JPS6029601B2 - Manufacturing method of raw ceramic sheet - Google Patents

Manufacturing method of raw ceramic sheet

Info

Publication number
JPS6029601B2
JPS6029601B2 JP52105538A JP10553877A JPS6029601B2 JP S6029601 B2 JPS6029601 B2 JP S6029601B2 JP 52105538 A JP52105538 A JP 52105538A JP 10553877 A JP10553877 A JP 10553877A JP S6029601 B2 JPS6029601 B2 JP S6029601B2
Authority
JP
Japan
Prior art keywords
raw
sheet
sheets
ceramic
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52105538A
Other languages
Japanese (ja)
Other versions
JPS5438305A (en
Inventor
肇 川又
涼 木村
隆志 七野
泰孝 堀部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52105538A priority Critical patent/JPS6029601B2/en
Publication of JPS5438305A publication Critical patent/JPS5438305A/en
Publication of JPS6029601B2 publication Critical patent/JPS6029601B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Inorganic Insulating Materials (AREA)
  • Laminated Bodies (AREA)

Description

【発明の詳細な説明】 本発明は焼成用セラミック生シートの製造方法に関する
ものであり、特に高平滑かつ高密度な競鯖体シートが得
られる焼成用セラミック生シートの製造方法に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a raw ceramic sheet for firing, and more particularly to a method for manufacturing a raw ceramic sheet for firing, which yields a highly smooth and high-density competitive sheet.

最近、各種セラミックスを用いた電子部品は多にわたり
、高密度化、小型化が急速に進んできた。
In recent years, electronic components using various types of ceramics have become increasingly popular, and their density and size have rapidly increased.

従来、用途に応じた所定形状の圧電素子の供給は、競結
体もしくは単結晶のィンゴットを切断研磨等の機械加工
によりなされてきたが、加工歪による各種物理的特性の
劣化、さらには加工費用の増大という問題が大きくなっ
てきている。そのために、機械加工という後工程を伴わ
ないで工程の簡略化、大量生産を図ることから焼成と同
時に所望形状の素子が安価に供給されることが望まれて
いる。一般に、擁結体シートの製造方法は、セラミック
素材を結合物質と共に混練し成形して一定厚みの生シー
トを作製し、用途に応じた所定形状に打抜き、これを焼
成するという方法が知られている。
Conventionally, piezoelectric elements in a predetermined shape according to the application have been supplied by machining such as cutting and polishing a compact or single crystal ingot, but this has led to deterioration of various physical properties due to processing distortion and processing costs. The problem of increasing numbers of people is becoming more and more important. For this reason, it is desired that elements of a desired shape can be supplied at low cost at the same time as firing, in order to simplify the process and mass-produce without the post-process of machining. In general, a method for manufacturing retaining sheets is known, in which a ceramic material is kneaded with a binding substance, molded to produce a green sheet of a certain thickness, punched into a predetermined shape according to the intended use, and then fired. There is.

しかし、暁結後の競結体シート素子において、生シート
の焼成時の収縮に伴って変形、反り、クラック、穿孔さ
らには不均質組成が生じ、機械的特性や電気的特性等に
大きな影響を及ぼすという問題がある。
However, in the composite sheet element after dawning, deformation, warping, cracks, perforations, and non-uniform composition occur due to the shrinkage of the raw sheet during firing, which has a large effect on mechanical properties, electrical properties, etc. There is the problem of

高性能、高密度でかつ高平滑な焼結体シートを得るため
には、焼成工程は勿論のことではあるが、生シートの特
性が大きく左右する。
In order to obtain a high-performance, high-density, and highly smooth sintered sheet, not only the firing process but also the properties of the raw sheet are greatly influenced.

その諸特性を列挙すれば、生シートの密度をできるだけ
高めること。そのためには焼絹性が向上する比表面積の
大きい則ち粒径の小さいセラミック素材にできるだけ少
量の結合剤、可塑剤を加えて、適当量の溶媒で充分浪練
しセラミック素材の分散をよくすること。さらには厚さ
が均一でかつ可操性が充分あって打抜加工が容易で加工
歪が残らないこと等が必要である。これら特性において
結合剤、可塑剤あるいは溶媒の選択が著しい影響を与え
生シート作製上最も重要なポイントである。次に有機成
分の樹脂抜き工程および焼成工程の検討が重要になって
くる。
To enumerate its various characteristics, it is to increase the density of the raw sheet as much as possible. To achieve this, it is necessary to add as little binder and plasticizer as possible to a ceramic material with a large specific surface area or small particle size, which improves silkenability, and thoroughly mix it with an appropriate amount of solvent to improve the dispersion of the ceramic material. thing. Furthermore, it is necessary that the thickness is uniform, that it has sufficient maneuverability, that punching is easy, and that no processing distortion remains. The selection of binder, plasticizer or solvent has a significant influence on these properties and is the most important point in producing green sheets. Next, it becomes important to consider the resin removal process and firing process for organic components.

上記生シートの製造方法としては、1つには、セラミッ
ク素材に結合剤、可塑剤および溶媒を加えて泥糠とし、
これを平滑な基板上に流しドクターブレードにて一定厚
のシート状に成型、乾燥させて生シートを得るドクター
ブレード法でありLIつは、セラミック素材と結合剤、
可塑剤および溶媒との混練物を金型口から押出成型して
生シートを得る押出成型法であり、さらには乾式成型法
として熱硬化性樹脂を結合剤に用いて熱間ロール圧延す
るロール法等が知られている。
One method for producing the above-mentioned raw sheet is to add a binder, a plasticizer, and a solvent to a ceramic material to form a slurry;
The doctor blade method involves pouring this onto a smooth substrate, forming it into a sheet of a certain thickness using a doctor blade, and drying it to obtain a raw sheet.LI consists of a ceramic material, a binder,
This is an extrusion molding method in which a green sheet is obtained by extruding a mixture of a plasticizer and a solvent through a mold opening, and there is also a roll method in which hot roll rolling is performed using a thermosetting resin as a binder as a dry molding method. etc. are known.

これら方法のうち、ドクターブレード法が平滑性におい
て極めて優れかつ高密度であり、成型歪がほとんどない
生シートが得られる方法として多用されている。上註記
戦のいずれの方法にせよ、一般的に乾燥後の生シートは
厚み方向に対してセラミック素材の充填密度に勾配が生
じている。
Among these methods, the doctor blade method is widely used as a method for obtaining green sheets with extremely excellent smoothness, high density, and almost no forming distortion. Regardless of the method used, the raw sheet after drying generally has a gradient in the packing density of the ceramic material in the thickness direction.

具体的には、シート成型時にベースフィルムに接する側
(生シート裏面)は高密度になり、逆に溶媒が飛散して
いく自由表面側(生シート表面)は低密度になる煩向が
ある。このような生シートを焼成すると、充填密度の低
い生シート表面側に比べ、充填密度の高い生シート裏面
側の収縮率が大きいために反りの現象が生じる。
Specifically, the side that contacts the base film during sheet molding (the back surface of the green sheet) tends to have a high density, while the free surface side (the surface of the green sheet) where the solvent is scattered tends to have a low density. When such a green sheet is fired, a phenomenon of warping occurs because the shrinkage rate on the back side of the green sheet with a high packing density is greater than that on the front side of the green sheet with a low packing density.

焼結体シートの反りの要因は他にも考えられる。例えば
、生シートの面内方向の密度むらおよび厚みむら、急激
な樹脂抜き、あるいは焼成時の不均熱等が挙げられるが
、これらはいずれもシート成形機、焼成炉の性能に依存
し、高性能な装置を用いれば回避できる問題である。し
かし、上記に記述した生シートの厚み方向のセラミック
素材の充填密度差は避け難く、これが反り現象の主要因
になっているものと思われる。特に0.5肋厚以下の薄
もの生シートを焼成した場合には、反りが著しい。この
種の反りを防ぐには生シート表裏面での収縮量を同じよ
うにする必要があり、そのためには、生シート表裏での
充填密度差をいかに縮めて全体的に高密度化を図るかが
大きなポイントである。本発明の目的は、平滑性に優れ
た高密度焼結体シートを得るための焼成用セラミック生
シートを製造する新規な方法を提供するものである。
There are other possible causes of warping of the sintered sheet. Examples include uneven density and thickness in the in-plane direction of the raw sheet, rapid resin removal, and uneven heating during firing, but all of these depend on the performance of the sheet forming machine and firing furnace, and This problem can be avoided by using a high-performance device. However, the difference in the packing density of the ceramic material in the thickness direction of the green sheet described above is difficult to avoid, and this seems to be the main cause of the warping phenomenon. In particular, when a thin raw sheet with a thickness of 0.5 or less is fired, the warpage is significant. To prevent this kind of warping, it is necessary to equalize the amount of shrinkage on the front and back sides of the raw sheet, and in order to do this, it is necessary to reduce the difference in packing density between the front and back sides of the raw sheet and increase the overall density. is a major point. An object of the present invention is to provide a new method for producing a raw ceramic sheet for firing in order to obtain a high-density sintered sheet with excellent smoothness.

本発明は同一厚みの生シートを2枚用意して、生シート
面の表−表あるいは髪一憂の関係で合わして所望厚にな
るまで圧着して最終の積層型生シート1枚を作って後、
所望形状に打抜きこれを最適焼成温度で焼成するもので
あり、極めて反りの小さし、焼縞体シートが得られるも
のである。本発明の方法は、まずセラミック素材に有機
成分である結合剤、可塑剤および溶媒を所定量加え、ボ
ールミル、ニーダ等の既知の混合方法で良く混合し、適
当な粘度を有する泥酸を作り、この泥糠を有機フィルム
等の平滑な基板上に流し、ドクターブレード法にて一定
厚みのシート状に成形し乾燥して用途に応じて0.05
〜2.0肋の一定厚を有する高密度生シートを作製する
。この生シートのセラミック素材充填密度は体積比率で
50〜65%にも達した。生シートは他の方法、即ち押
出成型法、ロール圧延法を用いて作製しても何らごしつ
かえない。次にこの生シートを2枚重ねて圧着する。
In the present invention, two raw sheets of the same thickness are prepared, and the raw sheet surfaces are brought together face-to-face or in a hair-to-edge relationship and pressed together until the desired thickness is achieved to make one final laminated raw sheet. rear,
The sheet is punched into a desired shape and fired at an optimum firing temperature, resulting in a fired striped sheet with extremely low warpage. In the method of the present invention, first, a predetermined amount of organic components such as a binder, a plasticizer, and a solvent are added to a ceramic material, and the mixture is thoroughly mixed using a known mixing method such as a ball mill or kneader to produce muddy acid having an appropriate viscosity. This mud bran is poured onto a smooth substrate such as an organic film, formed into a sheet with a constant thickness using the doctor blade method, and dried to a thickness of 0.05 mm depending on the application.
A high density green sheet is made with a constant thickness of ~2.0 ribs. The ceramic material packing density of this raw sheet reached 50 to 65% in terms of volume ratio. There is no problem in producing the green sheet using other methods, such as extrusion molding or roll rolling. Next, two of these raw sheets are stacked and pressed together.

(但し、生シートの接合面は各生シートの表面あるいは
裏面同志となるようにする)この葉、両生シートがよく
接合するようにするために、あらかじめ接合面に泥数を
作る時に用いた溶媒をわずかに塗布もしくは含浸させる
か、あるいは生シートを損傷しない程度にまで加熱する
方法をとってもよい。このように2枚の生シートを積層
型にして1枚の生シートとなした後、必要形状に打抜加
工して焼成用セラミック生シートとするものである。上
記生シートを最適温度で焼成すれば、従釆法であるシー
ト成形機から作られた1枚の生シートを用いて得られる
暁結体シートに比べ、極めて平滑な暁結体シートが得ら
れた。本発明の方法で用いるセラミック素材は、セラミ
ック基板とする場合にはアルミナ(Aそ203)、マグ
ネシア(Mg0)、シリカ(Si02)の単体あるいは
それらの混合粉体であり、圧電体、議露体材料の場合に
は鞠Ti03もし〈はその変性体、P刀を代表する鉛系
圧電材であり、磁性体材料の場合には、各種フェライト
材料、その他酸化物抵抗体材料等いずれでもよい。
(However, the joint surfaces of the raw sheets should be the same as the front or back sides of each raw sheet.) In order to ensure that the leaves and amphipod sheets are well joined, the solvent used to make the mud number on the joint surfaces in advance. Alternatively, the raw sheet may be heated to an extent that does not damage the raw sheet. In this way, two green sheets are laminated to form one green sheet, and then punched into a required shape to form a ceramic green sheet for firing. If the above-mentioned raw sheet is fired at the optimum temperature, an extremely smooth Akatsuki compact sheet can be obtained compared to the Akatsuki compact sheet obtained using a single green sheet made from a sheet forming machine using the conventional method. Ta. The ceramic material used in the method of the present invention is a single powder of alumina (Aso203), magnesia (Mg0), or silica (Si02) or a mixed powder thereof when used as a ceramic substrate; In the case of materials, it is a lead-based piezoelectric material representative of its modified form, P-katana, and in the case of magnetic materials, various ferrite materials, other oxide resistor materials, etc. may be used.

有機結合材としては、ポリビニールアルコール、ポリ酢
酸ビニール、ポリビニールブチラール、塩化ビニール−
酢酸ビニール共重合体、メチルセルロース、エチルセル
ロース等があるが、特に接着性からポリ酢酸ビニール、
ポリビニールブチラールが好ましい。可塑剤は結合剤に
よって選択されるが、例えばフタル酸ェステル系、グリ
コール系、グリセリン系等が用いられる。結合剤、可塑
剤ともに生シートの成形性、加工性および高密度化の観
点から各々1〜1びo〆.%が好ましい。溶媒は、セラ
ミック素材によって異なるが、主として水、アルコール
系、ケトン系の単一もしくは混合溶媒が好ましい。かか
る本発明の方法による焼成用セラミック生シートを用い
て得られる高平滑かつ高密度な糠結体シート素子は、従
来の方法である焼縞体あるいは単結晶を切断、研磨加工
等によって作られた素子と比較して、加工歪がないため
に電気的特性、機械的特性等に優れかつ加工費用の低減
から安価に供給されて、セラミック素材の種類により様
々な用途に通した高性能電子部品に応用できる。
Organic binders include polyvinyl alcohol, polyvinyl acetate, polyvinyl butyral, and vinyl chloride.
There are vinyl acetate copolymers, methylcellulose, ethylcellulose, etc., but polyvinyl acetate,
Polyvinyl butyral is preferred. The plasticizer is selected depending on the binder, and for example, phthalate-based, glycol-based, glycerin-based, etc. are used. Both the binder and the plasticizer are used in a range of 1 to 100% from the viewpoint of moldability, processability, and densification of the raw sheet. % is preferred. The solvent varies depending on the ceramic material, but is preferably a single or mixed solvent of water, alcohol, or ketone. The highly smooth and high-density bran aggregate sheet element obtained using the raw ceramic sheet for firing according to the method of the present invention cannot be produced by conventional methods such as cutting and polishing a fired striped body or a single crystal. Compared to elements, there is no processing distortion, so it has excellent electrical and mechanical properties, and it can be supplied at low cost due to reduced processing costs, making it suitable for high-performance electronic components that can be used in a variety of applications depending on the type of ceramic material. Can be applied.

以下に限定的でない本発明の実施例について述べる。<
実施例> 粒子サイズ約1ムのa−A〆20396部、Si022
部、Mざ022部のセラミック素材に対して2.の重量
%のポリビニールブチラール、1.0重量%のフタル酸
ジプチルを各々加え、セラミック素材に対して4の重量
%のメチルアルコールでよく雛洋混合しさらにボールミ
ルにて24時間混合して泥発を作製した。
A non-limiting example of the invention is described below. <
Example> 20396 parts of a-A with particle size of about 1 mm, Si022
2. For the ceramic material of 0.22 parts. % by weight of polyvinyl butyral and 1.0% by weight of diptyl phthalate were added, mixed well with methyl alcohol of 4% by weight based on the ceramic material, and further mixed in a ball mill for 24 hours to remove mud. was created.

この泥鰍をポリエステルフィルム上に流し、ドクタープ
レード法で生シートを作製した。この時の生シート厚は
250山mで、密度は2.6夕/地であった。次に、こ
の生シートを一辺2Q蚊の角状に打抜き、この2枚の生
シートを表面−表面あるいは裏面−裏面が重なるように
合せて第1表に示す方法で圧着した。
This mudfish was poured onto a polyester film, and a raw sheet was prepared using the doctor blade method. The thickness of the green sheet at this time was 250 m, and the density was 2.6 mm/ground. Next, this raw sheet was punched into a 2Q mosquito horn shape on each side, and the two raw sheets were pressed together so that the front surface or back surface overlapped, and the method shown in Table 1 was used.

この圧着した焼成用生シートを電気炉内に設置し、まず
予備焼成して有機成分を除去した後、160000、2
時間の焼成条件で本焼成を行った。焼成後、室温まで除
冷して暁結体シートを取り出した。これら嬢結体シート
は生シート時と比べ半径方向に15%前後の収縮率を示
したが、割れ、穿孔、反りを生せず平滑性の優れたもの
であつた。第1表に圧着法とそれから得られた糠結体シ
ートの密度と平滑性を示す。
This press-bonded raw sheet for firing was placed in an electric furnace, and after preliminary firing to remove organic components, 160,000, 2
The main firing was performed under the firing conditions of 100 hrs. After firing, the Akatsuki compact sheet was slowly cooled to room temperature and taken out. Although these compacted sheets showed a shrinkage rate of about 15% in the radial direction compared to the raw sheet, they did not exhibit cracks, perforations, or warping and had excellent smoothness. Table 1 shows the pressure bonding method and the density and smoothness of the bran aggregate sheet obtained using the pressure bonding method.

第1表 このように本発明によれば反りの生じない平滑性のすぐ
れた競結体シートを得ることのできる生シートを提供す
るものである。
Table 1 As described above, the present invention provides a green sheet from which a composite sheet with excellent smoothness and no warpage can be obtained.

Claims (1)

【特許請求の範囲】 1 セラミツク素材に有機成分である結合剤、可塑剤お
よび溶媒を加えて混練し、この混練物を平滑なベースフ
イルム上に流しドクターブレード法により一定厚みに延
展し乾燥して生シートを作製し、次にこの生シート2枚
を用意し、生シートの表面(ベースフイルムに接した面
と反対側)と表面、あるいは裏面(ベースフイルムに接
した面)と裏面との関係になるように重ねた後、圧着す
ると同時に所望形状に打抜いて積層型にすることを特徴
とするセラミツク生シートの製造方法。 2 圧着する際に、生シートを損傷しない程度にまで加
熱することを特徴とする特許請求の範囲第1項のセラミ
ツク生シートの製造方法。 3 圧着前の生シートを重ねる際に接合面を、上記混練
物に含まれる溶媒と同様のものを用いてわずかに含浸さ
せて後、圧着することを特徴とする特許請求の範囲第1
項記載のセラミツク生シートの製造方法。
[Claims] 1. Organic components such as a binder, a plasticizer, and a solvent are added to a ceramic material and kneaded, and the kneaded product is poured onto a smooth base film and spread to a constant thickness using a doctor blade method, and then dried. A raw sheet is produced, then two of these raw sheets are prepared, and the relationship between the front side (the side opposite to the side in contact with the base film) and the front side or the back side (the side in contact with the base film) and the back side of the raw sheet is determined. 1. A method for producing raw ceramic sheets, which comprises stacking them so that the shape of the raw ceramic sheets forms, pressing them together, and simultaneously punching them into a desired shape to form a laminated type. 2. The method for producing a raw ceramic sheet according to claim 1, wherein the raw sheet is heated to an extent that the raw sheet is not damaged during crimping. 3. Claim 1, characterized in that when stacking raw sheets before crimping, the joining surfaces are slightly impregnated with a solvent similar to that contained in the kneaded material, and then crimping is carried out.
A method for producing a raw ceramic sheet as described in .
JP52105538A 1977-09-01 1977-09-01 Manufacturing method of raw ceramic sheet Expired JPS6029601B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52105538A JPS6029601B2 (en) 1977-09-01 1977-09-01 Manufacturing method of raw ceramic sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52105538A JPS6029601B2 (en) 1977-09-01 1977-09-01 Manufacturing method of raw ceramic sheet

Publications (2)

Publication Number Publication Date
JPS5438305A JPS5438305A (en) 1979-03-22
JPS6029601B2 true JPS6029601B2 (en) 1985-07-11

Family

ID=14410353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52105538A Expired JPS6029601B2 (en) 1977-09-01 1977-09-01 Manufacturing method of raw ceramic sheet

Country Status (1)

Country Link
JP (1) JPS6029601B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218815A (en) * 1988-07-06 1990-01-23 Tomoegawa Paper Co Ltd Manufacture of superconducting molded body
CN102862367B (en) * 2012-09-11 2015-01-14 中国兵器工业集团第二一四研究所苏州研发中心 Cavity forming method of multi-layered ceramic element

Also Published As

Publication number Publication date
JPS5438305A (en) 1979-03-22

Similar Documents

Publication Publication Date Title
JPS6036369A (en) Ceramic manufacture
US4526635A (en) Process for manufacturing heat exchangers from ceramic sheets
JP2001114569A (en) Ceramic slurry composition, ceramic green sheet and production of multilayer ceramic electronic part
JPH05254955A (en) Production of porous pzt ceramic
JPS6029601B2 (en) Manufacturing method of raw ceramic sheet
JPS6219391B2 (en)
JPS5930770A (en) Sic-si3n4 sintered complex ceramics
TWI310343B (en)
JPS6114679B2 (en)
JP2004009681A (en) Manufacturing process for layered product, die used for it, and manufacturing process for the die
JP3538706B2 (en) Method for producing ceramic slurry composition and method for producing ceramic green sheet
JPS6043677B2 (en) Method for manufacturing piezoelectric sheet
JPS60231458A (en) Manufacture of ceramic dielectic
JPS6060968A (en) Manufacture of ceramic sintered body
JPH0430723B2 (en)
JPS608990B2 (en) Method for manufacturing piezoelectric sintered sheet
JP3369312B2 (en) Multilayer piezoelectric element and method of manufacturing the same
JPH04122001A (en) Production of positive characteristic thermistor
JPS62105962A (en) Raw material for manufacturing aluminum nitirde sintered body
JPS6054964A (en) Manufacture of ceramic mud
JPS6050359B2 (en) Method for manufacturing piezoelectric material
JP2841655B2 (en) Green sheet for multilayer ceramic capacitor and method for manufacturing multilayer ceramic capacitor using the same
JPS63137497A (en) Manufacture of ceramic wiring circuit board
JPS6060984A (en) Manufacture of ceramic sintered body
JPH05105526A (en) Production of aluminum nitride substrate