CN106226676A - A kind of chip parameter test system - Google Patents
A kind of chip parameter test system Download PDFInfo
- Publication number
- CN106226676A CN106226676A CN201610523368.5A CN201610523368A CN106226676A CN 106226676 A CN106226676 A CN 106226676A CN 201610523368 A CN201610523368 A CN 201610523368A CN 106226676 A CN106226676 A CN 106226676A
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- China
- Prior art keywords
- test
- chip
- test section
- connecting gear
- parameter
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Abstract
The invention discloses a kind of chip parameter test system, including: feeding area, including feeding connecting gear；First test section, including entrance, outlet and the first test equipment；Second test section, including entrance, outlet and the second test equipment；Test connecting gear, extends to the outlet of the second test section from the entrance of the first test section；Discharging area, near the outlet of the second test section, and is provided with blanking connecting gear；Robot device, the feeder mechanical arm electrically connected with control station including control station and the blanking machine mechanical arm electrically connected with control station.The first test section and the second test section that chip parameter is tested by this system are arranged at same test system and simultaneously by a manipulator control simultaneously, while chip parameter testing cost is reduced, decrease test period, improve work efficiency, and the test data of two test section gained can be integrated one to one, improve the efficiency analysis of test data.
Description
Technical field
The present invention relates to chip testing technology field, particularly relate to a kind of chip parameter test system.
Background technology
In chip technology field, along with the continuous progress of semiconductor technology, on chip, the dense degree of integrated circuit is more come
The highest so that function and the speed of service of chip are greatly improved, meanwhile, to the testing cost of chip parameter also
More and more higher, in prior art, it is typically based on the different classes of of parameter and chip parameter is separately tested, such as, commonly
Parameter utilizes low side test machine to carry out, and high-grade, precision and advanced parameter utilizes high-end test machine to carry out.
But, this method can make the test period of chip parameter lengthen, and reduces work efficiency, and the number of separately test
Cannot be integrated together one to one according to result, cause the effectiveness of data analysis to decline.
Summary of the invention
The present invention mainly a kind of chip parameter test system, it is intended to solve will join to reduce chip parameter testing cost
Cause test period to lengthen during number separately test, work efficiency drop and test data cannot the problems of confluence analysis.
For solving above-mentioned technical problem, the technical scheme that the present invention uses is: provide a kind of chip test system, should
System includes:
Feeding area, it includes feeding connecting gear, and wherein, described feeding connecting gear receives and transmits from a upper operation
Chip to be measured；
First test section, it includes an inlet and an outlet, and described first test section is provided with the first test equipment；
Second test section, it includes an inlet and an outlet, and described second test section is provided with the second test equipment, its
In, the entrance of described second test section is connected with the outlet of described first test section；
Test connecting gear, extends to the outlet of described second test section from the entrance of described first test section；
Discharging area, near the outlet of described second test section, and described discharging area is provided with blanking connecting gear；
Robot device, comprising:
Control station；
Feeder mechanical arm, electrically connects with described control station, and described feeder mechanical arm according to the control of described control station and
The chip to be measured received by described feeding transfer structure is placed to described test connecting gear, thus utilizes described test to transmit
Described chip to be measured is sequentially delivered to the first test section and described second test section and carries out parameter testing respectively by mechanism；
Blanking machine mechanical arm, electrically connects with described control station, and described blanking machine mechanical arm according to the control of described control station and
Chip after the parameter testing of the first test section and described second test section on described test transfer structure is placed to institute
State on blanking connecting gear.
Wherein, farther including: pallet input/output mechanism, it includes that pallet output connecting gear and pallet input transmit
Mechanism；
And described robot device farther includes pallet mechanical arm；
Wherein, when described feeder mechanical arm, the chip to be measured on described feeding connecting gear is placed to described test transmission
After in mechanism, the pallet being used for placing chip to be measured of residual on described feeding connecting gear is placed extremely by described pallet mechanical arm
Described pallet output connecting gear is to reclaim；And described pallet mechanical arm is further by described pallet input transport mechanism
Transmit the new pallet come to place to described blanking connecting gear to utilize described pallet to be placed through the first test section and institute
State the chip after the parameter testing of the second test section.
Wherein, described test connecting gear includes:
Guide rail, extends to the outlet of described second test section from the entrance of described first test section；
Test delivery platform, is arranged on described guide rail；
Wherein, what described feeding connecting gear was received by described feeder mechanical arm according to the control of described control station is to be measured
Chip is held in place on the described test delivery platform of the porch of described first test section, described test delivery platform along
Described guide rail and described chip to be measured is sequentially delivered to described first test section and described second test section to join respectively
Number test.
Wherein, described chip parameter test system includes multiple described test connecting gear, and the plurality of test transmits
Mechanism is set up in parallel.
Wherein, described blanking connecting gear includes automatic blanking connecting gear and manual blanking connecting gear, wherein, automatically
Blanking connecting gear is qualified for transmitting test result after the parameter testing of the first test section and described second test section
Chip, and described manual blanking connecting gear for transmit through the first test section and the parameter testing of described second test section
Rear test result is underproof chip.
Wherein, described blanking connecting gear includes that multiple described automatic blanking connecting gear and multiple described manual blanking pass
Send mechanism, and the plurality of automatic blanking connecting gear is set up in parallel, and the plurality of manual blanking transfer structure is set up in parallel.
Wherein, it is characterised in that farther include:
At least one preheating plate, the entrance near described first test section is arranged；
Wherein, when described chip to be measured needs first to preheat, described feeder mechanical arm according to the control of described control station and
The chip to be measured that described feeding transfer structure receives first is placed to preheat to described preheating plate, described feeder mechanical arm
Again the chip after preheating is placed to described test connecting gear, thus utilize described test connecting gear by described core to be measured
Sheet is sequentially delivered to the first test section and described second test section and carries out parameter testing respectively.
Wherein, it is characterised in that farther include:
First turntable, is arranged on the porch of described first test section；
Wherein, the position of the parameter testing defined of described first test section is not met when the putting position of described chip to be measured
When putting, described chip to be measured is first placed to described first turntable by described feeder mechanical arm according to the control of described control station
So that the putting position of described chip to be measured meets the regulation of the parameter testing of described first test section, then by described chip to be measured
Place to described test connecting gear with by described first test section.
Wherein, farther include:
Second turntable, is arranged on the porch of described second test section；
Wherein, described second test section is not met when the putting position of the chip after the parameter testing through the first test section
The position of parameter testing defined time, described chip is placed extremely by described feeder mechanical arm according to the control of described control station
So that the putting position of described chip meets the regulation of the parameter testing of described second test section on described second turntable, then will
Described chip is placed to described test connecting gear with by described second test section.
Wherein, farther include:
3rd turntable, is arranged on the exit of described second test section；
Wherein, institute is not met when the putting position of the chip after the parameter testing through the first test section and the second test section
When stating the position of blanking connecting gear defined, described chip is put by described blanking machine mechanical arm according to the control of described control station
Put to the 3rd turntable so that the putting position of described chip meets the regulation of described blanking connecting gear, then by described chip
Place to described blanking connecting gear.
The invention has the beneficial effects as follows: be different from the situation of prior art, the present invention by chip parameter is tested
One test section and the second test section are arranged at same test system and simultaneously by the method for a manipulator control simultaneously so that core
While sheet parameter testing cost reduces, decrease test period, improve work efficiency, and make two test section gained
Test data can be integrated one to one, improves the efficiency analysis of test data.
Accompanying drawing explanation
Fig. 1 is the floor map of chip parameter of the present invention test system first embodiment；
Fig. 2 is that Fig. 1 embodiment electrically connects schematic diagram；
Fig. 3 is the floor map of chip parameter of the present invention test system the second embodiment；
Fig. 4 is that Fig. 3 embodiment electrically connects schematic diagram.
Detailed description of the invention
For making those skilled in the art be more fully understood that technical scheme, below in conjunction with the accompanying drawings and be embodied as
A kind of chip parameter test system provided by the present invention is described in further detail by mode.
Refering to Fig. 1 and Fig. 2, chip parameter of the present invention test system first embodiment includes: the 11, first test section, feeding area
12, the second test section 13, test connecting gear 14, discharging area 15 and robot device 16.
Feeding area 11 is provided with feeding connecting gear 111, and feeding connecting gear 111 receives and transmits treating from a upper operation
Survey chip 112.
First test section 12 includes entrance 121 and outlet 122, and the first test section 12 is provided with the first test equipment 123,
First test equipment 123 can test a part of data of chip 112 parameter to be measured.
Second test section 13 includes entrance 131 and outlet 132, and the second test section 13 is provided with the second test equipment 133,
Second test equipment 133 can test another part data of chip 112 parameter to be measured.
Wherein, a part of data and second of the first test equipment 123 test test another part number of equipment 133 test
According to the partial data and the not superposition mutually that constitute chip parameter；The entrance 131 of the second test section 13 and the outlet of the first test section 12
122 are connected, and chip 112 to be measured can be sent to the second test section 13 from the first test section 12 outlet.
The test connecting gear 14 entrance 121 from the first test section 12 extends to the outlet 132 of the second test section 13, its bag
Including guide rail 141 and test delivery platform 142, test delivery platform 142 is arranged on guide rail 141.Test delivery platform 142 is the
The entrance 121 of one test section 12 receives chip 112 to be measured, and then is sequentially delivered to state along guide rail 141 by chip 112 to be measured
One test section 12 and the second test section 13 are to carry out parameter testing respectively.
Wherein, this chip parameter test system embodiment includes multiple test connecting gear 14, and multiple test conveyer
Structure 14 is set up in parallel.
Discharging area 15 is near the outlet 132 of the second test section 13, and discharging area 15 is provided with blanking connecting gear 151, under
Material connecting gear 151 includes automatic blanking connecting gear 1512 and manual blanking connecting gear 1511.Automatic blanking connecting gear
1512 for transmit after the parameter testing of the first test section 12 and described second test section 13 test result be qualified core
Sheet, and manual blanking connecting gear 1511 is surveyed after the parameter testing of the first test section 12 and the second test section 13 for transmitting
Test result is underproof chip.
Wherein, blanking connecting gear 151 includes multiple automatic blanking connecting gear 1512 and multiple manual blanking conveyer
Structure 1511, and multiple automatic blanking connecting gear 1512 is set up in parallel, multiple manual blanking transfer structure 1511 is set up in parallel.
Robot device 16 includes control station 161, feeder mechanical arm 162, blanking machine mechanical arm 163.
Wherein, feeder mechanical arm 162 electrically connects with control station 161, and feeder mechanical arm 162 is according to the control of control station 161
The chip to be measured 112 made and received by feeding transfer structure 111 is placed to test connecting gear 14, thus utilizes test to transmit
Chip 112 to be measured is sequentially delivered to the first test section 12 by mechanism 14 and the second test section 13 carries out parameter testing respectively；Blanking
Mechanical arm 163 electrically connects with control station 161, and blanking machine mechanical arm 163 will test transfer structure according to the control of control station 161
On 14, the chip 112 after the parameter testing of the first test section 12 and described second test section 13 is placed to blanking connecting gear
On 151.
Further regarding to Fig. 2, the first test equipment 123 electrically connects with control station 161, the second test equipment 133 and control
Platform 161 electrically connects, and control station 161 can concurrently or separately send test signal, and then controls the first test equipment 123 and the second survey
Examination equipment 133 carries out test concurrently or separately to each several part parameter of chip 112 to be measured.
During practical operation, feeding connecting gear 111 receives the chip to be measured 112 from upper one procedure, and control station 16 is controlled
Chip 112 to be measured is placed to test delivery platform 142 by feeder mechanical arm 162 processed, and test delivery platform 142 is at guide rail 141
Upper operation, is sent to the first test section 12 by chip 112 to be measured, and now, control station 161 sends test signal, controls the first survey
A part of parameter of chip 112 to be measured is tested by examination equipment 123, and after being completed, test delivery platform 142 further will
Chip 112 to be measured is sent to the second test section 13, and meanwhile, control station 161 sends test signal, controls the second test equipment 133
Testing another part parameter of chip 112 to be measured, after being completed, control station 161 is to the first test equipment 123 and the
Two data of two test equipment 133 tests carry out integrating, analyzing, and draw the partial data of chip to be measured, and then control station 161
Control blanking machine mechanical arm 163 to place the chip to be measured 112 being completed to automatic blanking connecting gear according to test result
1512 or manual blanking connecting gears 1511.
Being different from prior art, the first test section 12 and the second test section 13 are positioned in same test system by the present invention
Chip 112 parameter to be measured is tested respectively, and is controlled by same mechanical hand 16 so that chip 112 parameter testing to be measured becomes
While this reduction, decrease test period, improve work efficiency, and make the test data of two test section gained can one
Integrate one, improve the efficiency analysis of test data.
Refering to Fig. 3 and Fig. 4, chip parameter of the present invention test system the second embodiment includes: the 21, first test section, feeding area
22, the second test section 23, test connecting gear 24, discharging area 25 and robot device 26, farther include: pallet input and output
Mechanism 27, preheating plate the 28, first turntable the 29, second turntable the 30, the 3rd turntable 31.
Wherein, robot device 26 farther includes pallet mechanical arm 264.
Wherein, the 22, second test section 23, the 21, first test section, feeding area, test connecting gear 24, discharging area 25 and machinery
Arm device 26 is identical with the scheme in chip parameter of the present invention test system first embodiment and principle, and the present embodiment no longer does in detail
Thin description.
Pallet input/output mechanism 27 includes pallet output connecting gear 271 and pallet input transport mechanism 272, works as feeding
After chip to be measured 212 on feeding connecting gear 211 is placed to test connecting gear 24 by mechanical arm 262, pallet mechanical arm
The pallet being used for placing chip 212 to be measured of residual on feeding connecting gear 211 is placed to pallet output connecting gear by 264
271 to reclaim；And the new pallet placement that pallet input transport mechanism 272 is transmitted by pallet mechanical arm 264 further
To blanking connecting gear 251 to utilize pallet to be placed through the parameter testing of the first test section 22 and the second test section 23 after
Chip.
The preheating plate 28 entrance 221 near the first test section 22 is arranged, and quantity is at least one, the present embodiment conceptual scheme
Showing as a example by two, when chip 212 to be measured needs first to preheat, feeder mechanical arm 262 is incited somebody to action according to the control of control station 261
The chip to be measured 212 that feeding transfer structure 211 receives first is placed to preheat to preheating plate 28, and feeder mechanical arm 262 is again
Chip 212 after preheating is placed to test connecting gear 24, thus utilizes test connecting gear 24 to be depended on by chip 212 to be measured
Secondary it is sent to the first test section 22 and the second test section 23 carries out parameter testing respectively.
First turntable 29 is arranged at the entrance 221 of the first test section 22, when the putting position of chip 212 to be measured is not inconsistent
During the position of the parameter testing defined closing the first test section 22, feeder mechanical arm 262 will be treated according to the control of control station 261
Survey chip 212 first to place to the first turntable 29 so that the putting position of chip to be measured 212 meets the parameter of the first test section 22
The regulation of test, then chip 212 to be measured is placed to test connecting gear 24 with by the first test section 22.
Second turntable 30 is arranged at the entrance 231 of the second test section 23, when the parameter through the first test section 22 is surveyed
During the position of the parameter testing defined that the putting position of the chip 212 after examination does not meets the second test section 23, feeder mechanical arm
Chip 212 is placed to the second turntable 30 so that the putting position of chip meets by 262 according to the control of control station 261
The regulation of the parameter testing of two test sections 23, then chip is placed to test connecting gear 24 with by the second test section 23.
3rd turntable 31 is arranged at the outlet 232 of the second test section 23, when surveying through the first test section 22 and second
When the putting position of the chip after the parameter testing in examination district 23 does not meets the position of blanking connecting gear 251 defined, blanking machine
Chip is placed to the 3rd turntable 31 so that the putting position of chip meets by mechanical arm 263 according to the control of control station 261
The regulation of blanking connecting gear 251, then chip is placed to described blanking connecting gear 251.
The foregoing is only embodiments of the invention, not thereby limit the scope of the claims of the present invention, every utilize this
Equivalent structure or equivalence flow process that bright description and accompanying drawing content are made convert, or are directly or indirectly used in other relevant skills
Art field, is the most in like manner included in the scope of patent protection of the present invention.
Claims (10)
1. a chip parameter test system, it is characterised in that including:
Feeding area, is provided with feeding connecting gear in it, wherein, the reception of described feeding connecting gear comes from a upper operation transmission
Chip to be measured；
First test section, it includes an inlet and an outlet, and described first test section is provided with the first test equipment；
Second test section, it includes an inlet and an outlet, and described second test section is provided with the second test equipment, wherein, institute
The outlet of the entrance and described first test section of stating the second test section is connected；
Test connecting gear, extends to the outlet of described second test section from the entrance of described first test section；
Discharging area, near the outlet of described second test section, and described discharging area is provided with blanking connecting gear；
Robot device, comprising:
Control station；
Feeder mechanical arm, electrically connects with described control station, and described feeder mechanical arm is according to the control of described control station and by institute
State on the chip described to be measured placement extremely described test connecting gear that feeding transfer structure receives, thus utilize described test to transmit
Described chip to be measured is sequentially delivered to described first test section and described second test section and carries out parameter testing respectively by mechanism；
Blanking machine mechanical arm, electrically connects with described control station, and described blanking machine mechanical arm is according to the control of described control station and by institute
State chip after the parameter testing of described first test section and described second test section on test transfer structure to place to institute
State on blanking connecting gear.
Chip parameter the most according to claim 1 test system, it is characterised in that farther include: pallet input and output
Mechanism, it includes pallet output connecting gear and pallet input transport mechanism；
And described robot device farther includes pallet mechanical arm；
Wherein, when described feeder mechanical arm, the chip to be measured on described feeding connecting gear is placed to described test connecting gear
After on, the pallet being used for placing described chip to be measured of residual on described feeding connecting gear is placed extremely by described pallet mechanical arm
Described pallet output connecting gear is to reclaim；And described pallet mechanical arm is further by described pallet input transport mechanism
Transmit the new pallet come to place to described blanking connecting gear to utilize described pallet to be placed through the first test section and institute
State the chip after the parameter testing of the second test section.
Chip parameter the most according to claim 1 test system, it is characterised in that described test connecting gear includes:
Guide rail, extends to the outlet of described second test section from the entrance of described first test section；
Test delivery platform, is arranged on described guide rail；
Wherein, the chip to be measured that described feeding connecting gear is received by described feeder mechanical arm according to the control of described control station
On the described test delivery platform of the porch being held in place described first test section, described test delivery platform is along described
Guide rail and described chip to be measured is sequentially delivered to described first test section and described second test section to carry out parameter survey respectively
Examination.
Chip parameter the most according to claim 1 test system, it is characterised in that described chip parameter test system includes
Multiple described test connecting gears, and the plurality of test connecting gear is set up in parallel.
Chip parameter the most according to claim 1 test system, it is characterised in that described blanking connecting gear includes automatically
Blanking connecting gear and manual blanking connecting gear, wherein, described automatic blanking connecting gear is for transmitting through described first
After the parameter testing of test section and described second test section, test result is qualified chip, and described manual blanking connecting gear
It is underproof chip for transmitting test result after the parameter testing of described first test section and described second test section.
Chip parameter the most according to claim 5 test system, it is characterised in that described blanking connecting gear includes multiple
Described automatic blanking connecting gear and multiple described manual blanking connecting gear, and the plurality of automatic blanking connecting gear is arranged side by side
Arrange, and the plurality of manual blanking transfer structure is set up in parallel.
Chip parameter the most according to claim 1 test system, it is characterised in that farther include:
At least one preheating plate, the entrance near described first test section is arranged；
Wherein, when described chip to be measured needs first to preheat, described feeder mechanical arm is according to the control of described control station and by institute
The chip to be measured stating the reception of feeding transfer structure is first placed to preheat to described preheating plate, and described feeder mechanical arm will again
Chip after preheating is placed to described test connecting gear, thus utilizes described test connecting gear to be depended on by described chip to be measured
Secondary described first test section and described second test section of being sent to carries out parameter testing respectively.
Chip parameter the most according to claim 1 test system, it is characterised in that farther include:
First turntable, is arranged on the porch of described first test section；
Wherein, the position of the parameter testing defined of described first test section is not met when the putting position of described chip to be measured
Time, described feeder mechanical arm according to the control of described control station, described chip to be measured is first placed to described first turntable with
The putting position making described chip to be measured meets the regulation of the parameter testing of described first test section, then is put by described chip to be measured
Put to described test connecting gear with by described first test section.
Chip parameter the most according to claim 8 test system, it is characterised in that farther include:
Second turntable, is arranged on the porch of described second test section；
Wherein, the ginseng of described second test section is not met when the putting position of the chip after the parameter testing through the first test section
When number tests the position of defined, described chip is placed to the most described by described feeder mechanical arm according to the control of described control station
So that the putting position of described chip meets the regulation of the parameter testing of described second test section on second turntable, then by described
Chip is placed to described test connecting gear with by described second test section.
Chip parameter the most according to claim 9 test system, it is characterised in that farther include:
3rd turntable, is arranged on the exit of described second test section；
Wherein, when the putting position of the chip after the parameter testing through the first test section and the second test section do not meet described under
When expecting the position of connecting gear defined, described chip is placed extremely by described blanking machine mechanical arm according to the control of described control station
So that the putting position of described chip meets the regulation of described blanking connecting gear on 3rd turntable, more described chip is placed
To described blanking connecting gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610523368.5A CN106226676A (en) | 2016-07-05 | 2016-07-05 | A kind of chip parameter test system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610523368.5A CN106226676A (en) | 2016-07-05 | 2016-07-05 | A kind of chip parameter test system |
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| CN106226676A true CN106226676A (en) | 2016-12-14 |
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| CN201610523368.5A Pending CN106226676A (en) | 2016-07-05 | 2016-07-05 | A kind of chip parameter test system |
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| CN107179493A (en) * | 2017-03-22 | 2017-09-19 | 无锡圆方半导体测试有限公司 | Test erasable all-in-one |
| CN108152704A (en) * | 2017-12-08 | 2018-06-12 | 宁波芯路通讯科技有限公司 | A kind of integrated circuit high/low temperature test device |
| WO2018133014A1 (en) * | 2017-01-19 | 2018-07-26 | 深圳市汇顶科技股份有限公司 | Test device for strip chips |
| CN108957034A (en) * | 2017-05-19 | 2018-12-07 | 亚克先进科技股份有限公司 | Electronic components test system |
| CN112444734A (en) * | 2020-11-26 | 2021-03-05 | 苏州韬盛电子科技有限公司 | Chip testing machine and chip testing method |
| CN113446969A (en) * | 2021-09-01 | 2021-09-28 | 山东铭弘新能源科技有限公司 | Bearing cap automatic line on-line measuring system |
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| CN113446969A (en) * | 2021-09-01 | 2021-09-28 | 山东铭弘新能源科技有限公司 | Bearing cap automatic line on-line measuring system |
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Address after: 226001 Jiangsu Province, Nantong City Chongchuan District, No. 288 Applicant after: Tongfu Microelectronics Co., Ltd. Address before: 226001 Jiangsu Province, Nantong City Chongchuan District, No. 288 Applicant before: Fujitsu Microelectronics Co., Ltd., Nantong |
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Application publication date: 20161214 |