CN101965309B - 微支架 - Google Patents

微支架 Download PDF

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Publication number
CN101965309B
CN101965309B CN2009801066732A CN200980106673A CN101965309B CN 101965309 B CN101965309 B CN 101965309B CN 2009801066732 A CN2009801066732 A CN 2009801066732A CN 200980106673 A CN200980106673 A CN 200980106673A CN 101965309 B CN101965309 B CN 101965309B
Authority
CN
China
Prior art keywords
components
microsystem
microchannel plate
spring structure
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009801066732A
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English (en)
Chinese (zh)
Other versions
CN101965309A (zh
Inventor
J-P·豪希尔德
E·瓦佩尔霍斯特
J·米勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ludwig Crene & Co KG GmbH
Bayer AG
Original Assignee
Bayer Technology Services GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Technology Services GmbH filed Critical Bayer Technology Services GmbH
Publication of CN101965309A publication Critical patent/CN101965309A/zh
Application granted granted Critical
Publication of CN101965309B publication Critical patent/CN101965309B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/05—Aligning components to be assembled
    • B81C2203/051—Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electron Tubes For Measurement (AREA)
  • Micromachines (AREA)
  • Manipulator (AREA)
  • Multi-Conductor Connections (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN2009801066732A 2008-02-29 2009-02-17 微支架 Expired - Fee Related CN101965309B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200810011972 DE102008011972B4 (de) 2008-02-29 2008-02-29 Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen
DE102008011972.5 2008-02-29
PCT/EP2009/001088 WO2009109288A2 (de) 2008-02-29 2009-02-17 Mikrohalterung

Publications (2)

Publication Number Publication Date
CN101965309A CN101965309A (zh) 2011-02-02
CN101965309B true CN101965309B (zh) 2012-11-21

Family

ID=41056396

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801066732A Expired - Fee Related CN101965309B (zh) 2008-02-29 2009-02-17 微支架

Country Status (8)

Country Link
US (1) US9007784B2 (enExample)
EP (1) EP2259996B1 (enExample)
JP (2) JP2011513076A (enExample)
CN (1) CN101965309B (enExample)
AT (1) ATE529379T1 (enExample)
CA (1) CA2716978A1 (enExample)
DE (1) DE102008011972B4 (enExample)
WO (1) WO2009109288A2 (enExample)

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JP5049167B2 (ja) * 2008-03-07 2012-10-17 浜松ホトニクス株式会社 マイクロチャネルプレート組立体
DE202009002192U1 (de) * 2009-02-16 2009-04-23 Thermo Fisher Scientific (Bremen) Gmbh Elektrode zur Beeinflussung der Ionenbewegung in Massenspektrometern
US8602722B2 (en) 2010-02-26 2013-12-10 General Electric Company System and method for inspection of stator vanes
US8587660B2 (en) 2010-07-30 2013-11-19 General Electric Company Image recording assemblies and coupling mechanisms for stator vane inspection
CN102478660B (zh) * 2010-11-26 2013-07-24 中国科学院大连化学物理研究所 一种组装式带电粒子二维成像探测器
CN102014598B (zh) * 2010-11-27 2013-03-06 上海大学 棱柱阵列射流微通道散热器
DE102011015595B8 (de) * 2011-03-30 2015-01-29 Krohne Messtechnik Gmbh Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators
US8667856B2 (en) 2011-05-20 2014-03-11 General Electric Company Sensor assemblies and methods of assembling same
DE102011076693A1 (de) * 2011-05-30 2012-12-06 Robert Bosch Gmbh Mikrofluidische Vorrichtung mit elektronischem Bauteil und Federelement
JP5771447B2 (ja) * 2011-06-02 2015-08-26 浜松ホトニクス株式会社 電子増倍器
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
CN104090290A (zh) * 2014-07-25 2014-10-08 中国科学技术大学 极坐标读出式双楔条型阳极的二维位置灵敏探测器
CN104567946A (zh) * 2015-01-22 2015-04-29 清华大学 微通道板探测器及光子、电子、离子成像探测仪
CN111094888B (zh) 2017-07-28 2021-12-10 达纳加拿大公司 用于热管理的超薄热交换器
WO2019018945A1 (en) 2017-07-28 2019-01-31 Dana Canada Corporation DEVICE AND METHOD FOR ALIGNING PARTS FOR LASER WELDING
JP2021523523A (ja) * 2018-05-07 2021-09-02 アダプタス ソリューションズ プロプライエタリー リミテッド 構造が改善された検出器
CN111983345B (zh) * 2020-07-24 2023-03-14 北方夜视技术股份有限公司 异形微通道板测试夹具装置
EP4607571A1 (en) * 2024-02-22 2025-08-27 Alpine Quantum Technologies GmbH Monolithic spring contact for a trap for charged particles

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903059A (en) * 1995-11-21 1999-05-11 International Business Machines Corporation Microconnectors
EP1700821A2 (en) * 2005-03-08 2006-09-13 Zyvex Corporation Sockets for microassembly

Family Cites Families (18)

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US4731538A (en) * 1986-06-20 1988-03-15 Galileo Electro-Optics Corp. Microchannel plate ion detector
JPH06251840A (ja) * 1993-02-22 1994-09-09 Fujitsu Ltd センサ用ソケット
JP3774968B2 (ja) * 1996-01-19 2006-05-17 住友電気工業株式会社 マイクロコネクタおよびその製造方法
JPH10134763A (ja) * 1996-11-01 1998-05-22 Hamamatsu Photonics Kk 電子増倍器
US6627446B1 (en) * 1998-07-02 2003-09-30 Amersham Biosciences (Sv) Corp Robotic microchannel bioanalytical instrument
DE19946890C2 (de) * 1999-09-30 2003-08-14 Raymond A & Cie Halteelement zur unverlierbaren Halterung von Kopfschrauben
DE69931370T2 (de) * 1999-10-01 2007-02-01 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind
JP2003045576A (ja) * 2001-08-03 2003-02-14 Sumitomo Electric Ind Ltd マイクロコネクタとその製造方法
DE10203066A1 (de) * 2002-01-28 2003-08-07 Marconi Comm Gmbh Leiterplatten-Bestückungssystem sowie Verfahren zum Positionieren von Leiterplatten
WO2003100421A1 (en) * 2002-05-28 2003-12-04 Bio Strand, Inc. Specimen distributing device, coating part manufacturing method, specimen distributing method, and substrate activating device
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
DE10334548A1 (de) * 2003-07-29 2005-03-03 Infineon Technologies Ag Verfahren zum Kontaktieren von zu testenden Schaltungseinheiten und selbstplanarisierende Prüfkarteneinrichtung zur Durchführung des Verfahrens
US7095545B2 (en) * 2004-04-02 2006-08-22 Hewlett-Packard Development Company, L.P. Microelectromechanical device with reset electrode
JP4408266B2 (ja) * 2004-04-22 2010-02-03 日本碍子株式会社 マイクロスイッチ及びその製造方法
US7240879B1 (en) * 2005-05-06 2007-07-10 United States of America as represented by the Administration of the National Aeronautics and Space Administration Method and associated apparatus for capturing, servicing and de-orbiting earth satellites using robotics
US20070087474A1 (en) * 2005-10-13 2007-04-19 Eklund E J Assembly process for out-of-plane MEMS and three-axis sensors
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
US7710574B2 (en) * 2007-01-23 2010-05-04 Board Of Regents, The University Of Texas System Devices in miniature for interferometric use and fabrication thereof

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US5903059A (en) * 1995-11-21 1999-05-11 International Business Machines Corporation Microconnectors
EP1700821A2 (en) * 2005-03-08 2006-09-13 Zyvex Corporation Sockets for microassembly

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Lomas D.G. et al.A high-resolution, two-dimensional, electron imaging integrated circuit.《Measurement Science and Technology》.1998,第9卷(第3期),第391-398页. *
Wapelhorst E. et al.A One-Chip Solution of a Mass Spectrometer.《Solid-State Sensors, Actuators and Microsystems, 2007. Transducers 2007.IEEE》.2007,第2015-2018页. *

Also Published As

Publication number Publication date
JP2011513076A (ja) 2011-04-28
JP2015037832A (ja) 2015-02-26
ATE529379T1 (de) 2011-11-15
CA2716978A1 (en) 2009-09-11
CN101965309A (zh) 2011-02-02
US9007784B2 (en) 2015-04-14
DE102008011972A1 (de) 2009-12-10
EP2259996A2 (de) 2010-12-15
EP2259996B1 (de) 2011-10-19
DE102008011972B4 (de) 2010-05-12
US20110002109A1 (en) 2011-01-06
WO2009109288A3 (de) 2010-02-18
WO2009109288A2 (de) 2009-09-11

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C06 Publication
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ASS Succession or assignment of patent right

Owner name: LUDWIG-KROHNE GMBH + CO. KG

Effective date: 20130422

C41 Transfer of patent application or patent right or utility model
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Patentee after: Bayer Ag

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Patentee after: Bayer Pharma Aktiengesellschaft

Patentee after: Ludwig crene GmbH & Co. kg

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Patentee before: Ludwig crene GmbH & Co. kg

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20161207

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Patentee after: BAYER AG

Patentee after: Ludwig crene GmbH & Co. kg

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Patentee before: Ludwig crene GmbH & Co. kg

CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20121121

Termination date: 20180217