CN102077337A - Non-contact type conveyor plate having a suction force - Google Patents
Non-contact type conveyor plate having a suction force Download PDFInfo
- Publication number
- CN102077337A CN102077337A CN2009801246877A CN200980124687A CN102077337A CN 102077337 A CN102077337 A CN 102077337A CN 2009801246877 A CN2009801246877 A CN 2009801246877A CN 200980124687 A CN200980124687 A CN 200980124687A CN 102077337 A CN102077337 A CN 102077337A
- Authority
- CN
- China
- Prior art keywords
- air
- plate
- upper plate
- bolt
- fumarole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010521 absorption reaction Methods 0.000 claims description 19
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000004699 Ultra-high molecular weight polyethylene Substances 0.000 claims description 6
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 claims description 6
- 239000011521 glass Substances 0.000 abstract description 18
- 230000003068 static effect Effects 0.000 abstract description 7
- 229920006448 PE-UHMW Polymers 0.000 abstract 1
- 206010044565 Tremor Diseases 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 240000009023 Myrrhis odorata Species 0.000 description 1
- 235000007265 Myrrhis odorata Nutrition 0.000 description 1
- 235000012550 Pimpinella anisum Nutrition 0.000 description 1
- 208000034699 Vitreous floaters Diseases 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Abstract
Disclosed is a non-contact type conveyor plate having a suction force, capable of conveying glass sheets while generating a small amount of suction force to prevent even small vibrations of the glass sheets while being conveyed and of providing an excellent wear-resistant, anti-static upper plate coming into contact with a glass sheet. A conveyor plate according to the present invention comprises: a lower plate having a chamber formed therein; a middle plate overlaid on the top surface of the lower plate and having a multiplicity of joint holes communicating with the chamber; an upper plate overlaid on the top surface of the middle plate and having air eject holes communicating with the joint holes; and air eject bolts insertedly fixed into the air eject holes to accommodate air from the chamber and guide the air into a gap between the bolts and the air eject holes. Here, on the top end of the air eject hole is formed a head to allow the air to be ejected in an oblique upward direction, and on the top surface of the air eject hole is formed a hollow cavity to produce vacuum by a difference in atmospheric pressure. Moreover, the bottom surface of the head preferably forms an inclined plane in the oblique upward direction, and the top end of the air vent hole is preferably rounded. A multiplicity of vent holes may also be provided to vent air from the top surface of the upper plate to the bottom surface of the lower plate. Further, the upper plate is made from GUR (PE-UHMW) to improve wear-resistance and prevent static buildup.
Description
Technical field
The present invention relates to a kind of contactless carrying plate, relate in particular to a kind of ejection that utilizes air and form the vacuum space lifting glass time, thereby connect liter, the trickle contactless carrying plate that trembles and also can prevent of the glass of carrying with absorption affinity.
Background technology
Usually, online FPD automatic optical detection device (In-Line FPD Automatic OpticalInspection) is a kind of guiding Thin Film Transistor (TFT) LCD (TFT LCD) panel or display floaters such as plasma display (PDP), colored filter (display panel) etc., and after using the image of optical lens and CCD camera extracting detected object, utilize image processing algorithm to detect the device of the various defectives that the user will find out.
This on-line automatic optical detection apparatus is divided into the bad scanning element (scansection) of detection, check unit (review section) and retrieval unit (unload section) substantially.This checkout gear is in order to bring into play the function of detection system, the position and the size of defective of accurately finding detection is very important, and the function of the Handling device of guiding load (detected object) also is important factor from scanning element (scan section) to retrieval unit (unload section).
Existing Handling device once disclosed the contact Handling device of the revolving force carrying load that utilizes roller (roller), but owing to be to utilize the revolving force of roller to carry, therefore cut not only takes place on load or owing to stain takes place for the rotation of rod, and if a little less than the little or revolving force of frictional force, load will landing, thereby has the problem that can not carry smoothly.
For solving aforesaid problem, bring into use recently on tiny a plurality of pores and supply compressed air, and utilize the air-lift unit load that from pore, sprays and the contactless Handling device of carrying.The structure of the contactless carrying plate of schematic illustration is as follows, as shown in Figure 1, thereby by the lower plate 10 of the cell that flows that is provided with the guiding air in inside, have the upper plate 20 that the ejection of the lower plate of being combined in 10 tops flow into the compressed-air actuated pore 21 of cell and constitute.That is, be provided with the compressed-air actuated pneumatic fitting 11 of supply in lower plate 10 bottoms, and this compressed air is branched off into each passage and pore 21 ejections by upper plate 20 from cell.Thereby the certain altitude that is raised on glass that thereupon is placed on the upper plate 20 carries out contactless carrying.
Yet, be raised to above the upper plate even this carrying plate is on glass, also can cause the problem that glass and upper plate paste mutually because of the static that produces on the upper plate.
Therefore, upper plate is carried out specific coatings handle, thereby suppress the generation of static and upper plate is possessed than high-wearing feature.
Handle if as described above upper plate is carried out specific coatings, will cause the problem that the manufacturing cost of upper plate increases, and through the upper plate that coating is handled also exist can not regeneration problem.The buying expenses that for example carries out the upper plate per kilogram of specific coatings is 55,000 won.And, just can only cancel this upper plate and buy upper plate again if coat side comes off.
And, when carrying glass because glass rises, therefore jitter takes place.Even this phenomenon is very small, this phenomenon of trembling also can cause fatal defective, and therefore best countermeasure is to reduce to greatest extent to tremble.
Summary of the invention
The present invention proposes for solving aforesaid problem, its purpose is to provide the material of a kind of use ultra-high molecular weight polyethylene (PE-UHMW) as upper plate, thereby according to properties of materials, resistance to wear is good and have a contactless carrying plate that prevents charged function.
And, thereby the object of the invention is to provide a kind of and guides the injection of air between bolt and the upper plate space inserting jet bolt on the upper plate, thereby to side diffusion, make the center upper portion of jet bolt form vacuum simultaneously because of draught head, thereby absorption is risen, the glass of carrying, the trickle thus also suppressible contactless carrying plate with absorption affinity that trembles.
For addressing the above problem, the contactless carrying plate with absorption affinity of the present invention, it comprises: the lower plate that is provided with cell; Be superimposed upon the top of lower plate and have the middle plate of a plurality of combined holes that are communicated with cell; Plate top and have the upper plate of the fumarole that is communicated with combined hole in being superimposed upon; Insert, be fixed in the fumarole and accommodate the air of cell, and guide into and fumarole between jet bolt in the space that produces, it is characterized in that, the upper end of jet bolt be provided with towards above the head of oblique line directions ejection air, and on jet bolt, be provided with the groove of depression.At this moment, the bottom of jet bolt is carried out bolt with combined hole and is connected, and is provided with mutual corresponding chimb on the inner peripheral surface of the outer peripheral face of jet bolt and fumarole, for good.
And, be provided with bottom from jet bolt to the middle part along the suction hole of direction of principal axis guiding air, and, preferably, be provided with the steam vent that the four directions connects on the outer peripheral face at jet bolt in the upper end of suction hole.
And, preferably, below head towards above oblique line directions be provided with the inclined plane, and rounding is carried out in the upper end of puff prot.And preferably, in order to tighten or turn on jet bolt, the groove that is located on the head is formed by driving hole.
And, for make air above upper plate, lead to lower plate below, a plurality of air vent holes can be set.
And upper plate is made by ultra-high molecular weight polyethylene (PE-UHMW), thereby has resistance to wear and can prevent static.
Have the contactless carrying plate of absorption affinity owing in carrying, produce absorption affinity in a small amount according to of the present invention as mentioned above, therefore have the trickle feature of trembling and also can prevent of glass.
And the upper plate that will contact glass is done with ultrahigh molecular weight polyethylene, thereby good and prevent that charged function from can reduce the influence of static thereby have resistance to wear.
Description of drawings
Fig. 1 is the oblique view of the contactless carrying plate of prior art.
Fig. 2 is the exploded view according to contactless carrying plate of the present invention.
Fig. 3 is for overlooking the plane graph of lower plate shown in Figure 2 from above.
Fig. 4 is for overlooking the plane graph of middle plate shown in Figure 2 from above.
Fig. 5 is for overlooking the plane graph of upper plate shown in Figure 2 from above.
Fig. 6 is the cutaway view that the integrated structure of jet bolt shown in Figure 2 is shown.
Fig. 7 is the cutaway view that illustrates according to the operation logic of the contactless carrying plate with absorption affinity of the present invention.
Embodiment
Below, the contactless carrying plate that has absorption affinity with reference to description of drawings according to the preferred embodiment of the invention.
With reference to Fig. 2, carrying plate 100 according to the present invention comprises lower plate 110, middle plate 120, upper plate 130 and jet bolt 140.
At first, lower plate 110 is plates that air is provided by the compressor reducer of outside (not shown), is provided with a plurality of air connectors 111 below lower plate 110, and is provided with the cell 112 with air supplied branch on lower plate 110.Preferably, cell 112 is designed to, from air connector 111 top sets several to the dozens of direction, and cell 112 is being set via whole lower plate 110.And then with cell 112 that each air connector 111 is communicated with between be provided with the bottom air vent hole 113 of up/down perforation.
In plate 120 be superimposed upon lower plate 110 above, for be located at lower plate 110 on the end of branch of cell 112 be communicated with, thereby on have a plurality of combined holes 121.At this moment, on the inner peripheral surface of combined hole 121, be provided with the nut 121a that is used to connect jet bolt 140.And on middle plate 120 up/down perforation be provided with in the middle of air vent hole 123, be used for be located at lower plate 110 on bottom air vent hole 113 be communicated with.
During upper plate 130 is superimposed upon plate 120 above, for be located in combined hole 121 on the plate 120 is communicated with the identical layout of fumarole 131 employings.And for be located at lower plate 110 and middle plate 120 on bottom air vent hole 113 and middle air vent hole 123 be communicated with, up/down perforation is provided with top air vent hole 133.At this moment, the position that top air vent hole 133 is set on upper plate 130 is than low above the upper plate 130, so that the outflow of air is smooth.
This upper plate 130 is positions of glass contact, therefore for than high-wearing feature with can prevent static, have the charged ultra-high molecular weight polyethylene (PE-UHMW) that prevents function thereby used.
The internal structure that specifies jet bolt 140 is as follows, is provided with aspirating unit 143 below jet bolt 140 to mid portion along central axis direction.And be provided with towards the air-jet channel 144 of the outer peripheral face four directions branch of jet bolt 140 in the upper end of aspirating unit 143.
Upper end at the jet bolt 140 that so forms is provided with the head 145 that extends laterally.At this moment, the design of the top level of head 145, head 145 following then is designed to more up extend wide more oblique line 146.
On the other hand, upper plate 130 fumaroles 131 inside of inserting jet bolt 140 are specially, and fumarole 131 is a starting point with the chimb 132 of mid portion, form mutually different two squit holes up and down of diameter.At this moment, the squit hole of downside is littler than the squit hole of upside, so that the chimb 142 of jet bolt 140 is articulated on the chimb 132 of fumarole 131.
Why on fumarole 131 and jet bolt 140, form corresponding chimb 132,142, be when jet bolt 140 descends because external screw thread 141a and internal thread 121a interconnect, can make the head 145 of jet bolt 140 separated by a certain interval, thereby air can be by the ejection of the space between head 145 and the fumarole 131 with fumarole 131.
And the upper end of fumarole 131 forms rounding 134, so that the head 145 of jet bolt 140 is owing to oblique line 146 separates, and makes air mobile smooth and easy of ejection.
And, insert the fumarole 131 of jet bolt 140 and can directly process and form upper plate 130, insert the installing ring 135 of the aluminium match then and jet bolt 140 is installed.
On the other hand, the groove 147 of depression is set, thereby forms the space that can form vacuum in the upper central of jet bolt 140.Promptly, flow out towards cubic side direction by the air of jet bolt 140, therefore in the central because draught head has formed vacuum naturally with the space ejection of fumarole 131.At this moment, thereby further increase the space that the groove 147 of depression increases vacuum, just can further improve absorption affinity.
The groove 147 of depression preferentially is designed to polygonal driving holes such as hexagonal or anise, thereby also can utilize the multiple use of this driving hole to use when the jet bolt 140 of mounting or dismounting.
Spray towards oblique line directions by the space between jet bolt 140 and the fumarole 131 according to air in the contactless carrying plate 100 with absorption affinity of the present invention, thereby promote the glass G that is placed on the upper plate 130, and the ejection by air supports because the glass G that rises of the vacuum that produces of heart portion therein, thereby can prevent trickle trembling.
As above be illustrated with reference to preferential embodiment of the present invention, but be familiar with in the scope in thought of the present invention that the people of the affiliated art of present technique can put down in writing and field the modifications and changes the present invention of varied ground in being no more than claims.
Have the contactless carrying plate of absorption affinity owing in carrying, produce absorption affinity in a small amount according to of the present invention as mentioned above, therefore have the trickle feature of trembling and also can prevent of glass.
And the upper plate that will contact glass is done with ultrahigh molecular weight polyethylene, thereby good and prevent that charged function from can reduce the influence of static thereby have resistance to wear.
Claims (6)
1. contactless carrying plate with absorption affinity, it comprises: the lower plate (110) that is provided with cell (112); Be superimposed upon the top of described lower plate (110) and have the middle plate (120) of a plurality of combined holes (121) that are communicated with described cell (112); Be superimposed upon described in plate (120) top and have the upper plate (130) of the fumarole (131) that is communicated with described combined hole (121); Insert, be fixed on described fumarole (131) thus in accommodate the air of described cell (112), and guide into and described fumarole (131) between jet bolt (140) in the space that produces, it is characterized in that,
Be provided with towards the head (145) of top oblique line directions ejection air in the upper end of described jet bolt (140), and be to extend wide more oblique line (146) more towards the top below the described head (145), the upper end of described fumarole (131) forms rounding (134), is provided with the groove (147) of depression on described jet bolt (140).
2. the contactless carrying plate with absorption affinity according to claim 1, it is characterized in that, the bottom of described jet bolt (140) is carried out bolt with described combined hole (121) and is connected, and is provided with mutual corresponding chimb (142,132) on the inner peripheral surface of the outer peripheral face of described jet bolt (140) and described fumarole (131).
3. the contactless carrying plate with absorption affinity according to claim 1, it is characterized in that, be provided with the aspirating unit (143) that guides air from the bottom of described jet bolt (140) to the middle part along direction of principal axis, and be provided with the exhaust duct (144) that the four directions connects on the outer peripheral face of described jet bolt (140) in the upper end of described aspirating unit (143).
4. the contactless carrying plate with absorption affinity according to claim 1 is characterized in that described groove (147) is formed by driving hole, to tighten or to turn on described jet bolt (140).
5. the contactless carrying plate with absorption affinity according to claim 1 is characterized in that, is provided with a plurality of air vent holes (113,123,133) so that air above described upper plate (130), lead to described lower plate (110) below.
6. the contactless carrying plate with absorption affinity according to claim 1 is characterized in that described upper plate (130) is become by ultrahigh molecular weight polyethylene.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020080060221A KR100876337B1 (en) | 2008-06-25 | 2008-06-25 | Noncontact conveying plate having a suction |
| KR10-2008-0060221 | 2008-06-25 | ||
| PCT/KR2009/002393 WO2009157647A2 (en) | 2008-06-25 | 2009-05-07 | Non-contact type conveyor plate having a suction force |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102077337A true CN102077337A (en) | 2011-05-25 |
| CN102077337B CN102077337B (en) | 2012-10-31 |
Family
ID=40373307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801246877A Expired - Fee Related CN102077337B (en) | 2008-06-25 | 2009-05-07 | Non-contact type conveyor plate having a suction force |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100876337B1 (en) |
| CN (1) | CN102077337B (en) |
| WO (1) | WO2009157647A2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103373606A (en) * | 2012-04-24 | 2013-10-30 | 李在成 | Conveying plate for large area panel |
| CN112278862A (en) * | 2020-10-13 | 2021-01-29 | 南京多脉智能设备有限公司 | Friction-free pneumatic type glass panel carrier manipulator |
| JP7437187B2 (en) | 2020-02-26 | 2024-02-22 | Ｊｓｗアクティナシステム株式会社 | Levitation conveyance device and laser processing device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100916932B1 (en) | 2009-02-24 | 2009-09-15 | 이재성 | Noncontact conveying plate |
| KR100916933B1 (en) | 2009-03-20 | 2009-09-15 | 이재성 | Noncontact conveying plate |
| KR100913298B1 (en) | 2009-04-01 | 2009-08-26 | 이재성 | Conveying plate using vacuum |
| KR100938355B1 (en) | 2009-10-23 | 2010-01-22 | 이재성 | Noncontact conveying plate |
| KR101282902B1 (en) * | 2010-05-25 | 2013-07-05 | 주식회사 에이엠에이치시스템즈 | Noncontact Conveying Plate Using Coanda Effect |
| KR101234017B1 (en) | 2010-08-03 | 2013-02-18 | 주식회사 에스에프에이 | Noncontact conveying apparatus |
| KR101276064B1 (en) * | 2011-02-15 | 2013-06-17 | 박봉선 | Non-contact Plate Transferring Device |
| KR101402692B1 (en) | 2013-05-24 | 2014-06-03 | 이성 주식회사 | Air floating stage |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4493742B2 (en) * | 1998-10-12 | 2010-06-30 | 株式会社渡辺商行 | Gas ejection structure for levitation conveyor |
| JP2008505041A (en) * | 2004-07-09 | 2008-02-21 | オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト | Gas bearing substrate loading mechanism |
| JP2006347719A (en) * | 2005-06-17 | 2006-12-28 | Shinko Electric Co Ltd | Gas floating unit and gas floating carrying device |
| KR100650290B1 (en) * | 2005-11-23 | 2006-11-27 | (주)넥스트인스트루먼트 | Noncontact conveying plate |
| JP2007324442A (en) * | 2006-06-02 | 2007-12-13 | Smc Corp | Noncontact transfer apparatus |
-
2008
- 2008-06-25 KR KR1020080060221A patent/KR100876337B1/en active IP Right Grant
-
2009
- 2009-05-07 WO PCT/KR2009/002393 patent/WO2009157647A2/en active Application Filing
- 2009-05-07 CN CN2009801246877A patent/CN102077337B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103373606A (en) * | 2012-04-24 | 2013-10-30 | 李在成 | Conveying plate for large area panel |
| CN103373606B (en) * | 2012-04-24 | 2016-12-28 | 李在成 | Large size panel delivery board |
| JP7437187B2 (en) | 2020-02-26 | 2024-02-22 | Ｊｓｗアクティナシステム株式会社 | Levitation conveyance device and laser processing device |
| CN112278862A (en) * | 2020-10-13 | 2021-01-29 | 南京多脉智能设备有限公司 | Friction-free pneumatic type glass panel carrier manipulator |
| CN112278862B (en) * | 2020-10-13 | 2022-09-27 | 南京多脉智能设备有限公司 | Friction-free pneumatic type glass panel carrier manipulator |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009157647A2 (en) | 2009-12-30 |
| CN102077337B (en) | 2012-10-31 |
| WO2009157647A3 (en) | 2010-02-25 |
| KR100876337B1 (en) | 2008-12-29 |
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