CN102055127B - Polarization maintaining optical fibre laser with anti-reflection device - Google Patents
Polarization maintaining optical fibre laser with anti-reflection device Download PDFInfo
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- CN102055127B CN102055127B CN 201010559809 CN201010559809A CN102055127B CN 102055127 B CN102055127 B CN 102055127B CN 201010559809 CN201010559809 CN 201010559809 CN 201010559809 A CN201010559809 A CN 201010559809A CN 102055127 B CN102055127 B CN 102055127B
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Abstract
The invention relates to a polarization maintaining optical fibre laser with an anti-reflection device, which comprises a linear polarization laser unit (1), a polarization maintaining optical fibre combiner (2), a large core diameter polarization maintaining matching optical fibre (3), an optical fiber end cap (4), an optical alignment system (5), a polarization spectroscope (6), a lambda/4 wave plate (7), an optical alignment focusing system (8) and a light absorber (9), wherein the linear polarization laser unit (1) outputs a high-power linear polarization laser, and a material is processed by using the anti-reflection device consisting of the optical alignment system, the polarization spectroscope (6) and the lambda/4 wave plate (7). The lambda/4 wave plate (7) changes the polarization characteristic of a workpiece reflection beam and the reflection light is separated from an emitting beam from the optical fiber laser by using the polarization spectroscope to ensure that the reflection light can not irradiate inside the laser. The invention can obtain high-power linear polarization laser output, prevent the reflection light from damaging the laser, and ensure that the laser has higher system stability in a process of laser processing.
Description
Technical field
The invention belongs to the fiber laser technology field, particularly the polarization-maintaining fiber laser of band antireflection device.
Background technology
Laser processing is a new and high technology that development is exceedingly fast, and its range of application spreads all trades and professions at present, not only is widely used in aspects such as punching, mark, cutting, welding and heat treatment, and is widely used in various retrofits.Aspect nonferrous materials processing, laser processing has more shown special advantages especially.Laser is as the core parts of laser-processing system, and its technical merit has determined the quality of laser processing to a great extent.The laser that is applied to laser processing at present mainly is CO
2Laser and Nd:YAG solid state laser.In two kinds of lasers, CO
2The laser standing charges are high, and flexible poor, extensive use is very limited; Have wavelength selectivity because material for laser light absorbs, the common metal material more is prone to absorb to the short laser of wavelength, and short wavelength's Nd:YAG solid state laser optical maser wavelength is that 1 μ m compares CO aspect metal material processing
2Laser optical maser wavelength is that 10.6 μ m more have superiority.And solid Nd: though YAG laser absorptivity is higher, Nd:YAG laser volume is huge, and power output is limited.As the fiber laser of third generation laser, not only output wavelength is identical with the YAG laser wavelength, and volume is little; Life-span is long, and efficient is high, good beam quality; Safeguard that simply the available fiber transmission can run well in the adverse circumstances of HTHP, high vibrations, HI high impact.
Because the applied range of fiber laser, people hope that the fiber laser that obtains more high power, more high light beam quality laser output satisfies the needs in laser industrial processes field.In recent years, people mainly concentrate on high power laser light output and high light beam quality aspect for the research of high-capacity optical fiber laser.The fiber laser of the IPG company of U.S. development has at present been realized the output of 9.6KW laser single mode, and other companies and institute also competitively develop the multikilowatt high-capacity optical fiber laser.Yet in industrial process applications, high-capacity optical fiber laser very easily receives catoptrical influence, big limitations the application of fiber laser in the industrial processes field.When laser emission when the material surface, material surface can reflect laser, metal material particularly, reflectivity is very high; Laser light reflected can focus on the outgoing fiber end face through optical system, optical fiber is burnt, even arrive fiber laser through Optical Fiber Transmission; Form and transfer Q, cause fiber laser output giant pulse, influence the stability of materials processing on the one hand; Or the damage fiber laser, prevent that effectively laser-bounce from being the subject matter of puzzlement optical-fiber laser materials processing, must will prevent.
At present, prevent that the reflection of laser from adopting the optical isolator of being with Faraday polarization apparatus mostly, but this optical isolator can not bear the high power laser radiation, inapplicable in the Materialbearbeitung mit Laserlicht of multikilowatt.Having plenty of work in-process makes finished surface and optical fiber laser output end mask that about 10 degree in certain angle of inclination arranged; Can prevent catoptrical damage though do like this, also limit the application of some technology simultaneously, and in the course of processing; If the mobile of molten bath is at random in the laser beam welding; The reflecting surface that forms also is at random, so reverberation also might reflex to the optical fiber exit portal, with optical fiber even fiber laser scaling loss.Though but the method that reverberation is measured in real time can measure reverberation can not really prevent catoptrical damage to laser.
Summary of the invention
The objective of the invention is to overcome the deficiency of existing high-capacity optical fiber laser, provide to prevent effectively that reverberation from causing the polarization-maintaining fiber laser of the band antireflection device of damage to laser.
The technical scheme that the present invention adopts is; Polarization-maintaining fiber laser according to band antireflection device of the present invention; Comprise: linearly polarized light fibre laser unit 1, polarization maintaining optical fibre bundling device 2, big core diameter coupling polarization maintaining optical fibre 3, optical fiber end cap 4, optical alignment system 5, polarization spectroscope 6, λ/4 wave plate 7, optical alignment focusing system 8, absorber of light 9, it is characterized in that: linearly polarized light fibre laser unit 1 closes the big core diameter coupling polarization maintaining optical fibre 3 phase weldings that Shu Houyu has optical fiber end cap 4 through polarization maintaining optical fibre bundling device 2; The linearly polarized laser outgoing beam L of output gets into polarization spectroscope 6 after optical alignment system 5, obtain circularly polarized laser light beam L through λ/4 wave plates 7 again
1, circularly polarized laser light beam L
1 Optical focusing system 8 after placing λ/4 wave plates 7 focuses on and shines on the workpiece 10, through the folded light beam L of workpiece reflection
2Return along former emitting light path, become the linear polarization folded light beam L vertical through behind λ/4 wave plates 7 once more with linearly polarized laser outgoing beam L polarization direction
3, linear polarization folded light beam L
3Through behind the polarization spectroscope 5, the direction of deviated line polarization laser outgoing beam L shines on the absorber of light 9.
Described linearly polarized light fibre laser unit 1 comprises the fine semiconductor pumping sources 11 of magnetic tape trailer, flashlight reflection polarization-maintaining fiber grating 12, protect inclined to one side doped fiber 13, output coupling polarization-maintaining fiber grating 14, pump light stripper 15, protect inclined to one side doped fiber 13 two ends respectively with flashlight reflection polarization-maintaining fiber grating 12 and the welding mutually of output coupling polarization-maintaining fiber grating 14; Semiconductor pumping sources 11 and the welding mutually of flashlight reflection polarization-maintaining fiber grating 12 other ends that magnetic tape trailer is fine, output coupling polarization-maintaining fiber grating 14 outputs and pump light stripper 15 welding mutually.
Above-mentioned linearly polarized light fibre laser unit 1 is more than two.
Above-mentioned polarization spectroscope 6 is P linearly polarized light transmission reflective spectroscope of S linearly polarized light or the reflective spectroscope of S linearly polarized light transmission P linearly polarized light.
Above-mentioned λ/4 wave plates 7 are transmission-type wave plate or reflective wave plate.
The polarization-maintaining fiber laser of above-mentioned band antireflection device comprises two or more linearly polarized light fibre lasers unit; And each linearly polarized light fibre laser unit all is independently; The damage of single linearly polarized light fibre laser unit only can influence the gross power of final output laser; And can not produce decisive influence to overall optical fibre laser output laser, therefore, the present invention has higher system stability.
A kind of in addition polarization-maintaining fiber laser with the antireflection device; Comprise: linearly polarized light fibre laser unit 1, optical fiber end cap 4, optical alignment system 5, polarization spectroscope 6, λ/4 wave plate 7, optical alignment focusing system 8, absorber of light 9; The linearly polarized laser outgoing beam L of linearly polarized light fibre laser unit 1 output gets into polarization spectroscope 6 after optical alignment system 5, obtain circularly polarized laser light beam L through λ/4 wave plates 7 again
1, circularly polarized laser light beam L
1After focusing on, optical alignment focusing system 8 after placing λ/4 wave plates 7 shines on the workpiece 10 the folded light beam L of workpiece reflection
2Return along former emitting light path, become the linear polarization folded light beam L vertical through behind λ/4 wave plates 7 once more with linearly polarized laser outgoing beam L polarization direction
3, linear polarization folded light beam L
3Through behind the polarization spectroscope 5, the direction of linearly polarized laser outgoing beam L shines on the absorber of light 9 partially.
Described linearly polarized light fibre laser unit 1 comprises the fine semiconductor pumping sources 11 of magnetic tape trailer, flashlight reflection polarization-maintaining fiber grating 12, protect inclined to one side doped fiber 13, output coupling polarization-maintaining fiber grating 14, pump light stripper 15, protect inclined to one side doped fiber 13 two ends respectively with flashlight reflection polarization-maintaining fiber grating 12 and the welding mutually of output coupling polarization-maintaining fiber grating 14; Semiconductor pumping sources 11 and the welding mutually of flashlight reflection polarization-maintaining fiber grating 12 other ends that magnetic tape trailer is fine, output coupling polarization-maintaining fiber grating 14 outputs and pump light stripper 15 welding mutually.
Described polarization spectroscope 6 is P linearly polarized light transmission reflective spectroscope of S linearly polarized light or the reflective spectroscope of S linearly polarized light transmission P linearly polarized light.
The polarization-maintaining fiber laser of band antireflection device is characterized in that: described λ/4 wave plates 7 are transmission-type wave plate or reflective wave plate.
Polarization maintaining optical fibre bundling device 2 will be for aiming at back welding mutually with big core diameter coupling polarization maintaining optical fibre 3 with the polarization maintaining optical fibre 17 that each linearly polarized light fibre laser unit 1 output polarization maintaining optical fibre is complementary behind fused biconical taper.
Adopt technique scheme, the present invention has advantage:
High power line polarization fiber laser according to the invention has independently linearly polarized light fibre laser unit; Can obtain the output of high power line polarised light laser through closing the bundle mode; Its antireflection electro-optical device can effectively prevent the damage of reverberation to laser, therefore is suitable for the higher industrial processes of manufacturing system stability and uses the high-power polarization fiber laser.
Description of drawings
Fig. 1 is polarization-maintaining fiber laser structural representation Fig. 1 of band antireflection device according to the invention;
Fig. 2 is polarization-maintaining fiber laser structural representation Fig. 2 of band antireflection device according to the invention;
Fig. 3 is polarization-maintaining fiber laser structural representation Fig. 3 of band antireflection device according to the invention;
Fig. 4 is polarization-maintaining fiber laser structural representation Fig. 4 of band antireflection device according to the invention;
Fig. 5 is polarization-maintaining fiber laser structural representation Fig. 5 of band antireflection device according to the invention;
Fig. 6 is polarization-maintaining fiber laser structural representation Fig. 6 of band antireflection device according to the invention;
Fig. 7 is polarization-maintaining fiber laser structural representation Fig. 7 of band antireflection device according to the invention;
Fig. 8 is polarization-maintaining fiber laser structural representation Fig. 8 of band antireflection device according to the invention
Fig. 9 is the inclined to one side bundling device structural representation of guarantor according to the invention
Among the figure: 1, linearly polarized light fibre laser unit, 2, the polarization maintaining optical fibre bundling device, 3, big core diameter matched fiber, 4, the optical fiber end cap; 5, optical alignment system, 6, polarization spectroscope, 7, λ/4 wave plates; 8, optical alignment focusing system, 9, absorber of light, 10, workpiece; 11, the fine semiconductor pumping sources of magnetic tape trailer, 12, flashlight reflection polarization-maintaining fiber grating, 13, protect inclined to one side doped fiber; 14, output coupling polarization-maintaining fiber grating, 15, the pump light stripper, 16, unit wires polarization laser output tail optical fiber;
L, linearly polarized laser outgoing beam, L
1, the circularly polarized laser light beam, L
2, folded light beam, L
3, the linear polarization folded light beam.
Embodiment
Reach technological means and the effect that predetermined purpose is taked for further setting forth the present invention,, the present invention is proposed, be elaborated as follows below in conjunction with accompanying drawing and embodiment.
Embodiment 1:
The polarization-maintaining fiber laser structure of band antireflection device of the present invention comprises shown in Fig. 1-4: linearly polarized light fibre laser unit 1, polarization maintaining optical fibre bundling device 2, big core diameter coupling polarization maintaining optical fibre 3, optical fiber end cap 4, optical alignment system 5, polarization spectroscope 6, λ/4 wave plate 7, optical alignment focusing system 8, absorber of light 9, workpiece 10.
Each linearly polarized light fibre laser unit 1 is closed the big core diameter coupling polarization maintaining optical fibre 3 phase weldings that Shu Houyu has optical fiber end cap 4 through polarization maintaining optical fibre bundling device 2; The line of output battle array laser emitting light beam L partially gets into polarization spectroscope 6 after optical alignment system 5, obtain circularly polarized laser light beam L through λ/4 wave plates 7 again
1, optical alignment focusing system 8 places the laser optical path after λ/4 wave plates 7, circularly polarized laser light beam L
1After shining on the workpiece after the line focus, the partial reflection light beam L of workpiece reflection
2Return along former emitting light path, once more through becoming the vertical linear polarization folded light beam L in polarization direction behind λ/47 wave plates with the inclined to one side battle array of line laser emitting light beam L
3, polarized reflection light light beams L
3Through behind the polarization spectroscope, the direction of meeting deviated line polarization laser outgoing beam L shines on the absorber.Cause polarized reflection light light beams L
3Can't be along the line partially the direction of battle array laser emitting light beam L reflex to fiber laser inside, realized that fiber laser prevents the purpose of reverberation damage in the Materialbearbeitung mit Laserlicht process.When polarization spectroscope 6 and λ/4 wave plates 7 were the inclined to one side battle array of line laser emitting light beam L transmission-type, the polarization-maintaining fiber laser structure of band antireflection device was as shown in Figure 1.When polarization spectroscope 6 is a partially battle array laser emitting light beam L transmission-type of line, λ/when 4 wave plates 7 be reflective, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 2.When polarization spectroscope 6 be line partially battle array laser emitting light beam L is reflective, λ/when 4 wave plates 7 be transmission-type, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 3.When polarization spectroscope 6 be line partially battle array laser emitting light beam L is reflective, λ/when 4 wave plates 7 be reflective, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 4.
Embodiment 2:
The polarization-maintaining fiber laser structure of band antireflection device of the present invention is shown in Fig. 5-8; Comprise: linearly polarized light fibre laser unit 1, optical fiber end cap 4, optical alignment system 5, polarization spectroscope 6, λ/4 wave plate 7, optical alignment focusing system 8, absorber of light 9; The linearly polarized laser outgoing beam L of linearly polarized light fibre laser unit 1 output gets into polarization spectroscope 6 after optical alignment system 5, obtain circularly polarized laser light beam L through λ/4 wave plates 7 again
1, optical alignment focusing system 8 places the laser optical path after λ/4 wave plates 7, circularly polarized laser light beam L
1After shining on the workpiece after the line focus, the partial reflection light beam L of workpiece reflection
2Return along former emitting light path, become the linear polarization folded light beam L vertical through behind λ/47 wave plates once more with linearly polarized laser outgoing beam L polarization direction
3, linear polarization folded light beam L
3Through behind the polarization spectroscope, the direction of meeting deviated line polarization laser outgoing beam L shines on the absorber.Cause polarized reflection light light beams L
3Can't be along the line partially the direction of battle array laser emitting light beam L reflex to fiber laser inside, realized that fiber laser prevents the purpose of reverberation damage in the Materialbearbeitung mit Laserlicht process.When polarization spectroscope 6 and λ/4 wave plates 7 were the inclined to one side battle array of line laser emitting light beam L transmission-type, the polarization-maintaining fiber laser structure of band antireflection device was as shown in Figure 5.When polarization spectroscope 6 is a partially battle array laser emitting light beam L transmission-type of line, λ/when 4 wave plates 7 be reflective, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 6.When polarization spectroscope 6 be line partially battle array laser emitting light beam L is reflective, λ/when 4 wave plates 7 be transmission-type, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 7.When polarization spectroscope 6 be line partially battle array laser emitting light beam L is reflective, λ/when 4 wave plates 7 be reflective, be with the polarization-maintaining fiber laser structure of antireflection device as shown in Figure 8.
Polarization maintaining optical fibre bundling device 2 will be for aiming at back welding mutually with big core diameter coupling polarization maintaining optical fibre 3 with the polarization maintaining optical fibre 17 that each linearly polarized light fibre laser unit 1 output polarization maintaining optical fibre is complementary behind fused biconical taper.Its structure is as shown in Figure 9.
According to above description and accompanying drawing, can understand the present invention more fully, providing these accompanying drawings only is for illustrative purposes, rather than limitation of the present invention.
Can further know range of application of the present invention according to above description.Though yet should be understood that and provided the preferred embodiments of the present invention, just to illustrative purposes.Polarization spectroscope 6 and λ/4 wave plates 7 can have multi-form and specifications parameter, and according to these detailed descriptions, this area the professional obviously know, can polarized light splitting device, delay device parameter be done various variations and change within the spirit and scope of the present invention.
Claims (7)
1. be with the polarization-maintaining fiber laser of antireflection device; Comprise: linearly polarized light fibre laser unit (1), polarization maintaining optical fibre bundling device (2), big core diameter coupling polarization maintaining optical fibre (3), optical fiber end cap (4), optical alignment system (5), polarization spectroscope (6), λ/4 wave plates (7), optical alignment focusing system (8), absorber of light (9) is characterized in that: linearly polarized light fibre laser unit (1) closes big core diameter coupling polarization maintaining optical fibre (3) the phase welding that Shu Houyu has optical fiber end cap (4) through polarization maintaining optical fibre bundling device (2); The linearly polarized laser outgoing beam L of output gets into polarization spectroscope (6) after optical alignment system (5), pass through λ/4 wave plates (7) again and obtain circularly polarized laser light beam L
1, circularly polarized laser light beam L
1Shine on the workpiece (10) through placing λ/4 wave plates (7) optical focusing system (8) afterwards to focus on, through the folded light beam L of workpiece reflection
2Return along former emitting light path, become the linear polarization folded light beam L vertical after passing through λ/4 wave plates (7) once more with linearly polarized laser outgoing beam L polarization direction
3, linear polarization folded light beam L
3Behind polarization spectroscope (5), the direction of deviated line polarization laser outgoing beam L shines on the absorber of light (9);
Described linearly polarized light fibre laser unit (1) comprises the fine semiconductor pumping sources (11) of magnetic tape trailer, flashlight reflection polarization-maintaining fiber grating (12), protects inclined to one side doped fiber (13), exports coupling polarization-maintaining fiber grating (14), pump light stripper (15), protects inclined to one side doped fiber (13) two ends and reflects polarization-maintaining fiber grating (12) and the welding mutually of output coupling polarization-maintaining fiber grating (14) with flashlight respectively; Semiconductor pumping sources (11) and the welding mutually of flashlight reflection polarization-maintaining fiber grating (12) other end that magnetic tape trailer is fine, output coupling polarization-maintaining fiber grating (14) output and pump light stripper (15) welding mutually.
2. the polarization-maintaining fiber laser of band antireflection device according to claim 1 is characterized in that: said linearly polarized light fibre laser unit (1) is more than two.
3. the polarization-maintaining fiber laser of band antireflection device according to claim 1 and 2 is characterized in that: described polarization spectroscope (6) is P linearly polarized light transmission reflective spectroscope of S linearly polarized light or the reflective spectroscope of S linearly polarized light transmission P linearly polarized light.
4. the polarization-maintaining fiber laser of band antireflection device according to claim 1 and 2 is characterized in that: described λ/4 wave plates (7) are transmission-type wave plate or reflective wave plate.
5. be with the polarization-maintaining fiber laser of antireflection device; Comprise: linearly polarized light fibre laser unit (1), optical fiber end cap (4), optical alignment system (5), polarization spectroscope (6), λ/4 wave plates (7), optical alignment focusing system (8), absorber of light (9); It is characterized in that: the linearly polarized laser outgoing beam L of linearly polarized light fibre laser unit (1) output gets into polarization spectroscope (6) after optical alignment system (5), pass through λ/4 wave plates (7) again and obtain circularly polarized laser light beam L
1, circularly polarized laser light beam L
1After placing λ/4 wave plates (7) optical alignment focusing system (8) afterwards to focus on, shine on the workpiece (10) the folded light beam L of workpiece reflection
2Return along former emitting light path, become the linear polarization folded light beam L vertical after passing through λ/4 wave plates (7) once more with linearly polarized laser outgoing beam L polarization direction
3, linear polarization folded light beam L
3Behind polarization spectroscope (5), the direction of deviated line polarization laser outgoing beam L shines on the absorber of light (9);
Described linearly polarized light fibre laser unit (1) comprises the fine semiconductor pumping sources (11) of magnetic tape trailer, flashlight reflection polarization-maintaining fiber grating (12), protects inclined to one side doped fiber (13), exports coupling polarization-maintaining fiber grating (14), pump light stripper (15), protects inclined to one side doped fiber (13) two ends and reflects polarization-maintaining fiber grating (12) and the welding mutually of output coupling polarization-maintaining fiber grating (14) with flashlight respectively; Semiconductor pumping sources (11) and the welding mutually of flashlight reflection polarization-maintaining fiber grating (12) other end that magnetic tape trailer is fine, output coupling polarization-maintaining fiber grating (14) output and pump light stripper (15) welding mutually.
6. the polarization-maintaining fiber laser of band antireflection device according to claim 5 is characterized in that: described polarization spectroscope (6) is P linearly polarized light transmission reflective spectroscope of S linearly polarized light or the reflective spectroscope of S linearly polarized light transmission P linearly polarized light.
7. the polarization-maintaining fiber laser of band antireflection device according to claim 5 is characterized in that: described λ/4 wave plates (7) are transmission-type wave plate or reflective wave plate.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010559809 CN102055127B (en) | 2010-11-26 | 2010-11-26 | Polarization maintaining optical fibre laser with anti-reflection device |
| PCT/CN2011/082983 WO2012069017A1 (en) | 2010-11-26 | 2011-11-25 | Laser antireflection device and laser apparatus comprising same |
| EP11842571.9A EP2645493B1 (en) | 2010-11-26 | 2011-11-25 | Laser antireflection device and laser apparatus comprising same |
| US13/989,409 US8937977B2 (en) | 2010-11-26 | 2011-11-26 | Laser antireflection device and laser apparatus comprising same |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010559809 CN102055127B (en) | 2010-11-26 | 2010-11-26 | Polarization maintaining optical fibre laser with anti-reflection device |
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| CN102055127B true CN102055127B (en) | 2012-11-14 |
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| US8937977B2 (en) | 2010-11-26 | 2015-01-20 | Beijing Luhe Feihong Laser S&T Co., Ltd. | Laser antireflection device and laser apparatus comprising same |
| WO2012069017A1 (en) * | 2010-11-26 | 2012-05-31 | 山西飞虹激光科技有限公司 | Laser antireflection device and laser apparatus comprising same |
| CN102248286B (en) * | 2011-06-17 | 2015-05-27 | 山西飞虹激光科技有限公司 | Linear polarization pulse fiber laser processing device |
| CN102240846B (en) * | 2011-06-17 | 2015-01-14 | 山西飞虹激光科技有限公司 | Linearly polarized pulsed fiber laser processing device with all-fiber structure |
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| CN104416284B (en) * | 2013-08-30 | 2016-08-10 | 大族激光科技产业集团股份有限公司 | A kind of laser-processing system |
| CN103618200B (en) * | 2013-11-29 | 2016-03-16 | 广东高聚激光有限公司 | A kind of pump light stripper for fiber laser |
| CN103928824A (en) * | 2014-03-28 | 2014-07-16 | 中国科学院长春光学精密机械与物理研究所 | Heat-pipe-type alkali-metal vapor laser device |
| CN103904548A (en) * | 2014-04-10 | 2014-07-02 | 深圳市大族激光科技股份有限公司 | Laser power stability control method and system |
| CN108422082A (en) * | 2017-02-15 | 2018-08-21 | 南京帝耐激光科技有限公司 | Laser process equipment, laser processing and its application |
| CN107544137B (en) * | 2017-08-23 | 2023-04-28 | 武汉锐科光纤激光技术股份有限公司 | Optical shutter for high-power fiber laser |
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