CN103760699A - Micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides - Google Patents
Micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides Download PDFInfo
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Abstract
The invention discloses a micro-ring resonant cavity tunable optical filter based on liquid crystal slit waveguides. The micro-ring resonant cavity tunable optical filter comprises a substrate, a first straight waveguide, a second straight waveguide, a micro-ring waveguide, a first electrode, a second electrode and an upper wrapping layer. The first straight waveguide and/or the second straight waveguide are/is internally provided with slit structures or a slit structure, the first straight waveguide and the second straight waveguide are respectively arranged on the upper surface of the substrate, a slit structure is arranged in the micro-ring waveguide, the micro-ring waveguide is arranged on the substrate and located between the first straight waveguide and the second straight waveguide, the first electrode is arranged in an inner circular ring region of the micro-ring waveguide, and the second electrode is arranged in an outer circular ring region of the micro-ring waveguide. The first straight waveguide, the second straight waveguide, the micro-ring waveguide, the first electrode and the second electrode are respectively covered with the upper wrapping layer, and the slit structures are filled with the upper wrapping layer. The micro-ring resonant cavity tunable optical filter has the advantages of being low in control voltage, large in resonant wavelength tuning range and simple in structure.
Description
Technical field
The invention belongs to optical communication technology field, particularly a kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide.
Background technology
The concept in optical micro-ring resonant chamber is proposed in 1969 first by Marcatili,, when light wavelength meets certain condition, could in the ring of light, interfere resonance, and then realize the function of frequency filtering.
In recent years, along with developing rapidly of slab guide manufacture craft, silicon-based micro ring resonator device is as one of most important basic device in integrated optical circuit, more and more give prominence to its integration and performance diversity, yet micro annular resonant cavity type tunable optic filter, its method mainly adopting is that thermo-optic effect is tuning, the modes such as the tuning and carrier injection of electrooptical effect, it is large that above-mentioned traditional tuning manner exists power consumption, the problems such as regulation and control restriction, comparatively speaking, current liquid crystal waveguide micro annular resonant cavity type light filter, it is to using slab waveguide as basic wave guide structure formation micro-ring resonant cavity configuration, overcome to a certain extent traditional tuning manner and had the technical matters that power consumption is large, but because directly adopting slab waveguide, this structure forms micro-ring resonant cavity configuration, also there is following shortcoming in it:
1, tuning voltage is excessive, the range of application of restriction optical filter;
2, the tuning range of resonance wavelength is less;
3, electrode structural designs is comparatively complicated.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide that voltage is little, the tuning range of resonance wavelength is large of controlling.
For solving the problems of the technologies described above, the invention provides a kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide, a kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide, comprising: substrate; The first straight wave guide and the second straight wave guide; Described the first straight wave guide and/or, be provided with narrow slit structure in described the second straight wave guide, described the first straight wave guide and described the second straight wave guide are separately positioned on described substrate, and described the first straight wave guide and described the second straight wave guide are parallel to each other; The width of described the first straight wave guide and described the second straight wave guide is 100nm-1000nm; The height of described the first straight wave guide and described the second straight wave guide is 100nm-1000nm; Micro-ring waveguide; In described micro-ring waveguide, be provided with narrow slit structure, described micro-ring waveguide is arranged on described substrate, and described micro-ring waveguide is at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described micro-ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described micro-ring waveguide and described the second straight wave guide is 10nm-1000nm; The first electrode and the second electrode; Described the first electrode is arranged on the interior circle ring area of described micro-ring waveguide, and described the second electrode is arranged on the outer toroid region of described micro-ring waveguide; Described the first electrode external voltage source and described the second electrode grounding or, described the second electrode external voltage source and described the first electrode grounding; Top covering; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described micro-ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
Further, described micro-ring waveguide comprises: interior ring waveguide and outer ring waveguide; Described interior ring waveguide and described outer ring waveguide are separately positioned on described substrate, and described interior ring waveguide and described outer ring waveguide are at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described outer ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described outer ring waveguide and described the second straight wave guide is 10nm-1000nm; The outer ledge position of described interior ring waveguide and the position, inside edge of described outer ring waveguide form the narrow slit structure of described micro-ring waveguide at a distance of 10nm-1000nm; Described the first electrode is arranged on the interior circle ring area of described interior ring waveguide, and described the second electrode is arranged on the outer toroid region of described outer ring waveguide; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described interior ring waveguide, described outer ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
Further, described micro-ring waveguide can comprise interior ring waveguide, middle ring waveguide and outer ring waveguide; Described interior ring waveguide, described middle ring waveguide and described outer ring waveguide are separately positioned on described substrate, and described middle ring waveguide is at described interior ring waveguide and described outer ring waveguide between the two; Described interior ring waveguide, described middle ring waveguide and described outer ring waveguide lay respectively at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described outer ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described outer ring waveguide and described the second straight wave guide is 10nm-1000nm; Described interior ring waveguide is arranged in the interior circle ring area of described outer ring waveguide; And the outer ledge position of described interior ring waveguide and the position, inside edge of described outer ring waveguide are at a distance of 10nm-1000nm; Described interior ring waveguide is distinguished the described slit mechanism of corresponding formation with gap and described outer ring waveguide between described middle ring waveguide with the gap between described middle ring waveguide; Described the first electrode is arranged on the interior circle ring area of described interior ring waveguide, and described the second electrode is arranged on the outer toroid region of described outer ring waveguide; Described the first electrode external voltage source and described the second electrode grounding or, described the second electrode external voltage source and described the first electrode grounding; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described interior ring waveguide, described middle ring waveguide, described outer ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
Further, described interior ring waveguide comprises: the first slab waveguide and the first planar waveguide; The height of described the first slab waveguide is 100nm-1000nm; The height of described the first planar waveguide is 10nm-1000nm; End and the two cross section that described the first slab waveguide is arranged on described the first planar waveguide are U-shaped structure; Described the first electrode is arranged on described the first planar waveguide; And described outer ring waveguide comprises: the second slab waveguide and the second planar waveguide; The height of described the second slab waveguide is 100nm-1000nm; The height of described the second planar waveguide is 10nm-1000nm; End and the two cross section that described the second slab waveguide is arranged on described the second planar waveguide are L-type structure; Described the second electrode is arranged on described the second planar waveguide; The side of the side of described the second slab waveguide and described the first slab waveguide forms the narrow slit structure of described micro-ring waveguide at a distance of 10nm-1000nm.
Further, described middle ring waveguide comprises: the 3rd slab waveguide; The height of described the 3rd slab waveguide and/or width are 100nm-1000nm; Described outer ring waveguide comprises: the second slab waveguide and the second planar waveguide; The height of described the second slab waveguide is and/or width is 100nm-1000nm; The height of described the second planar waveguide is 10nm-1000nm; End and the two cross section that described the second slab waveguide is arranged on described the second planar waveguide are L-type structure; Described the second electrode is arranged on described the second planar waveguide; The side of the side of described the second slab waveguide and described the first slab waveguide is at a distance of 20nm-1000nm; Described the 3rd slab waveguide is arranged on described the first slab waveguide, described the second slab waveguide between the two, and described the 3rd slab waveguide equates with the vertical range of described the 3rd slab waveguide to described the second slab waveguide to the vertical range of described the first slab waveguide, 2 narrow slit structures of gap formation between the gap between described the 3rd slab waveguide and described the first slab waveguide and described the 3rd slab waveguide and described the second slab waveguide.
Further, the height of described the first slab waveguide equates with the height of described the second slab waveguide; And/or the width of described the first slab waveguide equates with the width of described the second slab waveguide; And/or the height of described the first planar waveguide equates with the height of described the second planar waveguide; And/or described the first electrode equates with the vertical range of described the second electrode to described the second slab waveguide to the vertical range of described the first slab waveguide.
Further, the width of described the first straight wave guide equates with the width of described the second straight wave guide; And/or the height of described the first straight wave guide equates with the height of described the second straight wave guide.
Further, the material of described the first straight wave guide, described the second straight wave guide and described micro-ring waveguide is that the P type that is mixed with impurity can be led silicon; The material of described top covering is organic lcd.
Further, the material of described substrate is silicon dioxide.
Further, described organic lcd is nematic crystal.
A kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide provided by the invention, by the first straight wave guide and the second straight wave guide being separately positioned on to the upper surface of substrate, in micro-ring waveguide, establish narrow slit structure, and micro-ring waveguide is arranged on substrate, and at the first straight wave guide and the second straight wave guide between the two, the first electrode is arranged on the interior circle ring area of micro-ring waveguide, and the second electrode is arranged on the outer toroid region of micro-ring waveguide, top covering covers respectively the first straight wave guide, the second straight wave guide, micro-ring waveguide, on the first electrode and the second electrode, and top covering is filled in respectively the first straight wave guide, in the narrow slit structure of the second straight wave guide and micro-ring waveguide, make in actual job process, the first electrode external voltage source is as positive electrode of the present invention, the second electrode grounding as negative electrode of the present invention (or, the second electrode external voltage source, the first electrode grounding), the first straight wave guide is as the input straight wave guide of the present embodiment one light, the second straight wave guide is as the straight wave guide output of the present embodiment one light, by voltage source, produce the sensing mistake direction that continuously adjustable voltage changes liquid crystal molecule, and then refractive index is transmitted in the equivalence that changes narrow slit structure in micro-ring waveguide, thereby cause the change by the first straight wave guide input beam resonance wavelength, finally realize the tunability of optical filter, and adopt the narrow slit wave-guide pattern of establishing narrow slit structure in micro-ring waveguide to make the tuning range of resonance wavelength larger, the first electrode, the second electrode are set respectively in interior circle ring area, the outer toroid region of micro-ring waveguide and have simplified the design of electrode structure, there is the little feature of the voltage of control simultaneously.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The micro annular resonant cavity type adjustable light wave-filter one-piece construction vertical view based on liquid crystal narrow slit wave-guide that Fig. 1 provides for the embodiment of the present invention one; And
The part-structure cut-open view of substrate, top covering and micro-ring waveguide in the micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide that Fig. 2 provides for the embodiment of the present invention one; And
The part-structure cut-open view of substrate, top covering, micro-ring waveguide in the micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide that Fig. 3 provides for the embodiment of the present invention two; And
The micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide that Fig. 4 provides for the embodiment of the present invention one, in micro-ring waveguide in annulus zone radius while being set to 20 μ m, filter and to obtain light wavelength and the Numerical Simulation Results graph of a relation of controlling voltage;
Wherein, 1-substrate, 2-top covering, 3-narrow slit structure, 4-voltage source, 101-the first straight wave guide, 102-the second straight wave guide, 201-the first electrode, 202-the second electrode, 301-the first slab waveguide, 302-the second slab waveguide, 303-the 3rd slab waveguide, 401-the first planar waveguide, 402-the second planar waveguide.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, the every other embodiment that those of ordinary skills obtain, belongs to the scope of protection of the invention.
Current micro annular resonant cavity type tunable optic filter, its method mainly adopting has that thermo-optic effect is tuning, electrooptical effect is tuning and the mode such as carrier injection, yet the problems such as power consumption is large, regulation and control restriction that above-mentioned traditional tuning manner exists, comparatively speaking, the high electrooptical coefficient of liquid crystal provides possibility for realizing the integrated opto-electronic device of efficient adjustable, the present invention is based on above-mentioned theory following embodiment is provided:
Embodiment mono-
Referring to Fig. 1-2, a kind of micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide that the embodiment of the present invention provides, comprises substrate 1, the first straight wave guide 101,102,1 micro-ring waveguide of the second straight wave guide, the first electrode 201, the second electrode 202 and top covering 2; Wherein, in the first straight wave guide 101 and/or the second straight wave guide 102, be provided with the upper surface that narrow slit structure 3, the first straight wave guides 101 and the second straight wave guide 102 for beam Propagation are separately positioned on substrate 1, and the first straight wave guide 101 and the second straight wave guide 102 are parallel to each other; The width of the first straight wave guide 101 and the second straight wave guide 102 is 100nm-1000nm; The height of the first straight wave guide 101 and the second straight wave guide 102 is 100nm-1000nm; Accordingly, be also provided with narrow slit structure 3 in micro-ring waveguide, micro-ring waveguide is arranged on substrate 1, and micro-ring waveguide is at the first straight wave guide 101 and the second straight wave guide 102 between the two; Spacing distance (bee-line) between micro-ring waveguide and the first straight wave guide 101 is that the spacing distance (bee-line) between 10nm-1000nm, micro-ring waveguide and the second straight wave guide 102 is 10nm-1000nm; The first electrode 201 is arranged on the interior circle ring area of micro-ring waveguide, and the second electrode 202 is arranged on the outer toroid region of micro-ring waveguide; Top covering 2 covers respectively on the first straight wave guide 101, the second straight wave guide 102, micro-ring waveguide, the first electrode 201 and the second electrode 202, and top covering 2 is filled in respectively in the narrow slit structure 3 of the first straight wave guide 101, the second straight wave guide 102 and micro-ring waveguide.In actual job process, positive electrode using the first electrode 201 external voltage sources 4 as the present embodiment one, the second electrode 202 ground connection as the negative electrode of the present embodiment one (or, the second electrode 202 external voltage sources, the first electrode 201 ground connection), the first straight wave guide 101 is as the input straight wave guide of the present embodiment one light, the second straight wave guide 102 is as the straight wave guide output of the present embodiment one light, by voltage source 4, produce the sensing mistake direction that continuously adjustable voltage changes liquid crystal molecule, and then refractive index is transmitted in the equivalence that changes narrow slit structure 3 in micro-ring waveguide, thereby cause the change by the first straight wave guide 101 input beam resonance wavelengths, finally realized the tunability of optical filter.
Particularly, in the present embodiment one, micro-ring waveguide comprises: cross section is the barrel-shaped interior ring waveguide of U-shaped structure, and centre is provided with the outer ring waveguide of annular sidewall; Wherein, interior ring waveguide and outer ring waveguide are separately positioned on substrate 1, and interior ring waveguide and outer ring waveguide are at the first straight wave guide 101 and the second straight wave guide 102 between the two; The edge, inner side (annular sidewall) of the outer ledge position of interior ring waveguide and outer ring waveguide forms the narrow slit structure 3 of micro-ring waveguide at a distance of 10nm-1000nm; Meanwhile, the first electrode 201 is arranged on interior ring waveguide, and the second electrode 202 is arranged on outer ring waveguide.
Further, interior ring waveguide comprises: the first slab waveguide 301 and the first planar waveguide 401; Outer ring waveguide comprises: the second slab waveguide 302 and the second planar waveguide 402; Wherein, the height of the first slab waveguide 301 is 100nm-1000nm; The height of the second slab waveguide 302 is 100nm-1000nm; The height of the first planar waveguide 401 is 10nm-1000nm; The height of the second planar waveguide 402 is 10nm-1000nm; Meanwhile, end and the two cross section that the first slab waveguide 301 is arranged on the first planar waveguide 401 are U-shaped structure, and end and the two cross section that the second slab waveguide 302 is arranged on the second planar waveguide 402 are L-type structure; Preferably, the composite structure of the composite structure of the first slab waveguide 301 and the first planar waveguide 401, the second slab waveguide 302 and the second planar waveguide 402 can complete by etching technics; The first electrode 201 is arranged on the upper surface of the first planar waveguide 401; The second electrode 202 is arranged on the upper surface of the second planar waveguide 402; In actual job process, the side of the side of the second slab waveguide 302 and the first slab waveguide 301 is at a distance of 10nm-1000nm and then form the narrow slit structure 3 of micro-ring waveguide, by voltage source 4, produce the sensing mistake direction that continuously adjustable voltage changes liquid crystal molecule, and then change by the second slab waveguide 302, the first slab waveguide 301 transmits refractive index with the equivalence of single narrow slit wave-guide that narrow slit structure 3 forms, thereby cause the change by the first straight wave guide 101 input beam resonance wavelengths, finally realized the tunability of optical filter.
It is pointed out that simple in structure for ease of the present embodiment one, be easy to make and be compatible with CMOS technique, preferred, the height of the first slab waveguide 301, width respectively with height, the width correspondent equal of the second slab waveguide 302; The vertical range of the first electrode 201 to first slab waveguides 301 equates with the vertical range of the second electrode 202 to second slab waveguides 302; The height of the first straight wave guide 101, width respectively with height, the width correspondent equal of the second straight wave guide 102.Simultaneously, generation for ease of electric potential field, form turning circuit, preferably, the material of the first straight wave guide 101, the second straight wave guide 102 and micro-ring waveguide (the first slab waveguide 301, the second slab waveguide 302, the first planar waveguide 401, the second planar waveguide 402) can select the P type that is mixed with impurity can lead silicon; The material of top covering 2 can be selected organic lcd (as nematic liquid crystalline material 5CB etc.); The material of substrate can be selected silicon dioxide.
Below, for further the present invention being elaborated, to support technical matters to be solved by this invention, with based on SOI(Silicon-On-Insulator, silicon in dielectric substrate) the single slit micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide of making is row, wherein: the height of substrate (SiO2) is 2 μ m, the district of narrow slit structure 3 is wide is 100nm, the first slab waveguide 301, the width of the second slab waveguide 302 is 200nm, the first slab waveguide 301, the second slab waveguide 302 is highly 220nm, the first planar waveguide 401, the height of the second planar waveguide 402 is 60nm, the first electrode 201, the second electrode 202(metal electrode) correspondence is plated in the first planar waveguide 401 respectively, the upper surface of the second planar waveguide 402, and the second motor 202 external voltage sources 4, select nematic liquid crystalline material 5CB as top covering 2, be highly 2 μ m, and be filled in narrow slit structure 3 the insides, when Fig. 4 is set to 20 μ m for annulus zone radius in micro-ring waveguide, the light wavelength and the Numerical Simulation Results graph of a relation of controlling voltage of filtering to obtain, the present invention is by introducing the concept of narrow slit wave-guide as seen from the figure, in Bing top covering district and narrow slit structure 3, fill organic liquid crystal material, greatly improved tuning capability (having increased wavelength tuning range), and by the upper surface at the first planar waveguide 401, the second planar waveguide 402 respectively, plate the first electrode 201, the second electrode 202, shortened the distance in electrode and LCD electric-controlled region, improved tuning efficiency and reduced the maximum modulation voltage of voltage source 4, meanwhile, the present invention also have simple in structure, be easy to make, with low cost and be compatible with the feature of CMOS technique.
Embodiment bis-
For the embodiment of the present invention one, because the equivalent refractive index change value of double aperture slit waveguide is greater than the equivalent refractive index change value of single narrow slit wave-guide, and then the tunable range of double aperture slit waveguide is greater than the tunable range of single narrow slit wave-guide, based on above-mentioned theory, this enforcement two provides the micro annular resonant cavity type adjustable light wave-filter of the another kind of double aperture slit structure based on liquid crystal narrow slit wave-guide, as described below:
Refer to Fig. 3, the micro annular resonant cavity type adjustable light wave-filter that the present embodiment two provides comprises: substrate 1; The first straight wave guide 101 and the second straight wave guide 102; In the first straight wave guide 101 and/or the second straight wave guide 102, be provided with narrow slit structure 3, the first straight wave guides 101 and the second straight wave guide 102 and be separately positioned on substrate 1, and the first straight wave guide 101 and the second straight wave guide 102 are parallel to each other; The width of the first straight wave guide 101 and the second straight wave guide 102 is 100nm-1000nm; The height of the first straight wave guide 101 and the second straight wave guide 102 is 100nm-1000nm; Micro-ring waveguide; Described micro-ring waveguide comprises interior ring waveguide, middle ring waveguide and outer ring waveguide; Wherein, interior ring waveguide, middle ring waveguide and outer ring waveguide are separately positioned on substrate 1, and middle ring waveguide is between interior ring waveguide and outer ring waveguide, interior ring waveguide, middle ring waveguide and outer shroud ring waveguide are at the first straight wave guide 101 and the second straight wave guide 102 between the two; Spacing distance between outer ring waveguide and the first straight wave guide 101 is 10nm-1000nm, and the spacing distance between outer ring waveguide and the second straight wave guide 102 is 10nm-1000nm; The outer ledge position of interior ring waveguide and the position, inside edge of outer ring waveguide are at a distance of 10nm-1000nm; The first electrode 201 and the second electrode 202; The first electrode 201 is arranged on the interior circle ring area of interior ring waveguide, and the second electrode 202 is arranged on the outer toroid region of outer ring waveguide; The first electrode 201 external voltage sources 4 are as the positive electrode of the present embodiment two, and the second electrode 202 ground connection are as the negative electrode of the present embodiment two (or, the second electrode 202 external voltage sources, the first electrode 201 ground connection), top covering 2; Top covering 4 covers respectively the upper surface of the first straight wave guide 101, the second straight wave guide 102, interior ring waveguide, outer ring waveguide, the first electrode 201 and the second electrode 202, and top covering 2 is filled in respectively in the narrow slit structure 3 of outer ring waveguide.
Specifically, interior ring waveguide comprises: the first slab waveguide 301 and the first planar waveguide 401; The height of the first slab waveguide 301 is 100nm-1000nm; The height of the first planar waveguide 401 is 10nm-1000nm; End and the two cross section that the first slab waveguide 301 is arranged on the first planar waveguide 401 are U-shaped structure; The first electrode 201 is arranged on the upper surface of the first planar waveguide 401; Middle ring waveguide comprises: the 3rd slab waveguide 303; Outer ring waveguide comprises: the second slab waveguide 302 and the second planar waveguide 402; The height of the second slab waveguide 302 is 100nm-1000nm; The height of the 3rd slab waveguide 303 is 100nm-1000nm; The height of the second planar waveguide 402 is 10nm-1000nm; End and the two cross section that the second slab waveguide 302 is arranged on the second planar waveguide 402 are L-type structure; The second electrode 202 is arranged on the second planar waveguide 402; The side of the side of the second slab waveguide 302 and the first slab waveguide 301 is at a distance of 20nm-2000nm; The 3rd slab waveguide 303 is arranged on the first slab waveguide 301, the second slab waveguide 302 between the two, and the vertical range of the 3rd slab waveguide 303 to first slab waveguides 301 equates with the vertical range of the 3rd slab waveguide 303 to second slab waveguides 302,2 narrow slit structures 3 of gap formation between the gap between the 3rd slab waveguide 303 and the first slab waveguide 301 and the 3rd slab waveguide 303 and the second slab waveguide 302.In actual job process, positive electrode using the first electrode 201 external voltage sources 4 as the present embodiment one, the second electrode 202 ground connection as the negative electrode of the present embodiment one (or, the second electrode 202 external voltage sources, the first electrode 201 ground connection), the first straight wave guide 101 is as the input straight wave guide of the present embodiment two light, the second straight wave guide 102 is as the straight wave guide output of the present embodiment two light, by voltage source 4, produce the sensing mistake direction that continuously adjustable voltage changes liquid crystal molecule, and then change in micro-ring waveguide respectively by the first slab waveguide 301, the 3rd slab waveguide 303, the equivalence transmission refractive index of the double aperture slit waveguide of the second slab waveguide 302 and 2 narrow slit structure 3 formations, thereby cause the change by the first straight wave guide 101 input beam resonance wavelengths, finally realized the tunability of optical filter, compared with the phase embodiment of the present invention one, because the equivalent refractive index change value of double aperture slit waveguide is greater than the equivalent refractive index change value of single narrow slit wave-guide, therefore the tunable range of double aperture slit waveguide is greater than the tunable range of single narrow slit wave-guide.
It should be noted that, because the embodiment of the present invention two is micro annular resonant cavity type adjustable light wave-filters of the another kind of double aperture slit structure that provides based on embodiment mono-, the micro annular resonant cavity type adjustable light wave-filter of the single narrow slit structure providing with embodiment mono-is compared, in embodiment bis-except micro-ring waveguide part-structure is different from embodiment mono-, other structure ingredients are identical with embodiment mono-, therefore, in detail part not being described in detail in embodiment bis-can, referring to the introduction in embodiment mono-, repeat no more here.
It should be noted last that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to example, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement technical scheme of the present invention, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of claim scope of the present invention.
Claims (10)
1. the micro annular resonant cavity type adjustable light wave-filter based on liquid crystal narrow slit wave-guide, is characterized in that, comprising:
Substrate;
The first straight wave guide and the second straight wave guide; Described the first straight wave guide and/or, be provided with narrow slit structure in described the second straight wave guide, described the first straight wave guide and described the second straight wave guide are separately positioned on described substrate, and described the first straight wave guide and described the second straight wave guide are parallel to each other; The width of described the first straight wave guide and described the second straight wave guide is 100nm-1000nm; The height of described the first straight wave guide and described the second straight wave guide is 100nm-1000nm;
Micro-ring waveguide; In described micro-ring waveguide, be provided with narrow slit structure, described micro-ring waveguide is arranged on described substrate, and described micro-ring waveguide is at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described micro-ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described micro-ring waveguide and described the second straight wave guide is 10nm-1000nm;
The first electrode and the second electrode; Described the first electrode is arranged on the interior circle ring area of described micro-ring waveguide, and described the second electrode is arranged on the outer toroid region of described micro-ring waveguide; Described the first electrode external voltage source and described the second electrode grounding or, described the second electrode external voltage source and described the first electrode grounding;
Top covering; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described micro-ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
2. micro annular resonant cavity type adjustable light wave-filter according to claim 1, is characterized in that:
Described micro-ring waveguide comprises: interior ring waveguide and outer ring waveguide;
Described interior ring waveguide and described outer ring waveguide are separately positioned on described substrate, and described interior ring waveguide and described outer ring waveguide are at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described outer ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described outer ring waveguide and described the second straight wave guide is 10nm-1000nm; The outer ledge position of described interior ring waveguide and the position, inside edge of described outer ring waveguide form the narrow slit structure of described micro-ring waveguide at a distance of 10nm-1000nm; Described the first electrode is arranged on the interior circle ring area of described interior ring waveguide, and described the second electrode is arranged on the outer toroid region of described outer ring waveguide; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described interior ring waveguide, described outer ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
3. micro annular resonant cavity type adjustable light wave-filter according to claim 1, is characterized in that:
Described micro-ring waveguide comprises interior ring waveguide, middle ring waveguide and outer ring waveguide;
Described interior ring waveguide, described middle ring waveguide and described outer ring waveguide are separately positioned on described substrate, and described middle ring waveguide is at described interior ring waveguide and described outer ring waveguide between the two; Described interior ring waveguide, described middle ring waveguide and described outer ring waveguide lay respectively at described the first straight wave guide and described the second straight wave guide between the two; Spacing distance between described outer ring waveguide and described the first straight wave guide be 10nm-1000nm and/or, the spacing distance between described outer ring waveguide and described the second straight wave guide is 10nm-1000nm; Described interior ring waveguide is arranged in the interior circle ring area of described outer ring waveguide; And the outer ledge position of described interior ring waveguide and the position, inside edge of described outer ring waveguide are at a distance of 10nm-1000nm; Described interior ring waveguide is distinguished the described slit mechanism of corresponding formation with gap and described outer ring waveguide between described middle ring waveguide with the gap between described middle ring waveguide; Described the first electrode is arranged on the interior circle ring area of described interior ring waveguide, and described the second electrode is arranged on the outer toroid region of described outer ring waveguide; Described the first electrode external voltage source and described the second electrode grounding or, described the second electrode external voltage source and described the first electrode grounding; Described top covering covers respectively on described the first straight wave guide, described the second straight wave guide, described interior ring waveguide, described middle ring waveguide, described outer ring waveguide, described the first electrode and described the second electrode, and described top covering is filled in described narrow slit structure.
4. according to the micro annular resonant cavity type adjustable light wave-filter described in claim 2 or 3, it is characterized in that:
Described interior ring waveguide comprises: the first slab waveguide and the first planar waveguide; The height of described the first slab waveguide is 100nm-1000nm; The height of described the first planar waveguide is 10nm-1000nm; End and the two cross section that described the first slab waveguide is arranged on described the first planar waveguide are U-shaped structure; Described the first electrode is arranged on described the first planar waveguide;
And,
Described outer ring waveguide comprises: the second slab waveguide and the second planar waveguide; The height of described the second slab waveguide is 100nm-1000nm; The height of described the second planar waveguide is 10nm-1000nm; End and the two cross section that described the second slab waveguide is arranged on described the second planar waveguide are L-type structure; Described the second electrode is arranged on described the second planar waveguide; The side of the side of described the second slab waveguide and described the first slab waveguide forms the narrow slit structure of described micro-ring waveguide at a distance of 10nm-1000nm.
5. micro annular resonant cavity type adjustable light wave-filter according to claim 3, is characterized in that:
Described middle ring waveguide comprises: the 3rd slab waveguide; The height of described the 3rd slab waveguide and/or width are 100nm-1000nm;
Described outer ring waveguide comprises: the second slab waveguide and the second planar waveguide; The height of described the second slab waveguide is and/or width is 100nm-1000nm; The height of described the second planar waveguide is 10nm-1000nm; End and the two cross section that described the second slab waveguide is arranged on described the second planar waveguide are L-type structure; Described the second electrode is arranged on described the second planar waveguide; The side of the side of described the second slab waveguide and described the first slab waveguide is at a distance of 20nm-1000nm; Described the 3rd slab waveguide is arranged on described the first slab waveguide, described the second slab waveguide between the two, and described the 3rd slab waveguide equates with the vertical range of described the 3rd slab waveguide to described the second slab waveguide to the vertical range of described the first slab waveguide, 2 narrow slit structures of gap formation between the gap between described the 3rd slab waveguide and described the first slab waveguide and described the 3rd slab waveguide and described the second slab waveguide.
6. micro annular resonant cavity type adjustable light wave-filter according to claim 4, is characterized in that:
The height of described the first slab waveguide equates with the height of described the second slab waveguide;
And/or,
The width of described the first slab waveguide equates with the width of described the second slab waveguide;
And/or,
The height of described the first planar waveguide equates with the height of described the second planar waveguide;
And/or,
Described the first electrode equates with the vertical range of described the second electrode to described the second slab waveguide to the vertical range of described the first slab waveguide.
7. micro annular resonant cavity type adjustable light wave-filter according to claim 1, is characterized in that:
The width of described the first straight wave guide equates with the width of described the second straight wave guide;
And/or,
The height of described the first straight wave guide equates with the height of described the second straight wave guide.
8. according to the micro annular resonant cavity type adjustable light wave-filter described in claim 5 or 6 or 7, it is characterized in that:
The material of described the first straight wave guide, described the second straight wave guide and described micro-ring waveguide is that the P type that is mixed with impurity can be led silicon;
The material of described top covering is organic lcd.
9. micro annular resonant cavity type adjustable light wave-filter according to claim 8, is characterized in that:
The material of described substrate is silicon dioxide.
10. micro annular resonant cavity type adjustable light wave-filter according to claim 8, is characterized in that:
Described organic lcd is nematic crystal.
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