CN101967038A - 制造微型流体装置的方法 - Google Patents
制造微型流体装置的方法 Download PDFInfo
- Publication number
- CN101967038A CN101967038A CN2010102633142A CN201010263314A CN101967038A CN 101967038 A CN101967038 A CN 101967038A CN 2010102633142 A CN2010102633142 A CN 2010102633142A CN 201010263314 A CN201010263314 A CN 201010263314A CN 101967038 A CN101967038 A CN 101967038A
- Authority
- CN
- China
- Prior art keywords
- glass
- sheet
- mould
- matrix band
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000011521 glass Substances 0.000 claims abstract description 53
- 239000012530 fluid Substances 0.000 claims description 52
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 239000002241 glass-ceramic Substances 0.000 abstract description 9
- 239000006112 glass ceramic composition Substances 0.000 abstract description 4
- 239000011159 matrix material Substances 0.000 description 43
- 239000000463 material Substances 0.000 description 15
- 239000005357 flat glass Substances 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 9
- 238000007666 vacuum forming Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 4
- 238000003672 processing method Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000004017 vitrification Methods 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000003490 calendering Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 206010011469 Crying Diseases 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 235000009470 Theobroma cacao Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 244000240602 cacao Species 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000035876 healing Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/006—Constructions of heat-exchange apparatus characterised by the selection of particular materials of glass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2260/00—Heat exchangers or heat exchange elements having special size, e.g. microstructures
- F28F2260/02—Heat exchangers or heat exchange elements having special size, e.g. microstructures having microchannels
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Clinical Laboratory Science (AREA)
- Hematology (AREA)
- General Health & Medical Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Joining Of Glass To Other Materials (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04291114.9 | 2004-04-30 | ||
EP04291114 | 2004-04-30 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA200510070018XA Division CN1693245A (zh) | 2004-04-30 | 2005-04-29 | 高热效率玻璃微型通道及其真空成形方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101967038A true CN101967038A (zh) | 2011-02-09 |
Family
ID=35185900
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010102633142A Pending CN101967038A (zh) | 2004-04-30 | 2005-04-29 | 制造微型流体装置的方法 |
CNA200510070018XA Pending CN1693245A (zh) | 2004-04-30 | 2005-04-29 | 高热效率玻璃微型通道及其真空成形方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA200510070018XA Pending CN1693245A (zh) | 2004-04-30 | 2005-04-29 | 高热效率玻璃微型通道及其真空成形方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20050241815A1 (enrdf_load_stackoverflow) |
JP (1) | JP2005336049A (enrdf_load_stackoverflow) |
CN (2) | CN101967038A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107810377A (zh) * | 2015-06-10 | 2018-03-16 | 康宁股份有限公司 | 耐热串扰的流动反应器 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7829147B2 (en) | 2005-08-18 | 2010-11-09 | Corning Incorporated | Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device |
US7722929B2 (en) | 2005-08-18 | 2010-05-25 | Corning Incorporated | Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device |
US20070040501A1 (en) | 2005-08-18 | 2007-02-22 | Aitken Bruce G | Method for inhibiting oxygen and moisture degradation of a device and the resulting device |
LT1998690T (lt) * | 2006-03-29 | 2019-11-11 | Swenora Biotech Ab | Būdas nervo regeneravimo prietaisui sukurti |
EP1857423B1 (en) * | 2006-05-15 | 2009-08-05 | Corning Incorporated | Sintered glass and glass-ceramic structures and methods for producing |
FR2905690B1 (fr) * | 2006-09-12 | 2008-10-17 | Saint Gobain | Procede de fabrication d'un dispositif microfluidique. |
ES2350653T3 (es) * | 2007-02-28 | 2011-01-25 | Corning Incorporated | Método para fabricar dispositivos microfluídicos. |
EP1964816B1 (en) * | 2007-02-28 | 2015-06-03 | Corning Incorporated | Methods for forming compositions containing glass |
WO2009027774A1 (en) * | 2007-08-24 | 2009-03-05 | Zer Teknoloji Sanayi Ve Ticaret Limited Sirketi | Glass panel radiator |
EP2067526A1 (en) * | 2007-11-29 | 2009-06-10 | Corning Incorporated | Devices and methods for radiation assisted chemical processing |
US20090246412A1 (en) * | 2008-03-27 | 2009-10-01 | Peter Knowles | Localized deposition system and method of localized deposition |
US9010153B2 (en) * | 2008-07-02 | 2015-04-21 | Corning Incorporated | Method of making shaped glass articles |
US20100126222A1 (en) * | 2008-11-25 | 2010-05-27 | Thierry Luc Alain Dannoux | Method and apparatus for forming and cutting a shaped article from a sheet of material |
US20100127420A1 (en) * | 2008-11-25 | 2010-05-27 | Thierry Luc Alain Dannoux | Method of forming a shaped article from a sheet of material |
CN101786788B (zh) * | 2009-01-22 | 2013-07-03 | 北京盛康宁科技开发有限公司 | 一种玻璃板及其制造方法以及该方法中使用的设备 |
KR101151221B1 (ko) | 2010-03-11 | 2012-06-11 | 서울대학교산학협력단 | 마이크로 채널을 가진 구조물의 제조 방법 및 그 구조물 |
US10041747B2 (en) * | 2010-09-22 | 2018-08-07 | Raytheon Company | Heat exchanger with a glass body |
EP2444769A1 (en) * | 2010-10-18 | 2012-04-25 | Kryoz Technologies B.V. | Micro-cooling device |
TW201404729A (zh) * | 2012-07-27 | 2014-02-01 | G Tech Optoelectronics Corp | 成型模具、使用該玻璃成型模具的玻璃成型裝置及方法 |
EP3010321B1 (en) * | 2014-10-14 | 2021-12-01 | Magneti Marelli S.p.A. | Liquid cooling system for an electronic component |
WO2019209776A1 (en) * | 2018-04-27 | 2019-10-31 | Corning Incorporated | Microfluidic devices and methods for manufacturing microfluidic devices |
US12137648B2 (en) * | 2020-12-31 | 2024-11-12 | Qatar University | Self-cooling greenhouse for hot climate |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1868271A (en) * | 1931-06-10 | 1932-07-19 | Schutte & Koerting Company | Heat exchanger |
FR1304146A (fr) * | 1961-08-09 | 1962-09-21 | Nouveaux matériaux délimités sur l'une au moins de leurs faces par une configuration du type des structures chevronnées développables, et procédés pour leur fabrication | |
US3279931A (en) * | 1963-02-13 | 1966-10-18 | Corning Glass Works | Glass-ceramic body and method of making it |
US3320044A (en) * | 1964-04-29 | 1967-05-16 | Corning Glass Works | Method and apparatus for making ceramic or vitreous articles |
US3943994A (en) * | 1972-12-07 | 1976-03-16 | Gte Sylvania Incorporated | Ceramic cellular structure having high cell density and method for producing same |
US3885942A (en) * | 1973-02-16 | 1975-05-27 | Owens Illinois Inc | Method of making a reinforced heat exchanger matrix |
US4248297A (en) * | 1977-03-29 | 1981-02-03 | Owens-Illinois, Inc. | Glass-ceramic article and method of making same |
US4392362A (en) * | 1979-03-23 | 1983-07-12 | The Board Of Trustees Of The Leland Stanford Junior University | Micro miniature refrigerators |
US4386505A (en) * | 1981-05-01 | 1983-06-07 | The Board Of Trustees Of The Leland Stanford Junior University | Refrigerators |
US4611474A (en) * | 1984-05-14 | 1986-09-16 | Kms Fusion, Inc. | Microminiature refrigerator |
US4955435A (en) * | 1987-04-08 | 1990-09-11 | Du Pont Canada, Inc. | Heat exchanger fabricated from polymer compositions |
ES2222217T5 (es) * | 1999-07-07 | 2010-05-07 | 3M Innovative Properties Company | Articulo de deteccion que tiene una pelicula para el control de fluidos con canales capilares. |
JP2003170411A (ja) * | 2001-09-27 | 2003-06-17 | Toto Ltd | セラミックス成形体およびその製造方法 |
JP2003275575A (ja) * | 2002-03-22 | 2003-09-30 | Nippon Sheet Glass Co Ltd | マイクロ化学システム用チップ部材のチャネル形成方法、及び該形成方法によってチャネルが形成されたマイクロ化学システム用チップ部材 |
JP2004066388A (ja) * | 2002-08-06 | 2004-03-04 | Nippon Sheet Glass Co Ltd | マイクロ化学システム用チップ部材及びその製造方法 |
US6983792B2 (en) * | 2002-11-27 | 2006-01-10 | The Aerospace Corporation | High density electronic cooling triangular shaped microchannel device |
-
2005
- 2005-04-13 US US11/106,178 patent/US20050241815A1/en not_active Abandoned
- 2005-04-19 JP JP2005121449A patent/JP2005336049A/ja active Pending
- 2005-04-29 CN CN2010102633142A patent/CN101967038A/zh active Pending
- 2005-04-29 CN CNA200510070018XA patent/CN1693245A/zh active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107810377A (zh) * | 2015-06-10 | 2018-03-16 | 康宁股份有限公司 | 耐热串扰的流动反应器 |
CN107810377B (zh) * | 2015-06-10 | 2020-06-19 | 康宁股份有限公司 | 耐热串扰的流动反应器 |
Also Published As
Publication number | Publication date |
---|---|
CN1693245A (zh) | 2005-11-09 |
JP2005336049A (ja) | 2005-12-08 |
US20050241815A1 (en) | 2005-11-03 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C12 | Rejection of a patent application after its publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20110209 |