CN101967038A - 制造微型流体装置的方法 - Google Patents

制造微型流体装置的方法 Download PDF

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Publication number
CN101967038A
CN101967038A CN2010102633142A CN201010263314A CN101967038A CN 101967038 A CN101967038 A CN 101967038A CN 2010102633142 A CN2010102633142 A CN 2010102633142A CN 201010263314 A CN201010263314 A CN 201010263314A CN 101967038 A CN101967038 A CN 101967038A
Authority
CN
China
Prior art keywords
glass
sheet
mould
matrix band
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010102633142A
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English (en)
Chinese (zh)
Inventor
T·L·A·达诺克斯
P·卡泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN101967038A publication Critical patent/CN101967038A/zh
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/006Constructions of heat-exchange apparatus characterised by the selection of particular materials of glass
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/12Elements constructed in the shape of a hollow panel, e.g. with channels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/12Specific details about materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/058Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2260/00Heat exchangers or heat exchange elements having special size, e.g. microstructures
    • F28F2260/02Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Clinical Laboratory Science (AREA)
  • Hematology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Micromachines (AREA)
CN2010102633142A 2004-04-30 2005-04-29 制造微型流体装置的方法 Pending CN101967038A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04291114.9 2004-04-30
EP04291114 2004-04-30

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNA200510070018XA Division CN1693245A (zh) 2004-04-30 2005-04-29 高热效率玻璃微型通道及其真空成形方法

Publications (1)

Publication Number Publication Date
CN101967038A true CN101967038A (zh) 2011-02-09

Family

ID=35185900

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2010102633142A Pending CN101967038A (zh) 2004-04-30 2005-04-29 制造微型流体装置的方法
CNA200510070018XA Pending CN1693245A (zh) 2004-04-30 2005-04-29 高热效率玻璃微型通道及其真空成形方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA200510070018XA Pending CN1693245A (zh) 2004-04-30 2005-04-29 高热效率玻璃微型通道及其真空成形方法

Country Status (3)

Country Link
US (1) US20050241815A1 (enrdf_load_stackoverflow)
JP (1) JP2005336049A (enrdf_load_stackoverflow)
CN (2) CN101967038A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107810377A (zh) * 2015-06-10 2018-03-16 康宁股份有限公司 耐热串扰的流动反应器

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US7829147B2 (en) 2005-08-18 2010-11-09 Corning Incorporated Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device
US7722929B2 (en) 2005-08-18 2010-05-25 Corning Incorporated Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
US20070040501A1 (en) 2005-08-18 2007-02-22 Aitken Bruce G Method for inhibiting oxygen and moisture degradation of a device and the resulting device
LT1998690T (lt) * 2006-03-29 2019-11-11 Swenora Biotech Ab Būdas nervo regeneravimo prietaisui sukurti
EP1857423B1 (en) * 2006-05-15 2009-08-05 Corning Incorporated Sintered glass and glass-ceramic structures and methods for producing
FR2905690B1 (fr) * 2006-09-12 2008-10-17 Saint Gobain Procede de fabrication d'un dispositif microfluidique.
ES2350653T3 (es) * 2007-02-28 2011-01-25 Corning Incorporated Método para fabricar dispositivos microfluídicos.
EP1964816B1 (en) * 2007-02-28 2015-06-03 Corning Incorporated Methods for forming compositions containing glass
WO2009027774A1 (en) * 2007-08-24 2009-03-05 Zer Teknoloji Sanayi Ve Ticaret Limited Sirketi Glass panel radiator
EP2067526A1 (en) * 2007-11-29 2009-06-10 Corning Incorporated Devices and methods for radiation assisted chemical processing
US20090246412A1 (en) * 2008-03-27 2009-10-01 Peter Knowles Localized deposition system and method of localized deposition
US9010153B2 (en) * 2008-07-02 2015-04-21 Corning Incorporated Method of making shaped glass articles
US20100126222A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method and apparatus for forming and cutting a shaped article from a sheet of material
US20100127420A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method of forming a shaped article from a sheet of material
CN101786788B (zh) * 2009-01-22 2013-07-03 北京盛康宁科技开发有限公司 一种玻璃板及其制造方法以及该方法中使用的设备
KR101151221B1 (ko) 2010-03-11 2012-06-11 서울대학교산학협력단 마이크로 채널을 가진 구조물의 제조 방법 및 그 구조물
US10041747B2 (en) * 2010-09-22 2018-08-07 Raytheon Company Heat exchanger with a glass body
EP2444769A1 (en) * 2010-10-18 2012-04-25 Kryoz Technologies B.V. Micro-cooling device
TW201404729A (zh) * 2012-07-27 2014-02-01 G Tech Optoelectronics Corp 成型模具、使用該玻璃成型模具的玻璃成型裝置及方法
EP3010321B1 (en) * 2014-10-14 2021-12-01 Magneti Marelli S.p.A. Liquid cooling system for an electronic component
WO2019209776A1 (en) * 2018-04-27 2019-10-31 Corning Incorporated Microfluidic devices and methods for manufacturing microfluidic devices
US12137648B2 (en) * 2020-12-31 2024-11-12 Qatar University Self-cooling greenhouse for hot climate

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US1868271A (en) * 1931-06-10 1932-07-19 Schutte & Koerting Company Heat exchanger
FR1304146A (fr) * 1961-08-09 1962-09-21 Nouveaux matériaux délimités sur l'une au moins de leurs faces par une configuration du type des structures chevronnées développables, et procédés pour leur fabrication
US3279931A (en) * 1963-02-13 1966-10-18 Corning Glass Works Glass-ceramic body and method of making it
US3320044A (en) * 1964-04-29 1967-05-16 Corning Glass Works Method and apparatus for making ceramic or vitreous articles
US3943994A (en) * 1972-12-07 1976-03-16 Gte Sylvania Incorporated Ceramic cellular structure having high cell density and method for producing same
US3885942A (en) * 1973-02-16 1975-05-27 Owens Illinois Inc Method of making a reinforced heat exchanger matrix
US4248297A (en) * 1977-03-29 1981-02-03 Owens-Illinois, Inc. Glass-ceramic article and method of making same
US4392362A (en) * 1979-03-23 1983-07-12 The Board Of Trustees Of The Leland Stanford Junior University Micro miniature refrigerators
US4386505A (en) * 1981-05-01 1983-06-07 The Board Of Trustees Of The Leland Stanford Junior University Refrigerators
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US4955435A (en) * 1987-04-08 1990-09-11 Du Pont Canada, Inc. Heat exchanger fabricated from polymer compositions
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JP2003170411A (ja) * 2001-09-27 2003-06-17 Toto Ltd セラミックス成形体およびその製造方法
JP2003275575A (ja) * 2002-03-22 2003-09-30 Nippon Sheet Glass Co Ltd マイクロ化学システム用チップ部材のチャネル形成方法、及び該形成方法によってチャネルが形成されたマイクロ化学システム用チップ部材
JP2004066388A (ja) * 2002-08-06 2004-03-04 Nippon Sheet Glass Co Ltd マイクロ化学システム用チップ部材及びその製造方法
US6983792B2 (en) * 2002-11-27 2006-01-10 The Aerospace Corporation High density electronic cooling triangular shaped microchannel device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107810377A (zh) * 2015-06-10 2018-03-16 康宁股份有限公司 耐热串扰的流动反应器
CN107810377B (zh) * 2015-06-10 2020-06-19 康宁股份有限公司 耐热串扰的流动反应器

Also Published As

Publication number Publication date
CN1693245A (zh) 2005-11-09
JP2005336049A (ja) 2005-12-08
US20050241815A1 (en) 2005-11-03

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Application publication date: 20110209