CN102101776B - Method for manufacturing ceramic airtight inner chamber - Google Patents
Method for manufacturing ceramic airtight inner chamber Download PDFInfo
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- CN102101776B CN102101776B CN2009100734610A CN200910073461A CN102101776B CN 102101776 B CN102101776 B CN 102101776B CN 2009100734610 A CN2009100734610 A CN 2009100734610A CN 200910073461 A CN200910073461 A CN 200910073461A CN 102101776 B CN102101776 B CN 102101776B
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- chamber
- hole
- tape casting
- ceramic
- casting diaphragm
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Abstract
The invention relates to a method for manufacturing a ceramic airtight inner chamber. A chamber is punched on ceramic casting raw porcelain membranes by using a punching die; membranes formed by punching a carbon membrane, rubber paper, and the like are inlaid into the chamber by using the same punching die; and the chamber membranes are laminated among the raw porcelain membranes. After the carbon membrane inlaid into the chamber is volatilized by laminating and cofiring, the airtight chamber is formed. The manufacture method can obtain the ceramic airtight chamber with integral structure, high strength and high air tightness. The volume of the chamber can be adjusted at random, and the height can be controlled at random at 40 microns to 1mm. The method can be used for manufacturing the ceramic airtight working chamber of an oxygen sensor and a capacitive type pressure sensor.
Description
(1) technical field
The invention belongs to sensor technology and manufacturing field, relate to a kind of method that adopts pyroceramic co-sintering Technology to make ceramic airtight inner chamber.
(2) background technology
Oxygen sensor, capacitive pressure sensor etc. require its work chamber's structural integrity, sealing strength is high, resistance to air loss good.And traditional ceramic air-tight chamber manufacture method adopts glass sealing mostly, because glass sealing exists micro-bubble and tiny crack, affects sealing strength, also is unfavorable for batch production and the integrated and multifunction of sensor simultaneously.
The present invention adopts pyroceramic co-sintering Technology, make ceramic air-tight chamber, technology immediate with it is the various devices with window, chamber and passage that adopt ceramic co-fired knot Technology to make, these devices for keeping the integrity of window, chamber and passage, are usually filled and are volatilely had the rubber paper of suitable hardness as support in lamination process.The volatile support substance volatilization of filling after sintering stay window, chamber and passage, but these chambers and passage mostly is opening, but not the resistance to air loss chamber.
(3) summary of the invention
The object of the present invention is to provide a kind of ceramic airtight inner chamber manufacture method, the air-tight chamber structural integrity, intensity is high, resistance to air loss good, is applicable to make gas sensor, capacitive pressure sensor, flow sensor with airtight work chamber.
The object of the present invention is achieved like this: it adopts pyroceramic co-sintering Technology, at ZrO
2Or Al
2O
3Punch out surrounding airtight hole with punching die on tape casting diaphragm, and with same punching die with carbon membrane, macromolecule membrane, solid paraffin, rubber paper etc., in die-cut embedding hole, overlay between tape casting diaphragm, the sealing bag vacuum of packing into is sealed, and carries out lamination with static pressure such as warm water.The carbon film that is bumped into plays a supportive role in lamination process, and complete with the holding chamber cell structure is through high temperature sintering, the support carbon film vapors away, and forms air-tight chamber, and carbon film volatilizees under 800 ℃, simultaneously be in porous state at this process pottery, can get rid of the gaseous constituent of reaction process.Should reduce near the temperature rise rate 800 ℃ in sintering process, make the volatilization of fully burning of itself and oxygen.
(4) description of drawings
Each layer of Fig. 1 air-tight chamber schematic diagram
Fig. 2 air-tight chamber is dissected schematic diagram
(5) embodiment
For example the present invention is described in more detail below in conjunction with accompanying drawing.
Fig. 1, ceramic resistance to air loss inner cavity chamber manufacture method is to adopt high temperature co-firing knot Technology, is stablizing ZrO
2Punch out square hole with punching die on tape casting diaphragm 3, overlay on support chip 4, punch out the carbon film identical with hole shape 2 with same punching die, in carbon film 2 embedding holes, supporting diaphragm 1 overlays on diaphragm with holes 3, the stack membrane sheet sealing bag vacuum of packing into is sealed, with the static pressure such as warm water compacting one, through high temperature sintering, carbon film in embedding hole 3 vapors away, and forms as Fig. 2 airtight work chamber.Carbon film volatilizees under 700 ℃-800 ℃, near the temperature rise rate suitably reduce by 800 ℃ in sintering process, and about 0.5 ℃ of-1 ℃/min makes the volatilization of fully burning of carbon film 2 and oxygen, and 1500 ℃ of the temperature that then raises are burnt till compact zirconia with pottery.
Claims (3)
1. ceramic resistance to air loss inner cavity chamber manufacture method, it is characterized in that the method is to adopt pyroceramic co-sintering technique, to punch out the hole of desired shape on ceramic tape casting diaphragm, the volatile support substance of the low temperature that filling shape is identical in the hole, overlay successively between lower support pottery tape casting diaphragm, the sealing bag vacuum of packing into is sealed, the static pressure laminations such as warm water, high temperature co-firing; Keep certain heating curve in the process that heats up, the volatile support substance volatilization of low temperature forms air-tight chamber; Wherein, the volatile support substance of low temperature is carbon membrane, macromolecule membrane, solid paraffin or rubber paper; Keep certain heating curve to refer to: normal temperature-700 ℃, 0.7 ℃ of-1 ℃/min of temperature rise rate; 700 ℃-800 ℃, 0.5 ℃ of-2 ℃/min of temperature rise rate; 800 ℃-1500 ℃, 2 ℃ of-3 ℃/min of temperature rise rate; 1500 ℃, insulation 2-3h.
2. manufacture method according to claim 1, wherein said ceramic tape casting diaphragm is characterized in that: ceramic tape casting diaphragm is to stablize ZrO
2, semi-stability ZrO
2Or Al
2O
3Tape casting diaphragm, thickness are 40 μ m-1mm.
3. manufacture method according to claim 1, the hole of the wherein said desired shape that punches out on tape casting diaphragm is characterized in that: the hole of described desired shape is square hole, circular hole or irregular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100734610A CN102101776B (en) | 2009-12-18 | 2009-12-18 | Method for manufacturing ceramic airtight inner chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100734610A CN102101776B (en) | 2009-12-18 | 2009-12-18 | Method for manufacturing ceramic airtight inner chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102101776A CN102101776A (en) | 2011-06-22 |
| CN102101776B true CN102101776B (en) | 2013-06-05 |
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ID=44154866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100734610A Expired - Fee Related CN102101776B (en) | 2009-12-18 | 2009-12-18 | Method for manufacturing ceramic airtight inner chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102101776B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102862367B (en) * | 2012-09-11 | 2015-01-14 | 中国兵器工业集团第二一四研究所苏州研发中心 | Cavity forming method of multi-layered ceramic element |
| CN103017945B (en) * | 2012-11-30 | 2015-03-25 | 中北大学 | High-temperature ceramic pressure sensor for pressure test in high temperature environment and processing method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3101649B2 (en) * | 1995-12-22 | 2000-10-23 | 財団法人韓国科学技術研究院 | Composition for porous ceramic diffusion barrier layer, heater-integrated oxygen sensor using the same, and method of manufacturing the same |
| CN1363536A (en) * | 2000-12-26 | 2002-08-14 | 独立行政法人产业技术综合研究所 | Sintering method and apparatus by centrifugal force |
-
2009
- 2009-12-18 CN CN2009100734610A patent/CN102101776B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3101649B2 (en) * | 1995-12-22 | 2000-10-23 | 財団法人韓国科学技術研究院 | Composition for porous ceramic diffusion barrier layer, heater-integrated oxygen sensor using the same, and method of manufacturing the same |
| CN1363536A (en) * | 2000-12-26 | 2002-08-14 | 独立行政法人产业技术综合研究所 | Sintering method and apparatus by centrifugal force |
Non-Patent Citations (2)
| Title |
|---|
| JP特开平10-6324A 1998.01.13 |
| JP特许第3101649号B2 2000.10.23 |
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| CN102101776A (en) | 2011-06-22 |
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