910046542A CN109738164A CN 109738164 A CN109738164 A CN 109738164A CN 201910046542 A CN201910046542 A CN 201910046542A CN 109738164 A CN109738164 A CN 109738164A
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Abstract
The present invention relates to technical field of laser mark, specially a kind of laser index carving galvanometer high-precision correction system and method.The system comprises: vibration mirror scanning module forms array target for controlling laser beam deflection on vibrating mirror correction plate；The vibrating mirror correction plate, for receiving the irradiation of the laser beam to form the array target；Image Acquisition and processing module, so that the galvanometer for obtaining correcting for galvanometer compensates file, realize the correction of galvanometer in the vibration mirror scanning module for acquiring and handling the image of the target.The present invention on vibrating mirror correction plate by getting array target using vibration mirror scanning module, image collecting device is recycled to carry out Image Acquisition to the array target, described image is handled to obtain galvanometer compensation file, file is compensated by the galvanometer, is input to the correction that the included software systems of galvanometer realize galvanometer.The present invention realizes the efficient correction of galvanometer, without the survey crew of profession and the measuring device of valuableness, high degree of automation.
Description
Technical field
The present invention relates to Laser mark technology field, more particularly to a kind of laser index carving galvanometer high-precision correction system and
Method.
Background technique
Laser galvanometer, that is, laser scanner, abbreviation galvanometer are anti-by X-Y optical scanning head, electric drive amplifier and optics
Camera lens composition is penetrated, control signal is provided by controller and optical scanning head is driven by drive amplification circuit, to realize light
The controllable deflection of beam on an x-y plane, and then realize laser processing.
During carrying out high-accuracy laser processing using galvanometer, it is often necessary to propose that harshness is wanted to galvanometer machining accuracy
It asks, it is therefore desirable to which accuracy correction is carried out to galvanometer.Initial galvanometer bearing calibration is to use steel ruler or slide calliper rule as measuring tool,
And the rectangle frame of a fixed size can only be calibrated, it can only guarantee the precision of this rectangle frame.Modern Laser industry, this does
Method is far from meeting the market demand.Further, it is also possible to by beating matrix target on correcting plate, in conjunction with subsidiary equipment into
Row measurement, actual measured value compensation file deviation is imported into software and is corrected, this method is not only time-consuming, it is also necessary to
The subsidiary equipment of special survey crew and valuableness, and corresponding instrument is not necessarily had in curstomer's site, although
The precision of correction increases, but low efficiency.
As it can be seen that existing galvanometer bearing calibration the degree of automation is low, and it is inconvenient, it needs to improve.
Summary of the invention
The present invention provides a kind of laser index carving galvanometer high-precision correction system, and it is automatic to be able to solve the correction of prior art galvanometer
Change degree is low, inconvenient problem.
The invention is realized in this way a kind of laser index carving galvanometer high-precision correction system, comprising:
Vibration mirror scanning module forms array target for controlling laser beam deflection on vibrating mirror correction plate；
The vibrating mirror correction plate, for receiving the irradiation of the laser beam to form the array target；And
Image Acquisition and processing module, for acquiring and handling the image of the target, to obtain the vibration corrected for galvanometer
Mirror compensates file, realizes the correction of galvanometer in the vibration mirror scanning module.
In another embodiment, a kind of laser index carving galvanometer High-precision correction method, the side are additionally provided
Method the following steps are included:
Adjustment vibration mirror scanning module is overlapped its coordinate system and the coordinate system of Image Acquisition and processing module；
Vibrating mirror correction plate is set to the working region of vibration mirror scanning module, starts the vibration mirror scanning module and adds by preset path
Work goes out array target；
Image Acquisition is carried out to the array target using Image Acquisition and processing module, and is corrected using secondary Bayside algorithm
The coordinate of the array target each point obtains galvanometer compensation file；
The control unit that galvanometer compensation file inputs the vibration mirror scanning module is realized to the correction to galvanometer.
The present invention provides a kind of laser index carving galvanometer high-precision correction system, and the system comprises vibration mirror scanning modules, vibration
Mirror correcting plate, Image Acquisition and processing module.The present invention on vibrating mirror correction plate by getting array using vibration mirror scanning module
Target recycles image collecting device to carry out Image Acquisition to the array target, is handled described image to obtain galvanometer
File is compensated, file is compensated by the galvanometer, is input to the correction that the included software systems of galvanometer realize galvanometer.The present invention is real
The efficient correction for having showed galvanometer, without the survey crew of profession and the measuring device of valuableness, high degree of automation.
Detailed description of the invention
Fig. 1 is a kind of laser index carving galvanometer high-precision correction system structure diagram provided in an embodiment of the present invention；
Fig. 2 is focus lamp postposition scanning system structural schematic diagram；
Fig. 3 is the preposition scanning system structural schematic diagram of focus lamp；
Fig. 4 is a kind of laser index carving galvanometer High-precision correction method flow diagram provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The present invention provides a kind of laser index carving galvanometer high-precision correction system, and it is automatic to be able to solve the correction of prior art galvanometer
Change degree is low, inconvenient problem.
Specific implementation of the invention is described in detail below in conjunction with specific embodiment.
As shown in Figure 1, being that a kind of structure of laser index carving galvanometer high-precision correction system provided in an embodiment of the present invention is shown
It is intended to, comprising:
Vibration mirror scanning module 101 forms array target for controlling laser beam deflection on vibrating mirror correction plate 102；
The vibrating mirror correction plate 102, for receiving the irradiation of the laser beam to form the array target；And
Image Acquisition and processing module 103, for acquiring and handling the image of the target, to obtain for galvanometer correction
Galvanometer compensates file, realizes the correction of galvanometer in the vibration mirror scanning module.
In the present invention, the vibration mirror scanning module 101 is deflected for controlling laser beam along setting path, thus in galvanometer
Array target is got on correcting plate 102, array target here refers to lattice array.It is to be understood that in the present invention, vibration mirror scanning
Module 101 is both a part to picture and correction system of system compensation, is exactly based on collection analysis vibration mirror scanning module 101
The error for the dot matrix got, to obtain galvanometer correction data.
In the present invention, the irradiation that vibrating mirror correction plate 102 is used to receive laser forms the array target, in order to preferably
Normal process condition is simulated, the material that the vibrating mirror correction plate 102 uses can be consistent with normal process material, certainly, out
In improving correction accuracy, prevents correcting plate deformation etc. from considering, the material for being less prone to thermal deformation can also be selected, commonly use 3M mark
Paper, the invention is not limited in this regard.
In the present invention, Image Acquisition and processing module 103 can integrate in the vibration mirror scanning module 101, can also
To be separately provided；Further, Image Acquisition and processing module 103 can be set to together with the vibration mirror scanning module 101
At one, place setting can also be different；It is corresponding to it, the vibrating mirror correction plate 102 can be completed to carry out image again after mark to adopt
Collection can also be to carry out Image Acquisition, the invention is not limited in this regard while mark.
The present invention provides a kind of laser index carving galvanometer high-precision correction system, the system comprises vibration mirror scanning module 101,
Vibrating mirror correction plate 102, Image Acquisition and processing module 103.The present invention is by utilizing vibration mirror scanning module 101 in vibrating mirror correction plate
Array target is got on 102, image collecting device is recycled to carry out Image Acquisition to the array target, and described image is carried out
Processing obtains galvanometer compensation file, compensates file by the galvanometer, is input to the included software systems of galvanometer and realizes galvanometer
Correction.The present invention realizes the efficient correction of galvanometer, without the survey crew of profession and the measuring device of valuableness, the degree of automation
It is high.
In one embodiment of the invention, the vibration mirror scanning module includes:
Control unit, control and machining path setting for each component of vibration mirror scanning module；
Laser light source is connected with described control unit, for generating laser beam, carries out marking to the vibrating mirror correction plate and handles
To the array target；
Galvanometer is connected with described control unit, including X is set to the propagation path of the laser beam to galvanometer and Y-direction galvanometer
On, it is respectively used to adjust the X-direction of the laser beam and the offset of Y-direction；
Focus lamp is set on the propagation path of the laser beam, the focusing for the laser beam.
In the present invention, described control unit is used for the control of each component of galvanometer scanning unit and setting for machining path
It sets, the component for needing to control includes at least laser light source, galvanometer；The deflection that galvanometer is wherein controlled for the control of galvanometer, from
And move optical path in processing plane, process the shape of setting.Control unit comes with control program, will be finally obtained
The correction of the amount of galvanometer deflection may be implemented in the control program of galvanometer rectification building-out file input control unit, this is partly belonged to
This field routine operation.
In the present invention, the galvanometer includes X to galvanometer and Y-direction galvanometer, is respectively used to control laser beam along two not
Same aspect deflection.In the present invention, galvanometer is easy to produce offset error after a number of uses, this is that the present invention needs to correct
Error.
In the present invention, the laser light source is for generating laser beam, utilizes the high-energy high-temperature of laser beam
Feature makes to irradiate object and melt rapidly even to gasify, so that marking goes out target shape.It should be noted that laser light source generated
Laser can not be directly used in rapidoprint, because being that energy density is lower, it is therefore desirable to focus lamp be arranged, utilize focus lamp
Focussing force increase the energy density of laser.In the prior art, the focus lamp can be set before galvanometer, can also
After being set to galvanometer, as shown in Figure 2,3.
The embodiment of the invention provides a kind of laser index carving galvanometer high-precision correction system, the present embodiment shows in particular vibration
The composition of scarnning mirror module includes that control unit, laser light source, galvanometer and focus lamp pass through control unit in the present invention
Control galvanometer deflection is to process array target, by the deflection for obtaining galvanometer to formation target progress Image Acquisition and analysis
Error, to carry out error correction to galvanometer.
As a prioritization scheme of above-described embodiment, the X can turn to galvanometer and Y-direction galvanometer rotating around respective shaft
It is dynamic, and the shaft of the two is mutually orthogonal in space.
In the present invention, the X can be rotated to galvanometer and Y-direction galvanometer rotating around respective shaft, and the shaft of the two
It is mutually orthogonal in space, the amount of movement of light beam in two mutually orthogonal directions is adjusted by the deflection of galvanometer.By setting
Setting orthogonal two galvanometers of rotation direction can be more convenient relative to other setting forms, directly adjust galvanometer
Offset error.
The embodiment of the invention provides a kind of laser index carving galvanometer high-precision correction systems, and wherein vibration mirror scanning module is arranged
There is galvanometer, the galvanometer includes that X makes to galvanometer and Y-direction galvanometer by setting orthogonal to the shaft of galvanometer and Y-direction galvanometer for X
The deflection correction for obtaining galvanometer is more direct easy without being subjected to complicated conversion, improves the efficiency of galvanometer correction.
In one embodiment of the invention, described image acquisition and processing module include:
Image acquisition units are connected with image processing unit, for acquiring the array target image on the vibrating mirror correction plate simultaneously
It is transferred to described image processing unit；
Described image processing unit, for receiving the image data of described image processing unit transmission, and to described image data
It is handled to obtain the galvanometer compensation file.
In the present invention, described image acquisition and processing module include image acquisition units, and described image acquisition unit is
It is single its role is to obtain the image of the target array and be transferred to described image processing for the main element of Image Acquisition
Member.
In the present invention, described image processing unit is used to analyze the figure of the collected target of described image acquisition device
Picture, the grid deviation by calculating the array target each point obtain galvanometer and compensate file, to realize the galvanometer deflection
Correction.
A kind of laser index carving galvanometer high-precision correction system provided in an embodiment of the present invention is filled using Image Acquisition and processing
It sets and realizes automatically analyzing for array target, to obtain compensation file, correction course high degree of automation reduces artificial ginseng
With, maximally ensure that compensation file data accuracy.
As a prioritization scheme of above-described embodiment, described image acquisition unit is set to the vibration mirror scanning module
Working end, as the vibration mirror scanning module is mobile, into Image Acquisition while the vibration mirror scanning module carries out mark target.
In the present invention, described image acquisition unit is set to the working end of the vibration mirror scanning module, can be with vibration
The mobile mark of scarnning mirror module carries out the acquisition of image coloured silk to the target completed, farthest saved Image Acquisition with
The time-consuming of analysis, improves work efficiency.
As the carry out one-step optimization of above-mentioned prioritization scheme, described image acquisition unit is CCD vision camera.
In the present embodiment, described image acquisition unit is CCD vision camera, and CCD vision camera, which has, to be more preferably imaged
Effect, color is more gorgeous, and image quality is also more fine and smooth, and the identification conducive to software more makes to improve the deviation of error analysis
Deviation correction is more accurate reliable.
In one embodiment of the invention, the array target include rectangular array, circular array, cross array,
Triangular array.
In the present embodiment, the array target can use various shapes, including but not limited to rectangular array, circle
Column, cross array, triangular array, wherein the direction to deviate and size can more directly be calculated using rectangular array, had
X is pointedly adjusted to offset or Y-direction offset.
In one embodiment of the invention, described image processing unit corrects the array by secondary Bayside algorithm
The coordinate value of consecutive points on target.
In embodiments of the present invention, the coordinate value of two consecutive points, Ke Yigeng can be corrected by secondary Bayside algorithm
Quickly and efficiently obtain galvanometer compensation file.
Another embodiment of the invention additionally provides a kind of laser index carving galvanometer High-precision correction method, as shown in figure 4,
It the described method comprises the following steps:
Step S401, adjustment vibration mirror scanning module are overlapped its coordinate system and the coordinate system of Image Acquisition and processing module；
Vibrating mirror correction plate is set to the working region of vibration mirror scanning module by step S402, is started the vibration mirror scanning module and is pressed
Preset path processes array target；
Step S403 is carried out Image Acquisition to the array target using Image Acquisition and processing module, and is matched using secondary shellfish
The coordinate that your algorithm corrects the array target each point obtains galvanometer compensation file；
The control unit that galvanometer compensation file inputs the vibration mirror scanning module is realized the school to galvanometer by step S404
Just.
In step S401 of the present invention, in order to reduce the error of image acquisition process generation, need whole vibration mirror scanning first
The coordinate system of module is adjusted to be overlapped with the coordinate system of Image Acquisition and processing module.Method particularly includes: utilize special calibrating plate
The vibration mirror scanning module and Image Acquisition and processing module are corrected, the coordinate system deviation of the two, the calibration are reduced
Have the odd number dot battle array (N be greater than 1 odd number) of N × N on plate, can by the vibration mirror scanning module or described image acquisition and
The display end of processing module is overlapped situation to the coordinate of the two and observes, so that the coordinate center to vibration mirror scanning module carries out
Adjustment is overlapped described image acquisition and the cross hairs of processing module and the rectangular lattice direction of the scaling board, and records
A dot corresponds to the pixel millimeter value of the circle of certain radius on scaling board；It crosses in the vibration mirror scanning module display end
Line runs the vibration mirror scanning module and is allowed to get cross line pattern on the scaling board；By adjusting the vibration mirror scanning
Module is allowed to coordinate system and is overlapped with the cross hairs of described image acquisition and processing module, realizes the alignment at the two coordinate center.It will
The scaling board is removed, the operation after carrying out.
In the present invention, the array target can use various shapes, including but not limited to rectangular array, circle
Column, cross array, triangular array, wherein the direction to deviate and size can more directly be calculated using rectangular array, had
X is pointedly adjusted to offset or Y-direction offset.
In the present invention, described image acquisition and analysis module include the figure for being set to vibration mirror scanning module working end
As acquisition unit, the acquisition of image coloured silk can be carried out to the target completed with the mobile mark of vibration mirror scanning module, it is maximum
The time-consuming for having saved to degree Image Acquisition and analysis, improves work efficiency.
A kind of laser index carving galvanometer High-precision correction method provided in an embodiment of the present invention, the present invention using galvanometer by being swept
It retouches module and gets array target on vibrating mirror correction plate, recycle image collecting device to carry out image to the array target and adopt
Collection is handled to obtain galvanometer compensation file to described image, compensates file by the galvanometer, and included soft of galvanometer is input to
The correction of part system realization galvanometer.The present invention realizes the efficient correction of galvanometer, without the survey crew of profession and the survey of valuableness
Measure equipment, high degree of automation.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (9)
1. a kind of laser index carving galvanometer high-precision correction system, which is characterized in that the system comprises:
Vibration mirror scanning module forms array target for controlling laser beam deflection on vibrating mirror correction plate；
The vibrating mirror correction plate, for receiving the irradiation of the laser beam to form the array target；And
Image Acquisition and processing module, for acquiring and handling the image of the target, to obtain the vibration corrected for galvanometer
Mirror compensates file, realizes the correction of galvanometer in the vibration mirror scanning module.
2. a kind of laser index carving galvanometer high-precision correction system as described in claim 1, which is characterized in that the vibration mirror scanning
Module includes:
Control unit, control and machining path setting for each component of vibration mirror scanning module；
Laser light source is connected with described control unit, for generating laser beam, carries out marking to the vibrating mirror correction plate and handles
To the array target；
Galvanometer is connected with described control unit, including X is set to the propagation path of the laser beam to galvanometer and Y-direction galvanometer
On, it is respectively used to adjust the X-direction of the laser beam and the offset of Y-direction；
Focus lamp is set on the propagation path of the laser beam, the focusing for the laser beam.
3. a kind of laser index carving galvanometer high-precision correction system as claimed in claim 2, which is characterized in that the X is to galvanometer
It can be rotated rotating around respective shaft with Y-direction galvanometer, and the shaft of the two is mutually orthogonal in space.
4. a kind of laser index carving galvanometer high-precision correction system as described in claim 1, which is characterized in that described image acquisition
Include: with processing module
Image acquisition units are connected with image processing unit, for acquiring the array target image on the vibrating mirror correction plate simultaneously
It is transferred to described image processing unit；
Described image processing unit, for receiving the image data of described image processing unit transmission, and to described image data
It is handled to obtain the galvanometer compensation file.
5. a kind of laser index carving galvanometer high-precision correction system as claimed in claim 4, which is characterized in that described image acquisition
Unit is set to the working end of the vibration mirror scanning module, as the vibration mirror scanning module is mobile, in the vibration mirror scanning mould
Into Image Acquisition while block progress mark target.
6. a kind of laser index carving galvanometer high-precision correction system as claimed in claim 5, which is characterized in that described image acquisition
Unit is CCD vision camera.
7. a kind of laser index carving galvanometer high-precision correction system as described in claim 1, which is characterized in that the array target
Including rectangular array, circular array, cross array, triangular array.
8. a kind of laser index carving galvanometer high-precision correction system as claimed in claim 4, which is characterized in that described image processing
Unit corrects the coordinate value of consecutive points on the array target by secondary Bayside algorithm.
9. a kind of laser index carving galvanometer High-precision correction method, which is characterized in that the described method comprises the following steps:
Adjustment vibration mirror scanning module is overlapped its coordinate system and the coordinate system of Image Acquisition and processing module；
Vibrating mirror correction plate is set to the working region of the vibration mirror scanning module, starts the vibration mirror scanning module by default road
Diameter processes array target；
Image Acquisition is carried out to the array target using described image acquisition and processing module, and utilizes secondary Bayside algorithm
The coordinate for correcting the array target each point obtains galvanometer compensation file；
The control unit that galvanometer compensation file inputs the vibration mirror scanning module is realized to the correction to galvanometer.
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