CN102132481B - 等离子功率供给装置 - Google Patents

等离子功率供给装置 Download PDF

Info

Publication number
CN102132481B
CN102132481B CN200880130900.0A CN200880130900A CN102132481B CN 102132481 B CN102132481 B CN 102132481B CN 200880130900 A CN200880130900 A CN 200880130900A CN 102132481 B CN102132481 B CN 102132481B
Authority
CN
China
Prior art keywords
switch element
plasma power
processing apparatus
signal processing
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200880130900.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102132481A (zh
Inventor
T·基希迈尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Huettinger GmbH and Co KG
Original Assignee
Huettinger Elektronik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Elektronik GmbH and Co KG filed Critical Huettinger Elektronik GmbH and Co KG
Publication of CN102132481A publication Critical patent/CN102132481A/zh
Application granted granted Critical
Publication of CN102132481B publication Critical patent/CN102132481B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5383—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a self-oscillating arrangement
    • H02M7/53832—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a self-oscillating arrangement in a push-pull arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H03F3/21—Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
    • H03F3/217—Class D power amplifiers; Switching amplifiers
    • H03F3/2171—Class D power amplifiers; Switching amplifiers with field-effect devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/56—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices
    • H03K17/687—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements, of semiconductor devices the devices being field-effect transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Amplifiers (AREA)
CN200880130900.0A 2008-08-27 2008-08-27 等离子功率供给装置 Expired - Fee Related CN102132481B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2008/006993 WO2010022749A1 (fr) 2008-08-27 2008-08-27 Système d'alimentation en puissance plasma

Publications (2)

Publication Number Publication Date
CN102132481A CN102132481A (zh) 2011-07-20
CN102132481B true CN102132481B (zh) 2014-07-02

Family

ID=40599622

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880130900.0A Expired - Fee Related CN102132481B (zh) 2008-08-27 2008-08-27 等离子功率供给装置

Country Status (3)

Country Link
EP (1) EP2319167A1 (fr)
CN (1) CN102132481B (fr)
WO (1) WO2010022749A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017125548A1 (de) * 2017-11-01 2019-05-02 Sma Solar Technology Ag Schaltungsanordnung und leistungselektronische wandlerschaltung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614998A (en) * 1984-01-11 1986-09-30 Deutsche Thomson Brandt Gmbh DC-AC converter for a load with an inductive component
EP1030541A1 (fr) * 1999-01-19 2000-08-23 MAGNETEK S.p.A. Circuit pour alimenter une charge résonnante
CN1832316A (zh) * 2005-03-08 2006-09-13 索尼株式会社 开关电源电路
US7180758B2 (en) * 1999-07-22 2007-02-20 Mks Instruments, Inc. Class E amplifier with inductive clamp

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5658132A (en) * 1993-10-08 1997-08-19 Sawafuji Electric Co., Ltd. Power supply for vibrating compressors
JP3233138B2 (ja) * 1999-09-27 2001-11-26 松下電器産業株式会社 インバータ回路
US7100532B2 (en) * 2001-10-09 2006-09-05 Plasma Control Systems, Llc Plasma production device and method and RF driver circuit with adjustable duty cycle
US7852471B2 (en) * 2006-05-22 2010-12-14 Varian Australia Pty Ltd Power generator for spectrometry

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4614998A (en) * 1984-01-11 1986-09-30 Deutsche Thomson Brandt Gmbh DC-AC converter for a load with an inductive component
EP1030541A1 (fr) * 1999-01-19 2000-08-23 MAGNETEK S.p.A. Circuit pour alimenter une charge résonnante
US7180758B2 (en) * 1999-07-22 2007-02-20 Mks Instruments, Inc. Class E amplifier with inductive clamp
CN1832316A (zh) * 2005-03-08 2006-09-13 索尼株式会社 开关电源电路

Also Published As

Publication number Publication date
WO2010022749A1 (fr) 2010-03-04
EP2319167A1 (fr) 2011-05-11
CN102132481A (zh) 2011-07-20

Similar Documents

Publication Publication Date Title
US7161818B2 (en) High frequency excitation system
CN103222344B (zh) 高频电源装置
US9762074B2 (en) Method and apparatus for transferring electrical power
EP3001551A1 (fr) Dispositif d'alimentation électrique sans contact
JP6315594B2 (ja) コンバータを制御するための方法
CN103490633B (zh) 开关式电源和用于操作开关式电源的方法
CN108463943A (zh) 同步整流电路的具有死区时间控制的谐振电源转换器
CN102132481B (zh) 等离子功率供给装置
CN102216595A (zh) 用于控制谐振超声压电喷射器的装置和方法
CN103401468A (zh) 一种等离子体起弧电路
JP6580044B2 (ja) フライバック型スイッチング電源回路及びそれを用いたバックライト駆動装置
CN104584405A (zh) 开关控制电路以及开关电源装置
CN105610307B (zh) 一种产生固定负压的功率开关管隔离栅驱动电路
CN106134080A (zh) 电平移位电路
MX2014001358A (es) Circuitos piezotransformadores intrinsecos adaptivos y autonomos.
JP2017054646A (ja) 高周波電源装置、当該高周波電源装置を備えているプラズマ処理システムおよび非接触給電システム
CN105119515B (zh) 电源以及控制电源的方法
CN101893669B (zh) 油浸升压变压器组件的测试方法
JPH06505844A (ja) 大電力スイッチ・モード無線周波増幅の方法及び装置
WO2019176358A1 (fr) Dispositif de réception d'énergie
CN103891122A (zh) 用于机动车的电压转换器
KR102163054B1 (ko) 신호 생성 장치
CN210813569U (zh) 一种超声空化治疗超声驱动电路
CN204216775U (zh) 用于x射线发生器的逆变驱动电路
CN115566523B (zh) 多元电路耦合的激光器电源系统

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140702

Termination date: 20210827