CN101942645A - 镀膜机 - Google Patents
镀膜机 Download PDFInfo
- Publication number
- CN101942645A CN101942645A CN2009103040531A CN200910304053A CN101942645A CN 101942645 A CN101942645 A CN 101942645A CN 2009103040531 A CN2009103040531 A CN 2009103040531A CN 200910304053 A CN200910304053 A CN 200910304053A CN 101942645 A CN101942645 A CN 101942645A
- Authority
- CN
- China
- Prior art keywords
- load plate
- coating
- tray
- coating equipment
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title abstract 9
- 239000011248 coating agent Substances 0.000 claims description 70
- 238000000576 coating method Methods 0.000 claims description 70
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910304053.1A CN101942645B (zh) | 2009-07-06 | 2009-07-06 | 镀膜机 |
US12/632,945 US8316793B2 (en) | 2009-07-06 | 2009-12-08 | Film coating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910304053.1A CN101942645B (zh) | 2009-07-06 | 2009-07-06 | 镀膜机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101942645A true CN101942645A (zh) | 2011-01-12 |
CN101942645B CN101942645B (zh) | 2013-10-09 |
Family
ID=43411942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910304053.1A Active CN101942645B (zh) | 2009-07-06 | 2009-07-06 | 镀膜机 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8316793B2 (zh) |
CN (1) | CN101942645B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103014678A (zh) * | 2011-09-20 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | 独特传动机构传片技术进行硅薄膜镀膜 |
CN112705415A (zh) * | 2020-12-11 | 2021-04-27 | 凯盛科技股份有限公司蚌埠华益分公司 | 用于空气成像玻璃高透率低反射镀膜生产线 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60160139A (ja) * | 1984-01-30 | 1985-08-21 | Fujitsu Ltd | 移送方法 |
CN1854898A (zh) * | 2005-03-11 | 2006-11-01 | 东京毅力科创株式会社 | 涂敷、显影装置 |
US20070117400A1 (en) * | 2003-12-12 | 2007-05-24 | Tokyo Electron Limited | Substrate treating apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4768147B2 (ja) * | 2001-04-27 | 2011-09-07 | Nec液晶テクノロジー株式会社 | 液晶表示装置の製造装置 |
US7267497B2 (en) * | 2005-01-21 | 2007-09-11 | Tokyo Electron Limited | Coating and developing system and coating and developing method |
-
2009
- 2009-07-06 CN CN200910304053.1A patent/CN101942645B/zh active Active
- 2009-12-08 US US12/632,945 patent/US8316793B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60160139A (ja) * | 1984-01-30 | 1985-08-21 | Fujitsu Ltd | 移送方法 |
US20070117400A1 (en) * | 2003-12-12 | 2007-05-24 | Tokyo Electron Limited | Substrate treating apparatus |
CN1854898A (zh) * | 2005-03-11 | 2006-11-01 | 东京毅力科创株式会社 | 涂敷、显影装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103014678A (zh) * | 2011-09-20 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | 独特传动机构传片技术进行硅薄膜镀膜 |
CN112705415A (zh) * | 2020-12-11 | 2021-04-27 | 凯盛科技股份有限公司蚌埠华益分公司 | 用于空气成像玻璃高透率低反射镀膜生产线 |
Also Published As
Publication number | Publication date |
---|---|
CN101942645B (zh) | 2013-10-09 |
US8316793B2 (en) | 2012-11-27 |
US20110000429A1 (en) | 2011-01-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151009 Address after: 225400 Hongqiao Industrial Park, Taixing Economic Development Zone, Taizhou, Jiangsu, China, seven Patentee after: Hu Lichun Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee before: Hon Hai Precision Industry Co., Ltd. |
|
C56 | Change in the name or address of the patentee | ||
CP02 | Change in the address of a patent holder |
Address after: 510640, China Education building, No. five, 371-1 mountain road, Guangzhou, Guangdong, Tianhe District 715, China Patentee after: Hu Lichun Address before: 225400 Hongqiao Industrial Park, Taixing Economic Development Zone, Taizhou, Jiangsu, China, seven Patentee before: Hu Lichun |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151119 Address after: 226236 No. 5, Jiangzhou Road, Binhai Industrial Park, Nantong, Jiangsu, Qidong Patentee after: XU SHENGYING Address before: 510640, China Education building, No. five, 371-1 mountain road, Guangzhou, Guangdong, Tianhe District 715, China Patentee before: Hu Lichun |