CN102136440A - Accurate pointing and sorting unit - Google Patents
Accurate pointing and sorting unit Download PDFInfo
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- CN102136440A CN102136440A CN2010101039886A CN201010103988A CN102136440A CN 102136440 A CN102136440 A CN 102136440A CN 2010101039886 A CN2010101039886 A CN 2010101039886A CN 201010103988 A CN201010103988 A CN 201010103988A CN 102136440 A CN102136440 A CN 102136440A
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- garden
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- sorting unit
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Abstract
The invention discloses an accurate pointing and sorting unit. By adopting the accurate pointing and sorting unit, accurate pointing and sorting flows in a known semiconductor posterior stage process are integrated, wafer processing speed is increased, the problem of sorting misplacement caused by the contraction of a blue membrane is solved, a manual conveying step is eliminated, and the process reliability is improved.
Description
Technical field
The present invention is relevant a kind of semiconductor equipment, particularly surveys about a kind of integration points and the equipment of sorting.
Background technology
In known semiconductor rear section (back-end) technology, some measurement equipment (Prober) and screening installation (Sorter) are separately independently.After the garden sheet machines, be attached to blue film (blue tape) and go up and cut into a plurality of chips.This indigo plant film is fixed in a garden loop (wafer ring) and stretches tight out, and makes each chip on it separated from one another.Then, this garden loop is sent into a measurement equipment via manual or automatic last slice program.The point measurement equipment is done testing electrical property at the chip on this garden loop, and then, the garden loop that test finishes is displaced to screening installation with manual type again.Screening installation arrives the die grading on the loop of garden in the sorting box (bin) of each grade according to test result.For cooperating integrated artistic, the garden loop often will wait the last a few days from leaving a measurement equipment to sending into the screening installation.During this section, the blue film that is strutted can shrink gradually, makes the distributing position of chip change, and therefore misplaces easily when sorting.In addition, artificial careless mistake is also being taken place from this step that a measurement equipment is displaced to screening installation in garden loop easily, the reliability of technology is being worked the mischief in artificial mode.
All the time, process integration all is important developing direction in the semiconductor technology.In the time of in related process is integrated in same system, the garden sheet will be able to promptly processed, so processing speed promotes; And the garden sheet maintains under the vacuum environment automatically and transmits, and avoids being exposed in the air, and the yield of product is improved; The integration of equipment more can make the floor space of equipment reduce.Process integration except for the matter that promotes processing procedure, measure and reduce cost favourable, the flow process after the integration makes the garden sheet must not eliminate the generation of artificial careless mistake with artificial transmission in this segment process.
For solving foregoing problems, the someone proposes the device of a kind of integration points survey and sorting, and Fig. 1 is its schematic diagram.When using the device 10 of this some survey and sorting, after the garden loop loads loop storing district, garden 14, displacement 102 is taken off chip from this garden loop, deliver to transmission region 16, chip in 12 pairs of transmission regions 16 of spot measurement device is done testing electrical property, the chip that tests directly is sorted into sorting box according to the testing electrical property result of this chip from transmission region 16 by displacement 104 again and puts sorting box in the district 18, puts district's 18 dischargings from the sorting box at last.This device has been integrated known point and has been surveyed and sorting process, does not have economic benefit slowly but cross because of processing speed during practical application, and therefore present semiconductor factory still adopts and independently puts measurement equipment and screening installation separately.
Summary of the invention
The objective of the invention is to propose a kind of point and survey and sorting unit, be i.e. the device of integrating semiconductor last part technology mid point survey and sorting flow process.
For achieving the above object, point provided by the invention is surveyed and sorting unit, comprising:
One test section has and a bit surveys device for the chip on the test one garden loop;
One fen constituency has a sorting unit, and the chip on this garden loop is sorted in a plurality of sorting boxes according to test result; And
One conveyer is sent to this minute constituency with this garden loop from this test section.
Described device is arranged at this test section comprising a vision detection system.
Described device is arranged at this minute constituency comprising a vision detection system.
Described device, wherein this conveyer comprises mechanical arm.
Described device, wherein this conveyer comprises plummer start on a slide rail.
Point provided by the invention is surveyed and sorting unit, also comprises:
One filling area is for being written into a garden to be measured loop;
One test section has and a bit surveys device for the chip on this garden to be measured loop of some survey;
One garden loop is put the district, for the garden loop of placing after testing;
One conveyer should be sent to this test section from this filling area by garden to be measured loop, and the garden loop after will testing is sent to this loop storing district, garden;
One sorting box is put the district, for putting the sorting box; And
One sorting unit, this garden loop is put to distinguish the garden loop of chip after test is sorted into the sorting box in this sorting box storing district certainly.
Described device is arranged at this test section comprising a vision detection system.
Described device is arranged at this sorting unit comprising a vision detection system.
Described device is arranged at this garden loop comprising a vision detection system and puts the district.
Described device, comprising a feed arrangement, can ccontaining a plurality of gardens loop, be used for garden to be measured loop is loaded this filling area automatically.
Described device, wherein this conveyer comprises mechanical arm.
Described device, wherein this conveyer comprises plummer start on a slide rail.
The device of integration points survey provided by the invention and sorting, integration points is surveyed and sorting process, lowers the chance of occurrence of artificial careless mistake, promotes the product yield, keeps garden sheet processing speed simultaneously.
Description of drawings
Fig. 1 is the device of known integration points survey and sorting flow process;
Fig. 2 is the calcspar of first embodiment of the invention;
Fig. 3 is the schematic diagram of the embodiment of Fig. 2;
Fig. 4 is the calcspar of second embodiment of the invention; And
Fig. 5 is the schematic diagram of the embodiment of Fig. 4.
Primary clustering symbol description in the accompanying drawing:
Survey and sorting unit 102 displacement, 104 displacement at 10,12 spot measurement devices, 14 garden loops are put district, 16 transmission regions, 18 sorting boxes are put the district, survey and sorting unit 22 conveyers at 20,24 fens constituencies, 242 sorting platforms, 244 garden loop placing platform, 246 sorting units, 26 test sections, 262 spot measurement devices, 264 lining platforms, survey and sorting unit 302 sorting units, 304 conveyers at 30,306 garden loops, 308 feed arrangements, 32 filling areas, 34 test sections, 36 garden loops are put the district, and 38 sorting boxes are put the district.
Embodiment
According to the present invention, a kind of point is surveyed and sorting unit comprises a test section, this test section is provided with a bit surveys device, chip on the one garden loop is tested, garden loop after the test is by a conveyer, this garden loop is sent to one fen constituency from this test section, this minute the constituency have a sorting unit, the chip on this garden loop is sorted in a plurality of sorting boxes according to test result.
According to the present invention, a kind of point is surveyed and sorting unit comprises a filling area, for loading a garden to be measured loop, one test section has a bit surveys device, be used for this garden to be measured loop is tested, one garden loop is put the district, for the garden loop of placing after testing, one conveyer should garden to be measured loop be sent to this test section from this filling area and accepts test, garden loop after will testing again is sent to this garden loop and puts the district, and a sorting unit is sorted into sorting box from this loop storing district, garden with the garden loop of chip after test according to test result and puts the sorting box in district.
Preferable, in some survey of the present invention and sorting unit, a vision detection system is set, to check the outward appearance of tested chip.
Preferable, also comprise a feed arrangement, with the automatic control mode charging.
Below in conjunction with accompanying drawing the present invention is elaborated.
The integrating apparatus of Fig. 1 is tested because of chip has been got one by one, makes processing speed low excessively.The step that mid point of the present invention is surveyed chip changes the whole garden of single treatment sheet into to promote processing speed.
Fig. 2 is the calcspar of first embodiment of the invention, and after some survey and sorting unit 20 were given in garden loop charging to be measured, prior to accepting test in test section 26, conveyer 22 was displaced to branch constituency 24 with the garden loop and does sorting after test finished, last discharging.Present embodiment is that the garden loop is carried out a survey, and in other words, testing electrical property is once done to the chip of whole garden sheet in test section 26, and therefore the speed of test promotes.The garden loop that tests is directly sent into branch constituency 24 and is carried out sorting, so the influence that the shrinkage degree of blue film causes sorting drops to minimum.In the present embodiment, conveyer 22 is realized with mechanical arm or with plummer start on slide rail.
Fig. 3 is the schematic diagram of an entity device, after some survey and sorting unit 20 are given in garden loop charging, on a lining platform 264, accept spot measurement device 262 tests, be sent to garden loop placing platform 244 via conveyer 22 then and accept sorting unit 246 and choose and get, the chip on the loop of garden is displaced in the sorting box of sorting platform 242 by sorting unit 246 according to its grade.In other embodiments, also vision detection system (AOI) can be set on a lining platform, garden loop placing platform or sorting platform, so that check whether the chip outward appearance is complete.
Fig. 4 is the calcspar of second embodiment of the invention, after some survey and sorting unit 30 are given in garden loop charging, be positioned over filling area 32 earlier, conveyer 304 is displaced to test section 34 with the garden loop on the filling area 32, be provided with spot measurement device in the test section 34, chip on the loop of garden is 34 receiving stations survey device to test in the test section, after test finishes, conveyer 304 is displaced to the garden loop garden loop again and puts district 36, the garden loop that sorting unit 302 is put in the district 36 from the garden loop takes off chip, be sorted into the sorting box according to test result and put in the sorting box in district 38, finish sorting step, put district's 38 dischargings by the sorting box at last.In the present embodiment, filling area 32 provides the effect of buffering simultaneously.Preferable, in the test section, the garden loop puts the district or sorting unit is provided with vision detection system, so that check whether the chip outward appearance is complete.The input and output material mode can have various variations, and for example the charging and discharging with garden loop and sorting box all design in filling area, and garden loop and sorting box that sorting finishes all are displaced to filling area and discharging by conveyer 304.In other embodiments, carry out the charging and discharging of garden loop in filling area, the charging and discharging of sorting box are then put the district via the sorting box.
Fig. 5 is the schematic diagram of an entity device, the automatic feeder 308 that is commonly called as the card casket is arranged on the right side of a survey and sorting unit 30, after garden loop 306 is fed to filling area 32 by feed arrangement 308, be transmitted device 304 and got and be displaced to test section 34 receiving stations survey, the garden loop that tests is displaced to the garden loop by conveyer 304 again and puts district 36, sorting unit 302 is for providing the swing arm of pull of vacuum, chip after the garden loop is put garden loop in the district 36 and taken off, is put the sorting box according to the grade of this chip and put in the sorting box in the district 38.In the present embodiment, conveyer 304 is a mechanical arm, and in other embodiments, conveyer 304 can plummer start or the realization of other mechanism on slide rail.
More than illustrate its purpose for being stated as of doing of preferred embodiment of the present invention; be not intended to limit protection scope of the present invention; based on above prompting or to make an amendment or change from embodiments of the invention study be possible; embodiment is for explaining orally principle of the present invention and allow those skilled in the art utilize the present invention to select in practical application with various embodiment and narrate, and technological thought of the present invention is decided by claim scope and the equalization thereof with application.
Claims (12)
1. a point is surveyed and sorting unit, comprising:
One test section has and a bit surveys device for the chip on the test one garden loop;
One fen constituency has a sorting unit, and the chip on this garden loop is sorted in a plurality of sorting boxes according to test result; And
One conveyer is sent to this minute constituency with this garden loop from this test section.
2. device as claimed in claim 1 wherein, comprises that a vision detection system is arranged at this test section.
3. device as claimed in claim 1 wherein, comprises that a vision detection system is arranged at this minute constituency.
4. device as claimed in claim 1, wherein, this conveyer comprises mechanical arm.
5. device as claimed in claim 1, wherein, this conveyer comprises plummer start on a slide rail.
6. a point is surveyed and sorting unit, comprising:
One filling area is for being written into a garden to be measured loop;
One test section has and a bit surveys device for the chip on this garden to be measured loop of some survey;
One garden loop is put the district, for the garden loop of placing after testing;
One conveyer should be sent to this test section from this filling area by garden to be measured loop, and the garden loop after will testing is sent to this loop storing district, garden;
One sorting box is put the district, for putting the sorting box; And
One sorting unit, this garden loop is put to distinguish the garden loop of chip after test is sorted into the sorting box in this sorting box storing district certainly.
7. device as claimed in claim 6 wherein, comprises that a vision detection system is arranged at this test section.
8. device as claimed in claim 6 wherein, comprises that a vision detection system is arranged at this sorting unit.
9. device as claimed in claim 6 wherein, comprises that a vision detection system is arranged at this garden loop and puts the district.
10. device as claimed in claim 6 wherein, comprises a feed arrangement, can ccontaining a plurality of gardens loop, be used for garden to be measured loop is loaded this filling area automatically.
11. device as claimed in claim 6, wherein, this conveyer comprises mechanical arm.
12. device as claimed in claim 6, wherein, this conveyer comprises plummer start on a slide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010103988A CN102136440B (en) | 2010-01-26 | 2010-01-26 | Accurate pointing and sorting unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010103988A CN102136440B (en) | 2010-01-26 | 2010-01-26 | Accurate pointing and sorting unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102136440A true CN102136440A (en) | 2011-07-27 |
| CN102136440B CN102136440B (en) | 2012-10-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010103988A Expired - Fee Related CN102136440B (en) | 2010-01-26 | 2010-01-26 | Accurate pointing and sorting unit |
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| Country | Link |
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| CN (1) | CN102136440B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103567155A (en) * | 2012-07-30 | 2014-02-12 | 三星电子株式会社 | Transfer unit of test handler and method of operating the same |
| CN104576462A (en) * | 2015-01-21 | 2015-04-29 | 太仓思比科微电子技术有限公司 | Visualized automatic blank-jumping wafer picking machine and operating method thereof |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1477690A (en) * | 2002-08-21 | 2004-02-25 | 南茂科技股份有限公司 | Test method of complex semiconductor packaged structure |
| US7345254B2 (en) * | 2003-12-09 | 2008-03-18 | Asm Assembly Automation Ltd. | Die sorting apparatus and method |
| CN100470749C (en) * | 2005-10-24 | 2009-03-18 | 南茂科技股份有限公司 | Crystal wafer testing method and structure of LED |
| CN101241869B (en) * | 2007-02-08 | 2010-06-23 | 鸿劲科技股份有限公司 | Chip testing classifier |
| CN101412027B (en) * | 2007-10-16 | 2012-10-24 | 鸿劲科技股份有限公司 | Automatic testing and sorting machine for wafer |
| CN101593715B (en) * | 2008-05-27 | 2011-05-18 | 旺硅科技股份有限公司 | Full-automatic inlet/outlet device and method thereof |
| CN101540291A (en) * | 2009-03-23 | 2009-09-23 | 常州新区爱立德电子有限公司 | Automatic sorting machine for semiconductor chip |
-
2010
- 2010-01-26 CN CN201010103988A patent/CN102136440B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103567155A (en) * | 2012-07-30 | 2014-02-12 | 三星电子株式会社 | Transfer unit of test handler and method of operating the same |
| US9573235B2 (en) | 2012-07-30 | 2017-02-21 | Samsung Electronics Co., Ltd. | Transfer unit of test handler and method of operating the same |
| CN103567155B (en) * | 2012-07-30 | 2017-09-08 | 三星电子株式会社 | The delivery unit of testing, sorting machine and the method for operating it |
| US10471606B2 (en) | 2012-07-30 | 2019-11-12 | Samsung Electronics Co., Ltd. | Transfer unit of test handler and method of operating the same |
| CN104576462A (en) * | 2015-01-21 | 2015-04-29 | 太仓思比科微电子技术有限公司 | Visualized automatic blank-jumping wafer picking machine and operating method thereof |
| CN104576462B (en) * | 2015-01-21 | 2018-03-02 | 太仓思比科微电子技术有限公司 | The automatic empty wafer of jumping of visualization chooses a machine and its operating method |
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| Publication number | Publication date |
|---|---|
| CN102136440B (en) | 2012-10-10 |
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Granted publication date: 20121010 Termination date: 20200126 |