CN102103979A - 一种制作利用硅通孔构成的三维硅基无源电路的方法 - Google Patents
一种制作利用硅通孔构成的三维硅基无源电路的方法 Download PDFInfo
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- CN102103979A CN102103979A CN 200910242759 CN200910242759A CN102103979A CN 102103979 A CN102103979 A CN 102103979A CN 200910242759 CN200910242759 CN 200910242759 CN 200910242759 A CN200910242759 A CN 200910242759A CN 102103979 A CN102103979 A CN 102103979A
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052802 copper Inorganic materials 0.000 claims abstract description 22
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- 239000003990 capacitor Substances 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 73
- 239000000377 silicon dioxide Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 20
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- 238000005229 chemical vapour deposition Methods 0.000 claims description 16
- 239000000615 nonconductor Substances 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
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- 238000007747 plating Methods 0.000 claims description 5
- 238000000992 sputter etching Methods 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
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- 239000004065 semiconductor Substances 0.000 description 10
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- 238000005538 encapsulation Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
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- 241000790917 Dioxys <bee> Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
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- 230000004044 response Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Abstract
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CN 200910242759 CN102103979B (zh) | 2009-12-16 | 2009-12-16 | 一种制作利用硅通孔构成的三维硅基无源电路的方法 |
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CN 200910242759 CN102103979B (zh) | 2009-12-16 | 2009-12-16 | 一种制作利用硅通孔构成的三维硅基无源电路的方法 |
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CN102103979A true CN102103979A (zh) | 2011-06-22 |
CN102103979B CN102103979B (zh) | 2013-01-02 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102412228A (zh) * | 2011-10-31 | 2012-04-11 | 中国科学院微电子研究所 | 同轴硅通孔互连结构及其制造方法 |
CN103094068A (zh) * | 2011-10-31 | 2013-05-08 | 中国科学院微电子研究所 | 高密度嵌入式电容器及其制作方法 |
CN103295915A (zh) * | 2012-03-05 | 2013-09-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tsv转接板的制作方法及tsv转接板 |
CN104685098A (zh) * | 2012-09-28 | 2015-06-03 | 田中贵金属工业株式会社 | 担载用于镀覆处理的催化剂颗粒的基板的处理方法 |
CN106605298A (zh) * | 2014-09-29 | 2017-04-26 | 苹果公司 | 晶片级无源器件的集成 |
CN111653488A (zh) * | 2020-06-15 | 2020-09-11 | 上海先方半导体有限公司 | 微流道散热系统及其制造方法 |
CN112018096A (zh) * | 2020-07-31 | 2020-12-01 | 复旦大学 | 一种用于能量缓冲的纳米电容三维集成系统及其制备方法 |
CN112071935A (zh) * | 2020-09-04 | 2020-12-11 | 复旦大学 | 一种基于太阳能的三维集成系统及制备方法 |
CN112071974A (zh) * | 2020-09-04 | 2020-12-11 | 复旦大学 | 一种三维集成系统及制备方法 |
CN112151535A (zh) * | 2020-08-17 | 2020-12-29 | 复旦大学 | 一种硅基纳米电容三维集成结构及其制备方法 |
-
2009
- 2009-12-16 CN CN 200910242759 patent/CN102103979B/zh active Active
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102412228A (zh) * | 2011-10-31 | 2012-04-11 | 中国科学院微电子研究所 | 同轴硅通孔互连结构及其制造方法 |
CN103094068A (zh) * | 2011-10-31 | 2013-05-08 | 中国科学院微电子研究所 | 高密度嵌入式电容器及其制作方法 |
CN103094068B (zh) * | 2011-10-31 | 2015-11-18 | 成都锐华光电技术有限责任公司 | 高密度嵌入式电容器及其制作方法 |
CN103295915A (zh) * | 2012-03-05 | 2013-09-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tsv转接板的制作方法及tsv转接板 |
CN103295915B (zh) * | 2012-03-05 | 2016-02-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tsv转接板的制作方法及tsv转接板 |
CN104685098A (zh) * | 2012-09-28 | 2015-06-03 | 田中贵金属工业株式会社 | 担载用于镀覆处理的催化剂颗粒的基板的处理方法 |
CN104685098B (zh) * | 2012-09-28 | 2017-04-12 | 田中贵金属工业株式会社 | 担载用于镀覆处理的催化剂颗粒的基板的处理方法 |
US10468381B2 (en) | 2014-09-29 | 2019-11-05 | Apple Inc. | Wafer level integration of passive devices |
CN106605298A (zh) * | 2014-09-29 | 2017-04-26 | 苹果公司 | 晶片级无源器件的集成 |
CN106605298B (zh) * | 2014-09-29 | 2021-07-06 | 苹果公司 | 晶片级无源器件的集成 |
US11398456B2 (en) | 2014-09-29 | 2022-07-26 | Apple Inc. | Wafer level integration of passive devices |
CN111653488A (zh) * | 2020-06-15 | 2020-09-11 | 上海先方半导体有限公司 | 微流道散热系统及其制造方法 |
CN112018096A (zh) * | 2020-07-31 | 2020-12-01 | 复旦大学 | 一种用于能量缓冲的纳米电容三维集成系统及其制备方法 |
CN112018096B (zh) * | 2020-07-31 | 2022-05-24 | 复旦大学 | 一种用于能量缓冲的纳米电容三维集成系统及其制备方法 |
CN112151535A (zh) * | 2020-08-17 | 2020-12-29 | 复旦大学 | 一种硅基纳米电容三维集成结构及其制备方法 |
CN112151535B (zh) * | 2020-08-17 | 2022-04-26 | 复旦大学 | 一种硅基纳米电容三维集成结构及其制备方法 |
CN112071935A (zh) * | 2020-09-04 | 2020-12-11 | 复旦大学 | 一种基于太阳能的三维集成系统及制备方法 |
CN112071974A (zh) * | 2020-09-04 | 2020-12-11 | 复旦大学 | 一种三维集成系统及制备方法 |
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CN102103979B (zh) | 2013-01-02 |
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