CN101866066A - Phase change material-aid micro ring-based optical waveguide switch - Google Patents
Phase change material-aid micro ring-based optical waveguide switch Download PDFInfo
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- CN101866066A CN101866066A CN201010185796A CN201010185796A CN101866066A CN 101866066 A CN101866066 A CN 101866066A CN 201010185796 A CN201010185796 A CN 201010185796A CN 201010185796 A CN201010185796 A CN 201010185796A CN 101866066 A CN101866066 A CN 101866066A
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Abstract
The invention discloses a phase change material-aid micro ring-based optical waveguide switch. The optical waveguide switch comprises a micro ring waveguide resonant cavity and two straight waveguides coupled with the resonant cavity; and a phase change material is placed on the surface of the micro ring waveguide resonant cavity except a coupled area of the micro ring waveguide resonant cavity and the straight waveguides, and the state change of the phase change material is controlled through a phase change control source to control the loss of the micro ring waveguide resonant cavity so as to realize a wavelength selection switch of the light wave between the two straight waveguides. The state of the phase change material is adjusted through pulse so that the phase change material is switched between the crystalline state and the amorphous state and the switch of a light path is further realized. The optical waveguide switch eliminates power consumption during on and off state maintenance, and has power consumption only during on and off state switch so as to reduce the power consumption. The optical waveguide switch is favorable for miniaturization and integration of devices and environmental protection, and is suitable for a future optical communication network with high speed, high integration and low power consumption. The optical waveguide switch serving as a low power consumption optical device forming optical forking multiplexing and optical crossing connection can be widely applied to the optical communication network.
Description
Technical field
The present invention relates to optical component, be specifically related to the auxiliary optical waveguide switch of a kind of phase-change material based on little ring.
Background technology
Along with developing rapidly of science and technology, the information transmission capacity of the communications field increases day by day, and people are more and more higher to the requirement of bandwidth, and optical-fiber network how can be efficiently, transmission information at high speed becomes one of people's research focus.Photoswitch is the important element in the optical-fiber network as one of Primary Component that constitutes the multiplexing and optical cross connect of light bifurcated, is widely used in that optical communication, photometry are calculated, light interconnection and optical information processing system, is the focus of optical device research.Based on the photoswitch of micro-ring resonant, very little owing to the chamber cycle on the one hand, thus the also quickening accordingly of its switching speed can be satisfied the requirement of high-speed communication well; Simultaneously, ring resonator is simply compact, structure is flexible and be suitable for utilizing the slab guide fabrication techniques, has very big potentiality in the extensive integrated optical circuit in future is used.But, in keeping the process of Push And Release, need constantly to consume energy consumption based on the optical waveguide switch of little ring always, caused the waste of the energy.So, we propose the auxiliary optical waveguide switch based on little ring of phase-change material, power consumption in the state maintenance process of its elimination Push And Release, and power consumption is only arranged in the stateful switchover process of Push And Release, thereby energy consumption is reduced greatly, more help green and environmental protection, also more be applicable to following high speed, high integration, low-power consumption optical communication network.
Summary of the invention
In order eliminating, and power consumption only to be arranged in the stateful switchover process of Push And Release, thereby to realize the low-power consumption of device based on the power consumption in the optical waveguide switch Push And Release state maintenance process of little ring.The object of the invention is to provide a kind of phase-change material the auxiliary optical waveguide switch based on little ring.It adopts the auxiliary closed loop waveguide of phase-change material, by pulse regulation phase-change material state, makes it to change between crystalline state and amorphous state, realizes the switching of light path then.Power consumption in the state maintenance process of its elimination Push And Release, thus and only in the stateful switchover process of Push And Release, there is power consumption to reduce power consumption.
The technical solution adopted for the present invention to solve the technical problems is:
The present invention includes little ring waveguide resonator cavity and with two straight wave guides of its coupling; Phase-change material places the surface of the little ring waveguide resonator cavity except that little ring waveguide resonator cavity and straight wave guide coupling regime, change by phase transformation Controlling Source control phase-change material state, control the loss of little ring waveguide resonator cavity, realize the wavelength-selective switches of light wave at two straight wave guides.
Described phase transformation Controlling Source is automatically controlled source, and its drive electrode links to each other with phase-change material, changes the state of phase-change material by drive electrode, and then controls the loss of little ring waveguide resonator cavity, realizes the wavelength-selective switches of light wave at two straight wave guides.
Described phase transformation Controlling Source is light-operated source, its driving light source adopts external light source, external light source direct irradiation or through lens focus or through being radiated at after the Optical Fiber Transmission on the phase-change material, cause the change of phase-change material state, and then control the loss of little ring waveguide resonator cavity, realize the wavelength-selective switches of light wave at two straight wave guides.
Described phase-change material place the regional area of little ring waveguide resonator cavity inner surface or Zone Full, little ring waveguide resonator cavity outer surface regional area, little ring waveguide resonator cavity directly over regional area or Zone Full, microwave lead resonator cavity under regional area or Zone Full, perhaps in the position of the above-mentioned direction permutation and combination of little ring waveguide resonator cavity.
Described micro-ring resonant cavity and with two straight wave guides of its coupling be in silicon waveguide, glass waveguide, SiO 2 waveguide, polymer waveguide and the waveguide of III-V compounds of group any one.
Described phase-change material is Ge
2Sb
2Te
5Phase-change material or be M:Ge
xSb
yTe
zPhase-change material.
The present invention compares with the photoswitch of background technology, and the beneficial effect that has is:
Adopt the auxiliary optical waveguide switch of phase-change material,, make it between crystalline state and amorphous state, to change, realize the switching of light path then by pulse regulation phase-change material state based on little ring.Power consumption in the state maintenance process of its elimination Push And Release, thus and only in the stateful switchover process of Push And Release, there is power consumption to reduce power consumption.This also is more conducive to green and environmental protection for miniaturization of devices and integrated playing an important role, and also more is applicable to following high speed, high integration, low-power consumption optical communication network.The present invention can be widely used in optical communication system as a kind of low-power consumption optical device that constitutes the multiplexing and optical cross connect of light bifurcated.
Description of drawings
Fig. 1 is that phase transformation Controlling Source of the present invention is automatically controlled source, and the structural principle synoptic diagram of phase-change material when being positioned at surface directly over little ring waveguide resonator cavity.
Fig. 2 is that phase transformation Controlling Source of the present invention is light-operated source, when by external light source direct irradiation on phase-change material and the structural principle synoptic diagram of phase-change material when being positioned at little ring waveguide resonator cavity outside regional area.
Fig. 3 is that phase transformation Controlling Source of the present invention is light-operated source, when the light that sends by external light source behind lens, be radiated on the phase-change material and the structural principle synoptic diagram of phase-change material when being positioned at little ring waveguide resonator cavity outside regional area.
Fig. 4 is that phase transformation Controlling Source of the present invention is light-operated source, when by external light source after Optical Fiber Transmission, be radiated on the phase-change material and the structural principle synoptic diagram of phase-change material when being positioned at little ring waveguide resonator cavity outside regional area.
Among the figure: 1, little ring waveguide resonator cavity, 2, with the straight wave guide of little ring waveguide resonator cavity coupling, 3, phase-change material, 4, electrode, 5, external light source, 6, optical fiber, 7, lens.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
As Fig. 1, Fig. 2, Fig. 3, shown in Figure 4, the auxiliary optical waveguide switch of phase-change material based on little ring comprise little ring waveguide resonator cavity 1 and with two straight wave guides 2 of its coupling.Phase-change material 3 places the surface of the little ring waveguide resonator cavity 1 except that little ring waveguide resonator cavity 1 and straight wave guide 2 coupling regimes, change by phase transformation Controlling Source control phase-change material 3 states, control the loss of little ring waveguide resonator cavity 1, realize the wavelength-selective switches of light wave at two straight wave guides 2.
Described phase transformation Controlling Source is automatically controlled source, and its drive electrode 4 links to each other with phase-change material 3, changes the state of phase-change material 3 by drive electrode 4, and then controls the loss of little ring waveguide resonator cavity 1, realizes the wavelength-selective switches of light wave at two straight wave guides 2.
Described phase transformation Controlling Source is light-operated source, its driving light source adopts external light source 5, external light source 5 direct irradiations or focus on or after optical fiber 6 transmission, be radiated on the phase-change material 3 through lens 7, cause the change of phase-change material 3 states, and then control the loss of little ring waveguide resonator cavity 1, realize the wavelength-selective switches of light wave at two straight wave guides 2.
Described phase-change material 3 place the regional area of little ring waveguide resonator cavity 1 inner surface or Zone Full, little ring waveguide resonator cavity 1 outer surface regional area, little ring waveguide resonator cavity 1 directly over regional area or Zone Full, microwave lead resonator cavity 1 under regional area or Zone Full, perhaps in the position of little ring waveguide resonator cavity 1 above-mentioned direction permutation and combination.
Described micro-ring resonant cavity 1 and with two straight wave guides 2 of its coupling be in silicon waveguide, glass waveguide, SiO 2 waveguide, polymer waveguide and the waveguide of III-V compounds of group any one.
Described phase-change material 3 is Ge
2Sb
2Te
5Phase-change material or be M:Ge
xSb
yTe
zPhase-change material.
As shown in Figure 1; when straight wave guide 2 materials of micro-ring resonant cavity 1 that adopts and coupling with it are silicon; by dry etching produce micro-ring resonant cavity 1 and with it the coupling straight wave guide 2; utilize thermal oxide to form silicon dioxide layer of protection then; spin coating phase-change material 3 is prepared electrode 4 by sputter and wet etching again.Be coupled into straight wave guide 2 from the light signal of optical fiber or the output of other planar optical waveguide loops, some light enters micro-ring resonant cavity 1 during by coupling regime, be carried in electrode 4 adjusted phase-change materials 3 by pulse, the loss that causes micro-ring resonant cavity 1 changes, thereby realizes the switching of light path in straight-through attitude and intersection attitude.
As shown in Figure 2; when straight wave guide 2 materials of micro-ring resonant cavity 1 that adopts and coupling with it are silicon dioxide; can reactive ion dry method dry etching produce the micro-ring resonant cavity 1 and the straight wave guide 2 of coupling with it; pass through grinding and polishing again; sputter last layer pure silicon dioxide protective seam then, spin coating phase-change material 3.Be coupled into from the light signal of optical fiber or other planar optical waveguide loops output and enter straight wave guide 2, part light enters micro-ring resonant cavity 1 during by coupling regime, the light direct irradiation that sends by external light source 5 is at phase-change material 3 adjusted phase-change materials 3 simultaneously, the loss that causes micro-ring resonant cavity 1 changes, thereby realizes the switching of light path in straight-through attitude and intersection attitude.
As shown in Figure 1, when straight wave guide 2 materials of micro-ring resonant cavity 1 that adopts and coupling with it are glass, the straight wave guide 2 that twice ion-exchange obtains micro-ring resonant cavity 1 and is coupled with it, the spin coating photoresist, photoetching, etching is also removed photoresist, preparation one deck electrode 4, this layer of etching electrode 4, spin coating phase-change material 3.Be coupled into straight wave guide 2 from the light signal of optical fiber or the output of other planar optical waveguide loops, some light enters micro-ring resonant cavity 1 during by coupling regime, be carried in electrode 4 adjusted phase-change materials 3 by pulse, the loss that causes micro-ring resonant cavity 1 changes, thereby realizes the switching of light path in straight-through attitude and intersection attitude.
As shown in Figure 3, when straight wave guide 2 materials of micro-ring resonant cavity 1 that adopts and coupling with it are the III-V compounds of group, preparation epitaxial growth sheet, spin coating photoresist, photoetching is developed, and etching is also removed photoresist, preparation one deck electrode 4, this layer of etching electrode 4, spin coating phase-change material 3.Be coupled into straight wave guide 2 from the light signal of optical fiber or the output of other planar optical waveguide loops, part light enters micro-ring resonant cavity 1 during by coupling regime, the light that sends by external light source 5 is behind lens 7 simultaneously, be radiated at phase-change material 3 adjusted phase-change materials 3, the loss that causes micro-ring resonant cavity 1 changes, thereby realizes the switching of light path in straight-through attitude and intersection attitude.
As shown in Figure 4, when straight wave guide 2 materials of micro-ring resonant cavity 1 that adopts and coupling with it are polymkeric substance, can write the straight wave guide 2 that obtains micro-ring resonant cavity 1 and be coupled with it, phase-change material 3 in the spin coating again by collimation laser.Be coupled into from the light signal of optical fiber or other planar optical waveguide loops output and enter straight wave guide 2, part light enters micro-ring resonant cavity 1 during by coupling regime, simultaneously the light that sends by external light source 5 through with optical fiber 6 that external light source 5 links to each other after, be radiated at phase-change material 3 adjusted phase-change materials 3, the loss that causes micro-ring resonant cavity 1 changes, thereby realizes the switching of light path in straight-through attitude and intersection attitude.
Compare with traditional photoswitch, the auxiliary optical waveguide switch based on little ring of phase-change material has the characteristics such as compact conformation, integrated level height and switching speed be fast, adopt simultaneously the phase-change material assistant waveguide, can be only by regulating the state of phase-change material, realize route and the switching of light path, greatly reduced traditional photoswitch in the energy consumption of Push And Release time-continuing process, realize the low-power consumption of device, be conducive to green and the environmental protection of device, the high-speed low-power-consumption optic communication in future has potential application prospect.
Claims (5)
1. the auxiliary optical waveguide switch of a phase-change material based on little ring, comprise little ring waveguide resonator cavity (1) and with two straight wave guides (2) of its coupling; It is characterized in that: phase-change material (3) places the surface of the little ring waveguide resonator cavity (1) except that little ring waveguide resonator cavity (1) and straight wave guide (2) coupling regime, change by phase transformation Controlling Source control phase-change material (3) state, control the loss of little ring waveguide resonator cavity (1), realize the wavelength-selective switches of light wave at two straight wave guides (2).
2. the self-sustaining waveguide optical switch that a kind of phase-change material according to claim 1 is auxiliary, it is characterized in that: described phase transformation Controlling Source is automatically controlled source, its drive electrode (4) links to each other with phase-change material (3), change the state of phase-change material (3) by drive electrode (4), and then control the loss of little ring waveguide resonator cavity (1), realize the wavelength-selective switches of light wave at two straight wave guides (2).
3. the self-sustaining waveguide optical switch that a kind of phase-change material according to claim 1 is auxiliary, it is characterized in that: described phase transformation Controlling Source is light-operated source, its driving light source adopts external light source (5), external light source (5) direct irradiation or focus on or after optical fiber (6) transmission, be radiated on the phase-change material (3) through lens (7), cause the change of phase-change material (3) state, and then control the loss of little ring waveguide resonator cavity (1), realize the wavelength-selective switches of light wave at two straight wave guides (2).
4. according to claim 1 or the auxiliary optical waveguide switch of 2 or 3 described a kind of phase-change materials based on little ring, it is characterized in that: described phase-change material (3) place the regional area of little ring waveguide resonator cavity (1) inner surface or Zone Full, little ring waveguide resonator cavity (1) outer surface regional area, little ring waveguide resonator cavity (1) directly over regional area or Zone Full, microwave lead resonator cavity (1) under regional area or Zone Full, perhaps in the position of the above-mentioned direction permutation and combination of little ring waveguide resonator cavity (1).
The optical waveguide switch based on little ring that 5 a kind of phase-change materials according to claim 1 are auxiliary is characterized in that: described micro-ring resonant cavity (1) and with in silicon waveguide, glass waveguide, SiO 2 waveguide, polymer waveguide and the waveguide of III-V compounds of group any one of being of two straight wave guides (2) of its coupling.
6. the self-sustaining waveguide optical switch that a kind of phase-change material according to claim 1 is auxiliary, it is characterized in that: described phase-change material (3) is Ge
2Sb
2Te
5Phase-change material or be M:Ge
xSb
yTe
zPhase-change material.
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636841A (en) * | 2012-04-27 | 2012-08-15 | 浙江大学 | Micro-ring assistant ring mirror structure |
| CN102662254A (en) * | 2012-05-02 | 2012-09-12 | 浙江大学 | Micro-ring optical switch based on electric absorption characteristics of graphene |
| CN103760699A (en) * | 2014-02-19 | 2014-04-30 | 华中科技大学 | Micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides |
| WO2016090610A1 (en) * | 2014-12-11 | 2016-06-16 | 华为技术有限公司 | Micro-ring resonator |
| CN106324865A (en) * | 2016-08-19 | 2017-01-11 | 上海交通大学 | Phase change material-based three-dimensional integrated optical switch |
| WO2017046590A1 (en) * | 2015-09-18 | 2017-03-23 | Oxford University Innovation Ltd. | Photonic device |
| US10288811B1 (en) | 2017-12-05 | 2019-05-14 | Hewlett Packard Enterprise Development Lp | Optical switching between waveguides by adjacent resonant structure coupling |
| CN109917565A (en) * | 2019-02-18 | 2019-06-21 | 上海交通大学 | Based on the multistage optical attenuator of silicon-phase-change material hybrid integrated |
| CN110187521A (en) * | 2019-05-15 | 2019-08-30 | 上海交通大学 | Resonant cavity assists phase transformation reconfigurable optical signal processing chip |
| CN110286444A (en) * | 2019-06-14 | 2019-09-27 | 浙江大学 | A kind of restructural micro-loop photoswitch based on phase-change material |
| CN112415784A (en) * | 2020-12-04 | 2021-02-26 | 中国科学院上海微系统与信息技术研究所 | Nonvolatile optical switch and manufacturing method thereof |
| CN113267907A (en) * | 2021-05-14 | 2021-08-17 | 北京工业大学 | Based on phase change material GemSbnTekGraphene auxiliary driving micro-ring optical switch |
| CN113777807A (en) * | 2021-09-07 | 2021-12-10 | 哈尔滨工程大学 | Based on Ge2Sb2Te5Nonvolatile echo wall mode all-optical switch of phase change material and manufacturing method thereof |
| CN113933931A (en) * | 2021-08-27 | 2022-01-14 | 北京工业大学 | Annular cavity optical modulator based on vanadium dioxide nanowire |
| CN114137745A (en) * | 2021-12-02 | 2022-03-04 | 程唐盛 | Antimony diselenide silicon-based electric dimming switch, optical switch array and chip |
| CN114488651A (en) * | 2022-01-04 | 2022-05-13 | 重庆邮电大学 | Photon digital-to-analog converter based on micro-ring array and GST (GST) and regulation and control method |
| CN116300242A (en) * | 2023-02-28 | 2023-06-23 | 中国人民解放军国防科技大学 | Micro-ring optical waveguide switch based on low-loss phase change material and preparation method thereof |
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Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102636841A (en) * | 2012-04-27 | 2012-08-15 | 浙江大学 | Micro-ring assistant ring mirror structure |
| CN102662254A (en) * | 2012-05-02 | 2012-09-12 | 浙江大学 | Micro-ring optical switch based on electric absorption characteristics of graphene |
| CN102662254B (en) * | 2012-05-02 | 2014-07-23 | 浙江大学 | Micro-ring optical switch based on electric absorption characteristics of graphene |
| CN103760699A (en) * | 2014-02-19 | 2014-04-30 | 华中科技大学 | Micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides |
| CN103760699B (en) * | 2014-02-19 | 2016-08-17 | 华中科技大学 | Micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide |
| US10359568B2 (en) | 2014-12-11 | 2019-07-23 | Huawei Technologies Co., Ltd. | Micro-ring resonator |
| WO2016090610A1 (en) * | 2014-12-11 | 2016-06-16 | 华为技术有限公司 | Micro-ring resonator |
| WO2017046590A1 (en) * | 2015-09-18 | 2017-03-23 | Oxford University Innovation Ltd. | Photonic device |
| EP3944005A1 (en) * | 2015-09-18 | 2022-01-26 | Oxford University Innovation Limited | Photonic device |
| US11099456B2 (en) | 2015-09-18 | 2021-08-24 | Oxford University Innovation Ltd. | Photonic device |
| CN106324865A (en) * | 2016-08-19 | 2017-01-11 | 上海交通大学 | Phase change material-based three-dimensional integrated optical switch |
| US10288811B1 (en) | 2017-12-05 | 2019-05-14 | Hewlett Packard Enterprise Development Lp | Optical switching between waveguides by adjacent resonant structure coupling |
| CN109917565A (en) * | 2019-02-18 | 2019-06-21 | 上海交通大学 | Based on the multistage optical attenuator of silicon-phase-change material hybrid integrated |
| CN110187521A (en) * | 2019-05-15 | 2019-08-30 | 上海交通大学 | Resonant cavity assists phase transformation reconfigurable optical signal processing chip |
| CN110286444A (en) * | 2019-06-14 | 2019-09-27 | 浙江大学 | A kind of restructural micro-loop photoswitch based on phase-change material |
| CN112415784A (en) * | 2020-12-04 | 2021-02-26 | 中国科学院上海微系统与信息技术研究所 | Nonvolatile optical switch and manufacturing method thereof |
| CN113267907A (en) * | 2021-05-14 | 2021-08-17 | 北京工业大学 | Based on phase change material GemSbnTekGraphene auxiliary driving micro-ring optical switch |
| CN113933931A (en) * | 2021-08-27 | 2022-01-14 | 北京工业大学 | Annular cavity optical modulator based on vanadium dioxide nanowire |
| CN113777807A (en) * | 2021-09-07 | 2021-12-10 | 哈尔滨工程大学 | Based on Ge2Sb2Te5Nonvolatile echo wall mode all-optical switch of phase change material and manufacturing method thereof |
| CN114137745A (en) * | 2021-12-02 | 2022-03-04 | 程唐盛 | Antimony diselenide silicon-based electric dimming switch, optical switch array and chip |
| CN114488651A (en) * | 2022-01-04 | 2022-05-13 | 重庆邮电大学 | Photon digital-to-analog converter based on micro-ring array and GST (GST) and regulation and control method |
| CN114488651B (en) * | 2022-01-04 | 2022-12-27 | 重庆邮电大学 | Photon digital-to-analog converter based on micro-ring array and GST (GST) and regulation and control method |
| CN116300242A (en) * | 2023-02-28 | 2023-06-23 | 中国人民解放军国防科技大学 | Micro-ring optical waveguide switch based on low-loss phase change material and preparation method thereof |
| CN116300242B (en) * | 2023-02-28 | 2024-02-06 | 中国人民解放军国防科技大学 | Micro-ring optical waveguide switch based on low-loss phase change material and preparation method thereof |
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Application publication date: 20101020 |