CN102132148A - Defect inspecting system, and defect inspecting method - Google Patents
Defect inspecting system, and defect inspecting method Download PDFInfo
- Publication number
- CN102132148A CN102132148A CN2009801335442A CN200980133544A CN102132148A CN 102132148 A CN102132148 A CN 102132148A CN 2009801335442 A CN2009801335442 A CN 2009801335442A CN 200980133544 A CN200980133544 A CN 200980133544A CN 102132148 A CN102132148 A CN 102132148A
- Authority
- CN
- China
- Prior art keywords
- light
- video camera
- tabular body
- light source
- defective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N2021/8905—Directional selective optics, e.g. slits, spatial filters
Abstract
When a bright-field image is photographed by a first camera with a transmitted light projected from a first linear light source and having passed through a plate member, an optical path shielding member having a knife edge shape is disposed at a position in the optical path of the transmitted light of the first camera and in front of the first camera. The region of a bright portion is searched from the photographed bright-field image by using a signal value higher than that of the background component of the bright-field image, as a threshold value. The region of the bright portion is used, when extracted as a result of the search, to discriminate whether or not a defective region is in the plate member.
Description
Technical field
The present invention relates to defect inspecting system and defect detecting method that the defective that exists in the tabular bodys such as glass plate with transparency is detected.
Background technology
At present, because glass plate is used in electronic equipments such as flat-panel monitor, so the few or complete non-existent glass plates of defective such as the strong request thickness of slab is thin, bubble.
The defectives such as scar on bubble that contains in the glass plate or surface can reduce, but may not remove fully, therefore need the processing that the part that has the glass plate of bubble etc. is removed and so in checking operation.Therefore, proposed to have in the past and various the glass plate made etc. was had the device that the defectives such as bubble that exist in the tabular body of the transparency are checked.
For example, as shown in Figure 6, be provided with than the long linear light source 52 of the width of glass plate G and with the light intensity of regulation in the side of the glass plate G that carries glass plate G is shone, the video camera 54 of the line sensor type by being arranged on opposite side is taken the light field image of the transmitted light that sees through glass plate G, and this image is sent to processing unit 56.Extract the zone that becomes dark portion that comprises in the light field images as defect area by processing unit 56.At this moment, the linear light source 52 that glass substrate G shines is taken for the video camera 54 by the line sensor type, and used the elongated slit that extends along the Width of glass plate G, form almost parallel light.Thus, can detect the defective of the glass plate G of conveying.
On the other hand, in following patent documentation 1, propose to be useful on the defect inspection method that detects the defective in the transparent plate body.In this detection method, luminaire and luminaire that setting is thrown light on subvertical angle with respect to the face of tabular body to throw light near parallel angle, by using the Flame Image Process of the image that described luminaire obtains, and can detect surface and the inner defective that exists at tabular body.
Patent documentation 1: the spy of Japan opens the 2002-214158 communique
Summary of the invention
In defect inspection method that above-mentioned patent documentation 1 is put down in writing or above-mentioned method shown in Figure 6, can't distinguish defective that on the face of glass plate, exists and the defective that exists in inside.In addition, shown in patent documentation 1, when changing means of illumination using two luminaires and taking, can't detect defective from the glass plate of carrying with certain speed on line.Therefore, the problem that can't implement above-mentioned defect inspection method on the manufacturing line of glass plate is arranged.
Therefore, the object of the invention is in order to address the above problem a little, provide a kind of and can differentiate and detect defect inspecting system and the defect detecting method that whether has defective at tabular body efficiently, and provide a kind of manufacture method of having used the tabular body of this inspection method, described defect inspecting system, defect detecting method can be used in the manufacturing line etc. that glass plate etc. has the tabular body of the transparency effectively.
In order to solve above-mentioned problem, the invention provides a kind of defect inspecting system, detect the existing defective of tabular body with transparency, it is characterized in that possessing: first flaw detection apparatus has: first linear light source, to the face projection light of described tabular body; First video camera makes by the transmitted light convergence of described tabular body and takes the light field image; And the light path shielding parts of blade-like, be arranged on the position that is positioned at described first video camera the place ahead in the light path of transmitted light of described first video camera; And treating apparatus, from the light field image that photographs by described first video camera, will be than the signal value of the background composition of light field image high signal value is as threshold value, the zone of the bright portion of search from the light field image, when extracting bright portion regional, use the area judging of this bright portion whether to have defect area at described tabular body as the result of search.
At this moment, preferably, described first light source is a linear light source, be provided with the imaging len of the picture imaging that is used to make tabular body at the front surface of the sensitive surface of described first video camera, set described first light source in the mode that satisfies first condition and second condition, described imaging len and described first video camera, described first condition is: will arrive half angle of extended corner of transmitted light light beam of described first light source of sensitive surface of described first video camera via described imaging len as the illumination light-emitting effective angle from described first light source, half angle of estimating the angle of field range of shadow surface that will arrive described first light source from the position of the sensitive surface of described first video camera via described imaging len is as field angle, and the value of establishing the light emission direction of expressing described first light source is when being α, described field angle multiply by value that the value α of the light emission direction of expressing described first light source obtains greater than 2 with respect to the ratio of described illumination light-emitting effective angle, described second condition is: when having determined blur circle, the area of the part that described blur circle is blocked by described light path shielding parts be described blur circle area 43～57%, described blur circle for the described transmitted light of described light path shielding parts pass through the position and with the face of the light shaft positive cross of described imaging len on form, from the observed field range of described sensitive surface.For example, determine the distance between distance, tabular body and described first light source between the f-number of described first video camera, described first video camera and the tabular body, the luminous width of described first light source in the mode that satisfies described first condition and described second condition.
Especially preferred, so that the photo detector of first video camera disposes first video camera across tabular body over against the mode of first light source.At this, so-called with over against mode dispose and be meant the direction that the photo detector of described first video camera is configured to be positioned at across glass plate G the maximum light intensity of first light source.
In addition, preferably, except that having described first flaw detection apparatus, also has second flaw detection apparatus, this second flaw detection apparatus is for the tabular body of the inspection object that becomes described first flaw detection apparatus, acceptance is checked defective from the illumination light of tabular body reflection, and described second flaw detection apparatus has: secondary light source, to the face irradiating illumination light of tabular body; And second video camera, make illuminated and assemble and take the bright field reflective image from the reflected light of the face outgoing of tabular body, and be arranged on a side identical with described secondary light source when tabular body is observed, described treating apparatus is extracted in the zone of the dark portion the image of tabular body reflection from the bright field reflective image that photographs by described second video camera, in the zone of this dark portion near and during in the face of the portion that states clearly regional, differentiate for having defective at tabular body.
At this moment, preferred, described treating apparatus is based on by the zone of the described dark portion in the image of tabular body reflection and dislocation by the dark portion in the image of the opposing party's of tabular body face reflection, and obtains the positional information of defective of the thickness direction of tabular body.
In addition, preferred, described tabular body is carried to a direction and is moved, and in described first flaw detection apparatus and described second flaw detection apparatus, described first flaw detection apparatus is arranged on the upstream side of described second flaw detection apparatus.Yet described first flaw detection apparatus also can be arranged on the downstream of described second flaw detection apparatus.
At this, preferred, described first flaw detection apparatus and the adjacent setting on throughput direction of described second flaw detection apparatus.This is because the short situation of the distance between described first flaw detection apparatus and described second flaw detection apparatus being compared with long situation, can handle the detection of defective and definite in the shorter time.
In addition, the invention provides a kind of defect detecting method, detection has the existing defective of tabular body of the transparency, it is characterized in that, from the face projection light of first linear light source to described tabular body, transmitted light by described tabular body is assembled when pass through first video camera shooting light field image, the position that is positioned at described first video camera the place ahead in the light path of the transmitted light of described first video camera is provided with the light path shielding parts of blade-like and takes, from the light field image that photographs by described first video camera, will be than the signal value of the background composition of light field image high signal value is as threshold value, the zone of the bright portion of search from the light field image, when extracting bright portion regional, use the area judging of this bright portion that causes anomaly of refraction whether to have defect area at described tabular body as the result of search.
In addition, among the present invention, the thickness of tabular body is not restricted especially, for example, in flat-panel monitor (FPD), can be applicable to that LCD (LCD) purposes and the thickness that comprise thin plate-type are the flat-panel monitor of 0.1～0.7mm, or in plasma display device (PDP) etc., can be applicable to the plasma display device that thickness 1mm is above, for example thickness is that plasma display device or the thickness of 1.8mm are the plasma display device of 2.8mm, but also can be applicable to the glass sheet of building materials purposes and as the manufacturing of the mesomorphic transparent articles of tabular body.
The invention effect
In defect inspecting system of the present invention and defect detecting method, the light path shielding parts of blade-like are set on the position that is positioned at first video camera the place ahead in the light path of the transmitted light of first video camera, from the light field image that photographs by first video camera, will be than the signal value of the background composition of light field image high signal value is as threshold value, from the light field image, extract the zone of bright portion, and the zone of the bright portion that will extract is used in the detection of the defect area that exists in the tabular body, thereby can differentiate expeditiously and detect at tabular body whether have defective.
Especially, by set the optical system of first video camera in the mode that satisfies first condition and second condition, can state portion clearly in the generation effectively on the light field image, this first condition is for multiply by value that the value α (numerical value more than 0 below 1) of the light emission direction of expressing first light source obtains greater than 2 with field angle with respect to the ratio of illumination light-emitting effective angle, this second condition be described blur circle by the light path shielding parts block the area of part be set at described blur circle area 43～57%.Especially first light source by will being used for instrumentation and first video camera be arranged to across glass plate G and over against, and can more effectively carry out defect inspection.
In addition, have: described secondary light source, it is to the face irradiating illumination light of tabular body; Described second video camera, it makes illuminated and assembles and take the bright field reflective image at the reflected light that the reflection of the face of tabular body obtains, and be arranged on a side identical with described secondary light source when tabular body is observed, wherein, described treating apparatus is extracted in the zone of the dark portion the image of face reflection of tabular body from the bright field reflective image that photographs by described second video camera, in the zone of this dark portion near and during in the face of the portion that states clearly regional, based on the dislocation of the mirror image of the real image of defective and defective, and can obtain the positional information of the thickness direction of the defective that is positioned at tabular body.
Description of drawings
Fig. 1 is the figure of brief configuration of an embodiment of explanation defect inspecting system of the present invention and defect detecting method.
Fig. 2 is illumination light-emitting effective angle θ and the field angle in the explanation defect inspecting system of the present invention
Figure.
Fig. 3 is the figure that the α that uses in the defect inspecting system of the present invention is described.
Fig. 4 A is the figure of an example of the schematically illustrated image that obtains by first flaw detection apparatus of the present invention.
Fig. 4 B is the figure of an example of the schematically illustrated image that obtains by the light field image that is produced by common transmitted light.
Fig. 5 A is explanation is used to generate the preferable range of bright portion in first flaw detection apparatus of defective system shown in Figure 1 figure.
Fig. 5 B is explanation is used to generate the preferable range of bright portion in first flaw detection apparatus of defective system shown in Figure 1 figure.
Fig. 6 is the figure that the brief configuration of flaw detection apparatus in the past is described.
Embodiment
Below, based on preferred embodiment shown in the drawings, describe defect inspecting system of the present invention and defect detecting method in detail.
First flaw detection apparatus 12 and second flaw detection apparatus 14 are provided with this from upstream side in proper order along the transport path of glass plate G.Treating apparatus 16 is that the image that obtains by first flaw detection apparatus 12 and second flaw detection apparatus 14 is handled the device that carries out defects detection.
Glass plate G is the sheet material of strip that takes out and form the thickness of regulation from melting furnace, carries on a plurality of driven rollers 18 that are provided with on the transport path.
First flaw detection apparatus 12 is positioned at the upstream of conveyor side of defect inspecting system 10, is the device of checking the defective of glass plate G.
Specifically, first flaw detection apparatus 12 has: first linear light source 20 that the face of glass plate G is shone from driven roller 18 1 sides (downside); Make by the transmitted light of glass plate G and assemble first video camera 22 of taking the light field image; Be arranged on the light path shielding parts 24 of the locational blade-like that is positioned at first video camera, 22 the place aheads in the light path of transmitted light of first linear light source 20.
First linear light source 20 is the led light sources that penetrate almost parallel light, and the exit portal of first linear light source 20 is the wire extension along the Width (the paper vertical direction among Fig. 1) of glass plate G.The exit portal of first linear light source 20 is arranged on apart from the face of the glass plate G position of 100～900mm for example, for example is set at 1～20mm along the width L (with reference to Fig. 2) of the throughput direction of light source.In addition, first linear light source 20 leaves the face of glass plate G and is provided with, do not need high positional precision aspect preferred.The kind of the light in the led light source is not limited especially, preferred use white, but also can be redness, blueness, green etc.Specifically, led light source has: luminous light emitting source (not shown); The light that sends is formed the Fresnel lens (not shown) of almost parallel light; Make the roughly uniform diffuser plate (not shown) of light intensity; The slit plate (not shown) that the outgoing of light is dwindled.Thus, first linear light source 20 sends and has roughly the almost parallel light of light intensity uniformly.In addition, even use Fresnel lens, diffuser plate and slit plate as mentioned above, also may not make light intensity evenly and to make light be directional light, but light intensity has directivity characteristics, light spreads.Consider the directivity characteristics of the light intensity of this moment, establishing the value of expressing directivity characteristics is α.
Light path shielding parts 24 are parts of the blade-like of on from the position that is positioned at first video camera, 22 the place aheads in the light path of the transmitted light of glass G the part of light path being blocked.Fore-end in the light path carries out sharpening in the mode that forms sword.Light path shielding parts 24 are arranged on the position in optical system (imaging len 23) the place ahead of first video camera 22, for example leave the position of 1～5mm.Keep the part of light path shielding parts 24 to be provided with making the light path shielding parts 24 can be in the mode in the crosscut light path along mechanism that directions X moves.At this moment, when having determined blur circle, the area of the part that described blur circle is blocked by light path shielding parts 24 be equivalent to blur circle area 43～57%, preferably roughly be equivalent to 50%, described blur circle be illustrated in light path shielding parts 24 transmitted light pass through the position and with first video camera 22 in the face of light shaft positive cross of imaging len 23 on form, from the observed field range of sensitive surface.Less than 43% o'clock, in the light field image, be difficult to produce bright portion described later, surpass at 57% o'clock, form the dark field image easily.
The scope that this kind blocks light path for example can realize by the distance between adjustment light shielding part 24 and the glass plate G and the f-number of first video camera 22.This be because, be set in this scope by the scope that will block light path, as described later, near by the light field image memory the dark portion that forms of defectives such as bubble the zone and form the zone of bright portion efficiently.
At this moment, preferred, when the value of establishing the light emission direction of expressing first linear light source 20 is α, field angle shown in Figure 2
The value that obtains with respect to the ratio value of multiply by α of illumination light-emitting effective angle θ is greater than 2.Illumination light-emitting effective angle θ is meant from first linear light source 20 half angle via the extended corner of the light beam of transmitted light sensitive surface, first linear light source 20 of the photo detector of imaging len 23 arrival first video camera 22.Field angle
Be meant half angle of estimating the angle of the field range of the shadow surface that arrives first linear light source 20 from the position of the sensitive surface of the photo detector of first video camera 22 via imaging len 23 (using the effective aperture d of lens).
At this, the value α that expresses the light emission direction of first linear light source 20 is meant, as shown in Figure 3, will obtain orientation angles with the direction of the shadow surface quadrature of light source as position angle 0 degree and be the mean value of 1 o'clock relative light intensity along transverse axis along the value that the longitudinal axis is established maximum light intensity.
In addition, as shown in Figure 2, preferably with the photo detector of first video camera 22 across glass plate G and first linear light source 20 over against mode dispose first video camera 22.In addition, the d among Fig. 2 is the effective aperture of imaging len 23, is represented by f/F (f is a focal length, and F is the F value).So, as shown in Figure 2, the illumination light-emitting effective angle θ and the field angle of Shi Yonging in the present invention
Determine by geometry based on the setting of each device or configuration.
By this kind first flaw detection apparatus 12, can easily detect the small defectives such as bubble that exist at glass plate G.
Second flaw detection apparatus 14 has the secondary light source 28 and second video camera 30.Second flaw detection apparatus 14 is with respect to as the inspection object of first flaw detection apparatus and the glass plate G that checks, from a side glass plate is thrown light on, the illumination light that be received in the surface of glass plate G and backside reflection by second video camera 30 this moment is checked the device of defective.
On basis,, by carrying out comprehensive evaluation, and can carry out determining of the defective that exists at glass plate G more reliably with the testing result combination of this second flaw detection apparatus 14 based on the testing result of the first above-mentioned flaw detection apparatus 12.
The image of taking by second video camera 30 be by secondary light source 28 illuminations at the image of the backside reflection of glass G, be the image that the zone of the defective that exists at glass plate G becomes dark portion.Comprise in this image: incide the surface of glass plate G from direction, and after the backside reflection of glass plate G with respect to the face tilt of glass plate G, thus the real image of the defective that the zone of defective forms by this catoptrical light path; The incident light on surface that incides glass plate G from the direction with respect to the surface tilt of glass plate G is after by the zone that is in the defective the light path in the glass plate G, in the backside reflection of glass plate G and the mirror image of the defective that forms.The view data that obtains by second video camera 30 transmits to treating apparatus 16 when reading with wire at every turn.
Treating apparatus 16 is to use the view data that sends from first flaw detection apparatus 12 and second flaw detection apparatus 14, detects the defective of glass plate G, discerns its kind, and the device of the position of definite defective on the thickness direction of glass plate G.Be connected with display 32 on the treating apparatus 16, the position to testing result, recognition result or the defective of the image that obtains by first flaw detection apparatus 12 and second flaw detection apparatus 14, defective in display 32 determines that the result carries out picture and shows.
As mentioned above, the image that obtains by first flaw detection apparatus 12 is the light field image, and the defective of glass plate G occurs as dark portion in image owing to the diffuse reflection of defect area.And, as mentioned above, the light path shielding parts 24 of the blade-like of a part of blocking light path are set in the dead ahead of the optical system of first video camera 22, thus, by these light path shielding parts 24 with near face or joining and the mode in the zone of dark portion in the relative image forms the zone of bright portion.This bright anomaly of refraction owing to the part of defective produces, and compares the brightness height with the background parts of light field image.
Fig. 4 A is the synoptic diagram of an example of the defect image of light path shielding parts 24 when being in the light path.Shown in Fig. 4 A, form near and in the face of the bright portion in the zone of dark portion.With respect to this, Fig. 4 B is the synoptic diagram of an example of the defect image of light path shielding parts 24 when not being present in (not shading light) in the light path.Shown in Fig. 4 B, form near and in the face of the bright portion in the zone of dark portion.In the light field image, shown in Fig. 4 A, bright portion form near and in the face of the zone of dark portion, can think to make the surface formation concaveconvex shape of glass plate G owing to be present in surface or inner bubble or the foreign matter etc. of glass plate G, thereby make the anomaly of refraction of glass plate G the cause of varied slightly occur.In fact, for scar that on the face of glass plate G, produces or the foreign matter that adheres to, do not form the bright portion shown in Fig. 4 A.
Therefore, in the treating apparatus 16, in the light field image, set the high threshold value of value, this extracted region more than threshold value is gone out zone as bright portion than the view data of the background parts in the light field image.
In addition, the view data of sending from first video camera 22 is the view data of the one dimension that read by line sensor type video camera by checking the position, therefore in treating apparatus 16, accumulate the view data of many lines (for example 500 lines) and after obtaining the image in certain face zone, state the extraction in the zone of portion on beginning clearly.During the defect area that exists in detecting glass plate G, the positional information in the zone of the bright portion of this extraction is as described below to be used.
The view data that is obtained and sent to treating apparatus 16 by second flaw detection apparatus 14 is the data of bright field reflective image, is the image that the part of defective becomes the zone of dark portion.As mentioned above, the real image of defective and mirror image occur as dark portion.According to the position of the thickness direction of the existing glass plate G of the defective of glass plate G, the real image of defective and mirror image produce dislocation.For example, when defective was positioned near the back side of glass plate G, the magnitude of misalignment of real image and mirror image reduced, when defective is positioned near surface, and the increase of the magnitude of misalignment of real image and mirror image.
Therefore, the information in the zone of the bright portion for the treatment of apparatus 16 use said extracted is determined the position of defective at the Width of glass plate G.In addition, use the position of this Width, the time offset that the image at same position between the image that obtains based on the image that is obtained by first flaw detection apparatus 12 and by second flaw detection apparatus 14, glass plate G occurs, and detect the zone of the dark portion of the real image of the defective that obtains by second video camera 30 and mirror image.Because the instrumentation position of first flaw detection apparatus 12 and the instrumentation position of second flaw detection apparatus 14 are known in the transporting velocity of leaving distance and glass G of throughput direction, therefore can obtain above-mentioned time offset by these information.
The extraction in the zone of dark portion uses pre-set threshold to carry out.
Next, obtain the magnitude of misalignment of the center of the center of this real image and mirror image, calculate the position of defective at the thickness direction of glass plate G based on this magnitude of misalignment.
In addition, treating apparatus 16 uses the real image of the defective that is obtained by second video camera 30 and obtains the size in the zone of dark portion, according to the size in this zone, infers the size of defective.In addition, treating apparatus 16 with based on state clearly portion the zone information processing independently, do not use the information in the zone of the portion of stating clearly, and use pre-set threshold to extract the zone of dark portion.
The information in the zone of the dark portion that treating apparatus 16 uses are extracted and the zone of bright portion, the zone of using the zone of bright portion and dark portion whether near and the size of the defective that the defective that exists among the glass plate G that face, calculate is obtained in the position of thickness direction, according to the zone of the dark portion that extracts and the characteristic quantity of defective, and the kind of definite defective.Preferably, the shape of the zone by bright from the light field transmission image and dark portion and the regional defect recognition of the dark portion in the bright field reflective image, and the kind of distinguishing the defective for example defective that causes of bubble, defective that foreign matter causes or scar etc. and infer.
Be in defectives such as foreign matter on the face of glass plate G or scar and the light field image that obtains from first flaw detection apparatus 12, do not form bright portion.
In addition, in first flaw detection apparatus 12, for make in the light field image near and in the face of bright of the dark portion zone of defective effectively occurs, preferably satisfy following condition.
Promptly, in the configuration of each several part shown in Figure 2, set the distance between distance, glass plate G and first linear light source 20 between first video camera 22 and the glass plate G, the irradiating width L of first linear light source in the mode that satisfies first condition, this first condition is: field angle
The value that obtains with respect to the ratio value of multiply by α of illumination light-emitting effective angle θ is greater than 2.
In addition, set the f-number of first video camera 22 and the distance between first video camera 22 and the glass plate G in the mode that satisfies second condition, this second condition is: when having determined blur circle, the area of the part that blur circle is blocked by light path shielding parts 24 be blur circle area 43～57%, described blur circle determine the allocation position of light path shielding parts 24 and with the face of the light shaft positive cross of imaging len 23 on form, from the edge of the observed field range of sensitive surface.
In addition, the mode of direction that is positioned at the maximum light intensity of first linear light source 20 across glass plate G with the photo detector of first video camera 22 disposes first video camera 22.
By dispose each device in the mode that satisfies these three conditions, state portion clearly and can in the light field image, produce effectively.
In addition, by reducing the F value, the subject depth of focus in the shooting shoals, and can produce image and lose burnt unfavorable condition easily.Therefore, in order to extract bright portion efficiently, preferred F5.6～F11, in the scope of the width L1～20mm of the luminous component 34 of first video camera 20, the value that the preferred above-mentioned ratio value of multiply by α obtains is greater than 2.
In the table shown in Fig. 5 A and the 5B, the width L of luminous component 34 that first video camera 20 is shown is by the numerical value of the illumination light-emitting effective angle θ of L=1mm, 3mm, 4mm, 5mm, 7mm decision and the field angle that is determined by F value
Value, in the hurdle of the correspondence of each table,
The expression comprise first light source 20 α value and carry out the value that multiplying obtains.In the scope of being surrounded by thick frame in the table shown in Fig. 5 A and the 5B, value α is roughly at 1 o'clock, shown in Fig. 4 A
Value greater than under 2 the condition, confirmed the situation that bright portion occurs effectively.Thus, we can say that the value α of first linear light source 20 has been during less than 1 (having considered light emission direction),
Under 2 condition, bright portion occurs effectively.
In addition, the distance between the surface of the imaging len 23 of the setting glass plate G and first video camera 22 is 380mm.Illumination WD from the shadow surface of first linear light source 20 to the instrumentation position of glass plate G is 200mm among Fig. 5 A, is 400mm in Fig. 5 B.The area of the part that the blur circle of setting this moment is blocked by light path shielding parts 24 be blur circle area 50%.
In this kind defect inspecting system 10, take the defective of missing in the automatic defect inspection in the past of method except being extracted in accurately directional light to be shone sideling be similar to striped to glass plate G, can also distinguish the defective of the glass plate G that can't repair, be effective in these areas.Thus, can avoid the defect part that to repair and glass plate G is cut out the size of regulation.
More than, understand defect inspecting system of the present invention and defect detecting method in detail, but the present invention is not limited to above-mentioned embodiment or embodiment, and in the scope that does not break away from purport of the present invention, can certainly carries out various improvement or change.
At length and with reference to specific embodiment the present invention has been described, but those skilled in the art do not break away from the spirit and scope of the present invention as can be known and can apply various changes or correction.The application is based on the Japanese patent application (Japanese Patent Application 2008-215091) that proposed on August 25th, 2008, and as with reference to and its content is included in this.
Label declaration
10 defect inspecting systems
12 first flaw detection apparatus
14 second flaw detection apparatus
16 treating apparatus
18 driven rollers
20 first linear light sources
22 first video cameras
23 imaging lens
24 light path shielding parts
28 secondary light sources
30 second video cameras
32 displays
34 luminous components
Claims (6)
1. a defect inspecting system detects the existing defective of tabular body with transparency, it is characterized in that possessing:
First flaw detection apparatus has:
First light source is to the face projection light of described tabular body;
First video camera makes by the transmitted light convergence of described tabular body and takes the light field image; And
The light path shielding parts of blade-like are arranged on the position that is positioned at described first video camera the place ahead in the light path of transmitted light of described first video camera; And
Treating apparatus, from the light field image that photographs by described first video camera, will be than the signal value of the background composition of light field image high signal value is as threshold value, the zone of the bright portion of search from the light field image, when extracting bright portion regional, use the area judging of this bright portion whether to have defect area at described tabular body as the result of search.
2. defect inspecting system according to claim 1, wherein,
Described first light source is a linear light source,
Be provided with the imaging len of the picture imaging that is used to make tabular body at the front surface of the sensitive surface of described first video camera,
Set described first light source, described imaging len and described first video camera in the mode that satisfies first condition and second condition,
Described first condition is: will arrive half angle of extended corner of transmitted light light beam of described first light source of sensitive surface of described first video camera via described imaging len as the illumination light-emitting effective angle from described first light source, half angle of estimating the angle of field range of shadow surface that will arrive described first light source from the position of the sensitive surface of described first video camera via described imaging len is as field angle, and the value of establishing the light emission direction of expressing described first light source is when being α, described field angle multiply by value that the value α of the light emission direction of expressing described first light source obtains greater than 2 with respect to the ratio of described illumination light-emitting effective angle
Described second condition is: when having determined blur circle, the area of the part that described blur circle is blocked by described light path shielding parts be described blur circle area 43～57%, described blur circle for the described transmitted light of described light path shielding parts pass through the position and with the face of the light shaft positive cross of described imaging len on form, from the observed field range of described sensitive surface.
3. defect inspecting system according to claim 1, wherein,
Except that having described first flaw detection apparatus, also have second flaw detection apparatus, this second flaw detection apparatus is for the tabular body of the inspection object that becomes described first flaw detection apparatus, accepts to check defective from the illumination light of tabular body reflection,
Described second flaw detection apparatus has:
Secondary light source is to the face irradiating illumination light of tabular body; And
Second video camera makes illuminated and assembles and take the bright field reflective image at the reflected light that the reflection of the face of tabular body obtains, and is arranged on a side identical with described secondary light source when tabular body is observed,
Described treating apparatus is extracted in the zone of the dark portion the image of tabular body reflection from the bright field reflective image that photographs by described second video camera, in the zone of this dark portion near and during in the face of the portion that states clearly regional, differentiate for having defective at tabular body.
4. defect inspecting system according to claim 3, wherein,
Described treating apparatus is obtained the positional information of the thickness direction of the defective that is positioned at tabular body based on the dislocation between the mirror image of the real image of the defective that forms as the picture of defective and defective in described bright field reflective image.
5. defect inspecting system according to claim 1, wherein,
Described tabular body is carried to a direction and is moved,
In described first flaw detection apparatus and described second flaw detection apparatus, described first flaw detection apparatus is arranged on the upstream side of described second flaw detection apparatus.
6. a defect detecting method detects the existing defective of tabular body with transparency, it is characterized in that,
From the face projection light of first linear light source to described tabular body, the transmitted light by described tabular body is assembled when pass through first video camera shooting light field image,
The position that is positioned at described first video camera the place ahead in the light path of the transmitted light of described first video camera is provided with the light path shielding parts of blade-like and takes,
From the light field image that photographs by described first video camera, will be than the signal value of the background composition of light field image high signal value is as threshold value, the zone of the bright portion of search from the light field image, when extracting bright portion regional, use the area judging of this bright portion whether to have defect area at described tabular body as the result of search.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008215091A JP2010048745A (en) | 2008-08-25 | 2008-08-25 | Defect inspection system and defect inspection method |
| JP2008-215091 | 2008-08-25 | ||
| PCT/JP2009/063445 WO2010024082A1 (en) | 2008-08-25 | 2009-07-28 | Defect inspecting system, and defect inspecting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102132148A true CN102132148A (en) | 2011-07-20 |
| CN102132148B CN102132148B (en) | 2012-12-12 |
Family
ID=41721254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801335442A Active CN102132148B (en) | 2008-08-25 | 2009-07-28 | Defect inspecting system, and defect inspecting method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2010048745A (en) |
| KR (1) | KR20110058784A (en) |
| CN (1) | CN102132148B (en) |
| TW (1) | TW201009324A (en) |
| WO (1) | WO2010024082A1 (en) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103175569A (en) * | 2011-12-21 | 2013-06-26 | 北京兆维电子(集团)有限责任公司 | Acquiring device for single-light-source dual cameras |
| CN103995003A (en) * | 2013-02-15 | 2014-08-20 | 大日本网屏制造株式会社 | Film detection apparatus, inspection system, and method of inspecting printed circuit board |
| CN105372267A (en) * | 2014-08-11 | 2016-03-02 | 东京威尔斯股份有限公司 | Device and method for inspecting appearance of transparent substrate |
| CN106198550A (en) * | 2015-06-01 | 2016-12-07 | 赫伯特坎尼吉塞尔有限公司 | For the method checking medicated clothing that is cleaned or that cleaned |
| CN106248684A (en) * | 2015-06-03 | 2016-12-21 | 法国圣戈班玻璃公司 | For detecting Optical devices and the method for the internal flaw of transparent substrates |
| CN106932406A (en) * | 2017-04-28 | 2017-07-07 | 许迪 | A kind of device for detecting transparent substance defect |
| CN107014826A (en) * | 2017-04-12 | 2017-08-04 | 武汉华星光电技术有限公司 | CF substrate micro examination machines |
| CN107289878A (en) * | 2016-04-13 | 2017-10-24 | 旭硝子株式会社 | The manufacture method of transparent panel surface examining device, transparent panel surface inspecting method and glass plate |
| CN108169240A (en) * | 2017-12-28 | 2018-06-15 | 湖南文理学院 | Nickel foam surface defect detection apparatus |
| CN109564085A (en) * | 2016-09-07 | 2019-04-02 | 株式会社斯巴鲁 | Damage detection system and damage detecting method |
| CN109564169A (en) * | 2016-07-06 | 2019-04-02 | 蒂阿马公司 | Determine the inspection method, check device and inspection line of the crimping on the inward flange of ring surface |
| CN109709106A (en) * | 2017-10-26 | 2019-05-03 | 海因里希·格奥尔格机械制造有限公司 | Inspection system and method for analyzing defect |
| CN110036281A (en) * | 2017-01-06 | 2019-07-19 | 日本电气硝子株式会社 | The inspection method and its manufacturing method of glass plate and the check device of glass plate |
| CN110267893A (en) * | 2017-02-09 | 2019-09-20 | 玻璃技术公司 | The system and correlation technique of optical characteristics for on-line measurement glass plate |
| CN112492887A (en) * | 2019-06-21 | 2021-03-12 | 东洋玻璃株式会社 | Method for inspecting glass bottle and method for manufacturing glass bottle |
| CN112888531A (en) * | 2018-12-11 | 2021-06-01 | 本田技研工业株式会社 | Workpiece inspection apparatus and workpiece inspection method |
| CN113015901A (en) * | 2018-11-21 | 2021-06-22 | 日本电气硝子株式会社 | Method for producing glass plate and apparatus for producing glass plate |
| CN113263260A (en) * | 2020-02-17 | 2021-08-17 | 三星Sdi株式会社 | Laser welding method and monitoring system for secondary battery |
| US11333617B2 (en) | 2018-01-05 | 2022-05-17 | Tiama | Method, device and inspection line for determining the three-dimensional geometry of a container ring surface |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101198406B1 (en) | 2010-04-21 | 2012-11-07 | (주)에이앤아이 | Pattern inspection device |
| JP5881278B2 (en) * | 2010-05-20 | 2016-03-09 | 株式会社プレックス | Cloth piece inspection apparatus and inspection method |
| WO2012093633A1 (en) * | 2011-01-06 | 2012-07-12 | 日本電気硝子株式会社 | Method for inspecting glass substrate for flat panel display, and glass substrate for flat panel display |
| KR101745883B1 (en) | 2011-03-16 | 2017-06-12 | 해성디에스 주식회사 | Apparatus and method for inspecting printed circuit boards |
| JP5935266B2 (en) * | 2011-09-01 | 2016-06-15 | 東レ株式会社 | Scratch defect inspection method and sheet manufacturing method |
| CN103907013B (en) * | 2011-11-09 | 2016-12-28 | 株式会社久保田 | Coccoid checks device |
| KR101409217B1 (en) * | 2012-02-27 | 2014-06-20 | 엘아이지에이디피 주식회사 | Inspection apparatus and inspection method of attached substrate |
| JP5966704B2 (en) * | 2012-07-11 | 2016-08-10 | 株式会社島津製作所 | Substrate inspection device and transmission illumination device for substrate inspection device |
| KR101387090B1 (en) * | 2012-10-24 | 2014-04-21 | 길기재 | Detection apparatus and method for surface of transparent body |
| CN103630544B (en) * | 2013-11-07 | 2016-09-14 | 江苏大学 | A kind of vision on-line detecting system |
| CN105241891A (en) * | 2015-08-27 | 2016-01-13 | 任红霞 | Glass defect detection method based on WIFI network |
| CN105091764A (en) * | 2015-09-06 | 2015-11-25 | 苏州南光电子科技有限公司 | Measurement method of laser and CCD-based glass thickness measurement system |
| CN107247059B (en) * | 2017-06-09 | 2020-05-01 | 华北电力大学（保定） | Insulator fault detection device and method based on air thermal schlieren distribution |
| US11060980B2 (en) * | 2017-11-29 | 2021-07-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Broadband wafer defect detection |
| CN108267460A (en) * | 2018-02-26 | 2018-07-10 | 湖南科创信息技术股份有限公司 | For the matrix form vision detection system and method for transparent material defects detection |
| KR102030014B1 (en) * | 2018-03-26 | 2019-11-08 | 제이티웨이 주식회사 | Inspection system for lens product and method for inspecting lens product |
| KR102181637B1 (en) * | 2018-05-24 | 2020-11-23 | (주)쎄미시스코 | Target edge defect inspection system and method |
| CN108872246A (en) * | 2018-05-29 | 2018-11-23 | 湖南科创信息技术股份有限公司 | Face sheet material regards planar defect detection system entirely |
| CN109682836A (en) * | 2019-01-29 | 2019-04-26 | 安徽利珀科技有限公司 | A kind of defect detecting device |
| TWI699465B (en) * | 2019-05-16 | 2020-07-21 | 亞亞科技股份有限公司 | Wafer inner and outer layer imaging device |
| JP2021004769A (en) * | 2019-06-25 | 2021-01-14 | 住友金属鉱山株式会社 | Inspection apparatus of substrate and inspection method of substrate |
| CN111351795A (en) * | 2020-02-27 | 2020-06-30 | 杨孝兰 | Mirror surface object and transparent object detection method based on special structured light |
| KR20230034023A (en) | 2021-09-02 | 2023-03-09 | 박노진 | Optical image extraction device and diagonal optical instrument for image extraction device and straight optical instrument for optical image extraction device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007024733A (en) * | 2005-07-19 | 2007-02-01 | Hitachi High-Technologies Corp | Substrate inspection device and substrate inspection method |
| KR20070084169A (en) * | 2004-11-24 | 2007-08-24 | 아사히 가라스 가부시키가이샤 | Method and device for inspecting defect of transparent plate body |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3480176B2 (en) * | 1996-03-18 | 2003-12-15 | 日立電子エンジニアリング株式会社 | Glass substrate front / back defect identification method |
| JPH11316195A (en) * | 1998-04-30 | 1999-11-16 | Asahi Glass Co Ltd | Surface defect detecting device of transparent plate |
| JP2001141662A (en) * | 1999-11-18 | 2001-05-25 | Central Glass Co Ltd | Method and apparatus for detecting flaw of transparent plate-shaped object |
| WO2003005007A1 (en) * | 2001-07-05 | 2003-01-16 | Nippon Sheet Glass Co., Ltd. | Method and device for inspecting defect of sheet-shaped transparent body |
| JP2005049291A (en) * | 2003-07-31 | 2005-02-24 | Nippon Sheet Glass Co Ltd | Device and method for detecting micro-defect having light converging action for transparent plate |
| JP4362335B2 (en) * | 2003-08-27 | 2009-11-11 | エスペックテクノ株式会社 | Inspection device |
| JP2008536127A (en) * | 2005-04-06 | 2008-09-04 | コーニング インコーポレイテッド | Glass inspection apparatus and method of use thereof |
-
2008
- 2008-08-25 JP JP2008215091A patent/JP2010048745A/en not_active Withdrawn
-
2009
- 2009-07-28 WO PCT/JP2009/063445 patent/WO2010024082A1/en active Application Filing
- 2009-07-28 KR KR1020117004448A patent/KR20110058784A/en not_active Application Discontinuation
- 2009-07-28 CN CN2009801335442A patent/CN102132148B/en active Active
- 2009-07-31 TW TW098125949A patent/TW201009324A/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070084169A (en) * | 2004-11-24 | 2007-08-24 | 아사히 가라스 가부시키가이샤 | Method and device for inspecting defect of transparent plate body |
| JP2007024733A (en) * | 2005-07-19 | 2007-02-01 | Hitachi High-Technologies Corp | Substrate inspection device and substrate inspection method |
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103175569B (en) * | 2011-12-21 | 2015-07-15 | 北京兆维电子(集团)有限责任公司 | Acquiring device for single-light-source dual cameras |
| CN103175569A (en) * | 2011-12-21 | 2013-06-26 | 北京兆维电子(集团)有限责任公司 | Acquiring device for single-light-source dual cameras |
| CN103995003B (en) * | 2013-02-15 | 2017-04-19 | 斯克林集团公司 | Film detection apparatus, inspection system, and method of inspecting printed circuit board |
| CN103995003A (en) * | 2013-02-15 | 2014-08-20 | 大日本网屏制造株式会社 | Film detection apparatus, inspection system, and method of inspecting printed circuit board |
| CN105372267A (en) * | 2014-08-11 | 2016-03-02 | 东京威尔斯股份有限公司 | Device and method for inspecting appearance of transparent substrate |
| CN105372267B (en) * | 2014-08-11 | 2018-03-23 | 东京威尔斯股份有限公司 | The appearance inspection device and appearance inspection method of transparency carrier |
| CN106198550A (en) * | 2015-06-01 | 2016-12-07 | 赫伯特坎尼吉塞尔有限公司 | For the method checking medicated clothing that is cleaned or that cleaned |
| CN106248684A (en) * | 2015-06-03 | 2016-12-21 | 法国圣戈班玻璃公司 | For detecting Optical devices and the method for the internal flaw of transparent substrates |
| CN106248684B (en) * | 2015-06-03 | 2019-12-17 | 法国圣戈班玻璃公司 | Optical device and method for detecting internal defects of transparent substrate |
| CN107289878A (en) * | 2016-04-13 | 2017-10-24 | 旭硝子株式会社 | The manufacture method of transparent panel surface examining device, transparent panel surface inspecting method and glass plate |
| CN109564169B (en) * | 2016-07-06 | 2022-07-19 | 蒂阿马公司 | Inspection method, inspection device and inspection line for determining a curl on an inner edge of a ring surface |
| US11460414B2 (en) | 2016-07-06 | 2022-10-04 | Tiama | Process, device and line of inspection for determination of a wire-edge at the site of an internal edge of a ring surface |
| CN109564169A (en) * | 2016-07-06 | 2019-04-02 | 蒂阿马公司 | Determine the inspection method, check device and inspection line of the crimping on the inward flange of ring surface |
| CN109564085A (en) * | 2016-09-07 | 2019-04-02 | 株式会社斯巴鲁 | Damage detection system and damage detecting method |
| CN110036281A (en) * | 2017-01-06 | 2019-07-19 | 日本电气硝子株式会社 | The inspection method and its manufacturing method of glass plate and the check device of glass plate |
| CN110267893B (en) * | 2017-02-09 | 2022-05-13 | 玻璃技术公司 | System for on-line measurement of optical properties of glass sheets and related method |
| CN110267893A (en) * | 2017-02-09 | 2019-09-20 | 玻璃技术公司 | The system and correlation technique of optical characteristics for on-line measurement glass plate |
| CN107014826A (en) * | 2017-04-12 | 2017-08-04 | 武汉华星光电技术有限公司 | CF substrate micro examination machines |
| CN106932406A (en) * | 2017-04-28 | 2017-07-07 | 许迪 | A kind of device for detecting transparent substance defect |
| CN109709106A (en) * | 2017-10-26 | 2019-05-03 | 海因里希·格奥尔格机械制造有限公司 | Inspection system and method for analyzing defect |
| CN109709106B (en) * | 2017-10-26 | 2023-09-19 | 海因里希·格奥尔格机械制造有限公司 | Inspection system and method for analyzing defects |
| CN108169240A (en) * | 2017-12-28 | 2018-06-15 | 湖南文理学院 | Nickel foam surface defect detection apparatus |
| US11333617B2 (en) | 2018-01-05 | 2022-05-17 | Tiama | Method, device and inspection line for determining the three-dimensional geometry of a container ring surface |
| CN113015901A (en) * | 2018-11-21 | 2021-06-22 | 日本电气硝子株式会社 | Method for producing glass plate and apparatus for producing glass plate |
| CN112888531A (en) * | 2018-12-11 | 2021-06-01 | 本田技研工业株式会社 | Workpiece inspection apparatus and workpiece inspection method |
| CN112492887A (en) * | 2019-06-21 | 2021-03-12 | 东洋玻璃株式会社 | Method for inspecting glass bottle and method for manufacturing glass bottle |
| CN113263260A (en) * | 2020-02-17 | 2021-08-17 | 三星Sdi株式会社 | Laser welding method and monitoring system for secondary battery |
| US11897054B2 (en) | 2020-02-17 | 2024-02-13 | Samsung Sdi Co., Ltd. | Laser welding method and monitoring method for secondary battery |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102132148B (en) | 2012-12-12 |
| JP2010048745A (en) | 2010-03-04 |
| KR20110058784A (en) | 2011-06-01 |
| TW201009324A (en) | 2010-03-01 |
| WO2010024082A1 (en) | 2010-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102132148B (en) | Defect inspecting system, and defect inspecting method | |
| KR101324015B1 (en) | Apparatus and method for detecting the surface defect of the glass substrate | |
| JP5909751B2 (en) | Flat glass foreign matter inspection apparatus and inspection method | |
| JP4511978B2 (en) | Surface flaw inspection device | |
| KR20160078211A (en) | Transmission Type Defect Detecting Device and Defect Detecting Method | |
| TW201502498A (en) | Inspection system | |
| KR20160047360A (en) | System and method for defect detection | |
| US10345248B2 (en) | Optical system and method for inspecting a transparent plate | |
| JP2015040835A (en) | Defect inspection device and defect inspection method for transparent tabular body | |
| JP2011085520A (en) | Defect discrimination device, defect discrimination method, and sheet-like material | |
| WO2012105449A1 (en) | System for inspecting light transmitting board-like material | |
| CN111504459B (en) | Detection device for ceramic tile grading and color separation | |
| JP4362335B2 (en) | Inspection device | |
| JP2009216628A (en) | Defect detector and defect detection method | |
| KR102162693B1 (en) | System and method for defect detection | |
| JP2013246059A (en) | Defect inspection apparatus and defect inspection method | |
| KR102045818B1 (en) | Transmissive optical inspection device and method of detecting defect using the same | |
| JP2010223598A (en) | Flaw inspection device for sheet-like article | |
| JP2016125817A (en) | Inspection system, and inspection method | |
| TWI819285B (en) | Inspection device of transmission optical system | |
| WO2011101893A1 (en) | Method and device for detecting flaw on surface of flexible object to be tested | |
| TW201915481A (en) | Damage inspection method of optical display panel | |
| JP2016099314A (en) | Inspection system and inspection method | |
| TWM497271U (en) | Substrate defect inspection device for detecting substrate | |
| JP2005127747A (en) | Method and apparatus for inspecting surface defect in plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: AGC Corporation Address before: Tokyo, Japan Patentee before: Asahi Glass Co., Ltd. |