CN102016730A - 自主自适应半导体制造 - Google Patents
自主自适应半导体制造 Download PDFInfo
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- CN102016730A CN102016730A CN2009801045628A CN200980104562A CN102016730A CN 102016730 A CN102016730 A CN 102016730A CN 2009801045628 A CN2009801045628 A CN 2009801045628A CN 200980104562 A CN200980104562 A CN 200980104562A CN 102016730 A CN102016730 A CN 102016730A
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- G—PHYSICS
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- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/044,959 US8078552B2 (en) | 2008-03-08 | 2008-03-08 | Autonomous adaptive system and method for improving semiconductor manufacturing quality |
| US12/044,959 | 2008-03-08 | ||
| PCT/US2009/036149 WO2009114382A1 (en) | 2008-03-08 | 2009-03-05 | Autonomous adaptive semiconductor manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102016730A true CN102016730A (zh) | 2011-04-13 |
| CN102016730B CN102016730B (zh) | 2014-06-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980104562.8A Active CN102016730B (zh) | 2008-03-08 | 2009-03-05 | 自主自适应半导体制造 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8078552B2 (und) |
| JP (1) | JP5405499B2 (und) |
| KR (1) | KR101546556B1 (und) |
| CN (1) | CN102016730B (und) |
| TW (1) | TWI472887B (und) |
| WO (1) | WO2009114382A1 (und) |
Cited By (7)
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| CN104040679A (zh) * | 2011-03-28 | 2014-09-10 | 东京毅力科创株式会社 | 自适应配方选择器 |
| CN106557816A (zh) * | 2015-09-30 | 2017-04-05 | 发那科株式会社 | 具备机械学习器以及组装试验器的生产设备 |
| CN106557815A (zh) * | 2015-09-30 | 2017-04-05 | 发那科株式会社 | 机械学习装置以及电动机用磁化装置 |
| CN108334652A (zh) * | 2017-01-20 | 2018-07-27 | 财团法人工业技术研究院 | 机台的预诊断方法及预诊断装置 |
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| US8165705B2 (en) * | 2008-07-10 | 2012-04-24 | Palo Alto Research Center Incorporated | Methods and systems for continuously estimating persistent and intermittent failure probabilities for production resources |
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| US8359110B2 (en) * | 2009-03-23 | 2013-01-22 | Kuhn Lukas D | Methods and systems for fault diagnosis in observation rich systems |
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| TWI571808B (zh) * | 2010-08-02 | 2017-02-21 | 國立清華大學 | 因子分析系統及其分析方法 |
| KR101216517B1 (ko) * | 2011-04-01 | 2012-12-31 | 국방과학연구소 | 최적의 네트워크 시뮬레이션 환경 구축 방법 및 그 시스템 |
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| KR20110043518A (ko) | 2011-04-27 |
| JP2011517806A (ja) | 2011-06-16 |
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