CN101980375B - Bearing device special for texturing silicon wafer - Google Patents
Bearing device special for texturing silicon wafer Download PDFInfo
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- CN101980375B CN101980375B CN201010262793.6A CN201010262793A CN101980375B CN 101980375 B CN101980375 B CN 101980375B CN 201010262793 A CN201010262793 A CN 201010262793A CN 101980375 B CN101980375 B CN 101980375B
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- silicon chip
- screen
- silicon wafer
- rod
- slot
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to a bearing device special for texturing a silicon wafer. The bearing device comprises a left grid plate and a right grid plate, wherein the grid plate consists of an upper frame rod, a left side rod, a right side rod, a slot separating plate and a lower frame rod; the upper frame rod, the left side rod, the right side rod and the lower frame rod are firmly connected to form a grid plate frame; the slot separating plate is parallel to the left side rod and the right side rod and distributed in the grid plate frame, so that a plurality of vertically distributed silicon wafer slots are formed on the grid plate at equal intervals; liquid permeable holes are formed on the left side rod, the right side rod and the slot separating plate; a silicon wafer limit rod hole is formed along the height direction; a limit rod is inserted into the silicon wafer limit rod hole; at least one elastic pressing sheet is arranged in each silicon wafer slot; and when the silicon wafer is inserted into the silicon wafer slot, the elastic pressing sheet can press the side face of the silicon wafer. By the bearing device, the phenomenon that the silicon wafer is blocked in the silicon wafer slot can be effectively avoided, the breakage rate of the silicon wafer in the texturing production process is reduced to the greatest extent, and the problem of non-uniform texturing on the left and right side faces of the silicon wafer can be solved.
Description
Technical field:
The present invention relates to a kind of silicon chip storing containers used in manufacture of solar cells process, particularly relate to a kind of silicon wafer carrying device that silicon wafer wool making production process uses.
Background technology:
In the making herbs into wool production process of solar cell, must silicon wafer carrier be used, be commonly called as small basket of flowers, silicon chip block-by-block is put into silicon wafer carrier, then through NaOH solution, HCl solution, HF solution and clear water, silicon chip is cleaned successively, finally also will put into drier and dry.At present, the silicon wafer carrier used is grated plate type structure, as shown in Figure 1, it is enclosed by left screen 1, right screen 2, front apron 3 and backboard 4 and forms, left screen 1 is identical with right screen 2 structure, bracket 5 is fixed with in the upper end of left screen 1 and right screen 2, within it lower end, side is provided with bottom bracket 6, the madial wall of left screen 1 and right screen 2 is vertically provided with silicon chip slot equally spacedly, the lateral wall of left screen 1 and right screen 2 is provided with horizontally disposed silicon chip gag lever post, its objective is and prevent silicon chip from producing the oblique card phenomenon of silicon chip when spin-drying operation.There is following shortcoming in actual use in the silicon wafer carrier of this structure:
First; in large batch of silicon chip production process; always there is error in the size of silicon chip; be generally 0.1 ~ 0.3 millimeter; silicon chip to be placed in this grated plate type silicon wafer carrier in the process operations such as making herbs into wool, drying process; often can tilt to be stuck in the silicon chip slot of silicon wafer carrier, can contraction be produced when silicon wafer carrier cools fast after high temperature, thus cause silicon chip to break.
Second, silicon chip is in making herbs into wool process, the right and left due to silicon chip is all wanted in the silicon chip slot of insertion left and right, side screen, this plug in construction increases the contact area of isolation channel on silicon chip and screen, silicon chip is uneven in the making herbs into wool of limit, the left and right sides after making herbs into wool, this not only affects the photoelectric conversion efficiency of cell piece, but also affects the presentation quality of cell piece.
Summary of the invention:
The object of this invention is to provide a kind of Special carrying device for texturing silicon wafers.What it effectively can overcome that silicon chip causes because of size fluctuation in screen silicon chip slot turns card phenomenon, reduces the fragment rate of silicon chip in making herbs into wool production process to greatest extent, can solve again the uneven problem of making herbs into wool on limit, the silicon chip left and right sides.
The technical scheme that the present invention takes is:
A kind of Special carrying device for texturing silicon wafers, it is enclosed by left screen, right screen, front apron and backboard and forms, and is provided with bracket symmetrically in the upper end of left screen and right screen, is fixed with bottom bracket in the lower end of the medial surface of left screen and right screen, left screen is identical with the structure of right screen, the madial wall of the right screen of left screen offers silicon chip slot vertically, bracket and bottom bracket are all provided with silicon chip slot, and the silicon chip slot that bracket and bottom bracket are provided with is corresponding with the silicon chip slot that screen is provided with, it is characterized in that, described right screen is by upper ledge bar, left side bar, right-hand rod, separate slot plate and lower frame rod composition, upper ledge bar, left side bar, right-hand rod and lower frame rod connect into a screen frame securely, separate slot plate is parallel to left side bar and right-hand rod, and be distributed in screen frame, right screen is formed the silicon chip slot of equidistantly vertically distribution, left side bar, right-hand rod and separate slot plate are all provided with liquid drain hole, are provided with the spacing rod aperture of silicon chip along short transverse, in the spacing rod aperture of silicon chip, be interspersed with gag lever post.
Further, in each group silicon chip slot, be at least provided with an elastic pressuring plate, elastic pressuring plate is sleeved on gag lever post, when being inserted with silicon chip in silicon chip slot, and the side of elastic pressuring plate compressing silicon chip.
Further, in each group silicon chip slot, be provided with two elastic pressuring plates by vertical direction, and be positioned at the same side.
Owing to having set up liquid drain hole on left screen and right screen, silicon chip is inserted in silicon chip slot, Woolen-making liquid can contact with silicon chip from liquid drain hole, guarantees that the silicon chip be in silicon chip slot can carry out normal making herbs into wool, thus improves the consistency of the making herbs into wool effect of whole silicon chip.
Owing to have set up the gag lever post of restriction silicon chip on left screen and right screen, making to be in silicon chip in silicon chip slot can not left and right translation, can not rotate.Like this, the six-freedom degree of silicon chip in silicon chip slot is just defined, and can guarantee that silicon chip can not tilt to be stuck in silicon chip slot in making herbs into wool, cleaning, drying operational process of craft, eliminates cause silicon chip to break Producing reason from structure.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of existing silicon wafer carrier;
Fig. 2 is the structural representation of right screen in the present invention;
Fig. 3 is the A-A cutaway view of Fig. 2;
Fig. 4 is B-B cutaway view in Fig. 2;
Fig. 5 is the structural representation of embodiment 1;
Fig. 6 is the structural representation of embodiment 2;
In figure: the left screen of 1-; The right screen of 2-; 3-front apron; 4-backboard; 5-bracket; 6-bottom bracket; 7-silicon chip slot; 8-gag lever post; 9-elastic pressuring plate; 10-silicon chip; 21-upper ledge bar; Bar on the left of 22-; 23-right-hand rod; 24-separate slot plate; 25-lower frame rod; 26-liquid drain hole; The spacing rod aperture of 27-.
Specific embodiments:
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described:
Embodiment 1: one is applicable to the Special carrying device for texturing silicon wafers that specification is 156 × 156, as shown in Fig. 1 ~ 5, it is enclosed by left screen 1, right screen 2, front apron 3 and backboard 4 and forms, in the upper end of left screen 1 and right screen 2, bracket 5 is installed symmetrically, is fixed with bottom bracket 6 in the lower end of the medial surface of left screen 1 and right screen 2, left screen 1 is identical with the structure of right screen 2, the madial wall of right screen 2 offers silicon chip slot 7 that 25 width are 1 mm wide vertically, bracket 5 and bottom bracket 6 are all provided with the silicon chip slot 7 that 25 width are 1 millimeter, and the silicon chip slot 7 that bracket 5 and bottom bracket 6 are provided with is corresponding with the silicon chip slot 7 that screen is provided with, described right screen 2 is by upper ledge bar 21, left side bar 22, right-hand rod 23, separate slot plate 24 and lower frame rod 25 form, upper ledge bar 21, left side bar 22, right-hand rod 23 and lower frame rod 25 connect into a screen frame securely, separate slot plate 24 is parallel to left side bar 22 and right-hand rod 23, and be distributed in screen frame, screen is formed 25 silicon chip slots 7 equidistantly vertically distributed, left side bar 22, right-hand rod 23 and separate slot plate 24 are provided with liquid drain hole 26 all equably, two groups of spacing rod aperture 27 of silicon chip are provided with along short transverse, gag lever post 8 is interspersed with in the spacing rod aperture 27 of silicon chip, two gag lever posts 8 be sleeved on left screen 1 are of a size of 156 millimeters with the home record of two gag lever posts 8 be arranged in right screen 2, and tolerance is 0.2 ~ 1.2 millimeter.
Embodiment 2, overall structure and embodiment 1 similar, institute's difference is, in each silicon chip slot 7 of right screen 2, be provided with two elastic pressuring plates 9, elastic pressuring plate 9 is sleeved on gag lever post 8, when being inserted with silicon chip in silicon chip slot 7, elastic pressuring plate 9 can oppress the right edge of silicon chip 10, as shown in Figure 6.
Embodiments of the present invention are not limited to above-mentioned two examples, and the version of elastic pressuring plate is varied, as long as the technical scheme essence taked is identical with the present invention, all belongs to protection scope of the present invention.
Claims (1)
1. a Special carrying device for texturing silicon wafers, it is enclosed by left screen (1), right screen (2), front apron (3) and backboard (4) and forms, in the upper end of left screen (1) and right screen (2), bracket (5) is installed symmetrically, is fixed with bottom bracket (6) in the lower end of the medial surface of left screen (1) and right screen (2), left screen (1) is identical with the structure of right screen (2), the madial wall of right screen (2) offers silicon chip slot (7) vertically, bracket (5) and bottom bracket (6) are all provided with silicon chip slot (7), and the silicon chip slot (7) that bracket (5) and bottom bracket (6) are provided with is corresponding with the silicon chip slot (7) that screen is provided with, it is characterized in that, described screen is by upper ledge bar (21), left side bar (22), right-hand rod (23), separate slot plate (24) and lower frame rod (25) composition, upper ledge bar 21, left side bar 22, right-hand rod 23 and lower frame rod (25) connect into a screen frame securely, separate slot plate (24) is parallel to left side bar (22) and right-hand rod (23), and be distributed in screen frame, make screen to be formed some equidistantly vertically distributions silicon chip slot (7), left side bar (22), right-hand rod (23) and separate slot plate (24) are all provided with liquid drain hole (26), the spacing rod aperture of silicon chip (27) is provided with along short transverse, gag lever post (8) is interspersed with in the spacing rod aperture of silicon chip (27), an elastic pressuring plate (9) is at least provided with in each silicon chip slot (7), elastic pressuring plate (9) is sleeved on gag lever post (8), when being inserted with silicon chip in silicon chip slot (7), elastic pressuring plate (9) can oppress the side of silicon chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010262793.6A CN101980375B (en) | 2010-08-26 | 2010-08-26 | Bearing device special for texturing silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010262793.6A CN101980375B (en) | 2010-08-26 | 2010-08-26 | Bearing device special for texturing silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101980375A CN101980375A (en) | 2011-02-23 |
| CN101980375B true CN101980375B (en) | 2015-01-07 |
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ID=43600870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010262793.6A Active CN101980375B (en) | 2010-08-26 | 2010-08-26 | Bearing device special for texturing silicon wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101980375B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4176751A (en) * | 1977-01-27 | 1979-12-04 | Northern Telecom Limited | Container apparatus for handling semiconductor wafers |
| JP2871701B2 (en) * | 1988-12-14 | 1999-03-17 | 日本電気株式会社 | Carrier for semiconductor wafer |
| JPH0997782A (en) * | 1995-09-30 | 1997-04-08 | Komatsu Electron Metals Co Ltd | Semiconductor wafer carrier |
| KR101075512B1 (en) * | 2005-12-06 | 2011-10-21 | 후지쯔 세미컨덕터 가부시키가이샤 | Semiconductor wafer storage case and method of storing wafers |
| CN201788991U (en) * | 2010-08-26 | 2011-04-06 | 常州亿晶光电科技有限公司 | Special carrying device for texturing silicon wafers |
-
2010
- 2010-08-26 CN CN201010262793.6A patent/CN101980375B/en active Active
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| Publication number | Publication date |
|---|---|
| CN101980375A (en) | 2011-02-23 |
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