CN101972981A - Large-diameter crystal wafer chamfering tool and chamfering method thereof - Google Patents
Large-diameter crystal wafer chamfering tool and chamfering method thereof Download PDFInfo
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- CN101972981A CN101972981A CN201010507574XA CN201010507574A CN101972981A CN 101972981 A CN101972981 A CN 101972981A CN 201010507574X A CN201010507574X A CN 201010507574XA CN 201010507574 A CN201010507574 A CN 201010507574A CN 101972981 A CN101972981 A CN 101972981A
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- chamfering
- quartzy disk
- concave surface
- quartzy
- spherical concave
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Abstract
The invention provides a large-diameter crystal wafer chamfering tool and a chamfering method thereof. The chamfering tool comprises a four-shaft grinding machine, a bowl-shaped chamfering tool and a crystal wafer vacuum sticky hook, wherein the bowl-shaped chamfering tool comprises a bowel body with a spherical concave surface and a connector installed at the lower part of the bowl body, a grinding sand layer is arranged on the spherical concave surface of the bowel body, and the connector of the bowl-shaped chamfering tool is installed on a transmission shaft of the four-shaft grinding machine; the center of the crystal wafer vacuum sticky hook is corresponding to the center of the spherical concave surface. The chamfering method comprises the following steps of: starting the four-shaft grinding machine, and adjusting the rotating speed; absorbing the crystal wafer by using the crystal wafer vacuum sticky hook; and leading the crystal wafer to be in contact with the spherical concave surface, and chamfering the edge of the crystal wafer by rotating the spherical concave surface. The chamfering tool has the advantages of high working efficiency and low manufacturing cost and is easy to operate; the chamfering method has the advantages of simple process, ideal grinding effect, reliable chamfering quality and no broken edge.
Description
Technical field
The present invention relates to the wafer chamfering equipment that a kind of quartzy processing industry is used, specifically, relate to quartzy disk chamfering frock of a kind of major diameter and chamfering method thereof.
Background technology
Existing disk beveler is a kind of chamfering equipment that is widely used in industries such as glass, quartzy processing, traditional operation is that quartzy disk is carried out chamfering on the disk beveler, but it is only just better at the disk chamfering effect of diameter≤￠ 20, if large diameter quartzy disk, diameter has only 0.4 millimeter at 62 millimeters and thickness, and the chamfering effect is with regard to non-constant;
High-quality ￠ 62 round polishing water wafers are the products that are used for field of aviation measurement and test, and its processing request is very high, at present, chamfering control to it never has a good manufacturing process, and principal element is that its diameter is bigger, and thickness is extremely thin, has only 0.4 millimeter, therefore process very difficulty, difficult quality control, percent defective height, because the too big bad center of circle of fixedly looking for of diameter, therefore chamfer dimesion is very inhomogeneous, and it is serious to collapse the limit problem, and quality can not reach requirement;
Therefore, people are seeking the frock and the chamfering method thereof of a kind of easy operating, the quartzy disk chamfering of suitable major diameter always.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, thereby a kind of ingenious, easy to use, time saving and energy saving, high efficiency, the quartzy disk chamfering of major diameter frock that product percent of pass is high of designing is provided, also provide a kind of grinding effect ideal, chamfer quality reliable, do not have and collapse the chamfering method on limit.
To achieve these goals, the invention provides the quartzy disk chamfering of a kind of major diameter frock, it comprises four grinders, bowl type chamfering frock and quartzy disk vacuum fishing without hook, described bowl type chamfering frock comprises the bowl body with spherical concave surface and is arranged on bowl connector of body bottom, the spherical concave surface of described bowl body is provided with one deck abrasive sand, the connector of described bowl type chamfering frock is installed on the power transmission shaft of described four grinders, and the center of the corresponding described spherical concave surface in described quartzy disk vacuum fishing without hook center is provided with.
Based on above-mentioned, the top of described quartzy disk vacuum fishing without hook is provided with handle.
The chamfering method of the quartzy disk chamfering of a kind of major diameter frock, it may further comprise the steps:
In step 2, in the time of chamfering, inject lapping liquid to the contact site of spherical concave surface and quartzy disk.
The relative prior art of the present invention has outstanding substantive distinguishing features and marked improvement, specifically, the quartzy disk chamfering of this major diameter frock is fit to the chamfering of various large diameter quartzy disks, and high efficiency, product quality height, easy operating, well solve the chamfering of the ultra-thin circular wafer of major diameter and collapsed the limit problem, in addition, cheap for manufacturing cost, be easy to cost control;
This chamfering method has the advantage that technology is simple, grinding effect is desirable, chamfer quality is reliable, nothing collapses the limit.
Description of drawings
Fig. 1 is the structural representation of the quartzy disk chamfering of major diameter of the present invention frock.
The specific embodiment
Below by the specific embodiment, technical scheme of the present invention is described in further detail.
As shown in Figure 1, the quartzy disk chamfering of a kind of major diameter frock, it comprises four grinders 6, bowl type chamfering frock and quartzy disk vacuum fishing without hook 2;
Wherein, described bowl type chamfering frock comprises bowl body 1 with spherical concave surface 4 and the connector 5 that is arranged on bowl body 1 bottom, the spherical concave surface 4 of described bowl body 1 is provided with one deck abrasive sand, the connector 5 of described bowl type chamfering frock is installed on the power transmission shaft of described four grinders 6, and the center of the corresponding described spherical concave surface 4 in the center of described quartzy disk vacuum fishing without hook 2 is provided with.
Based on above-mentioned, the top of described quartzy disk vacuum fishing without hook 2 is provided with handle.
The chamfering method of the quartzy disk of a kind of major diameter, it may further comprise the steps:
Adopt quartzy disk vacuum fishing without hook 2 to adsorb quartzy disk 3, and make the center of quartzy disk vacuum fishing without hook 2 corresponding with the center of circle of quartzy disk 3;
In the time of chamfering, to the contact site injection lapping liquid of spherical concave surface 4 with quartzy disk 3.
The bowl type chamfering frock of this crystal disk chamfering frock is installed on the power transmission shaft of four grinders, utilize power transmission shaft to drive the rotation of bowl type chamfering frock, and utilized cleverly the life in common vacuum fishing without hook cling quartzy disk, so just can grasp the shank of vacuum fishing without hook, on the spherical concave surface of quartzy disk near bowl type chamfering frock, under the mating reaction of lapping liquid, can be very desirable with quartzy disk chamfering, grinding effect is very desirable, like this, the extraordinary chamfer angle technique of having controlled the quartzy disk of major diameter has improved the quality of product.
Should be noted that at last: above embodiment is only in order to illustrate that technical scheme of the present invention is not intended to limit; Although with reference to preferred embodiment the present invention is had been described in detail, those of ordinary skill in the field are to be understood that: still can make amendment or the part technical characterictic is equal to replacement the specific embodiment of the present invention; And not breaking away from the spirit of technical solution of the present invention, it all should be encompassed in the middle of the technical scheme scope that the present invention asks for protection.
Claims (4)
1. the quartzy disk chamfering of major diameter frock, it is characterized in that: the quartzy disk chamfering of this major diameter frock comprises four grinders, bowl type chamfering frock and quartzy disk vacuum fishing without hook, described bowl type chamfering frock comprises the bowl body with spherical concave surface and is arranged on bowl connector of body bottom, the spherical concave surface of described bowl body is provided with one deck abrasive sand, the connector of described bowl type chamfering frock is installed on the power transmission shaft of described four grinders, and the center of the corresponding described spherical concave surface in described quartzy disk vacuum fishing without hook center is provided with.
2. the quartzy disk chamfering of the described major diameter of claim 1 frock, it is characterized in that: the top of described quartzy disk vacuum fishing without hook is provided with handle.
3. the chamfering method of the quartzy disk chamfering of the described major diameter of claim 1 frock is characterized in that this chamfering method may further comprise the steps:
Step 1, four grinders of startup, the rotating speed of four grinders of adjustment; Adopt quartzy disk vacuum fishing without hook to adsorb quartzy disk, and make the center of quartzy disk vacuum fishing without hook corresponding with the center of circle of quartzy disk;
Step 2, quartzy disk vacuum fishing without hook and quartzy disk are placed in bowl spherical concave surface of type chamfering frock, make quartzy disk and spherical concave surface contact and make the center of the corresponding spherical concave surface in the center of circle of quartzy disk, the edge of facing quartzy disk by the spherical female of rotation carries out chamfering.
4. the chamfering method of the quartzy disk chamfering of major diameter according to claim 3 frock is characterized in that: in step 2, in the time of chamfering, inject lapping liquid to the contact site of spherical concave surface and quartzy disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010507574XA CN101972981A (en) | 2010-10-15 | 2010-10-15 | Large-diameter crystal wafer chamfering tool and chamfering method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010507574XA CN101972981A (en) | 2010-10-15 | 2010-10-15 | Large-diameter crystal wafer chamfering tool and chamfering method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101972981A true CN101972981A (en) | 2011-02-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010507574XA Pending CN101972981A (en) | 2010-10-15 | 2010-10-15 | Large-diameter crystal wafer chamfering tool and chamfering method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102848305A (en) * | 2011-06-30 | 2013-01-02 | 株式会社迪思科 | Method for grinding to-be-processed object |
| CN105798728A (en) * | 2016-06-02 | 2016-07-27 | 张清金 | Edge grinding device for machining columnar stone pier |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384290A (en) * | 1976-12-29 | 1978-07-25 | Daiei Kougiyoushiya Kk | Filter chamfering machine |
| JP2000317788A (en) * | 1999-04-30 | 2000-11-21 | Systemseiko Co Ltd | Polishing method for outer circumference of work and polishing device |
| JP2008080482A (en) * | 2006-09-01 | 2008-04-10 | Hoya Corp | Manufacturing method and manufacturing device for magnetic disk glass substrate, magnetic disk glass substrate, magnetic disk manufacturing method, and magnetic disk |
| CN201205684Y (en) * | 2008-04-24 | 2009-03-11 | 长葛市飞亚精密磨具厂 | Diamond corner making machine |
| CN201455768U (en) * | 2009-06-26 | 2010-05-12 | 上海中晶企业发展有限公司 | Workpiece conveying device of large-sized ring-like polishing machine |
| CN201824234U (en) * | 2010-10-15 | 2011-05-11 | 北京石晶光电科技股份有限公司济源分公司 | Chamfering tool of larger-diameter crystal wafer |
-
2010
- 2010-10-15 CN CN201010507574XA patent/CN101972981A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384290A (en) * | 1976-12-29 | 1978-07-25 | Daiei Kougiyoushiya Kk | Filter chamfering machine |
| JP2000317788A (en) * | 1999-04-30 | 2000-11-21 | Systemseiko Co Ltd | Polishing method for outer circumference of work and polishing device |
| JP2008080482A (en) * | 2006-09-01 | 2008-04-10 | Hoya Corp | Manufacturing method and manufacturing device for magnetic disk glass substrate, magnetic disk glass substrate, magnetic disk manufacturing method, and magnetic disk |
| CN201205684Y (en) * | 2008-04-24 | 2009-03-11 | 长葛市飞亚精密磨具厂 | Diamond corner making machine |
| CN201455768U (en) * | 2009-06-26 | 2010-05-12 | 上海中晶企业发展有限公司 | Workpiece conveying device of large-sized ring-like polishing machine |
| CN201824234U (en) * | 2010-10-15 | 2011-05-11 | 北京石晶光电科技股份有限公司济源分公司 | Chamfering tool of larger-diameter crystal wafer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102848305A (en) * | 2011-06-30 | 2013-01-02 | 株式会社迪思科 | Method for grinding to-be-processed object |
| CN102848305B (en) * | 2011-06-30 | 2016-04-27 | 株式会社迪思科 | The method for grinding of machined object |
| CN105798728A (en) * | 2016-06-02 | 2016-07-27 | 张清金 | Edge grinding device for machining columnar stone pier |
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Application publication date: 20110216 |