ATE529379T1 - Mikrohalterung für eine mikrokanalplatte - Google Patents

Mikrohalterung für eine mikrokanalplatte

Info

Publication number
ATE529379T1
ATE529379T1 AT09717253T AT09717253T ATE529379T1 AT E529379 T1 ATE529379 T1 AT E529379T1 AT 09717253 T AT09717253 T AT 09717253T AT 09717253 T AT09717253 T AT 09717253T AT E529379 T1 ATE529379 T1 AT E529379T1
Authority
AT
Austria
Prior art keywords
microchannel plate
mount
spring structure
conductive spring
micro
Prior art date
Application number
AT09717253T
Other languages
German (de)
English (en)
Inventor
Jan-Peter Hauschild
Eric Wapelhorst
Joerg Mueller
Original Assignee
Bayer Technology Services Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bayer Technology Services Gmbh filed Critical Bayer Technology Services Gmbh
Application granted granted Critical
Publication of ATE529379T1 publication Critical patent/ATE529379T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/05—Aligning components to be assembled
    • B81C2203/051—Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electron Tubes For Measurement (AREA)
  • Micromachines (AREA)
  • Manipulator (AREA)
  • Multi-Conductor Connections (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT09717253T 2008-02-29 2009-02-17 Mikrohalterung für eine mikrokanalplatte ATE529379T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810011972 DE102008011972B4 (de) 2008-02-29 2008-02-29 Vorrichtung zur selbstjustierenden Montage und Halterung von Mikrokanalplatten in Mikrosystemen
PCT/EP2009/001088 WO2009109288A2 (de) 2008-02-29 2009-02-17 Mikrohalterung

Publications (1)

Publication Number Publication Date
ATE529379T1 true ATE529379T1 (de) 2011-11-15

Family

ID=41056396

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09717253T ATE529379T1 (de) 2008-02-29 2009-02-17 Mikrohalterung für eine mikrokanalplatte

Country Status (8)

Country Link
US (1) US9007784B2 (enExample)
EP (1) EP2259996B1 (enExample)
JP (2) JP2011513076A (enExample)
CN (1) CN101965309B (enExample)
AT (1) ATE529379T1 (enExample)
CA (1) CA2716978A1 (enExample)
DE (1) DE102008011972B4 (enExample)
WO (1) WO2009109288A2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
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JP5049167B2 (ja) * 2008-03-07 2012-10-17 浜松ホトニクス株式会社 マイクロチャネルプレート組立体
DE202009002192U1 (de) * 2009-02-16 2009-04-23 Thermo Fisher Scientific (Bremen) Gmbh Elektrode zur Beeinflussung der Ionenbewegung in Massenspektrometern
US8602722B2 (en) 2010-02-26 2013-12-10 General Electric Company System and method for inspection of stator vanes
US8587660B2 (en) 2010-07-30 2013-11-19 General Electric Company Image recording assemblies and coupling mechanisms for stator vane inspection
CN102478660B (zh) * 2010-11-26 2013-07-24 中国科学院大连化学物理研究所 一种组装式带电粒子二维成像探测器
CN102014598B (zh) * 2010-11-27 2013-03-06 上海大学 棱柱阵列射流微通道散热器
DE102011015595B8 (de) * 2011-03-30 2015-01-29 Krohne Messtechnik Gmbh Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators
US8667856B2 (en) 2011-05-20 2014-03-11 General Electric Company Sensor assemblies and methods of assembling same
DE102011076693A1 (de) * 2011-05-30 2012-12-06 Robert Bosch Gmbh Mikrofluidische Vorrichtung mit elektronischem Bauteil und Federelement
JP5771447B2 (ja) * 2011-06-02 2015-08-26 浜松ホトニクス株式会社 電子増倍器
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
CN104090290A (zh) * 2014-07-25 2014-10-08 中国科学技术大学 极坐标读出式双楔条型阳极的二维位置灵敏探测器
CN104567946A (zh) * 2015-01-22 2015-04-29 清华大学 微通道板探测器及光子、电子、离子成像探测仪
CN111094888B (zh) 2017-07-28 2021-12-10 达纳加拿大公司 用于热管理的超薄热交换器
WO2019018945A1 (en) 2017-07-28 2019-01-31 Dana Canada Corporation DEVICE AND METHOD FOR ALIGNING PARTS FOR LASER WELDING
JP2021523523A (ja) * 2018-05-07 2021-09-02 アダプタス ソリューションズ プロプライエタリー リミテッド 構造が改善された検出器
CN111983345B (zh) * 2020-07-24 2023-03-14 北方夜视技术股份有限公司 异形微通道板测试夹具装置
EP4607571A1 (en) * 2024-02-22 2025-08-27 Alpine Quantum Technologies GmbH Monolithic spring contact for a trap for charged particles

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US4731538A (en) * 1986-06-20 1988-03-15 Galileo Electro-Optics Corp. Microchannel plate ion detector
JPH06251840A (ja) * 1993-02-22 1994-09-09 Fujitsu Ltd センサ用ソケット
US5903059A (en) * 1995-11-21 1999-05-11 International Business Machines Corporation Microconnectors
JP3774968B2 (ja) * 1996-01-19 2006-05-17 住友電気工業株式会社 マイクロコネクタおよびその製造方法
JPH10134763A (ja) * 1996-11-01 1998-05-22 Hamamatsu Photonics Kk 電子増倍器
US6627446B1 (en) * 1998-07-02 2003-09-30 Amersham Biosciences (Sv) Corp Robotic microchannel bioanalytical instrument
DE19946890C2 (de) * 1999-09-30 2003-08-14 Raymond A & Cie Halteelement zur unverlierbaren Halterung von Kopfschrauben
DE69931370T2 (de) * 1999-10-01 2007-02-01 Stmicroelectronics S.R.L., Agrate Brianza Verfahren zur Herstellung eines aufgehängten Elements für elektrische Verbindungen zwischen zwei Teilen eines Micromechanismus, welche relativ zueinander beweglich sind
JP2003045576A (ja) * 2001-08-03 2003-02-14 Sumitomo Electric Ind Ltd マイクロコネクタとその製造方法
DE10203066A1 (de) * 2002-01-28 2003-08-07 Marconi Comm Gmbh Leiterplatten-Bestückungssystem sowie Verfahren zum Positionieren von Leiterplatten
WO2003100421A1 (en) * 2002-05-28 2003-12-04 Bio Strand, Inc. Specimen distributing device, coating part manufacturing method, specimen distributing method, and substrate activating device
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
DE10334548A1 (de) * 2003-07-29 2005-03-03 Infineon Technologies Ag Verfahren zum Kontaktieren von zu testenden Schaltungseinheiten und selbstplanarisierende Prüfkarteneinrichtung zur Durchführung des Verfahrens
US7025619B2 (en) 2004-02-13 2006-04-11 Zyvex Corporation Sockets for microassembly
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JP4408266B2 (ja) * 2004-04-22 2010-02-03 日本碍子株式会社 マイクロスイッチ及びその製造方法
US7240879B1 (en) * 2005-05-06 2007-07-10 United States of America as represented by the Administration of the National Aeronautics and Space Administration Method and associated apparatus for capturing, servicing and de-orbiting earth satellites using robotics
US20070087474A1 (en) * 2005-10-13 2007-04-19 Eklund E J Assembly process for out-of-plane MEMS and three-axis sensors
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
US7710574B2 (en) * 2007-01-23 2010-05-04 Board Of Regents, The University Of Texas System Devices in miniature for interferometric use and fabrication thereof

Also Published As

Publication number Publication date
JP2011513076A (ja) 2011-04-28
JP2015037832A (ja) 2015-02-26
CA2716978A1 (en) 2009-09-11
CN101965309A (zh) 2011-02-02
US9007784B2 (en) 2015-04-14
DE102008011972A1 (de) 2009-12-10
EP2259996A2 (de) 2010-12-15
EP2259996B1 (de) 2011-10-19
DE102008011972B4 (de) 2010-05-12
CN101965309B (zh) 2012-11-21
US20110002109A1 (en) 2011-01-06
WO2009109288A3 (de) 2010-02-18
WO2009109288A2 (de) 2009-09-11

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