CN102862367B - Cavity forming method of multi-layered ceramic element - Google Patents
Cavity forming method of multi-layered ceramic element Download PDFInfo
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- CN102862367B CN102862367B CN201210332486.XA CN201210332486A CN102862367B CN 102862367 B CN102862367 B CN 102862367B CN 201210332486 A CN201210332486 A CN 201210332486A CN 102862367 B CN102862367 B CN 102862367B
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Abstract
The invention relates to a cavity forming method of a multi-layered ceramic element. The method is characterized in that a raw ceramic material capable of generating gas in a sintering process is used for processing a multi-layered ceramic element cavity filler which is filled into a cavity position, and then laminating is carried out; and in a subsequent sintering process, the raw ceramic material is subjected to a chemical reaction to generate gas, and after the gas is exhausted, a cavity is formed. By adopting the method of the invention, layered cracks at the cavity of the multi-layered ceramic element can be eliminated so as to realize the processing of the built-in cavity of the multi-layered ceramic element.
Description
Technical field
The invention belongs to multi-layer ceramic component technical field, relate to the manufacturing process processing cavity in a kind of multi-layer ceramic component.
Background technology
Conventional multi-layer ceramic component cavity forming method is by processing mold, in mould, inject silica gel make cavity filler, when multi-layer ceramics lamination, cavity filler is inserted cavity position and carry out lamination, after lamination, take out cavity filler, then carry out cutting, sintering.And when taking out cavity filler, the friction between cavity filler and pottery can cause multi-layer ceramic component to occur hierarchical crack at cavity place usually, finished product rate is low and have the hidden danger affecting long-term reliability.And cavity filler must take out by conventional cavity forming method before element sintering, therefore cannot process multi-layer ceramic component build-in cavities.
Summary of the invention
Object of the present invention is intended to the hierarchical crack eliminating multi-layer ceramic component cavity place, realizes the processing of multi-layer ceramic component build-in cavities.
The technical solution realizing the object of the invention is: a kind of multi-layer ceramic component cavity forming method, it is characterized in that: filler green materials processing being become various shape, and insert in the cavity corresponding with the cavity shape in multi-layer ceramic component, this green material generates gas and discharges in sintering process, forms the cavity of multi-layer ceramic component.
The procedure of processing of described filler is:
1) green material is processed into green band by curtain coating;
2) green band is obtained the green body identical with the cavity depth of multi-layer ceramic component through lamination and laminating technology;
3) again green body is processed into the filler identical with the cavity shape in multi-layer ceramic component.
Described green material is the green that chemical reaction can occur in sintering process, produce gas.
Described green material is processed into the green band of 0.05mm ~ 0.5mm thickness by curtain coating.
Described green body adopts the mode of Laser Processing or thermal cutting to be processed into the filler identical with cavity shape.
The temperature of described sintering process is between 300 DEG C ~ 800 DEG C.
There is chemical reaction between in sintering process 300 DEG C ~ 800 DEG C of described green material, generate gas.The actual temperature range reacted of green material also can between 500 DEG C ~ 800 DEG C.
Compared with prior art, its remarkable advantage is in the present invention:
Multi-layer ceramic component cavity forming method of the present invention, not only can machine-shaping surface cavities, and can machine-shaping build-in cavities, realizes the processing of multi-layer ceramic component build-in cavities; The hierarchical crack of multi-layer ceramic component at cavity place can be eliminated, improve the qualification rate of product, the service life of extension element.
Accompanying drawing explanation
Fig. 1 is green band schematic diagram;
Fig. 2, Fig. 3 are a kind of cavity filler front view and top view;
Fig. 4, Fig. 5 are another kind of cavity filler front view and top view;
Fig. 6, Fig. 7 are another cavity filler front view and top view;
Fig. 8 is ceramic block schematic diagram after lamination;
Fig. 9 is the multi-layer ceramic component structural representation with cavity.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.Following examples only for technical scheme of the present invention is clearly described, and can not limit the scope of the invention with this.
The processing process of multi-layer ceramic component mainly comprises following a few part:
Curtain coating green → processing cavity filler → multi-layer ceramic component lamination → placement cavity filler → lamination → cutting → sintering.
Concrete technology is as follows:
A curtain coating green: by the green band of multi-layer ceramics cavity requirement curtain coating processing desired thickness, as Fig. 1;
B processes cavity filler: use that above-mentioned green band carries out lamination, lamination obtains the green body identical with multi-layer ceramics cavity depth, use machining as modes such as Laser Processing, thermal cutting processing again, green body is processed into the filler identical with cavity pattern, the cavity of design can be various shape, and filler also can be processed as filler 2,3,4 as 1 in Fig. 2-Fig. 7 kind, 2 kinds or various shape according to the shape of cavity;
C lamination: multi-layer ceramics is piled in order successively and builds into a stereochemical structure;
D places filler: be in due course in lamination process and insert filler 2,3,4 in the cavities;
E lamination: under pressure the stereochemical structure that heap is built is pressed into relatively fine and close ceramic block 5, as Fig. 8;
F cuts: ceramic block is cut into the multi-layer ceramic component unit without sintering;
G sinters: the multi-layer ceramic component unit after cutting is fired into the multi-layer ceramic component 6 with surface cavities structure 7 and build-in cavities structure 8 under specific sintering atmosphere, sintering curre, in sintering process, filler 2,3,4 generates gas discharge, thus surface and built-in cavity structure can be formed, as shown in Figure 9.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and distortion, these improve and distortion also should be considered as protection scope of the present invention.
Claims (6)
1. a multi-layer ceramic component cavity forming method, it is characterized in that: filler green materials processing being become various shape, and insert in the cavity corresponding with the cavity shape in multi-layer ceramic component, this green material generates gas and discharges in sintering process, forms the cavity of multi-layer ceramic component;
The procedure of processing of described filler is:
1) green material is processed into green band by curtain coating;
2) green band is obtained the green body identical with the cavity depth of multi-layer ceramic component through lamination and laminating technology;
3) again green body is processed into the filler identical with the cavity shape in multi-layer ceramic component.
2. multi-layer ceramic component cavity forming method according to claim 1, is characterized in that: described green material is the green that chemical reaction can occur in sintering process, produce gas.
3. multi-layer ceramic component cavity forming method according to claim 1, is characterized in that: described green material is processed into the green band of 0.05mm ~ 0.5mm thickness by curtain coating.
4. multi-layer ceramic component cavity forming method according to claim 1, is characterized in that: described green body adopts the mode of Laser Processing or thermal cutting to be processed into the filler identical with cavity shape.
5. multi-layer ceramic component cavity forming method according to claim 1, is characterized in that: the temperature of described sintering process is between 300 DEG C ~ 800 DEG C.
6. multi-layer ceramic component cavity forming method according to claim 1 or 5, is characterized in that: between in sintering process 300 DEG C ~ 800 DEG C of described green material, chemical reaction occurs, generate gas.
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| CN201210332486.XA CN102862367B (en) | 2012-09-11 | 2012-09-11 | Cavity forming method of multi-layered ceramic element |
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| CN201210332486.XA CN102862367B (en) | 2012-09-11 | 2012-09-11 | Cavity forming method of multi-layered ceramic element |
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| CN102862367A CN102862367A (en) | 2013-01-09 |
| CN102862367B true CN102862367B (en) | 2015-01-14 |
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| CN105330312A (en) * | 2015-11-30 | 2016-02-17 | 中国电子科技集团公司第五十五研究所 | Setter plate applied to low-temperature co-sintering ceramic sintering |
Citations (4)
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| CN101791818A (en) * | 2010-03-04 | 2010-08-04 | 中国电子科技集团公司第五十五研究所 | Method for preparing aluminium oxide ceramics green ceramic chip by tape casting |
| CN102101776A (en) * | 2009-12-18 | 2011-06-22 | 中国电子科技集团公司第四十九研究所 | Method for manufacturing ceramic airtight inner chamber |
| CN102555033A (en) * | 2011-12-21 | 2012-07-11 | 中国电子科技集团公司第五十五研究所 | Flow filling lamination forming method of multilayer ceramic cavity body |
| CN102569095A (en) * | 2010-12-08 | 2012-07-11 | 中国科学院微电子研究所 | Method for preparing LTCC (low-temperature co-fired ceramic) substrate with channels |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS6029601B2 (en) * | 1977-09-01 | 1985-07-11 | 松下電器産業株式会社 | Manufacturing method of raw ceramic sheet |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102101776A (en) * | 2009-12-18 | 2011-06-22 | 中国电子科技集团公司第四十九研究所 | Method for manufacturing ceramic airtight inner chamber |
| CN101791818A (en) * | 2010-03-04 | 2010-08-04 | 中国电子科技集团公司第五十五研究所 | Method for preparing aluminium oxide ceramics green ceramic chip by tape casting |
| CN102569095A (en) * | 2010-12-08 | 2012-07-11 | 中国科学院微电子研究所 | Method for preparing LTCC (low-temperature co-fired ceramic) substrate with channels |
| CN102555033A (en) * | 2011-12-21 | 2012-07-11 | 中国电子科技集团公司第五十五研究所 | Flow filling lamination forming method of multilayer ceramic cavity body |
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Effective date of registration: 20180813 Address after: 233030 2016 Tang He road, Bengbu, Anhui Patentee after: Huadong Photoelectric Integrated Device Research Institute Address before: 215163 No. 89 Longshan Road, hi tech Zone, Suzhou, Jiangsu Patentee before: China North Industries Group Corporation No.214 Research Institute Suzhou R&D Center |