CN102007066A - 贴片制造 - Google Patents
贴片制造 Download PDFInfo
- Publication number
- CN102007066A CN102007066A CN2009801046353A CN200980104635A CN102007066A CN 102007066 A CN102007066 A CN 102007066A CN 2009801046353 A CN2009801046353 A CN 2009801046353A CN 200980104635 A CN200980104635 A CN 200980104635A CN 102007066 A CN102007066 A CN 102007066A
- Authority
- CN
- China
- Prior art keywords
- projection
- etching
- passivator
- mask
- etchant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Images
Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0012—Galenical forms characterised by the site of application
- A61K9/0019—Injectable compositions; Intramuscular, intravenous, arterial, subcutaneous administration; Compositions to be administered through the skin in an invasive manner
- A61K9/0021—Intradermal administration, e.g. through microneedle arrays, needleless injectors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
- A61K9/0097—Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00111—Tips, pillars, i.e. raised structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0023—Drug applicators using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0046—Solid microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/055—Microneedles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Dermatology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Heart & Thoracic Surgery (AREA)
- Hematology (AREA)
- Biomedical Technology (AREA)
- Anesthesiology (AREA)
- Medical Informatics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Medicinal Chemistry (AREA)
- Pharmacology & Pharmacy (AREA)
- Epidemiology (AREA)
- Micromachines (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims (42)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6393208P | 2008-02-07 | 2008-02-07 | |
US61/063,932 | 2008-02-07 | ||
PCT/AU2009/000142 WO2009097660A1 (en) | 2008-02-07 | 2009-02-05 | Patch production |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102007066A true CN102007066A (zh) | 2011-04-06 |
CN102007066B CN102007066B (zh) | 2013-06-26 |
Family
ID=40951747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801046353A Active CN102007066B (zh) | 2008-02-07 | 2009-02-05 | 贴片制造 |
Country Status (6)
Country | Link |
---|---|
US (3) | US8883015B2 (zh) |
EP (1) | EP2247527A4 (zh) |
CN (1) | CN102007066B (zh) |
AU (1) | AU2009212106B9 (zh) |
CA (1) | CA2749347C (zh) |
WO (1) | WO2009097660A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108096699A (zh) * | 2017-12-28 | 2018-06-01 | 浙江大学台州研究院 | 用于药物传输和体液采集的空心微针阵列及其制备方法 |
CN110002393A (zh) * | 2019-04-04 | 2019-07-12 | 中国科学院微电子研究所 | 选择性刻蚀方法及纳米针尖结构的制备方法 |
CN110732079A (zh) * | 2018-07-19 | 2020-01-31 | 淡江大学 | 微针元件及其制造方法与微针模具的制造方法 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0402131D0 (en) | 2004-01-30 | 2004-03-03 | Isis Innovation | Delivery method |
EP2231257A4 (en) | 2007-12-24 | 2013-11-06 | Univ Queensland | APPLICATION METHOD |
WO2009097660A1 (en) | 2008-02-07 | 2009-08-13 | The University Of Queensland | Patch production |
WO2009142741A1 (en) | 2008-05-21 | 2009-11-26 | Theraject, Inc. | Method of manufacturing solid solution peforator patches and uses thereof |
AU2009250341A1 (en) | 2008-05-23 | 2009-11-26 | The University Of Queensland | Analyte detection using a needle projection patch |
AU2009329806A1 (en) | 2008-12-22 | 2010-07-01 | The University Of Queensland | Patch production |
US9943673B2 (en) | 2010-07-14 | 2018-04-17 | Vaxxas Pty Limited | Patch applying apparatus |
JP5770055B2 (ja) * | 2010-09-29 | 2015-08-26 | 富士フイルム株式会社 | 針状アレイ経皮吸収シートの製造方法 |
CN103298520A (zh) * | 2010-10-25 | 2013-09-11 | 帝人株式会社 | 微针 |
EP3881781B1 (en) * | 2011-10-12 | 2023-03-29 | Vaxxas Pty Limited | Delivery device |
JP5472771B1 (ja) * | 2012-09-28 | 2014-04-16 | コスメディ製薬株式会社 | 段差に薬物を保持したマイクロニードル |
JP2015220313A (ja) | 2014-05-16 | 2015-12-07 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
CN104178414B (zh) * | 2014-07-15 | 2017-05-03 | 香港城市大学 | 一种向细胞内递送物质的装置和方法 |
WO2016018148A1 (en) | 2014-07-30 | 2016-02-04 | Biomarque B.V. | Biosensor comprising a modified metal surface and method for the modification of a metal surface |
WO2016084701A1 (ja) * | 2014-11-28 | 2016-06-02 | テルモ株式会社 | マイクロニードルデバイス |
EP3253440B1 (en) | 2015-02-02 | 2022-12-21 | Vaxxas Pty Limited | Microprojection array applicator |
KR102366801B1 (ko) * | 2015-03-31 | 2022-02-25 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
WO2017045031A1 (en) | 2015-09-18 | 2017-03-23 | Vaxxas Pty Limited | Microprojection arrays with microprojections having large surface area profiles |
US20180264244A1 (en) * | 2015-09-28 | 2018-09-20 | Vaxxas Pty Limited | Microprojection arrays with enhanced skin penetrating properties and methods thereof |
CN115923337A (zh) | 2017-03-31 | 2023-04-07 | 瓦克萨斯私人有限公司 | 用于涂覆表面的设备和方法 |
CA3065371A1 (en) | 2017-06-13 | 2018-12-20 | Vaxxas Pty Limited | Quality control of substrate coatings |
GB201709668D0 (en) * | 2017-06-16 | 2017-08-02 | Spts Technologies Ltd | Microneedles |
EP3661587A4 (en) | 2017-08-04 | 2021-06-09 | Vaxxas Pty Limited | COMPACT HIGH MECHANICAL ENERGY STORAGE AND LOW RELEASE FORCE ACTUATOR FOR MICROPROJECTION NETWORK (PRM) PATCH DELIVERY |
JP2021000146A (ja) * | 2019-06-19 | 2021-01-07 | 株式会社アルバック | シリコンマイクロニードルの製造方法 |
CN110862088B (zh) * | 2019-10-30 | 2020-11-13 | 南京大学 | 一种超高深宽比的硅纳米针阵列的制备方法 |
KR102373658B1 (ko) * | 2020-01-31 | 2022-03-15 | 한국과학기술연구원 | 다양한 형태를 갖는 고밀도 신경 프로브 및 이의 제조방법 |
Family Cites Families (129)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2881500A (en) | 1958-07-03 | 1959-04-14 | Charles W Furness | Corneal clamp |
DE3484951D1 (de) | 1983-10-14 | 1991-09-26 | Sumitomo Pharma | Verlaengerte praeparate mit verzoegerter abgabe. |
US4702799A (en) | 1985-09-03 | 1987-10-27 | Nestec S.A. | Dryer and drying method |
DK0500785T3 (da) | 1989-11-03 | 2002-08-19 | Immulogic Pharma Corp | Humant T-celleaktivitet felint protein (TRFP) isoleret fra husstøv samt anvendelser heraf |
US5201992A (en) | 1990-07-12 | 1993-04-13 | Bell Communications Research, Inc. | Method for making tapered microminiature silicon structures |
US5527288A (en) | 1990-12-13 | 1996-06-18 | Elan Medical Technologies Limited | Intradermal drug delivery device and method for intradermal delivery of drugs |
WO1994024281A1 (en) | 1993-04-14 | 1994-10-27 | Immulogic Pharmaceutical Corporation | T cell epitopes of the major allergens from dermatophagoides (house dust mite) |
AT397458B (de) | 1992-09-25 | 1994-04-25 | Avl Verbrennungskraft Messtech | Sensoranordnung |
US5449064A (en) | 1994-03-03 | 1995-09-12 | University Of Kansas | On-line interface and valve for capillary electophoresis system |
US5457041A (en) | 1994-03-25 | 1995-10-10 | Science Applications International Corporation | Needle array and method of introducing biological substances into living cells using the needle array |
DE19518932C2 (de) | 1994-05-23 | 1999-03-18 | Samsung Electro Mech | Vorrichtung zur Perforation der Haut für die Vorbereitung einer transdermalen Medikation |
AUPM873294A0 (en) | 1994-10-12 | 1994-11-03 | Csl Limited | Saponin preparations and use thereof in iscoms |
US5499474A (en) | 1994-11-28 | 1996-03-19 | Knooihuizen; Louis D. | Method and apparatus for liquid application |
AU5869796A (en) | 1995-05-22 | 1996-12-11 | Ned A. Godshall | Micromechanical patch for enhancing the delivery of compound s through the skin |
US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
ES2195151T3 (es) | 1996-06-18 | 2003-12-01 | Alza Corp | Dispositivo de mejora de aporte o de muestreo de agentes transdermicos. |
CA2217134A1 (en) | 1996-10-09 | 1998-04-09 | Sumitomo Pharmaceuticals Co., Ltd. | Sustained release formulation |
KR100453132B1 (ko) | 1996-12-20 | 2004-10-15 | 앨자 코포레이션 | 경피 약제 플럭스를 향상시키기 위한 장치 및 방법 |
US5859937A (en) | 1997-04-04 | 1999-01-12 | Neomecs Incorporated | Minimally invasive sensor |
KR100219848B1 (ko) | 1997-04-22 | 1999-09-01 | 이종수 | 구조물의 강도분석 방법 및 장치 |
US5928207A (en) | 1997-06-30 | 1999-07-27 | The Regents Of The University Of California | Microneedle with isotropically etched tip, and method of fabricating such a device |
WO1999002694A1 (en) | 1997-07-09 | 1999-01-21 | The University Of Queensland | Nucleic acid sequence and method for selectively expressing a protein in a target cell or tissue |
AUPP807899A0 (en) | 1999-01-08 | 1999-02-04 | University Of Queensland, The | Codon utilization |
EP1000117A1 (fr) | 1997-08-01 | 2000-05-17 | Compagnie Générale des Etablissements MICHELIN-MICHELIN & CIE | Composition de caoutchouc pour pneumatique couleur |
NL1008315C2 (nl) | 1998-02-16 | 1999-08-25 | Stichting Fund Ond Material | Met Si-chip geïntegreerde microdialyse-sonde. |
CA2321093A1 (en) | 1998-02-20 | 1999-08-26 | The Rockefeller University | Apoptotic cell-mediated antigen presentation to dendritic cells |
JP3372862B2 (ja) | 1998-03-25 | 2003-02-04 | 株式会社日立製作所 | 生体液の質量分析装置 |
US6503231B1 (en) | 1998-06-10 | 2003-01-07 | Georgia Tech Research Corporation | Microneedle device for transport of molecules across tissue |
JP2002517300A (ja) | 1998-06-10 | 2002-06-18 | ジョージア テック リサーチ コーポレイション | 微小針デバイスおよび製造方法ならびにそれらの使用 |
GB9815819D0 (en) | 1998-07-22 | 1998-09-16 | Secr Defence | Transferring materials into cells and a microneedle array |
US6004815A (en) | 1998-08-13 | 1999-12-21 | The Regents Of The University Of California | Bacteria expressing nonsecreted cytolysin as intracellular microbial delivery vehicles to eukaryotic cells |
US6414501B2 (en) * | 1998-10-01 | 2002-07-02 | Amst Co., Ltd. | Micro cantilever style contact pin structure for wafer probing |
US20020004041A1 (en) | 1999-02-19 | 2002-01-10 | Albert Matthew L. | Methods for abrogating a cellular immune response |
ATE462468T1 (de) | 1999-06-04 | 2010-04-15 | Georgia Tech Res Inst | Vorrichtungen zur vergrösserten penetration von mikronadeln in biologischen hautschichten |
US6743211B1 (en) | 1999-11-23 | 2004-06-01 | Georgia Tech Research Corporation | Devices and methods for enhanced microneedle penetration of biological barriers |
US6256533B1 (en) | 1999-06-09 | 2001-07-03 | The Procter & Gamble Company | Apparatus and method for using an intracutaneous microneedle array |
US6312612B1 (en) | 1999-06-09 | 2001-11-06 | The Procter & Gamble Company | Apparatus and method for manufacturing an intracutaneous microneedle array |
US6299621B1 (en) | 1999-06-18 | 2001-10-09 | Novare Surgical Systems, Inc. | Surgical clamp pads with elastomer impregnated mesh |
DE19935165A1 (de) | 1999-07-28 | 2001-02-01 | Roche Diagnostics Gmbh | Verfahren und Anordnung zur Konzentrationsbestimmung von Glucose in einer Körperflüssigkeit |
US6551849B1 (en) | 1999-11-02 | 2003-04-22 | Christopher J. Kenney | Method for fabricating arrays of micro-needles |
US6558361B1 (en) | 2000-03-09 | 2003-05-06 | Nanopass Ltd. | Systems and methods for the transport of fluids through a biological barrier and production techniques for such systems |
US6540675B2 (en) | 2000-06-27 | 2003-04-01 | Rosedale Medical, Inc. | Analyte monitor |
US6589202B1 (en) | 2000-06-29 | 2003-07-08 | Becton Dickinson And Company | Method and apparatus for transdermally sampling or administering a substance to a patient |
GB0017999D0 (en) | 2000-07-21 | 2000-09-13 | Smithkline Beecham Biolog | Novel device |
US6749575B2 (en) | 2001-08-20 | 2004-06-15 | Alza Corporation | Method for transdermal nucleic acid sampling |
JP4659336B2 (ja) | 2000-10-26 | 2011-03-30 | アルザ・コーポレーシヨン | 被覆された微細突出物を有する経皮的薬剤配達装置 |
US9302903B2 (en) | 2000-12-14 | 2016-04-05 | Georgia Tech Research Corporation | Microneedle devices and production thereof |
US6663820B2 (en) * | 2001-03-14 | 2003-12-16 | The Procter & Gamble Company | Method of manufacturing microneedle structures using soft lithography and photolithography |
US6855372B2 (en) | 2001-03-16 | 2005-02-15 | Alza Corporation | Method and apparatus for coating skin piercing microprojections |
BR0209046A (pt) | 2001-04-20 | 2004-11-09 | Alza Corp | Disposição de microprojeção que possui um agente benéfico contendo revestimento |
US20020193729A1 (en) | 2001-04-20 | 2002-12-19 | Cormier Michel J.N. | Microprojection array immunization patch and method |
US6591124B2 (en) | 2001-05-11 | 2003-07-08 | The Procter & Gamble Company | Portable interstitial fluid monitoring system |
EP1395328B1 (en) | 2001-06-08 | 2006-08-16 | Becton, Dickinson and Company | Device for manipulating a needle or abrader array |
US6767341B2 (en) | 2001-06-13 | 2004-07-27 | Abbott Laboratories | Microneedles for minimally invasive drug delivery |
US6557849B2 (en) | 2001-06-21 | 2003-05-06 | Da La Rue International | Sheet handling apparatus |
AT412060B (de) | 2001-07-06 | 2004-09-27 | Schaupp Lukas Dipl Ing Dr Tech | Verfahren zur messung von konzentrationen in lebenden organismen mittels mikrodialyse und und vorrichtung zur durchführung dieses verfahrens |
US6881203B2 (en) | 2001-09-05 | 2005-04-19 | 3M Innovative Properties Company | Microneedle arrays and methods of manufacturing the same |
US20030135166A1 (en) | 2001-09-28 | 2003-07-17 | Gonnelli Robert R. | Switchable microneedle arrays and systems and methods relating to same |
US20040002121A1 (en) | 2001-11-06 | 2004-01-01 | Regan Jeffrey F. | High throughput methods and devices for assaying analytes in a fluid sample |
WO2003048031A2 (en) | 2001-11-30 | 2003-06-12 | Alza Corporation | Methods and apparatuses for forming microprojection arrays |
HUP0402605A2 (hu) | 2001-12-20 | 2005-06-28 | Alza Corporation | Eszköz mikroszkopikus bemetszések ejtésére állat bőrszövetén |
US6908453B2 (en) | 2002-01-15 | 2005-06-21 | 3M Innovative Properties Company | Microneedle devices and methods of manufacture |
DE10209763A1 (de) * | 2002-03-05 | 2003-10-02 | Bosch Gmbh Robert | Vorrichtung und Verfahren zum anisotropen Plasmaätzen eines Substrates, insbesondere eines Siliziumkörpers |
AU2003222691A1 (en) | 2002-04-30 | 2003-11-17 | Morteza Shirkhanzadeh | Arrays of microneedles comprising porous calcium phosphate coating and bioactive agents |
US6945952B2 (en) | 2002-06-25 | 2005-09-20 | Theraject, Inc. | Solid solution perforator for drug delivery and other applications |
CA2490137C (en) | 2002-06-25 | 2012-01-03 | Sung-Yun Kwon | Rapidly dissolving micro-perforator for drug delivery and other applications |
CN100479875C (zh) | 2002-07-22 | 2009-04-22 | 贝克顿·迪金森公司 | 贴片状注射装置 |
US7081118B2 (en) | 2002-08-22 | 2006-07-25 | Helmut Weber | Medical tool |
US8062573B2 (en) | 2002-09-16 | 2011-11-22 | Theraject, Inc. | Solid micro-perforators and methods of use |
US7045069B2 (en) | 2002-11-14 | 2006-05-16 | Gennady Ozeryansky | Microfabrication method based on metal matrix composite technology |
AU2004220635A1 (en) | 2003-03-06 | 2004-09-23 | Applied Medical Resources Corporation | Spring clip and method for assembling same |
USRE45414E1 (en) * | 2003-04-14 | 2015-03-17 | Crucible Intellectual Property, Llc | Continuous casting of bulk solidifying amorphous alloys |
DE10328730B4 (de) * | 2003-06-25 | 2006-08-17 | Micronas Gmbh | Verfahren zum Herstellen eines Microarrays und Vorrichtung zum Versehen eines Trägers für ein Microarray mit Beschichtungsstoffen |
EP1680154B1 (en) | 2003-10-31 | 2012-01-04 | ALZA Corporation | Self-actuating applicator for microprojection array |
MXPA06005509A (es) | 2003-11-13 | 2007-05-23 | Johnson & Johnson | Sistema y metodo para distribucion transdermica. |
US7753888B2 (en) | 2003-11-21 | 2010-07-13 | The Regents Of The University Of California | Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles |
IL160033A0 (en) | 2004-01-25 | 2004-06-20 | Transpharma Medical Ltd | Transdermal delivery system for polynucleotides |
GB0402131D0 (en) | 2004-01-30 | 2004-03-03 | Isis Innovation | Delivery method |
US20080312669A1 (en) | 2004-03-31 | 2008-12-18 | Vries Luc De | Surgical instrument and method |
US7591806B2 (en) | 2004-05-18 | 2009-09-22 | Bai Xu | High-aspect-ratio microdevices and methods for transdermal delivery and sampling of active substances |
WO2005123173A1 (en) | 2004-06-10 | 2005-12-29 | 3M Innovative Properties Company | Patch application device and kit |
FR2872714B1 (fr) | 2004-07-08 | 2006-10-06 | Corolle | Jouet sensible au toucher humain |
TWI246929B (en) | 2004-07-16 | 2006-01-11 | Ind Tech Res Inst | Microneedle array device and its fabrication method |
US7524430B2 (en) * | 2004-09-10 | 2009-04-28 | Lexmark International, Inc. | Fluid ejection device structures and methods therefor |
JP4927751B2 (ja) | 2004-11-18 | 2012-05-09 | スリーエム イノベイティブ プロパティズ カンパニー | マイクロニードルアレイのコーティング方法 |
WO2006101459A1 (en) | 2005-03-23 | 2006-09-28 | Agency For Science, Technology And Research | Microneedles |
US10035008B2 (en) | 2005-04-07 | 2018-07-31 | 3M Innovative Properties Company | System and method for tool feedback sensing |
US20060253079A1 (en) | 2005-04-25 | 2006-11-09 | Mcdonough Justin | Stratum corneum piercing device |
US20070270738A1 (en) | 2005-04-25 | 2007-11-22 | Wu Jeffrey M | Method of treating ACNE with stratum corneum piercing patch |
KR101569307B1 (ko) | 2005-05-09 | 2015-11-13 | 테라노스, 인코포레이티드 | 현장진료 유체 시스템 및 그 용도 |
US8043250B2 (en) * | 2005-05-18 | 2011-10-25 | Nanomed Devices, Inc. | High-aspect-ratio microdevices and methods for transdermal delivery and sampling of active substances |
US20080213461A1 (en) | 2005-06-17 | 2008-09-04 | Georgia Tech Research Corporation | Coated Microstructures and Methods of Manufacture Thereof |
AU2006262316A1 (en) | 2005-06-21 | 2007-01-04 | Alza Corporation | Method and device for coating a continuous strip of microprojection members |
WO2007002521A2 (en) | 2005-06-27 | 2007-01-04 | 3M Innovative Properties Company | Microneedle array applicator device |
FR2888226B1 (fr) * | 2005-07-11 | 2007-12-14 | Rieter Textile Machinery Fr | Dispositif de va-et-vient a bras oscillant |
US20070027474A1 (en) | 2005-07-15 | 2007-02-01 | Jeffrey Lasner | Pressure limiting forceps |
WO2007012114A1 (en) | 2005-07-25 | 2007-02-01 | Nanotechnology Victoria Pty Ltd | Microarray device |
CA2629393C (en) | 2005-09-06 | 2014-06-10 | Theraject, Inc. | Solid solution perforator containing drug particle and/or drug-adsorbed particles |
EP1928539A1 (en) * | 2005-09-30 | 2008-06-11 | Tti Ellebeau, Inc. | Functionalized microneedles transdermal drug delivery systems, devices, and methods |
CA2628546A1 (en) | 2005-11-09 | 2007-05-18 | Pharmexa A/S | Therapeutic vaccines targeting hmgb1 |
CA2629193C (en) | 2005-11-18 | 2016-03-29 | 3M Innovative Properties Company | Coatable compositions, coatings derived therefrom and microarrays having such coatings |
WO2007070004A2 (en) | 2005-12-14 | 2007-06-21 | Silex Microsystems Ab | Methods for making micro needles and applications thereof |
GB0600795D0 (en) | 2006-01-16 | 2006-02-22 | Functional Microstructures Ltd | Method of making microneedles |
JP5028872B2 (ja) * | 2006-03-02 | 2012-09-19 | 凸版印刷株式会社 | 針状体の製造方法 |
US20070224252A1 (en) | 2006-03-27 | 2007-09-27 | Trautman Joseph C | Microprojections with capillary control features and method |
US20070299388A1 (en) | 2006-04-25 | 2007-12-27 | Alza Corporation | Microprojection array application with multilayered microprojection member for high drug loading |
WO2007127976A2 (en) | 2006-05-01 | 2007-11-08 | Georgia Tech Research Corporation | Particle based molding |
US7425465B2 (en) * | 2006-05-15 | 2008-09-16 | Fujifilm Diamatix, Inc. | Method of fabricating a multi-post structures on a substrate |
KR100793615B1 (ko) | 2006-07-21 | 2008-01-10 | 연세대학교 산학협력단 | 생분해성 솔리드 마이크로니들 및 이의 제조방법 |
WO2008011625A2 (en) | 2006-07-21 | 2008-01-24 | Georgia Tech Researh Corporation | Microneedle devices and methods of drug delivery or fluid withdrawal |
WO2008053481A1 (en) | 2006-11-01 | 2008-05-08 | Svip 6 Llc | Microneedle arrays |
KR20080051342A (ko) | 2006-12-05 | 2008-06-11 | 연세대학교 산학협력단 | 마이크로니들 기기 및 이의 응용방법 |
DE102007002832A1 (de) * | 2007-01-19 | 2008-07-24 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Vorrichtung umfassend eine Anordnung von Mikronadeln auf einem Träger und nach diesem Verfahren herstellbare Vorrichtung |
WO2009040548A1 (en) | 2007-09-28 | 2009-04-02 | The Queen's University Of Belfast | Delivery device and method |
JP5419702B2 (ja) | 2007-10-18 | 2014-02-19 | 久光製薬株式会社 | マイクロニードルデバイス |
AU2008327083B2 (en) | 2007-11-21 | 2014-01-16 | Bioserentach Co., Ltd. | Preparation for application to body surface and preparation holding sheet for application to body surface |
GB0725018D0 (en) | 2007-12-21 | 2008-01-30 | Univ Cardiff | Monitoring system for microneedle delivery |
EP2231257A4 (en) | 2007-12-24 | 2013-11-06 | Univ Queensland | APPLICATION METHOD |
WO2009097660A1 (en) | 2008-02-07 | 2009-08-13 | The University Of Queensland | Patch production |
AU2009250341A1 (en) | 2008-05-23 | 2009-11-26 | The University Of Queensland | Analyte detection using a needle projection patch |
CN101297989B (zh) | 2008-06-19 | 2010-06-23 | 上海交通大学 | 基于模压的中空微针批量制备方法 |
KR101578420B1 (ko) | 2008-06-30 | 2015-12-17 | 히사미쓰 세이야꾸 가부시키가이샤 | 마이크로니들 디바이스 및 마이크로니들 디바이스에 의한 인플루엔자 백신의 주공성을 상승시키는 방법 |
AU2009304594A1 (en) | 2008-10-16 | 2010-04-22 | The University Of Queensland | A method and associated apparatus for coating projections on a patch assembly |
AU2009329806A1 (en) | 2008-12-22 | 2010-07-01 | The University Of Queensland | Patch production |
WO2010109471A1 (en) | 2009-03-27 | 2010-09-30 | Technion Research & Development Foundation Ltd. | Applicators for patches and adhesives |
JPWO2011105496A1 (ja) | 2010-02-24 | 2013-06-20 | 久光製薬株式会社 | マイクロニードルデバイス |
WO2011116388A1 (en) | 2010-03-19 | 2011-09-22 | Nanostar Health Corporation | Body fluid sampling/fluid delivery device |
US9943673B2 (en) | 2010-07-14 | 2018-04-17 | Vaxxas Pty Limited | Patch applying apparatus |
EP3881781B1 (en) | 2011-10-12 | 2023-03-29 | Vaxxas Pty Limited | Delivery device |
-
2009
- 2009-02-05 WO PCT/AU2009/000142 patent/WO2009097660A1/en active Application Filing
- 2009-02-05 EP EP09707729.1A patent/EP2247527A4/en not_active Withdrawn
- 2009-02-05 CN CN2009801046353A patent/CN102007066B/zh active Active
- 2009-02-05 CA CA2749347A patent/CA2749347C/en active Active
- 2009-02-05 AU AU2009212106A patent/AU2009212106B9/en active Active
- 2009-02-05 US US12/866,717 patent/US8883015B2/en active Active
-
2014
- 2014-10-07 US US14/508,451 patent/US9283365B2/en active Active
-
2016
- 2016-01-29 US US15/010,734 patent/US20160220803A1/en not_active Abandoned
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108096699A (zh) * | 2017-12-28 | 2018-06-01 | 浙江大学台州研究院 | 用于药物传输和体液采集的空心微针阵列及其制备方法 |
CN110732079A (zh) * | 2018-07-19 | 2020-01-31 | 淡江大学 | 微针元件及其制造方法与微针模具的制造方法 |
CN110002393A (zh) * | 2019-04-04 | 2019-07-12 | 中国科学院微电子研究所 | 选择性刻蚀方法及纳米针尖结构的制备方法 |
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WO2009097660A1 (en) | 2009-08-13 |
CN102007066B (zh) | 2013-06-26 |
US20110223542A1 (en) | 2011-09-15 |
AU2009212106A1 (en) | 2009-08-13 |
CA2749347C (en) | 2018-03-27 |
AU2009212106B2 (en) | 2014-05-01 |
US8883015B2 (en) | 2014-11-11 |
US20150224294A1 (en) | 2015-08-13 |
EP2247527A4 (en) | 2014-10-29 |
CA2749347A1 (en) | 2009-08-13 |
US9283365B2 (en) | 2016-03-15 |
AU2009212106B9 (en) | 2014-05-22 |
US20160220803A1 (en) | 2016-08-04 |
EP2247527A1 (en) | 2010-11-10 |
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