CN110286444A - A kind of restructural micro-loop photoswitch based on phase-change material - Google Patents
A kind of restructural micro-loop photoswitch based on phase-change material Download PDFInfo
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- CN110286444A CN110286444A CN201910516164.2A CN201910516164A CN110286444A CN 110286444 A CN110286444 A CN 110286444A CN 201910516164 A CN201910516164 A CN 201910516164A CN 110286444 A CN110286444 A CN 110286444A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3536—Optical coupling means having switching means involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index
Abstract
The invention discloses a kind of restructural micro-loop photoswitch based on phase-change material.The present invention includes two bus waveguides, micro-ring resonator and the hybrid waveguide for carrying phase-change material；Hybrid waveguide includes silicon waveguide and the phase-change material that is placed in silicon waveguide, and hybrid waveguide is placed in by the outside or inside of micro-ring resonator, and is arranged to the segmental arc to match with micro-ring resonator；Lateral evanescent wave occurs between micro-ring resonator and input and output waveguide, upload downloading waveguide to couple, makes to generate light field resonance in micro-ring resonator；Micro-ring resonator occurs lateral evanescent wave with the hybrid waveguide for carrying phase-change material and couples, for regulating and controlling the light field resonance in micro-loop, to realize the switch routing of optical path.Structure of the invention concision and compact, design are convenient, stability is high, overcome the high loss technical problem of phase-change material itself, it reduces crosstalk and improves extinction ratio, can be realized self-sustaining characteristic and energy consumption is low, suitable for restructural, tunable wavelength-division multiplex system.
Description
Technical field
The present invention relates to a kind of planar optical waveguide integrated devices, more particularly, to a kind of restructural micro- based on phase-change material
Ring photoswitch.
Background technique
It is well known that long-distance optical communication has been achieved for immense success, numerous node units in optical communication network can
To carry out data exchange and routing by optic path.Light network can overcome traditional electricity mutually as a kind of new mutual contact mode
Even existing bottleneck problem, attracts wide attention.It proposes to use light network scheme in VLSI from J.W.Goodman in 1984
Since, light network research has achieved huge progress.Early stage light network relatively long distance optical path alignment and data routing in
Develop relative maturity, current optical switched technology is just constantly interconnected to very-short-reach and promoted, and switching performance demand is growing.
In the light network field of integrated chip scale, high exchange rate and contrast, low energy consumption, insertion loss and channel are gone here and there
Disturbing is the key factor for realizing the optical exchanger part haveing excellent performance.
In integrated planar optical waveguide device, it is based on the light of Mach-Zender interferometer (MZI) and micro-ring resonator (MRR)
Switch is studied much, and segmentation scheme has been realized in commercialization.Pass through electrooptic effect or hot light efficiency on integrated platform
It answers, has been realized in the considerable array of photoswitch of performance.Miniaturization and densification in view of device size scale, mostly use micro-
The basic unit of ring resonator effect photoswitch.Traditional photoswitch based on micro-ring resonator passes through electrooptic effect or hot light efficiency
The mode effective refractive index that micro-loop waveguide should be changed, translates resonance peak, to realize the change of certain wave strong point optical power, reaches
The effect switched to optical path states.In this structure, consumption energy, such as hot light need to be continued when photoswitch maintains a certain state
The power consumption of switch is in milliwatt magnitude；On the other hand, the switching of optical path states is translated dependent on resonance peak, can be to adjacent wavelength
The optical power of signal has an impact, and increases crosstalk between adjacency channel, is unfavorable for the application in wavelength-division multiplex system.
Open the light in recent years in conjunction with the light of phase-change material due to can produce biggish refringence, and have it is non-volatile, only
Energy need to be provided when state changes, cause the extensive concern of researcher, combine the light of phase-change material in the past few years
Switch research has made some progress.For example, document Stegmaier, M., R í os, C., Bhaskaran, H., Wright,
C.D.,&Pernice,W.H.P.(2017).Nonvolatile all-optical 1×2switch for chipscale
Photonic networks.Advanced Optical Materials, 5 (1), 1-6. to devise one kind certain in micro-loop
Surface area deposits Ge2Sb2Te5(GST225) photoswitch, extinction ratio is close to 5dB.Micro-ring resonant shape is adjusted using phase-change material
The scheme of state does not change the position of resonance peak, so that the channels crosstalk of this photoswitch is low, is suitable for wavelength-division multiplex system, simultaneously
The non-volatile of phase-change material makes photoswitch only need to provide energy, lower power consumption when state switches.However, due to phase-change material
Loss it is larger, biggish insertion loss can be introduced by being deposited directly in micro-loop, and the subsequent transmission and detection for being unfavorable for signal connect
It receives, limits it in the further practical and commercialization in photoswitch field.
Summary of the invention
In order to solve the problems, such as background technique, it is an object of that present invention to provide a kind of weighing based on phase-change material
Using the mixed wave guide structure of depositing phase change material in silicon waveguide and micro-loop lateral evanescent wave coupling occurs for structure micro-loop photoswitch
It closes, regulate and control the resonant state of micro-loop and then realizes the switching that signal is exported in different port, dropped while realizing High Extinction Ratio
Low insertion loss and channels crosstalk suitable for restructural, tunable wavelength-division multiplex system, and meet low-power consumption demand.
The technical solution adopted by the present invention is that:
The present invention include the input and output waveguide of a bus optical signal, one at all optical signal upload downloading waveguide and
One micro-ring resonator, micro-ring resonator are arranged in input and output waveguide and upload between downloading waveguide；It further include a carrying
The hybrid waveguide of phase-change material；Hybrid waveguide includes silicon waveguide and the phase-change material that is placed in silicon waveguide, and hybrid waveguide is placed in micro-
By the outside or inside of ring resonator, and hybrid waveguide is arranged to the segmental arc to match with micro-ring resonator, and the two is same
Heart circle structure or non-concentric structure；Occur laterally suddenly to die between micro-ring resonator and input and output waveguide, upload downloading waveguide
Wave coupling makes to generate light field resonance in micro-ring resonator；Micro-ring resonator and the hybrid waveguide for carrying phase-change material occur lateral
Evanescent wave coupling, regulates and controls the light field resonance in micro-ring resonator.
The electrooptic effect caused and applying voltage or laser irradiation to the phase-change material in hybrid waveguide or hot light efficiency
The hybrid waveguide to carrying phase-change material should be realized come the state change for changing the state of phase-change material, and then passing through phase-change material
Regulation；Duct height, width, length and the radius of curvature of the phase-change material are variable, the duct width of silicon waveguide, length
It is variable with radius of curvature.When the state of phase-change material changes, the mode effective refractive index for carrying the hybrid waveguide of phase-change material changes
Become, the resonant state for changing light field in micro-ring resonator is coupled by lateral evanescent wave, makes light field that resonance occur or do not occur humorous
Vibration, to regulate and control the output port of certain road wavelength signals.
The state change of two kinds of phases of phase-change material of the invention adjusts light in micro-ring resonator by the coupling of lateral evanescent wave
The resonant state of field makes the wavelength signals for meeting condition of resonance in micro-ring resonator that can upload downloading waveguide from local optical signal
The switch selection of specific wavelength signal is realized in downloading end or the output of the output end of bus optical signal input and output waveguide.
The structure of the hybrid waveguide of the carrying phase-change material is phase change material deposition in silicon waveguide, the phase transformation of deposition
Material section and silicon waveguide axisymmetricly or are biased to the outside or inside of silicon waveguide sections central axis.
The phase-change material is for example, by using VO2Or Ge2Sb2Te5(GST225) or Ge2Sb2Se4Te1(GSST), but it is unlimited
In this.
The input and output waveguide, to upload downloading waveguide, micro-ring resonator identical with the top covering material of hybrid waveguide,
Input and output waveguide, upload downloading waveguide, micro-ring resonator are identical with the under-clad layer material of hybrid waveguide.
The top covering and under-clad layer is surrounding cladding layers medium, specially silica.
The both ends of the hybrid waveguide are set as pyramidal structure or bending grading structure, can reduce in this way and micro-ring resonant
The reflection generated when device couples by waveguide sections mutation.
Input and output waveguide, upload downloading waveguide is no longer parallel to each other and waveguide intersection occurs, carries the mixed of phase-change material
Multiplex can be around greater angle when leading the outside for being placed on micro-ring resonator, and the two sides outside micro-ring resonator are placed respectively takes
The hybrid waveguide of phase-change material is carried, or places the hybrid waveguide for carrying phase-change material inside and outside micro-ring resonator.
Coupled structure of the micro-ring resonator respectively with input and output waveguide, upload downloading waveguide is straight wave guide coupling
It closes, curved waveguide coupling mutually in the same direction or mutually opposing curved waveguide couple；Input and output waveguide uploads downloading waveguide point
Spacing not between micro-ring resonator is variable, and curved waveguide coupling mutually in the same direction/mutually opposing curved waveguide couples knot
Curved waveguide and micro-ring resonator constitute concentric structure or non-concentric structure in structure.
The micro-ring resonator includes multiple micro-loops, and multiple micro-loops are along perpendicular to carrier wave under input and output waveguide/upload
That leads is disposed to extend direction between input and output waveguide and upload downloading waveguide in longitudinal cascade arrangement, and each micro-loop side is equal
There is the hybrid waveguide of a carrying phase-change material；The respective structural parameters of multiple micro-loops such as radius, duct width are variable,
Spacing between adjacent micro-loop is variable, the respective structural parameters of multiple hybrid waveguides such as duct height, width, length and curvature half
Diameter is variable.
The micro-ring resonator is being inputted along input and output waveguide/upload downloading waveguide direction that is disposed to extend is parallel to
In lateral cascade arrangement between output waveguide and upload downloading waveguide, array of photoswitch is constituted, each micro-loop side has one
Carry the hybrid waveguide of phase-change material；The respective structural parameters of micro-ring resonator such as radius, waveguide in the array of photoswitch
Variable-width, the respective structural parameters of hybrid waveguide such as duct height, width, length and radius of curvature are variable.
The input and output waveguide of the bus optical signal, the upload downloading waveguide of local optical signal and micro-ring resonator are equal
For single mode waveguide；The hybrid waveguide of the carrying phase-change material is single mode waveguide or multimode waveguide.
The invention has the advantages that:
The present invention uses basic structural unit of the micro-ring resonator as photoswitch, and compact, design simple for structure is conveniently, surely
Qualitative height.
Variations in refractive index is larger between two kinds of phases of the phase-change material that the present invention uses, and is easier to increase switch in two kinds of shapes
Light field difference when state, improves switch efficiency；Meanwhile phase-change material have it is non-volatile, can be realized self-sustaining characteristic, only
Energy need to be provided when switch state switches, energy consumption is low.
The present invention places the hybrid waveguide for carrying phase-change material in the horizontal lateral of micro-loop, instead of directly in micro-loop
The mode of upper depositing phase change material, coupled by hybrid waveguide with the lateral evanescent wave of micro-loop rather than the direct suction of phase-change material
Receive the disadvantage for overcoming that light field is lost in micro-loop caused by the height loss because of phase-change material to regulate and control the light field resonance in micro-loop
End, advantageously reduces the insertion loss and channels crosstalk of photoswitch output port, improves the extinction ratio of switch state, be suitable for
Restructural, tunable wavelength-division multiplex system.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the hybrid waveguide schematic cross-section for carrying phase-change material.
Fig. 3 is the schematic diagram for carrying the hybrid waveguide both ends introducing pyramidal structure of phase-change material.
Fig. 4 is the schematic diagram for carrying the hybrid waveguide both ends introducing bending grading structure of phase-change material.
Fig. 5 is the improved structure schematic diagram when hybrid waveguide length of carrying phase-change material is longer.
Fig. 6 is bus waveguide and the structural schematic diagram that micro-loop is when straight wave guide couples.
Fig. 7 is bus waveguide and the structural schematic diagram that micro-loop is when curved waveguide in the same direction couples.
Fig. 8 is bus waveguide and the structural schematic diagram that micro-loop is when reversed curved waveguide couples.
It includes multiple micro-loops longitudinally cascade structural schematic diagram that Fig. 9, which is in micro-ring resonator,.
Figure 10 is multiple micro-ring resonators laterally cascade structural schematic diagram.
Figure 11 is the embodiment of the present invention structural schematic diagram.
Figure 12 is the local light field transmission figure for carrying the hybrid waveguide of phase-change material in the embodiment of the present invention and coupling with micro-loop.
Figure 13 be in the embodiment of the present invention two output port light intensity with the variation schematic diagram of wavelength.
In figure: 1, the input and output waveguide of bus optical signal, 2, the upload of local optical signal download waveguide, 3, micro-ring resonant
Device, 4, carry phase-change material hybrid waveguide, 5, phase-change material, 6, silicon waveguide, 7, surrounding cladding layers medium, 8, pyramidal structure, 9,
It is bent grading structure, 10, straight wave guide coupled structure, 11, curved waveguide coupled structure in the same direction, 12, reversed curved waveguide coupling
Close structure, 13, multiple micro-loops of longitudinal cascade arrangement, 14, the lateral cascade array of photoswitch of micro-ring resonator.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Figure 1, the light at all of the input and output waveguide 1, one including a bus optical signal is embodied in the present invention
Upload downloading 2, micro-ring resonators 3 of waveguide of signal and the hybrid waveguide 4 of a carrying phase-change material；Micro-ring resonator 3
It is arranged in input and output waveguide 1 and uploads between downloading waveguide 2, hybrid waveguide 4 is placed in the outside or inside of micro-ring resonator 3
It is other；The input and output waveguide 1 of bus optical signal, the upload downloading waveguide 2 of local optical signal and the mixing for carrying phase-change material
Waveguide 4 occurs lateral evanescent wave with micro-ring resonator 3 and couples, and realizes the optic path in total.
As shown in Fig. 2, the hybrid waveguide 4 for carrying phase-change material includes silicon waveguide 6 and the phase-change material being placed in silicon waveguide 6
5, phase-change material 5 is placed in the middle part of 6 upper surface of silicon waveguide, the silicon waveguide 6 of hybrid waveguide 4 and phase-change material 5 be arranged to it is micro-
The segmental arc that ring resonator 3 matches, hybrid waveguide 4 and micro-ring resonator 3 constitute concentric structure；Micro-ring resonator 3 with it is defeated
Enter and lateral evanescent wave coupling occurs between output waveguide 1, upload downloading waveguide 2, makes to generate light field resonance in micro-ring resonator 3；
Micro-ring resonator 3 occurs lateral evanescent wave with the hybrid waveguide 4 for carrying phase-change material and couples, to regulate and control in micro-ring resonator 3
Light field resonance.
Restructural micro-loop photoswitch tool is respectively the first end for being used for the input of bus optical signal there are four port, four ports
Mouthful, for bus optical signal output second port, for local optical signal Zhong Mou road wavelength signals upload third port and
The 4th port for the downloading of local optical signal Zhong Mou road wavelength signals；The both ends of the input and output waveguide 1 of bus optical signal point
Not Zuo Wei first port and second port, the both ends of the upload downloading waveguide 2 of local optical signal are respectively as third port and the
Four ports.
Same root input and output waveguide 1 is passed through in the input and output of bus optical signal, and local optical signal uploads and downloads
Downloading waveguide 2 is uploaded by same root；Bus optical signal is inputted from the side of the input and output waveguide 1 of bus optical signal, another
Side output；By the selection index system of micro-ring resonator 3, certain road of side input is full in the input and output waveguide 1 of bus optical signal
The specific wavelength signal of sufficient micro-ring resonant condition is coupled by the evanescent wave of micro-ring resonator 3, is descended from local optical signal
Carrier wave leads 2 ipsilateral downloading output；Certain local road meets the specific wavelength signal of micro-ring resonant condition from local optical signal
The other side for uploading downloading waveguide 2 is coupled by the evanescent wave of micro-ring resonator 3, is uploaded to the input and output wave of bus optical signal
Lead 1 output end output.
The electrooptic effect caused and applying voltage or laser irradiation to the phase-change material 5 in hybrid waveguide 4 or hot light
Effect realizes the mixing to phase-change material is carried by the state change of phase-change material 5 to change the state of phase-change material 5
The regulation of waveguide 4；When the state of phase-change material 5 changes, the mode effective refractive index for carrying the hybrid waveguide 4 of phase-change material changes
Become, the resonant state for changing light field in micro-ring resonator 3 is coupled by lateral evanescent wave, makes light field that resonance occur or do not occur humorous
Vibration, to regulate and control the output port of certain road specific wavelength signal.
In this way, hybrid waveguide 4 of the switch state control of the road bus optical signal Zhong Mou wavelength signals by carrying phase-change material
It realizes；Certain road that one end inputs from the input and output waveguide 1 of bus optical signal meets the certain wave long letter of micro-ring resonant condition
Number selection by local optical signal uploads downloading waveguide 2 in downloading export or directly by the input and output waveguide 1 of bus optical signal
The other end output；Upload downloading 2 road Zhong Mou of waveguide of local optical signal can be made to meet the spy of micro-ring resonant condition simultaneously
Determine wavelength signals to select to be uploaded in input and output waveguide 1 to export.
As shown in Fig. 2, the structure for carrying the hybrid waveguide 4 of phase-change material is that phase-change material 5 is deposited in silicon waveguide 6, sink
Long-pending 5 section of phase-change material and silicon waveguide 6 axisymmetricly or are biased to the outside or inside of 6 kernel of section axis of silicon waveguide.
According to the numerical values recited of the Refractive Index of Material of phase-change material 5, carrying the hybrid waveguide 4 of phase-change material, to be located at micro-loop humorous
The outside or inside of vibration device 3 constitute concentric structure or non-concentric structure with micro-ring resonator 3.
Input and output waveguide 1, upload downloading waveguide 2, micro-ring resonator 3 are identical with the top covering material of hybrid waveguide 4, defeated
Enter output waveguide 1, waveguide 2 is downloaded in upload, micro-ring resonator 3 is identical with the under-clad layer material of hybrid waveguide 4.What is be embodied is upper
Covering and under-clad layer are surrounding cladding layers medium 7, specially silica.
The pyramidal structure 8 of 4 both ends of the hybrid waveguide introducing of phase-change material is carried as shown in figure 3, carrying the mixed of phase-change material
The both ends that multiplex leads phase-change material 5 and silicon waveguide 6 in 4 are all connected with the waveguide of a pyramidal structure 8, reduction and micro-ring resonator
The reflection generated when 3 coupling by waveguide sections mutation.
The bending grading structure 9 of 4 both ends of the hybrid waveguide introducing of phase-change material is carried as shown in figure 4, carrying phase-change material
Hybrid waveguide 4 in phase-change material 5 and silicon waveguide 6 both ends be all connected with one bending grading structure 9 curved waveguide, reduce
The reflection generated when being coupled with micro-ring resonator 3 because waveguide sections are mutated.
5 waveguide of specific phase-change material can be sub-wavelength structure, to improve the flexibility regulated and controled to coupling.
As shown in figure 5, two bus waveguides 1,2 are no longer mutually when 4 length of hybrid waveguide for carrying phase-change material is longer
In parallel and there is waveguide intersection, or on the basis of keeping two bus waveguides 1,2 parallel, can occur in micro-ring resonator 3
The other positions of lateral evanescent wave coupling place the hybrid waveguide 4 for carrying phase-change material, specifically two outside micro-ring resonator 3
Side or interior outside Fang Zhi not carry the hybrid waveguide 4 of phase-change material respectively.
Micro-ring resonator 3 respectively with input and output waveguide 1, upload downloading waveguide 2 coupled structure be straight wave guide couple 10,
Curved waveguide coupling 11 or mutually opposing curved waveguide coupling 12 mutually in the same direction；Input and output waveguide 1 uploads downloading waveguide
2 respectively the spacing between micro-ring resonator 3 it is variable, curved waveguide mutually in the same direction couples 11/ mutually opposing curved waveguide
Couple curved waveguide and micro-ring resonator 3 in 12 structures and constitute concentric structure or non-concentric structure, respectively as Fig. 6, Fig. 7,
Shown in Fig. 8.
As shown in figure 9, micro-ring resonator 3 includes multiple micro-loops 13, multiple micro-loops 13 are along perpendicular to input and output waveguide 1/
The direction that is disposed to extend for uploading downloading waveguide 2 is in longitudinal cascade arrangement between input and output waveguide 1 and upload downloading waveguide 2,
There is the hybrid waveguide 4 of a carrying phase-change material in each micro-loop side；The respective structural parameters of multiple micro-loops 13 such as radius, wave
Lead variable-width, the spacing between adjacent micro-loop is variable, the respective structural parameters of multiple hybrid waveguides 4 for example duct height, width,
Length and radius of curvature are variable.
As shown in Figure 10, micro-ring resonator 3 is along the side of being disposed to extend for being parallel to the upload downloading waveguide 2 of input and output waveguide 1/
, in lateral cascade arrangement, array of photoswitch 14, each micro-loop are constituted between input and output waveguide 1 and upload downloading waveguide 2
There is the hybrid waveguide 4 of a carrying phase-change material in side；The respective structural parameters of micro-ring resonator 3 are such as in array of photoswitch 14
Radius, duct width are variable, and the respective structural parameters of hybrid waveguide 4 such as duct height, width, length and radius of curvature is variable,
The selection uploaded and downloaded for realizing signal at wavelength multiple in wavelength-division multiplex system.
Working process and principle of the invention are as follows:
The switch state control of certain road wavelength signals is realized by the hybrid waveguide 4 of carrying phase-change material, by regulating and controlling phase transformation
The state of the phase of material 5 changes the mode effective refractive index for carrying the hybrid waveguide 4 of phase-change material, so as to regulate and control to carry
The hybrid waveguide 4 of phase-change material and the coupling effect of micro-ring resonator 3, and then regulate and control the light field resonance in micro-ring resonator 3, with
So that meeting the optical signal of the certain wave strong point of condition of resonance in micro-ring resonator 3 from bus optical signal input and output waveguide 1
Output end or local optical signal upload the downloading end output of downloading waveguide 2.
When phase-change material 5 is in the state of a certain phase, the hybrid waveguide 4 and micro-ring resonator 3 of phase-change material are carried
Mode effective refractive index meet the phase-matching condition of lateral evanescent wave coupling, by 1 coupling of bus optical signal input and output waveguide
The optical signal closed into micro-ring resonator 3 can be coupled in the hybrid waveguide 4 for carrying phase-change material, in micro-ring resonator 3
Light field resonance is destroyed.Under this state, optical signal cannot be coupled to local optical signal and upload in downloading waveguide 2, but directly
It is exported from the output end of bus optical signal input and output waveguide 1, the output end of bus optical signal input and output waveguide 1 is "ON" shape
State, the downloading end that local optical signal uploads downloading waveguide 2 is "Off" state.
When phase-change material 5 becomes the state of another phase, since its Refractive Index of Material produces large change, so that taking
The mode effective refractive index for carrying the hybrid waveguide 4 of phase-change material also produces large change, no longer meets side with micro-ring resonator 3
To the phase-matching condition of evanescent wave coupling, the optical signal in micro-ring resonator 3 is not couple to the mixed recharge for carrying phase-change material
It leads in 4, then the optical signal for meeting the certain wave strong point of condition of resonance in micro-ring resonator 3 can generate light field resonance.This shape
Under state, the specific wavelength optical signal inputted in bus optical signal input and output waveguide 1 is made by the resonance selection of micro-ring resonator 3
With, the downloading end output of downloading waveguide 2 is uploaded from local optical signal, becomes "On" state, and bus optical signal input and output wave
Leading 1 output end becomes "Off" state, realizes the function of light path switch routing.
Specific embodiments of the present invention are as follows:
This example selects the silicon nanowires optical waveguide for being based on silicon-on-insulator (SOI) material, and core material is silicon, with a thickness of
220nm, refractive index 3.4744, surrounding cladding layers material are silica, and refractive index 1.444 considers that wavelength band is
1500nm to 1600nm, by applying the variation that alive thermo-optic effect regulates and controls phase-change material phase to electrode.
The micro-ring resonator 3 and the coupled structure of two bus waveguides 1,2 can couples 10 using straight wave guide, are in the same direction
Curved waveguide coupling 11 or reversed curved waveguide coupling 12, in this example, be all made of curved waveguide coupling 11 in the same direction, and
For concentric structure.Micro-ring resonator 3 and the hybrid waveguide 4 for carrying phase-change material are also concentric structure.
In the hybrid waveguide 4 of the carrying phase-change material, section and the silicon waveguide below 6 of 5 waveguide of phase-change material are in
Axial symmetry is concentric structure；5 waveguide of phase-change material is sub-wavelength structure, to improve the flexibility regulated and controled to coupling；It takes
Carry phase-change material hybrid waveguide 4 both ends connect two tapered transmission line structures 8, with reduce coupled with micro-ring resonator 3 when because
Waveguide sections are mutated and the reflection of generation；The length for carrying the hybrid waveguide 4 of phase-change material is longer, by two bus waveguides 1,2
Square crossing is placed.
In embodiment device architecture, taking the duct width of two bus waveguides 1,2 is WSi=450nm, duct width meet
Single mode transport condition.The radius of micro-ring resonator 3 is RW=5 μm, the duct width of micro-ring resonator 3 is Wring=450nm.Two
In the coupled structure of root bus waveguide 1,2 and micro-ring resonator 3, the waveguide spacing of coupling regime is WG=240nm, two buses
Waveguide 1,2 coupling regimes bending radius be RS=5.69 μm.Two bus waveguides 1,2 take bending angle appropriate in coupling regime
Degree, so that it is 0.981 that the amplitude of bus optical signal input and output waveguide 1, which leads directly to the coefficient of coup, local optical signal uploads lower carrier wave
The straight-through coefficient of coup of amplitude for leading 2 is 0.985.
Phase-change material 5 selects Ge2Sb2Te5(GST225), at 1550nm wavelength, amorphous Refractive Index of Material is
4.21+0.0567i the Refractive Index of Material of crystal state is 7.00+1.0871i.When using phase-change material 5 as crystal state, phase is carried
The hybrid waveguide 4 for becoming material meets the phase-matching condition that lateral evanescent wave couples with micro-ring resonator 3, takes in hybrid waveguide 4
The duct width of lower section silicon waveguide 6 is WS=320nm, the duct width of 5 waveguide of phase-change material are WP=280nm, duct height are
HP=30nm, duct width and height meet single mode transport condition.Carry the hybrid waveguide 4 and micro-ring resonator 3 of phase-change material
Between waveguide spacing be WG=240nm, bending radius RP=5.625 μm, annulus bending angle is Φ=120 °.Phase transformation
5 waveguide of material is sub-wavelength structure, sub-wavelength period TP=250nm, duty ratio 0.5.Carry the mixing of phase-change material
In pyramidal structure 8 in waveguide 4, the pyramidal structure length of 5 waveguide of phase-change material is tp=0.6 μm, the pyramidal structure of silicon waveguide 6
Length is ts=0.8 μm.Above-mentioned waveguide material is that the height of all waveguiding structures of silicon is HSi=220nm, with silicon-on-insulator
(SOI) consistency of thickness of the sandwich layer silicon of material.
Figure 12, which gives, carries the local light field transmission figure that the hybrid waveguide 4 of phase-change material is coupled with micro-ring resonator 3, figure
Middle transmission mode is transverse electric TE basic mode, and wavelength 1550nm is emulated using 3D-FDTD.In local light field transmission figure, light from
Waveguide coupled structure is upwardly on the left of disc waveguide, transmission direction exports on the downside of disc waveguide to the left after changing 270 °.Scheme a
In phase-change material Ge2Sb2Te5For crystal state, carries the hybrid waveguide 4 of phase-change material at this time and micro-ring resonator 3 meets laterally
The phase-matching condition of evanescent wave coupling, since part light field is coupled in hybrid waveguide 4 in disc waveguide, the light field damage of itself
Consume larger, the light field resonance being equivalent in micro-ring resonator 3 is destroyed, and the optical signal in bus waveguide 1 is directly from its output end
Output, the downloading end of local waveguide 2 is without light output；Scheme the phase-change material Ge in b2Sb2Te5For amorphous state, phase transformation material is carried at this time
The hybrid waveguide 4 of material no longer meets the phase-matching condition that lateral evanescent wave couples with micro-ring resonator 3, from light field transmission figure
Can be seen that, carry the hybrid waveguide 4 of phase-change material and micro-ring resonator 3 occur it is faint couple, through 120 ° of over-angle of couplings away from
From rear, light field is coupled back into disc waveguide, and due to Ge2Sb2Te5It is smaller to be lost when amorphous state, it is coupled to mixed recharge
The transmission loss led in 4 is negligible, and the light field resonance being equivalent in micro-ring resonator 3 is unaffected, inputs from bus waveguide 1
The specific wavelength signal for meeting 3 condition of resonance of micro-ring resonator can be exported from the downloading end of local waveguide 2, without from bus waveguide
1 output.
Figure 13 gives the light intensity of 2 downloading end of 1 output end of bus waveguide and local waveguide with the variation schematic diagram of wavelength, leads to
It crosses 3D-FDTD and emulates being calculated for locally coupled characteristic and transfer matrix method, " Through " is bus wave in diagram mark
1 output end is led, " Drop " is 2 downloading end of local waveguide.Scheme the phase-change material Ge in a2Sb2Te5For crystal state, under this state
Light field resonance in micro-ring resonator 3 is destroyed, and corresponding to 1 output end of bus waveguide is "On" state, local 2 downloading end of waveguide
Insertion loss for "Off" state, operating wave strong point optical signal is less than 1dB；Scheme the phase-change material Ge in b2Sb2Te5For amorphous state,
Light field resonance under this state in micro-ring resonator 3 is unaffected, and corresponding to local 2 downloading end of waveguide is "On" state, always
1 output end of line waveguide is "Off" state, and the insertion loss of operating wave strong point optical signal is less than 2dB；It is available from figure a and figure b, it opens
Off status switch when, the extinction ratio of two ports be all larger than 20dB, it can be achieved that optical signal switch Route Selection.
It can be seen that the waveguiding structure concision and compact that the present invention designs, stability is high, overcomes the height of phase-change material itself
Technical problem is lost, reduces insertion loss and channels crosstalk, improves the extinction ratio of switch state, can be realized self-sustaining spy
Property and energy consumption it is low, achieve prominent significant technical effect.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and
In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.
Claims (9)
1. a kind of restructural micro-loop photoswitch based on phase-change material, input and output waveguide (1) including a bus optical signal,
Upload downloading waveguide (2) and a micro-ring resonator (3) of one optical signal at all, micro-ring resonator (3) be arranged in input it is defeated
Out between waveguide (1) and upload downloading waveguide (2)；It is characterized by also including the hybrid waveguides that one carries phase-change material
(4)；Hybrid waveguide (4) includes silicon waveguide (6) and the phase-change material (5) being placed on silicon waveguide (6), and hybrid waveguide (4) is placed in micro-
By the outside or inside of ring resonator (3), and hybrid waveguide (4) is arranged to the segmental arc to match with micro-ring resonator (3)；
Lateral evanescent wave occurs between micro-ring resonator (3) and input and output waveguide (1), upload downloading waveguide (2) to couple, keeps micro-loop humorous
Shaking, device (3) are interior to generate light field resonance；Lateral evanescent wave occurs for micro-ring resonator (3) and the hybrid waveguide (4) for carrying phase-change material
Coupling regulates and controls the light field resonance in micro-ring resonator (3).
2. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: by right
Phase-change material (5) in hybrid waveguide (4) applies voltage or laser irradiation and the electrooptic effect or thermo-optic effect that cause change
The state of phase-change material (5), and then realized by the state change of phase-change material (5) to the hybrid waveguide for carrying phase-change material
(4) regulation；When the state of phase-change material (5) changes, the mode effective refractive index for carrying the hybrid waveguide (4) of phase-change material changes
Become, the resonant state for changing micro-ring resonator (3) interior light field is coupled by lateral evanescent wave, makes light field that resonance occur or do not occur
Resonance, to regulate and control the output port of certain road wavelength signals.
3. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
The structure for carrying the hybrid waveguide (4) of phase-change material is that phase-change material (5) are deposited on silicon waveguide (6), the phase-change material of deposition
(5) outside or inside of silicon waveguide (6) kernel of section axis axisymmetricly or are biased in section and silicon waveguide (6).
4. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
Input and output waveguide (1), upload downloading waveguide (2), micro-ring resonator (3) are identical with the top covering material of hybrid waveguide (4), defeated
Enter that output waveguide (1), to upload downloading waveguide (2), micro-ring resonator (3) identical with the under-clad layer material of hybrid waveguide (4).
5. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
The both ends of hybrid waveguide (4) are set as pyramidal structure (8) or bending grading structure (9), can reduce in this way and micro-ring resonator (3)
The reflection generated when coupling because waveguide sections are mutated.
6. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: input is defeated
Out waveguide (1), upload that downloading waveguide (2) is no longer parallel to each other and waveguide intersection occur, in the external two sides of micro-ring resonator (3)
The hybrid waveguide (4) for carrying phase-change material is placed respectively, or is placed inside and outside micro-ring resonator (3) and carried phase transformation material
The hybrid waveguide (4) of material.
7. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
Micro-ring resonator (3) respectively with input and output waveguide (1), upload downloading waveguide (2) coupled structure be straight wave guide couple (10),
Curved waveguide coupling (11) mutually in the same direction or mutually opposing curved waveguide coupling (12)；Input and output waveguide (1), on descend
Carrier wave is led the spacing of (2) respectively between micro-ring resonator (3) and be can be changed, curved waveguide coupling (11) mutually in the same direction/mutually reciprocal
To curved waveguide coupling (12) structure in curved waveguide and micro-ring resonator (3) constitute concentric structure or non-concentric knot
Structure.
8. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
Micro-ring resonator (3) includes multiple micro-loops (13), and multiple micro-loops (13) are along perpendicular to the lower carrier wave of input and output waveguide (1)/upload
That leads (2) is disposed to extend direction between input and output waveguide (1) and upload downloading waveguide (2) in longitudinal cascade arrangement, each
There is the hybrid waveguide (4) of a carrying phase-change material in micro-loop side.
9. a kind of restructural micro-loop photoswitch based on phase-change material according to claim 1, it is characterised in that: described
Micro-ring resonator (3) is disposed to extend direction in input and output along input and output waveguide (1)/upload downloading waveguide (2) is parallel to
It in lateral cascade arrangement between waveguide (1) and upload downloading waveguide (2), constitutes array of photoswitch (14), each micro-loop side is equal
There is the hybrid waveguide (4) of a carrying phase-change material.
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