JP4493742B2 - Gas ejection structure for levitation conveyor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a gas ejection structure for a levitation transport apparatus. More specifically, the present invention relates to a gas ejection structure for a levitation conveyance device that can prevent deformation of a sealing plate constituting the conveyance plate. The present invention is suitably used for a levitation conveyance device or a levitation conveyance system for carrying an air current such as a glass plate used in a liquid crystal display or the like, or a wafer on which a semiconductor device is formed.
[0002]
[Prior art]
As a system that floats and transports a plate-like substrate, for example, there is a system that transports a glass plate for a TFT type liquid crystal display. This transport system is shown in FIG. This transport system is configured by combining the transfer unit 100 and the control unit 200. The transfer unit 100 floats the rectangular glass plate 300 and moves it in the direction of movement 310. The control unit 200 stops and stops in a state where the glass plate 300 is floated, and changes the direction in the change direction 311. Furthermore, although not shown, the transport system includes a processing unit that performs various processes on the glass plate 300.
[0003]
The transfer unit 100 is usually connected and used in order to move the glass plate 300 linearly. An example of the transfer unit 100 is shown in FIG. The transfer unit 100 includes a base 110 and an enclosure member 120. A supply system 111 for supplying a gas for floating the glass plate 300, for example, nitrogen gas, argon gas, dry air, or other gas that does not affect the glass plate 300 is piped on the base 110. A surface 112 of the base 110 covered by the enclosure member 120 is a transport surface of the transport path, and a plurality of ejection holes 113 are formed in the transport surface 112.
[0004]
As shown in FIG. 40, the ejection holes 113 are inclined with respect to the conveying surface 112, and the inclination direction of the ejection holes 113 is inclined toward the center 112 </ b> A of the moving direction 310 of the glass plate 300. In addition to the ejection holes 113, as shown in FIG. 41, the ejection ejection holes 115 are arranged parallel to the moving direction 310 of the glass plate 300 and inclined with respect to the transport surface 112. ing. The ejection holes 113 and 115 are formed between the conveying surface 112 and the gas chambers 114 and 116. The gas chambers 114 and 116 communicate with the supply system 111, respectively.
[0005]
The gas supplied from the supply system 111 by the ejection holes 113 and 115 is ejected from the ejection holes 113 and 115 through the gas chambers 114 and 116. The ejection direction of the gas from the ejection holes 113 and 115 is inclined obliquely upward with respect to the conveying surface 112, and the ejection hole 113 is perpendicular to the moving direction 310 and the ejection holes 115 are parallel to each other. . Such gas ejection is represented in plan by the ejection directions 113A and 115A in FIG.
[0006]
Thus, the glass plate 300 floats and moves in the moving direction 310 by the gas ejected from the ejection holes 113 and 115 in the ejection directions 113A and 115A, and at the same time, the center of the glass plate 300 follows the center 112A of the conveying surface 112. Therefore, the side surface of the glass plate 300 does not contact the side wall of the enclosure member 120. That is, the glass plate 300 moves in a non-contact state with respect to the conveyance surface 112 and the enclosure material 120.
[0007]
The control unit 200 receives the glass plate 300 sent from the transfer unit 100, and stops the glass plate 300, changes the stationary and moving direction, rotates the glass plate 300 itself, and the like. The control unit 200 includes a base 210 and an enclosure 220 as shown in FIG. As with the base 110, a supply system 211 that supplies gas for floating the glass plate 300 is piped to the enclosure member 220. A surface 212 of the base 210 covered by the enclosing material 220 is a transport surface of the transport path, and the transport surface 212 has a suction port and a plurality of ejection holes.
[0008]
As shown in FIG. 44, a suction port 213 is opened at the center of the transport surface 212. The suction port 213 sucks the gas in the vicinity of the center and makes the glass plate 300 stand still while floating. Around the suction port 213, setting lines 221 to 224 are set in order from the inside.
[0009]
In the setting line 222, an ejection hole 215 is opened. The ejection hole 215 is formed obliquely upward with respect to the transport surface 212 as in the ejection hole 113, but the gas ejection direction is a counterclockwise ejection direction 215A. The glass plate 300 rotates counterclockwise by the gas from the ejection hole 215.
[0010]
Further, an ejection hole 216 is opened in the setting line 222. The ejection holes 216 are formed obliquely upward with respect to the transport surface 212 as in the ejection holes 113, but the gas ejection direction is the clockwise ejection direction 216A. The glass plate 300 is rotated clockwise by the gas from the ejection holes 216.
[0011]
In the setting lines 221, 223, and 224, ejection holes 214, 217, and 218 are opened. The ejection holes 214, 217, and 218 are opened obliquely upward with respect to the transport surface 212, as with the ejection holes 113. Gases from the ejection holes 214, 217, and 218 are ejected in ejection directions 214A, 217A, and 218A toward the suction port 213. The center of the glass plate 300 is positioned at the suction port 213 by the gas from the ejection directions 214A, 217A, and 218A.
[0012]
Further, the control unit 200 is provided with ejection holes 251 to 253 for propulsion and capture of the glass plate 300 in two rows of setting lines 225 and 226, respectively. The ejection hole 251 ejects gas in the ejection direction 251A that is 180 degrees opposite to the movement direction 310 of the glass plate 300, and the ejection hole 252 ejects gas in the ejection direction 252A that is the same direction as the movement direction 310. .
[0013]
The ejection hole 253 ejects gas in the ejection direction 253 </ b> A that is the same direction as the conversion direction 311 of the glass plate 300.
[0014]
When the glass plate 300 enters the control unit 200 from the movement direction 310, the ejection holes 215 eject gas in the direction opposite to the movement direction 310. Thereby, the glass plate 300 is captured by the decelerating action of the ejected gas and is smoothly stopped at the center of the transport surface 212. As a result, the glass plate 300 can be smoothly stopped and rotated. For example, when the glass plate 300 is turned in the turning direction 311, the ejection holes 253 eject gas. The glass plate 300 is propelled in the conversion direction 311 by the ejected gas.
[0015]
By such an operation, the direction of the glass plate 300 is changed. In addition, when sending out the glass plate 300 in the same direction as the moving direction 310, the ejection hole 252 ejects gas.
[0016]
A processing system for the glass plate 300 is constructed by combining the transfer system configured by the transfer unit 100 and the control unit 200 and various processing units. An example of such a transport system is shown in International Application No. PCT / JP91 / 01469.
[0017]
By the way, the base 110 of the transfer unit 100 and the base 210 of the control unit 200 are made as follows. For example, in the case of the transfer unit 100, the base 110 includes a transport plate 110A as shown in FIG. The conveyance plate 110 </ b> A includes a processed plate 130 and a sealing plate 140.
[0018]
Conventionally, processing on the processed plate 130 has been performed as follows. That is, as shown in FIG. 46, a hole 132 was drilled from the lower surface 131 of the processed plate 130 by a drill (not shown). The diameter of the hole 132 was about several mm, and the drilling was performed from the direction perpendicular to the lower surface 131. The drill is set in advance on a processing machine (not shown) for processing the processed plate 130.
[0019]
When the formation of the hole 132 was completed, the hole 134 was formed toward the hole 132 from the upper surface 133 of the processed plate 130 as shown in FIG. The hole 134 has a diameter of about 0.3 to 1 mm and penetrates the hole 132. The hole 134 was drilled from a direction inclined with respect to the upper surface 133 by a drill (not shown).
[0020]
Thus, the hole 132 and the hole 134 were formed in the processed plate 130. The hole 132 is the gas chamber 114 or the gas chamber 116, and the hole 134 is the ejection hole 113 or the ejection hole 115.
[0021]
When the formation of the ejection holes 113 and 115 and the gas chambers 114 and 116 with respect to the processed plate 130 was completed, grooves 135 and 136 were provided in the lower surface 131 of the processed plate 130 as shown in FIG. At this time, a groove 135 was provided so as to connect only the gas chamber 114, and a groove 136 was provided so as to connect only the gas chamber 116.
[0022]
When the formation of the grooves 135 and 136 was completed, as shown in FIG. 45, the sealing plate 140 was attached to the lower surface 131, and the grooves 135 and 136 on the lower surface 131 were sealed independently of each other. A supply system was formed in the transfer unit 100 by these grooves 135 and 136. Instead of the processed plate 130 having the grooves 135 and 136, the sealing plate 140 may have a groove.
[0023]
In this way, the transport plate 110 </ b> A was made by the processed plate 130 and the sealing plate 140. Furthermore, the supply system in 110 A of conveyance boards was connected to the supply system 111 through the valve | bulb etc. which control the flow of gas, and the base 110 was made. Similarly, the base 210 of the control unit 200 was also made of a processed plate and a sealing plate.
[0024]
However, this technique has the following problems. That is, the processing plate or the sealing plate of the transfer unit 100 and the control unit 200 is configured to include a supply system groove. For this reason, there is a problem that the thickness of the processed plate or the sealing plate is reduced at the groove portion, and the warpage of the plate occurs in the processed plate or the sealing plate. The workability for attaching the sealing plate 140 to the processed plate 130 deteriorates due to the warp of the plate. Further, the state of close contact between the processed plate 130 and the sealing plate 140 is also deteriorated, and gas leakage occurs.
[0025]
As described above, according to the conventional technique, there are the following problems. That is, in order to provide a supply system for supplying gas to the ejection holes in the transport plate, a groove for flowing gas is required for the processed plate and the sealing plate. As a result, the processed plate and the sealing plate are warped, the workability for handling the processed plate and the sealing plate is deteriorated, and further, there is a problem that the supplied gas leaks.
[0026]
[Problems to be solved by the invention]
It is an object of the present invention to provide a gas ejection structure for a levitation transport device that can prevent deformation of a sealing plate constituting the transport plate.
[0027]
[Means for Solving the Problems]
A gas ejection structure for a levitation conveyance apparatus according to the present invention includes a conveyance plate that floats a plate-like substrate with gas ejected from a conveyance surface, and a supply system that supplies gas to the conveyance plate, and the conveyance plate is a processed plate. And a sealing plate, the working plate is provided with a plurality of ejection portions for ejecting gas supplied from the lower surface from the upper conveying surface, and the sealing plate is attached to the lower surface of the processing plate In the gas jetting structure for a conveying device, the sealing plate includes a flow path forming portion and a sealing portion, and the flow path forming portion is attached to the lower surface of the processed plate, and is grouped according to the jetting direction. Supply holes for allowing the gas from the supply system to flow into the jetted part, and the sealing portion is attached to the flow path forming portion so as to cover the lower surface of the flow path forming portion. It is characterized by that.
[0028]
According to the present invention, an internal supply system in the transport plate for flowing a gas from an external supply system is formed by the flow path forming portion and the sealing portion. Thereby, the gas from an external supply system is sent to the ejection part through the flow path forming part. As a result, since it becomes unnecessary to provide the sealing plate with a groove for flowing a gas from an external supply system in the grouped ejection parts, it is possible to prevent the deformation of the sealing plate.
[0029]
A gas ejection structure for a levitation conveyance apparatus according to the present invention includes a conveyance plate that floats a plate-like substrate with gas ejected from a conveyance surface, and a supply system that supplies gas to the conveyance plate, and the conveyance plate is a processed plate. And a sealing plate, and the processed plate includes a plurality of ejection portions that eject gas supplied from a lower surface from a conveying surface, which is an upper surface, and the sealing plate is attached to the lower surface of the processed plate In the gas ejection structure for the conveying device, the sealing plate includes a flow path forming portion and a sealing portion, and the flow path forming portion has an upper surface attached to the lower surface of the processed plate and according to the ejection direction. Supply holes for allowing gas to flow to the grouped jetting portions, respectively, and the sealing portion is attached to the flow path forming portion so as to cover the lower surface of the flow path forming portion, and the supply system Flowing gas from each of the supply holes And butterflies.
[0030]
According to the present invention, an internal supply system in the transport plate for flowing a gas from an external supply system is formed by the flow path forming portion and the sealing portion. Thereby, the gas from the supply system is sent to the ejection part through the sealing part and the flow path forming part. As a result, since it becomes unnecessary to provide the sealing plate with a groove for flowing a gas from an external supply system in the grouped ejection parts, it is possible to prevent the deformation of the sealing plate.
[0031]
A gas ejection structure for a levitation conveyance apparatus according to the present invention includes a conveyance plate that floats a plate-like substrate with gas ejected from a conveyance surface, and a supply system that supplies gas to the conveyance plate, and the conveyance plate is a processed plate. And a sealing plate, and the upper surface of the processed plate is the conveying surface, and the sealing plate is attached so as to cover the lower surface of the processed plate. Comprises a plate portion and a flow path forming portion, and the plate portion has an upper surface as the transport surface, and has a plurality of ejection holes penetrating from the upper surface to the lower surface, and the flow path forming portion corresponds to the ejection direction. The ejection holes grouped together are provided with supply holes for flowing gas from the supply system, and the lower surface of the plate portion is attached to the upper surface.
[0032]
According to the present invention, an internal supply system in the transport plate for flowing gas from an external supply system is formed by the flow path forming portion of the processed plate and the sealing plate. Thereby, the gas from the external supply system is sent to the ejection hole through the flow path forming portion. As a result, since it becomes unnecessary to provide the sealing plate with a groove for flowing gas from the supply system in the grouped ejection holes, it is possible to prevent the deformation of the sealing plate.
[0033]
A gas ejection structure for a levitation conveyance apparatus according to the present invention includes a conveyance plate that floats a plate-like substrate with gas ejected from a conveyance surface, and a supply system that supplies gas to the conveyance plate, and the conveyance plate is a processed plate. And a sealing plate, and the upper surface of the processed plate is the conveying surface, and the sealing plate is attached so as to cover the lower surface of the processed plate. Comprises a plate portion and a flow path forming portion, and the plate portion has an upper surface as the transport surface, and has a plurality of ejection holes penetrating from the upper surface to the lower surface, and the flow path forming portion corresponds to the ejection direction. Supply holes for flowing gas to the ejection holes grouped together, and the lower surface of the plate portion is attached to the upper surface, and the sealing plate is configured to supply the gas from the supply system to the supply holes. It is characterized by flowing in.
[0034]
According to the present invention, an internal supply system in the transport plate for flowing gas from an external supply system is formed by the flow path forming portion of the processed plate and the sealing plate. Thereby, the gas from an external supply system is sent to the ejection hole through the sealing plate and the flow path forming portion. As a result, it becomes unnecessary to provide the sealing plate with a groove for flowing a gas from an external supply system in the grouped ejection holes, so that the deformation of the sealing plate can be prevented.
[0035]
DETAILED DESCRIPTION OF THE INVENTION
[Embodiment 1]
Next, the first embodiment of the present invention will be described in detail with reference to FIGS. FIG. 1 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to the first embodiment. FIG. 2 is a cross-sectional view showing a II cross section of the flow path forming portion of FIG. FIG. 3 is a cross-sectional view showing a II-II cross section of FIG. FIG. 4 is a cross-sectional view showing a state of assembly of the transport plate according to the first embodiment.
[0036]
The gas ejection structure for the levitation transport apparatus according to Embodiment 1 is applied to the transport plate of the transfer unit. The transfer unit is one of the levitation transfer devices used in the airflow transfer system. As shown in FIG. 1, the gas ejection structure for the levitation conveyance apparatus of the first embodiment has a conveyance surface A ₁ A transport plate A that floats a plate-like substrate (for example, a glass plate) with a gas ejected from the air supply, and a supply system that supplies gas to the transport plate A are provided. The conveying plate A includes a processed plate 1 and a sealing plate 2, and the processed plate 1 is a conveying surface A whose upper surface is gas supplied from the lower surface. ₁ Are provided with a plurality of ejection portions (ejection hole 1A and its gas chamber, ejection hole 1B and its gas chamber). A sealing plate 2 is attached to the lower surface of the processed plate 1. In this gas ejection structure for the levitation transport apparatus, the sealing plate 2 includes a flow path forming portion 2A and a sealing portion 2B. The flow path forming portion 2A has an upper surface attached to the lower surface of the processed plate 1 and includes supply holes for flowing gas from the supply system to the ejection portions grouped according to the ejection direction. The sealing portion 2B is attached to the flow path forming portion 2A so as to cover the lower surface of the flow path forming portion 2A.
[0037]
The processed plate 1 is the same as the processed plate 130 shown in FIG. ₁ Includes the same ejection hole 1A as the ejection holes 113 and 115 shown in FIG. ₁ , 1B ₁ Is open to the bottom.
[0038]
The flow path forming portion 2 </ b> A is a plate-like body having the same vertical and horizontal lengths as the processed plate 1. As shown in FIG. 2, the flow path forming portion 2A has jet holes 1A arranged in six rows. ₁ No gas chamber 1A ₂ Rectangular supply hole 2A for flowing gas through ₁ ~ 2A ₆ Is open. Supply hole 2A ₁ ~ 2A ₆ Are arranged parallel to each other along the moving direction 310. As shown in FIG. 3, the supply hole 2A ₁ One end of the side surface 2A of the flow path forming portion 2A _{twenty one} It extends to. Supply hole 2A ₁ The other end of the supply hole 2A ₇ 2A supply hole ₂ ~ 2A ₆ It is connected with the end.
[0039]
Further, the flow passage forming portion 2A has an ejection hole 1B. ₁ No gas chamber 1B ₂ 2A rectangular supply holes for flowing gas into each row ₁₁ , 2A ₁ 2 is open. Supply hole 2A ₁₁ , 2A ₁₂ The end of the supply hole 2A ₁ 2A of the flow path forming part 2A in the same manner as _{twenty one} It extends to. Supply hole 2A ₁ ~ 2A ₇ , 2A ₁₁ , 2A ₁₂ Is manufactured by stamping.
[0040]
The sealing portion 2B is a plate-like body having the same vertical and horizontal lengths as the flow path forming portion 2A, and covers the flow path forming portion 2A in a close contact state.
[0041]
As shown in FIG. 4, the upper surface 2A of the flow path forming portion 2A _{twenty two} Was attached in close contact with the lower surface 1D of the processed plate 1. As a result, the supply hole 2A of the flow path forming portion 2A ₁ ~ 2A ₇ , 2A ₁₁ , 2A ₁₂ Thus, a supply system in the transport plate A was formed. Thereafter, the lower surface 2A of the flow path forming portion 2A _{twenty three} The sealing portion 2B was attached in close contact with the transfer plate A. The supply plate 2A is formed by the transport plate A thus produced. ₁ ~ 2A ₇ Is the supply hole 2A ₁₁ , 2A ₁₂ It becomes possible to flow gas independently of each other.
[0042]
Furthermore, the supply hole 2A in the conveying plate A is passed through a valve or the like for controlling the gas flow. ₁ And supply hole 2A ₁₁ , 2A ₁₂ Were connected to an external supply system to create a base for the transfer unit.
[0043]
Thus, according to the first embodiment, since the groove for connecting the gas chambers is unnecessary, the sealing plate 2 of the transfer unit can be prevented from warping. And since it is unnecessary to provide a gas chamber, the process with respect to the sealing plate 2 of a transfer unit can be reduced.
[0044]
Moreover, since the flow path forming portion 2A is made by punching, the step of providing a gas chamber can be eliminated, and the processing time for making the transfer plate of the transfer unit can be shortened.
[0045]
[Embodiment 2]
Next, the second embodiment of the present invention will be described in detail with reference to FIG. 5 and FIG. FIG. 5 is a cross-sectional view showing a cross section of the flow path forming portion according to the second embodiment. FIG. 6 is a plan view showing a sealing portion according to the second embodiment.
[0046]
In the gas ejection structure for the levitation transport apparatus according to the second embodiment, the flow path forming portion 3A shown in FIG. 5 and the flow channel forming portion 3A shown in FIG. 6 are shown as corresponding to the flow path forming portion 2A and the sealing portion 2B of the first embodiment. A sealing portion 3B is used. That is, in the second embodiment, the sealing plate includes the flow path forming portion 3A and the sealing portion 3B. The flow path forming portion 3A has an upper surface attached to the lower surface of the processed plate, and supplies gas to the ejection portions (the ejection hole 1A and its gas chamber, the ejection hole 1B and its gas chamber) grouped according to the ejection direction. Supply hole 3A for flowing ₁ ~ 3A ₇ , 3A ₁₁ ~ 3A ₁₃ Each is equipped. The sealing portion 3B is attached to the flow path forming portion so as to cover the lower surface of the flow path forming portion, and the gas from the supply system is supplied to the supply hole 3A. ₁ ~ 3A ₇ , 3A ₁₁ ~ 3A ₁₃ It is characterized by flowing in.
[0047]
The flow path forming portion 3 </ b> A is a plate-like body having the same vertical and horizontal lengths as the processed plate 1. The flow passage forming portion 3A has jet holes 1A arranged in six rows. ₁ No gas chamber 1A ₂ 3A rectangular supply hole for flowing gas into each row ₁ ~ 3A ₆ Is open. Supply hole 3A ₁ ~ 3A ₆ Are arranged parallel to each other along the moving direction 310. Supply hole 3A ₁ ~ 3A ₆ The end of the supply hole 3A ₇ Are connected by
[0048]
Further, the flow passage forming portion 3A has an ejection hole 1B. ₁ No gas chamber 1B ₂ 3A rectangular supply hole for flowing gas into each row ₁₁ , 3A ₁₂ Is open. Supply hole 3A ₁₁ , 3A ₁₂ The end of the supply hole 3A ₁₃ Are connected by Supply hole 3A ₁ ~ 3A ₇ , 3A ₁₁ ~ 3A ₁₃ Is manufactured by stamping.
[0049]
The sealing portion 3B is a plate-like body having the same vertical and horizontal lengths as the flow path forming portion 3A, and covers the lower surface of the flow path forming portion 3A. Supply hole 3A ₇ At the position of the sealing portion 3B corresponding to the connection hole 3B ₁ Is open. The connection hole 3B1 passes through the sealing portion 3B. In the same way, supply hole 3A ₁₃ Corresponding to the connection hole 3B ₂ Is opened in the sealing portion 3B. Connection hole 3B ₁ , 3B ₂ Is manufactured by stamping by pressing.
[0050]
By these flow path forming part 3A and sealing part 3B, a transport plate was made as in the first embodiment. Further, a valve or the like for controlling the gas flow is connected to the connection hole 3B of the sealing portion 3B. ₁ , 3B ₂ The base for the control unit was made.
[0051]
Thus, according to the second embodiment, the supply hole 3A ₁ ~ 3A ₇ , 3A ₁₁ ~ 3A ₁₃ In contrast, the connection hole 3B of the sealing portion 3B ₁ And connection hole 3B ₂ Therefore, the structure for connecting an external supply system to the transport plate can be simplified.
[0052]
[Embodiment 3]
Next, the third embodiment of the present invention will be described in detail with reference to FIGS. FIG. 7 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to the third embodiment. FIG. 8 is a plan view showing the plane of FIG. FIG. 9 is a cross-sectional view taken along the line III-III in FIG. FIG. 10 is a plan view showing a flow path forming portion according to the third embodiment. FIG. 11 is a plan view showing a sealing portion according to the third embodiment. FIG. 12 is a cross-sectional view showing a state of assembly of the transport plate according to the third embodiment.
[0053]
The gas ejection structure for the levitation transport apparatus according to Embodiment 3 is applied to the transport plate of the control unit. The control unit is one of the levitation conveyance devices used in the airflow conveyance system. As shown in FIG. 7, the gas ejection structure for the levitation conveyance apparatus according to the third embodiment includes a conveyance plate B that floats a plate-like substrate (for example, a glass plate) with gas ejected from the conveyance surface B1, and this conveyance plate. And a supply system for supplying gas to B. The conveying plate B includes a processed plate 4 and a sealing plate 5, and the processed plate 4 is a conveying surface B whose upper surface is a gas supplied from the lower surface. ₁ Are provided with a plurality of ejection portions (ejection holes and their gas chambers, ejection holes and their gas chambers). A sealing plate 5 is attached to the lower surface of the processed plate 4. In the gas jetting structure for the levitation transport apparatus, the sealing plate 5 includes a flow path forming portion 5A and a sealing portion 5B. 5 A of flow path formation parts are each equipped with the supply hole for flowing gas with respect to the ejection part grouped according to the ejection direction with the upper surface being attached to the lower surface of the processed plate 4. The sealing portion 5B is attached to the flow path forming portion 5A so as to cover the lower surface of the flow path forming portion 5A, and allows gas from the supply system to flow through the supply holes.
[0054]
The processed plate 4 stops and stops the glass plate in a levitated state, and in order to change the direction of the glass plate, a large number of ejection holes are formed on the conveying surface B. ₁ In preparation. That is, as shown in FIGS. 8 and 9, the upper surface 41 of the processed plate 4. ₁ A suction port 41A is opened at the center of the. Top surface 41 ₁ Is the conveying surface B of the conveying plate B shown in FIG. ₁ It is. The suction port 41A is the same as the suction port 213 in FIG.
[0055]
Around the suction port 41A, there is a setting line 41 in order from the inside. ₁₁ ~ 41 ₁₄ Is set. Setting line 41 ₁₁ In the ejection hole 41B ₁ Is open. Ejection hole 41B ₁ As shown in FIG. 9, the gas chamber 41B ₂ Leads to. Ejection hole 41B ₁ Ejects gas in the ejection direction 42B, that is, counterclockwise. Ejection hole 41B ₁ By the gas from the transfer surface B ₁ The glass plate floating from the counterclockwise rotates. Setting line 41 ₁₂ In the ejection hole 41C ₁ Is open. Jet hole 41C ₁ Is the gas chamber 41C ₂ Leads to. Ejection hole 41C ₁ Ejects gas in the ejection direction 42C, that is, in the clockwise direction. Jet hole 41C ₁ The glass plate is rotated clockwise by the gas from.
[0056]
Setting line 41 ₁₃ , 41 ₁₄ In the ejection hole 41D ₁ , 41E ₁ Is open. Ejection hole 41D ₁ , 41E ₁ Is the gas chamber 41D ₂ , 41E ₂ Leads to. Ejection hole 41D ₁ , 41E ₁ Ejects gas toward the ejection directions 42D and 42E, that is, toward the suction port 41A. Ejection hole 41D ₁ , 41E ₁ The center of the glass plate is positioned at the suction port 41A due to the gas from.
[0057]
Furthermore, the upper surface 41 ₁ Are provided with ejection holes for propulsion and capture of the glass plate. For this purpose, the upper surface 41 ₁ At the three ends, the setting line 41 _{twenty one} ~ 41 _{twenty three} Is set. Setting line 41 _{twenty one} In the ejection hole 41F ₁ Is open. Ejection hole 41F ₁ Is the gas chamber 41F ₂ Leads to. Ejection hole 41F ₁ Ejects gas in the ejection direction 42F, that is, in the movement direction 310. Ejection hole 41F ₁ The glass plate is moved in the moving direction 310 by the gas from. In addition, with respect to the glass plate entering from the direction opposite to the moving direction 310, the ejection hole 41F. ₁ Spouts gas. The glass plate is captured by the decelerating action of the ejected gas.
[0058]
Setting line 41 _{twenty two} In the ejection hole 41G ₁ Is open. Spout hole 41G ₁ Ejects gas in the ejection direction 42G, that is, in the moving direction 311. Spout hole 41G ₁ The glass plate is moved in the moving direction 311 by the gas from. In addition, with respect to the glass plate entering from the opposite side of the moving direction 311, the ejection hole 41 </ b> G ₁ Spouts gas. The glass plate is captured by the decelerating action of the ejected gas.
[0059]
Setting line 41 _{twenty three} In the injection hole 41H ₁ Is open. Ejection hole 41H ₁ Is gas chamber 41H ₂ Leads to. Ejection hole 41H ₁ Ejects gas in the ejection direction 42H, that is, in the direction opposite to the movement direction 310. Ejection hole 41H ₁ The glass plate is moved in the direction opposite to the moving direction 310 by the gas from. In addition, with respect to the glass plate entering from the moving direction 310, the ejection hole 41H ₁ Spouts gas. The glass plate is captured by the decelerating action of the ejected gas.
[0060]
Such suction port 41A and ejection hole 41B ₁ ~ 41H ₁ And the processed plate 4 is made.
[0061]
The sealing plate 5 includes a flow path forming portion 5A and a sealing portion 5B. The flow path forming portion 5 </ b> A is a plate-like body having the same vertical and horizontal lengths as the processed plate 4. As shown in FIG. 10, at the center of the flow path forming portion 5A, a circular suction hole 5A for sucking gas from the suction port 41A. ₁₁ Is open. Suction hole 5A ₁₁ On the outside of each nozzle 41B ₁ Gas chamber 41B ₂ Annular supply hole 5A for supplying gas to the tube ₁₂ Is suction hole 5A ₁₁ Is concentrically spaced around the center. In this case, the gas chamber 41B ₂ All make up one group. Grouping is a collection of gas chambers of multiple orifices with the same function. Supply hole 5A ₁₂ By the disk 5A ₁ Is separated from the flow path forming portion 5A.
[0062]
Supply hole 5A ₁₂ On the outside of each nozzle 41C ₁ Gas chamber 41C ₂ Annular supply hole 5A for supplying gas to the tube ₁₃ But suction hole 5A ₁₁ Is concentrically spaced around the center. In this case, each gas chamber 41C ₂ Constitutes one group. Supply hole 5A ₁₃ The annular disk 5A ₂ Is separated from the flow path forming portion 5A.
[0063]
Supply hole 5A ₁₃ On the outside of the nozzle 41D ₁ , 41E ₁ Gas chamber 41D ₂ , 41E ₂ Four arc-shaped supply holes 5A for supplying gas to ₁₄ Is suction hole 5A ₁₁ Is concentrically spaced around the center. In this case, gas chamber 41D ₂ , 41E ₂ Are divided into four groups. Supply hole 5A ₁₄ On the outside of the nozzle 41F ₁ Gas chamber 41F ₂ 41G ₁ Gas chamber 41G ₂ , 41H ₁ Gas chamber 41H ₂ Rectangular supply hole 5A for supplying gas to the tube ₁₅ , 5A ₁₆ , 5A ₁₇ Is open. Suction hole 5A ₁₁ And supply hole 5A ₁₂ ~ 5A ₁₇ Is formed by stamping by press working.
[0064]
The sealing portion 5B is a plate-like body having the same vertical and horizontal lengths as the flow path forming portion 5A, and covers the lower surface of the flow path forming portion 5A. As shown in FIG. 11, the suction hole 5A ₁₁ In the position of the sealing portion 5B corresponding to the connection hole 5B ₁ Is open. Connection hole 5B ₁ Penetrates the sealing portion 5B. In the same way, supply hole 5A ₁₂ , 5A ₁₃ , 5A ₁₄ Corresponding to the connection hole 5B ₂ , 5B _Three , 5B _Four Is opened in the sealing portion 5B. And supply hole 5A ₁₅ ~ 5A ₁₇ Corresponding to the connection hole 5B _Five ~ 5B ₇ Is opened in the sealing portion 5B.
[0065]
Connection hole 5B ₁ ~ 5B ₇ Is formed by stamping by press working. When the punching is finished, the production of the sealing portion 5B is finished.
[0066]
As shown in FIG. 12, the lower surface 5A of the flow path forming portion 5A _{twenty two} Is the upper surface 5B of the sealing portion 5B _{twenty one} Attached closely. At this time, the upper surface 5B of the sealing portion 5B _{twenty one} In contrast, disk 5A ₁ Is attached so that it is located at the center, and the disk 5A ₂ But the disk 5A ₁ The upper surface 5B so as to be concentric with respect to _{twenty one} Attached to. Thereby, the sealing plate 5 was made.
[0067]
Thereafter, the upper surface 5A of the flow path forming portion 5A _{twenty one} Is the lower surface 41 of the processed plate 4. ₂ The transfer plate 1 was made by being attached in close contact. Further, a valve or the like for controlling the gas flow is provided on the lower surface 5B of the sealing portion 5B. _{twenty two} Connection hole 5B from the side ₁ ~ 5B ₇ The base for the control unit was made.
[0068]
Thus, according to the third embodiment, since the groove for connecting the gas chambers is not required for the sealing plate 5, the sealing plate 5 can be prevented from warping.
[0069]
In addition, since the flow path forming portion 5A and the sealing portion 5B are made by punching, the formation of the flow channel for flowing gas can be simplified, and the manufacturing time of the transport plate B can be shortened.
[0070]
[Embodiment 4]
Next, a fourth embodiment of the present invention will be described in detail with reference to FIGS. FIG. 13 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to the fourth embodiment. 14 is a cross-sectional view showing a IV-IV cross section of the plate portion of FIG. 15 is a cross-sectional view showing a VV cross section of FIG. 13. FIG. 16 is a cross-sectional view showing a VI-VI cross section of FIG. FIG. 17 is a cross-sectional view illustrating a state of assembly of the transport plate according to the fourth embodiment.
[0071]
The gas ejection structure for a levitation transport apparatus according to Embodiment 4 is applied to a transport plate of a transfer unit. As shown in FIG. 13, the gas ejection structure for the levitation transport apparatus of the fourth embodiment has a transport surface C. ₁ The conveyance board C which floats a plate-shaped base | substrate (for example, glass plate) with the gas which ejects from this, and the supply system which supplies gas to this conveyance board C are provided. The conveyance plate C includes a processing plate 6 and a sealing plate 7. The upper surface of the processed plate 6 is a conveyance surface C <b> 1, and the sealing plate 7 is attached so as to cover the lower surface of the processed plate 6. In the gas jetting structure for the levitation transport apparatus, the processed plate 6 includes a plate portion 6A and a flow path forming portion 6B. The upper surface of the plate portion 6A is the conveying surface C ₁ A plurality of ejection holes 6A penetrating from the upper surface to the lower surface ₁ , 6A ₂ It has. The flow path forming portion 6B is composed of the ejection holes 6A grouped according to the ejection function. ₁ , 6A ₂ On the other hand, a supply hole for flowing gas from the supply system is provided, and the lower surface of the plate portion 7 is attached to the upper surface.
[0072]
That is, the plate portion 6A has the same ejection hole 6A as the ejection hole 113 of FIG. ₁ , And the same ejection hole 6A as the ejection hole 115 ₂ Is open. As shown in FIG. ₁ , 6A ₂ Is the upper surface 6A11 to the lower surface 6A of the plate portion 6A. ₁₂ Has penetrated. Upper surface 6A of plate portion 6A ₁₁ Is the conveying surface C of the conveying plate C ₁ It is.
[0073]
As shown in FIG. 15, the flow path forming portion 6B is a plate-like body having the same length and width as the plate portion 6A. The flow path forming part 6B has jet holes 6A arranged in six rows. ₁ Rectangular supply hole 6B for flowing gas into each row ₁ ~ 6B ₆ Is open. Supply hole 6B ₁ ~ 6B ₆ Are arranged parallel to each other along the moving direction 310. As shown in FIG. 16, the supply hole 6B ₁ One end of the side surface 6B of the flow path forming portion 6B _{twenty one} It extends to. Supply hole 6B ₁ The other end of the supply hole 6B ₇ By supply hole 6B ₂ ~ 6B ₆ It is connected with the end.
[0074]
Further, the flow path forming portion 6B has an ejection hole 6A. ₂ Rectangular supply hole 6B for flowing gas into each row ₁₁ , 6B ₁₂ Is open. Supply hole 6B ₁₁ , 6B ₁₂ The end of the supply hole 6B ₁ Side face 6B of plate-like body like _{twenty one} It extends to. Supply hole 6B ₁ ~ 6B ₇ , 6B ₁₁ , 6B ₁₂ Is manufactured by stamping.
[0075]
The sealing plate 7 is a plate-like body having the same vertical and horizontal lengths as the flow path forming portion 6B, and covers the lower surface of the flow path forming portion 6B.
[0076]
As shown in FIG. 17, the lower surface 6A of the plate portion 6A. ₁₂ Is the upper surface 6B of the flow path forming portion 6B _{twenty two} The processed board 6 was made by attaching closely to the substrate. Thereafter, the sealing plate 7 is a lower surface 6B of the flow path forming portion 6B. _{twenty three} Was attached in close contact with each other to form a conveying plate C. The supply hole 6B is formed by the transport plate C made in this way. ₁ ~ 6B ₆ Is the supply hole 6B ₁₁ , 6B ₁₂ It becomes possible to flow gas independently of each other.
[0077]
Furthermore, the supply hole 6B in the conveying plate C is passed through a valve or the like for controlling the gas flow. ₁ And supply hole 6B ₁₁ , 6B ₁₂ Were connected to the supply system to create a base for the transfer unit.
[0078]
Thus, according to the fourth embodiment, since the groove for connecting the gas chambers is not necessary, the processed plate 6 of the transfer unit can be prevented from warping. And since it is unnecessary to provide a gas chamber in the conveyance board C, the process with respect to the processed board 6 of a transfer unit can be reduced.
[0079]
Moreover, since the flow path forming portion 6B is made by punching, the step of providing a gas chamber can be eliminated, and the processing time for making the transfer plate of the transfer unit can be shortened.
[0080]
[Embodiment 5]
Next, the fifth embodiment of the present invention will be described in detail with reference to FIG. 18 and FIG. FIG. 18 is a cross-sectional view showing a cross section of the flow path forming portion according to the fifth embodiment. FIG. 19 is a plan view showing a sealing plate according to the fifth embodiment.
[0081]
In the gas ejection structure for the levitation transport apparatus according to the fifth embodiment, the flow path forming portion 6B and the sealing plate 7 of the fourth embodiment are used as the flow path forming portion 8 shown in FIG. 18 and the sealing plate 9 shown in FIG. And are used. That is, in the fifth embodiment, the processed plate is composed of the plate portion and the flow path forming portion 8. The upper surface of the plate portion is a conveying surface, and a plurality of ejection holes 6A penetrating from the upper surface to the lower surface. ₁ , 6A ₂ It has. The flow path forming portion 8 is composed of the ejection holes 6A grouped according to the ejection direction. ₁ , 6A ₂ Are provided with supply holes 8A to 8J for flowing gas, and the lower surface of the plate portion 6A is attached to the upper surface. The sealing plate 9 allows the gas from the supply system to flow through the supply holes 8A to 8J.
[0082]
That is, the flow path forming portion 8 is a plate-like body having the same length as the plate portion 6A in the vertical and horizontal directions. The flow path forming portion 8 has jet holes 6A of plate portions 6A arranged in six rows. ₁ The rectangular supply holes 8A to 8F for allowing a gas to flow through each of the columns are opened. The supply holes 8 </ b> A to 8 </ b> F are arranged in parallel to each other along the movement direction 310. The ends of the supply holes 8A to 8F are connected by the supply hole 8G.
[0083]
Further, the flow path forming portion 8 has an ejection hole 6A of the plate portion 6A. ₂ The rectangular supply holes 8H and 8I for allowing the gas to flow through each of the columns are opened. The ends of the supply holes 8H and 8I are connected by a supply hole 8J. The supply holes 8A to 8J are manufactured by punching by pressing.
[0084]
The sealing plate 9 is a plate-like body having the same vertical and horizontal length as that of the plate portion 8 and covers the lower surface of the flow path forming portion 8. A connection hole 9A is opened at the position of the sealing plate 9 corresponding to the supply hole 8G. The connection hole 9A penetrates the sealing plate 9. In the same manner, the connection hole 9B is opened in the sealing plate 9 corresponding to the supply hole 8J.
[0085]
The connection holes 9A and 9B are formed by punching by pressing. When the punching is finished, the production of the sealing plate 9 is finished.
[0086]
The flow path forming portion 8 and the sealing plate 9 made a transport plate as in the fourth embodiment. Further, a valve or the like for controlling the gas flow was connected to the connection holes 9A and 9B of the sealing plate 9, and a base for the transfer unit was made.
[0087]
Thus, according to the fifth embodiment, since the control for flowing the gas may be performed on the connection hole 9A and the connection hole 9B of the sealing plate 9, the structure of the transport plate is simplified. be able to.
[0088]
[Embodiment 6]
Next, the sixth embodiment of the present invention will be described in detail with reference to FIGS. FIG. 20 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to the sixth embodiment. FIG. 21 is a plan view showing the plane of FIG. 22 is a cross-sectional view showing a VII-VII cross section in FIG. 21. FIG. 23 is a plan view showing a flow path forming portion according to the sixth embodiment. FIG. 24 is a plan view showing a sealing plate according to the sixth embodiment. FIG. 25 is a cross-sectional view showing a state of assembly of the transport plate according to the sixth embodiment.
[0089]
The gas ejection structure for the levitation transport apparatus according to the sixth embodiment is applied to the transport plate of the control unit. As shown in FIG. 20, the gas ejection structure for the levitation transport apparatus according to the sixth embodiment has a transport surface D. ₁ The conveyance board D which floats a plate-shaped base | substrate (for example, glass plate) with the gas which ejects from this, and the supply system which supplies gas to this conveyance board D are provided. The conveyance plate D includes a processing plate 10 and a sealing plate 14. The upper surface of the processed plate 10 is the conveying surface D ₁ The sealing plate 14 is attached so as to cover the lower surface of the processed plate 10. In the gas ejection structure for the levitation transport apparatus, the processed plate 10 includes a plate portion 11 and a flow path forming portion 12. As for the plate part 11, an upper surface is a conveyance surface D ₁ And a plurality of ejection holes penetrating from the upper surface to the lower surface. The flow path forming portion 12 includes supply holes for flowing gas to the ejection holes grouped according to the ejection direction, and the lower surface of the plate portion 11 is attached to the upper surface. The sealing plate 14 causes the gas from the supply system to flow through each supply hole.
[0090]
As shown in FIG. 21, the upper surface 11 of the plate portion 11 ₁ A suction port 11A is opened at the center of the. Top surface 11 ₁ Is the transport surface D of the transport plate D ₁ It is. The suction port 11A is the same as the suction port 213 in FIG. Further, as shown in FIG. 22, the suction port 11 </ b> A is provided on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated.
[0091]
Around the suction port 11A, the setting line 11 is arranged in order from the inside. ₁₁ ~ 11 ₁₄ Is set. Setting line 11 ₁₁ The ejection hole 11B is opened. The ejection hole 11 </ b> B is formed on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated. Conveying surface D by gas from ejection hole 11B ₁ The glass plate floating from the counterclockwise rotates. Setting line 11 ₁₂ 11C has an ejection hole 11C. The ejection hole 11C has an ejection direction 11C. ₁ That is, the gas is ejected clockwise.
[0092]
Setting line 11 ₁₃ , 11 ₁₄ Are provided with ejection holes 11D and 11E. The ejection holes 11D and 11E are formed on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated. The ejection holes 11D and 11E are in the ejection direction 11D. ₁ , 11E ₁ That is, gas is ejected toward the suction port 11A.
[0093]
Furthermore, the top surface 11 ₁ Are provided with ejection holes for propulsion and capture of the glass plate. For this purpose, the top surface 11 ₁ At the three ends, the setting line 11 _{twenty one} ~ 11 _{twenty three} Is set. Setting line 11 _{twenty one} Has an ejection hole 11F. The ejection hole 11 </ b> F is formed on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated. The ejection hole 11 </ b> F ejects gas in the movement direction 310.
[0094]
Setting line 11 _{twenty two} 11G has an ejection hole 11G. The ejection hole 11 </ b> G is formed on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated. The ejection hole 11 </ b> G ejects gas in the movement direction 311.
[0095]
Setting line 11 _{twenty three} The ejection hole 11H is opened. The ejection hole 11 </ b> H is formed on the upper surface 11 of the plate portion 11. ₁ From bottom 11 ₂ Has penetrated. The ejection holes 11H eject gas in the direction opposite to the movement direction 310.
[0096]
The suction port 11A and the ejection holes 11B to 11H are opened to form the plate portion 11.
[0097]
The flow path forming portion 12 is a plate-like body having the same vertical and horizontal lengths as the plate portion 11. As shown in FIG. 23, a circular suction hole 12A for supplying gas to the suction port 11A is opened at the center of the flow path forming portion 12. Outside the suction hole 12A, an annular supply hole 12B for supplying gas to each of the ejection holes 11B is concentrically formed around the suction hole 12A. In this case, all the ejection holes 11B constitute one group. The disk 12 is provided by the supply hole 12B. ₁ Is separated from the flow path forming portion 12.
[0098]
On the outside of the supply hole 12B, an annular supply hole 12C for supplying gas to each of the ejection holes 11C is formed concentrically around the suction hole 12A. In this case, each ejection hole 11C forms one group. An annular disk 12A is provided by the supply hole 12C. ₂ Is separated from the flow path forming portion 12.
[0099]
Outside the supply hole 12C, four arc-shaped supply holes 12D for supplying gas to the ejection holes 11D and 11E are concentrically formed around the suction hole 12A. In this case, the ejection holes 11D and 11E are divided into four groups. Outside the supply hole 12D, rectangular supply holes 12E to 12G for supplying gas to the ejection holes 11F to 11H are opened. The suction holes 12A and the supply holes 12B to 12G are formed by punching by pressing.
[0100]
The sealing plate 14 is a plate-like body having the same vertical and horizontal lengths as the flow path forming portion 12 and covers the lower surface of the flow path forming portion 12. As shown in FIG. 24, a connection hole 14A is opened at the position of the sealing plate 14 corresponding to the suction hole 12A. The connection hole 14A passes through the sealing plate 14. Similarly, connection holes 14B and 14C are opened in the sealing plate 14 corresponding to the supply holes 12B and 12C, and connection holes 14D are opened in the sealing plate 14 corresponding to the respective supply holes 12D. . Then, connection holes 14E to 14G are opened in the sealing plate 14 corresponding to the supply holes 12E to 12G. The connection holes 14A to 14G are manufactured by punching by pressing.
[0101]
As shown in FIG. 25, the upper surface 12 of the flow path forming portion 12. ₁₁ Is the lower surface 11 of the plate portion 11 ₂ It is attached in close contact with. At this time, the lower surface 11 of the plate portion 11 ₂ On the other hand, the disk 12 ₁ Is mounted in the center, and the disk 12 ₂ Is the disc 12 ₁ It attached to the lower surface 112 so that it might become concentric with respect to. Thereafter, the lower surface 12 of the flow path forming portion 12 ₁₂ Is the upper surface 14 of the sealing plate 14. ₁ Was attached in close contact with each other, and a conveying plate D was made.
[0102]
Further, a valve or the like for controlling the gas flow is provided on the lower surface 14 of the sealing plate 14. ₂ Connected to the connection holes 14A to 14G from the side, a base for the control unit was made.
[0103]
Thus, according to the sixth embodiment, since the groove for connecting the gas chambers is unnecessary, it is possible to prevent the processed plate 10 of the control unit from warping. And since it is not necessary to provide a gas chamber in the processing board 10, the process with respect to the processing board 10 of a control unit can be reduced.
[0104]
Moreover, since the flow path forming portion 12 and the sealing plate 14 are made by punching, the process of providing the gas chamber for each ejection hole can be made unnecessary, and the processing time for making the transport plate D can be shortened. Can do.
[0105]
[Embodiment 7]
Hereinafter, the seventh embodiment of the present invention will be described in detail with reference to FIGS. FIG. 26 is a plan view showing a gas ejection structure for a levitation transport apparatus according to the seventh embodiment. FIG. 27 is an enlarged view showing a partial enlargement of FIG. FIG. 28 is a plan view showing a processing position set on the transport surface. 29 is a cross-sectional view showing a VIII-VIII cross section of FIG. FIG. 30 is a cross-sectional view showing a state of attachment of the engaging body.
[0106]
In the gas ejection structure for the levitation transport apparatus according to the seventh embodiment, the following is used as the plate portion of the transfer unit. That is, as shown in FIGS. 26 and 27, the conveying surface 21 of the plate portion 21. ₁ In addition, a receiving hole 21A is opened. 27 is a broken line portion 21 in FIG. ₂ FIG.
[0107]
As shown in FIG. 28, the receiving hole 21A has a conveying surface 21 on the plate portion of the transfer unit. ₁ Is set at a processing position 21B of the ejection hole of the transfer unit. The receiving hole 21A is a cylindrical hole penetrating the plate portion 21, as shown in FIG. The through direction of the receiving hole 21A is the conveyance surface 21. ₁ Is perpendicular to. That is, the processing for forming the receiving hole 21A is performed at the processing position 21B at the conveyance surface 21. ₁ Is performed from a direction perpendicular to.
[0108]
The engaging body 22 has a cylindrical shape that fits into the receiving hole 21A and has the same diameter as the receiving hole 21A. Upper surface 22 of the engagement body 22 ₁ The bottom surface 22 ₂ An ejection hole 22A penetrating through is formed.
[0109]
The engagement body 22 is produced as follows. That is, a round bar-shaped chip having the same diameter as the receiving hole 21A and the same length as the thickness of the plate portion 21 was prepared. A hole having a diameter of about 0.3 mm was provided for this chip. This hole is drilled with a top 22 ₁ From bottom 22 ₂ It was vacated until it reached. The opened hole is the ejection hole 22 </ b> A of the engagement body 22. And the process for opening 22 A of ejection holes was performed as follows using the processing machine. That is, the chip sandwiched between the jigs was set in the processing machine, and the drill mounted on the processing machine formed the ejection hole 22A in the chip. As a result, the ejection hole 22A becomes the upper surface 22 ₁ Even when tilted with respect to the tip, the chip was tilted and held by the jig, and thus machining from a right angle by a processing machine became possible.
[0110]
When the processing of the ejection hole 22A with respect to the engagement body 22 is completed, as shown in FIG. 30, the ejection direction of the ejection hole 22A is positioned in a predetermined direction, and the engagement body 22 is moved from the lower surface to the receiving hole 21A of the plate portion 21. It was driven and inserted into the plate part 21. As a result, the plate portion 21 shown in FIG. 26 was produced. Thereafter, in the same manner as in the first embodiment, the flow path forming portion was attached in close contact with the plate portion 21, and the sealing plate was further attached in close contact with the flow path forming portion. Thus, a transport plate for the transfer unit was made.
[0111]
According to the seventh embodiment, the engaging body 22 made separately from the plate portion 21 is driven into the receiving hole 21A of the plate portion 21 to form the ejection hole whose ejection direction is specified. As a result, even when the ejection holes having different directions are formed in one plate portion 21, it is not necessary to make holes while changing the orientation of the plate portion 21, and the formation of the ejection holes can be performed very easily. Can do. Moreover, the processing time with respect to the board part 21 can be shortened by this.
[0112]
Further, since the engaging body 22 is driven into the receiving hole 21A, it is possible to prevent the occurrence of a processing error in the ejection hole for the plate portion 21, and even if a processing error occurs, the engaging body 22 is simply extracted from the receiving hole 21A. Thus, the plate portion 21 can be easily corrected.
[0113]
[Embodiment 8]
Next, with reference to FIG. 31 and FIG. 32, Embodiment 8 of this invention is demonstrated. FIG. 31 is an enlarged view showing a gas ejection structure for a levitation transport apparatus according to the eighth embodiment. 32 is a cross-sectional view showing a IX-IX cross section of FIG.
[0114]
In the eighth embodiment, a guide portion is provided with respect to the seventh embodiment. That is, as shown in FIGS. 31 and 32, a groove 23A is provided as a guide groove on the side wall of the receiving hole 21A provided in the plate portion 21. The groove 23A indicates a position where the ejection hole 22A is opened. Further, on the side wall of the engagement body 22, a protrusion 23B that fits into the groove 23A of the receiving hole 21A is provided as a guide protrusion. The protrusion 23B is for specifying the gas ejection direction by the ejection hole 22A.
[0115]
By fitting the protrusion 23B into the groove 23A, the ejection direction of the ejection hole 22A can be easily set with respect to the receiving hole 21A.
[0116]
[Embodiment 9]
Next, Embodiment 9 of the present invention will be described with reference to FIG. 33 and FIG. FIG. 33 is a plan view showing a processed plate according to the ninth embodiment. FIG. 34 is a plan view showing an engagement body according to the ninth embodiment.
[0117]
In the ninth embodiment, a guide portion different from that in the eighth embodiment is provided in the receiving hole 21A and the engagement body 22 in the seventh embodiment. That is, as shown in FIG. 33, the lower surface 21 of the plate portion 21. _Three Is provided with an alignment mark 24A. The alignment mark 24A is formed around the receiving hole 21A by printing or the like.
[0118]
Further, as shown in FIG. 34, the lower surface 22 of the engaging body 22. ₂ Is provided with an alignment mark 24B. The alignment mark 24B is for alignment with the alignment mark 24A, and indicates the ejection direction of the ejection hole 22A. The alignment mark 24B is printed on the lower surface 22 of the engagement body 22 by printing or the like. ₂ It is formed in the vicinity of the outer periphery.
[0119]
When the engagement body 22 is driven into the receiving hole 21A, the alignment mark 24B of the engagement body 22 is made to coincide with the alignment mark 24A provided around the reception hole 21A. Accordingly, the ejection direction of the ejection hole 22A of the engagement body 22 can be easily set with respect to the receiving hole 21A.
[0120]
[Embodiment 10]
Next, Embodiment 10 of the present invention will be described with reference to FIG. FIG. 35 is a plan view showing a gas ejection structure for a levitation transport apparatus according to the tenth embodiment.
[0121]
In the tenth embodiment, instead of the circular receiving hole 21A of the seventh to ninth embodiments, a hexagonal receiving hole 25, for example, is formed in the plate portion 21 as a polygonal shape. Further, instead of the circular engagement body 22 of the seventh to ninth embodiments, a hexagonal engagement body 26 that is fitted to the reception hole 25 is inserted into the reception hole 25.
[0122]
A guide portion is formed by the hexagonal receiving hole 25 and the engagement body 26. The jet direction of the jet holes 22A can be specified by the hexagonal guide portion.
[0123]
[Embodiment 11]
Next, Embodiment 11 of the present invention will be described with reference to FIG. FIG. 36 is a sectional view showing a gas ejection structure for a levitation transport apparatus according to the eleventh embodiment.
[0124]
In the eleventh embodiment, the locking portion is provided in the seventh to tenth embodiments. That is, when the receiving hole 21A having the diameter a2 is formed in the plate portion 21, the conveying surface 21 ₁ A stepped portion 27 is provided in the nearby receiving hole 21A. Due to the stepped portion 27, the conveying surface 21 ₁ The side receiving hole 21A is smaller than the diameter a2. Thus, the receiving hole 21 </ b> A provided with the stepped portion 27 is opened in the plate portion 21.
[0125]
The engaging body 22 has a shape that fits into the receiving hole 21A. That is, the upper surface 22 of the engaging body 22 having a diameter a2. ₁ A nearby portion is formed narrower than the diameter a2. Thus, similarly to the receiving hole 21 </ b> A, the stepped portion 28 is provided for the engaging body 22.
[0126]
In the eleventh embodiment, a locking portion is formed by the step portion 27 of the receiving hole 21 </ b> A and the step portion 28 of the engaging body 22. When the engaging body 22 is driven into the receiving hole 21 </ b> A by this locking portion, the upper surface 22 of the engaging body 22. ₁ Is the transport surface 21 ₁ Can be prevented from jumping out. As a result, the upper surface 22 of the engaging body 22 ₁ The conveying surface 21 of the plate portion 21 ₁ On the other hand, it can be easily flattened.
[0127]
[Embodiment 12]
Next, an embodiment 12 of the invention will be described. FIG. 37 is a sectional view showing a gas ejection structure for a levitation transport apparatus according to the twelfth embodiment.
[0128]
In the twelfth embodiment, a locking portion different from the eleventh embodiment is provided in the seventh to tenth embodiments. That is, a conical receiving hole 29 having a diameter a2 as a maximum diameter and a diameter a3 as a minimum diameter is formed in the plate portion 21. The maximum diameter of the receiving hole 29 is the lower surface 21 of the plate portion 21. _Three The minimum diameter is the conveying surface 21 of the plate portion 21 ₁ Is located.
[0129]
The engaging body 30 in which the ejection holes 30 </ b> A are open has a shape that fits into the receiving hole 29. That is, the engagement body 30 is a cone having a diameter a2 as a maximum diameter, a diameter a3 as a minimum diameter, and a length a1 as a height.
[0130]
In the twelfth embodiment, the locking portion is formed by the conical shape of the receiving hole 29 and the cone of the engaging body 30. As in the eleventh embodiment, when the engaging body 30 is driven into the receiving hole 29 by this locking portion, the upper surface of the engaging body 30 becomes the transport surface 21. ₁ Can be prevented from jumping out.
[0131]
Although the first to twelfth embodiments have been described above, the present invention is not limited to these embodiments. For example, in the first to twelfth embodiments, the glass plate for a TFT type liquid crystal display or the like is used as an example of air flow conveyance, but the present invention is not limited to the glass plate, and various plate-like substrates are used. It can be applied to a transport system.
[0132]
Moreover, there are various types of arrangement methods of the ejection holes provided in the transfer unit and the control unit, and the present invention can be applied to these various arrangement methods.
[0133]
In the seventh to twelfth embodiments, the plate portion is for the transfer unit. However, the present invention can be similarly applied to the plate portion for the control unit.
[0134]
Further, high purity dry air, high purity nitrogen gas, high purity argon gas, high purity carbon dioxide gas, or the like can be used as the gas ejected from the ejection holes. When the wafer is transferred by airflow, it is optimal to use a high purity nitrogen gas having an impurity concentration of several ppb or less as the transfer gas.
[0135]
【The invention's effect】
As described above, in the gas ejection structure for the levitation transport apparatus of the present invention, the sealing plate includes the flow path forming portion and the sealing portion, and the flow path forming portion is attached to the lower surface of the processed plate. Each having a supply hole for flowing a gas from the supply system to the ejection portion grouped according to the ejection direction, and the sealing portion covers the lower surface of the flow passage formation portion. It is attached to the part. Further, in the gas jetting structure for the levitation transport apparatus of the present invention, the sealing plate includes a flow path forming portion and a sealing portion, and the flow path forming portion is attached to the lower surface of the processed plate in the jet direction. Each is provided with a supply hole for allowing gas to flow to the jetting parts grouped according to each other, and the sealing part is attached to the flow path forming part so as to cover the lower surface of the flow path forming part, and from the supply system It is characterized by flowing gas into each supply hole.
[0136]
Accordingly, it is not necessary to provide a groove for flowing a gas through the grouped ejection portions in the sealing plate. As a result, the occurrence of deformation of the sealing plate can be prevented. In addition, since the flow path forming portion previously made by punching or the like is used, the time required for the manufacturing process of the transport plate can be shortened.
[0137]
In the gas ejection structure for the levitation conveyance apparatus of the present invention, the processed plate includes a plate portion and a flow path forming portion, and the plate portion has a conveyance surface on the upper surface, and a plurality of ejection holes penetrating from the upper surface to the lower surface. The flow path forming portion is provided with supply holes for flowing gas from the supply system to the ejection holes grouped according to the ejection direction, and the lower surface of the plate portion is attached to the upper surface. Features. In the gas ejection structure for the levitation conveyance apparatus of the present invention, the processed plate includes a plate portion and a flow path forming portion, and the plate portion has a conveyance surface on the upper surface, and a plurality of ejections penetrating from the upper surface to the lower surface. The flow path forming portion is provided with supply holes for flowing gas to the ejection holes grouped according to the ejection direction, the lower surface of the plate portion is attached to the upper surface, and the sealing plate is The gas from the supply system is made to flow into each supply hole.
[0138]
Thereby, it is not necessary to provide a groove for flowing a gas through the grouped ejection holes in the processed plate. As a result, the deformation of the processed plate can be prevented. In addition, since the processed plate is made using the flow path forming portion that has been previously made by punching or the like, the time required for the manufacturing process of the transport plate can be shortened.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 1. FIG.
2 is a cross-sectional view showing a II cross section of a flow path forming portion in FIG. 1;
FIG. 3 is a cross-sectional view showing a II-II cross section of FIG. 2;
4 is a cross-sectional view showing a state of assembly of a transport plate according to Embodiment 1. FIG.
5 is a cross-sectional view showing a cross section of a flow path forming portion according to Embodiment 2. FIG.
6 is a plan view showing a sealing portion according to Embodiment 2. FIG.
7 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 3. FIG.
FIG. 8 is a plan view showing the plane of FIG. 7;
9 is a cross-sectional view taken along the line III-III of FIG.
FIG. 10 is a plan view showing a flow path forming portion according to the third embodiment.
11 is a plan view showing a sealing portion according to Embodiment 3. FIG.
12 is a cross-sectional view showing a state of assembling a transport plate according to Embodiment 3. FIG.
13 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 4. FIG.
14 is a sectional view showing a IV-IV section of the plate portion of FIG. 13;
15 is a cross-sectional view showing a VV cross section of FIG. 13;
16 is a cross-sectional view showing a VI-VI cross section of FIG. 15. FIG.
FIG. 17 is a cross-sectional view showing a state of assembling a transport plate according to the fourth embodiment.
18 is a cross-sectional view showing a cross section of a flow path forming portion according to Embodiment 5. FIG.
19 is a plan view showing a sealing plate according to Embodiment 5. FIG.
20 is a perspective view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 6. FIG.
FIG. 21 is a plan view showing the plane of FIG. 20;
22 is a cross-sectional view showing a VII-VII cross section of FIG. 21. FIG.
FIG. 23 is a plan view showing a flow path forming portion according to the sixth embodiment.
24 is a plan view showing a sealing plate according to Embodiment 6. FIG.
FIG. 25 is a cross-sectional view showing a state of assembling the transport plate according to the sixth embodiment.
FIG. 26 is a plan view showing a gas ejection structure for a levitation transport apparatus according to the seventh embodiment.
FIG. 27 is an enlarged view showing a partial enlargement of FIG. 26;
FIG. 28 is a plan view showing a processing position set on the conveying surface.
29 is a cross-sectional view showing a VIII-VIII cross section of FIG. 27. FIG.
FIG. 30 is a cross-sectional view showing a state of attachment of the engaging body.
31 is an enlarged view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 8. FIG.
32 is a cross-sectional view showing a IX-IX cross section of FIG. 31. FIG.
33 is a plan view showing a processed plate according to Embodiment 9. FIG.
34 is a plan view showing an engagement body according to the ninth embodiment. FIG.
35 is a plan view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 10. FIG.
36 is a cross-sectional view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 11. FIG.
FIG. 37 is a cross-sectional view showing a gas ejection structure for a levitation transport apparatus according to Embodiment 12.
FIG. 38 is a plan view showing a conventional plate-like substrate transport system.
FIG. 39 is a perspective view showing a conventional transfer unit.
40 is a cross-sectional view showing a XI-XI cross section of FIG. 39. FIG.
41 is a cross-sectional view showing a cross section taken along line XII-XII in FIG. 39;
FIG. 42 is an explanatory diagram showing the ejection direction by a conventional transfer unit.
FIG. 43 is a perspective view showing a conventional control unit.
FIG. 44 is an explanatory view showing the ejection direction by a conventional transfer unit.
FIG. 45 is a cross-sectional view showing the structure of a conventional transfer unit.
FIG. 46 is a cross-sectional view showing a state of processing on a processing plate of a conventional transfer unit.
FIG. 47 is a cross-sectional view showing a state of processing on a processing plate of a conventional transfer unit.
FIG. 48 is a bottom view showing a bottom surface of a processed plate of a conventional transfer unit.
[Explanation of symbols]
A, B, C, D, 110A Conveying plate
A ₁ , B ₁ , C ₁ , 10, 21 ₁ , 11 ₂ , 21 ₂ Transport surface
1, 4, 6, 10, 130 Processing plate
1A ₁ , 1B ₁ , 41B ₁ ~ 41H ₁ , 6A ₁ , 6A ₂ , 11B-11H, 22A,
30A, 113, 115, 214 to 218, 251 to 253
1A ₂ , 1B ₂ , 41B ₂ ~ 41H ₂ 114,116 Gas chamber
2, 7, 9, 14, 140 Sealing plate
2A, 3A, 5A, 6B, 8, 12 Channel formation part
2A ₁ ~ 2A ₇ , 2A ₁₁ , 2A ₁₂ , 3A ₁ ~ 3A ₇ , 3A ₁₁ ~ 3A ₁₃ ,
5A ₁₂ ~ 5A ₁₇ , 6B ₁ ~ 6B ₇ , 6B ₁₁ , 6B ₁₂ , 8A-8J, 9A,
9B, 12B-12G supply hole
5A ₁₁ , 12A Suction hole
2A _{twenty one} , 6B _{twenty one} side
2A _{twenty two} , 41 ₁ , 5A _{twenty one} , 5B _{twenty one} , 6A ₁₁ , 6B _{twenty two} , 11 ₁ , 12 ₁₁ ,
14 ₁ , 22 ₁ Top
1D, 2A _{twenty three} , 41 ₂ , 5A _{twenty two} , 5B _{twenty two} , 6A ₁₂ , 6B _{twenty three} , 11 ₂ , 12 ₁₂ ,
14 ₂ , 22 ₂ , 121 _Three 131 lower surface
2B, 3B, 5B sealing part
3B ₁ , 3A ₂ , 5B ₁ ~ 5B ₇ , 14A-14G Connection hole
11 ₁₁ ~ 11 ₁₄ , 11 _{twenty one} ~ 11 _{twenty three} , 41 ₁₁ ~ 41 ₁₄ , 41 _{twenty one} ~ 41 _{twenty three} ,
221 to 226 setting line
11A, 41A, 213 Suction port 11B ₁ ~ 11E ₁ 42B-42F,
113A, 115A, 214A to 218A, 251A to 253A ejection direction
5A ₁ , 5A ₂ , 12 ₁ , 12 ₂ Disc
6A, 11, 21 plate part
21 ₂ Dashed line
21A, 25, 29 Receiving hole
21B Processing position
22, 26, 30 Engagement body
23A Groove
23B Protrusion
24A, 24B alignment mark
27, 28 steps
100 transfer unit
110,210 base
111, 211 supply system
112A center
120,220 Enclosure
132 holes
134 holes
135,136 groove
200 Control unit
300 glass plate
310 Movement direction
311 Direction of change

Claims (4)

A transport plate that floats the plate-like substrate with gas ejected from the transport surface, and a supply system that supplies gas to the transport plate, the transport plate includes a processing plate and a sealing plate, the processing plate, In the gas ejection structure for a levitation conveyance apparatus, which includes a plurality of ejection portions that eject gas supplied from the lower surface from the conveyance surface that is the upper surface, and the sealing plate is attached to the lower surface of the processed plate.
The sealing plate comprises a flow path forming portion and a sealing portion;
The flow path forming part is provided with a supply hole for flowing a gas from the supply system to the ejection part, the upper surface of which is attached to the lower surface of the processed plate and grouped according to the ejection direction,
The gas ejection structure for a levitation transport apparatus, wherein the sealing portion is attached to the flow path forming portion so as to cover a lower surface of the flow path forming portion. A transport plate that floats the plate-like substrate with gas ejected from the transport surface, and a supply system that supplies gas to the transport plate, the transport plate includes a processing plate and a sealing plate, the processing plate, In the gas ejection structure for a levitation conveyance apparatus, which includes a plurality of ejection portions that eject gas supplied from the lower surface from the conveyance surface that is the upper surface, and the sealing plate is attached to the lower surface of the processed plate.
The sealing plate comprises a flow path forming portion and a sealing portion;
The flow path forming portion is provided with a supply hole for flowing gas to the ejection part grouped according to the ejection direction, the upper surface being attached to the lower surface of the processed plate,
The sealing part is attached to the flow path forming part so as to cover the lower surface of the flow path forming part, and the gas from the supply system flows into the supply holes. Spout structure. A transport plate that floats the plate-like substrate with gas ejected from the transport surface; and a supply system that supplies gas to the transport plate, the transport plate including a processing plate and a sealing plate, and an upper surface of the processing plate In the gas ejection structure for a levitation conveyance device attached so as to cover the lower surface of the processing plate, the sealing surface is the conveyance surface,
The processed plate includes a plate portion and a flow path forming portion,
The plate portion has an upper surface as the transport surface, and includes a plurality of ejection holes penetrating from the upper surface to the lower surface,
The flow path forming portion is provided with supply holes for flowing gas from the supply system to the ejection holes grouped according to the ejection direction, and the lower surface of the plate portion is attached to the upper surface. A gas jetting structure for a levitation transport apparatus. A transport plate that floats the plate-like substrate with gas ejected from the transport surface; and a supply system that supplies gas to the transport plate, the transport plate including a processing plate and a sealing plate, and an upper surface of the processing plate In the gas ejection structure for a levitation conveyance device attached so as to cover the lower surface of the processing plate, the sealing surface is the conveyance surface,
The processed plate includes a plate portion and a flow path forming portion,
The plate portion has an upper surface as the transport surface, and includes a plurality of ejection holes penetrating from the upper surface to the lower surface,
The flow path forming portion is provided with supply holes for flowing gas to the ejection holes grouped according to the ejection direction, and the lower surface of the plate portion is attached to the upper surface.
The sealing plate causes the gas from the supply system to flow into the supply holes.

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