CN101944510B - 提高非易失性存储器性能的方法 - Google Patents
提高非易失性存储器性能的方法 Download PDFInfo
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- CN101944510B CN101944510B CN200910054545XA CN200910054545A CN101944510B CN 101944510 B CN101944510 B CN 101944510B CN 200910054545X A CN200910054545X A CN 200910054545XA CN 200910054545 A CN200910054545 A CN 200910054545A CN 101944510 B CN101944510 B CN 101944510B
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- silicon nitride
- layer
- deposition
- silicon
- nitride layer
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Priority Applications (1)
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CN200910054545XA CN101944510B (zh) | 2009-07-09 | 2009-07-09 | 提高非易失性存储器性能的方法 |
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CN200910054545XA CN101944510B (zh) | 2009-07-09 | 2009-07-09 | 提高非易失性存储器性能的方法 |
Publications (2)
Publication Number | Publication Date |
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CN101944510A CN101944510A (zh) | 2011-01-12 |
CN101944510B true CN101944510B (zh) | 2013-03-13 |
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CN200910054545XA Expired - Fee Related CN101944510B (zh) | 2009-07-09 | 2009-07-09 | 提高非易失性存储器性能的方法 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1464538A (zh) * | 2002-06-04 | 2003-12-31 | 旺宏电子股份有限公司 | 形成介电层的方法 |
CN1725469A (zh) * | 2004-07-23 | 2006-01-25 | 茂德科技股份有限公司 | 形成ono型记忆胞与高低压晶体管的闸介电层的方法 |
CN101170135A (zh) * | 2006-10-23 | 2008-04-30 | 海力士半导体有限公司 | 具有电荷陷捕层的非易失性存储器件及其制造方法 |
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2009
- 2009-07-09 CN CN200910054545XA patent/CN101944510B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1464538A (zh) * | 2002-06-04 | 2003-12-31 | 旺宏电子股份有限公司 | 形成介电层的方法 |
CN1725469A (zh) * | 2004-07-23 | 2006-01-25 | 茂德科技股份有限公司 | 形成ono型记忆胞与高低压晶体管的闸介电层的方法 |
CN101170135A (zh) * | 2006-10-23 | 2008-04-30 | 海力士半导体有限公司 | 具有电荷陷捕层的非易失性存储器件及其制造方法 |
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Publication number | Publication date |
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CN101944510A (zh) | 2011-01-12 |
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ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20121116 |
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Effective date of registration: 20121116 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation Applicant after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation |
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C14 | Grant of patent or utility model | ||
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200709 |