CN101838799A - Horizontal high-temperature vacuum coating production line - Google Patents
Horizontal high-temperature vacuum coating production line Download PDFInfo
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- CN101838799A CN101838799A CN 201010195043 CN201010195043A CN101838799A CN 101838799 A CN101838799 A CN 101838799A CN 201010195043 CN201010195043 CN 201010195043 CN 201010195043 A CN201010195043 A CN 201010195043A CN 101838799 A CN101838799 A CN 101838799A
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Abstract
The invention provides a horizontal high-temperature vacuum coating production line, which comprises frames, vacuum buffer tank bodies, vacuum coating tank bodies, substrate frame delivery mechanisms and automatic loading and unloading piece mechanisms. The vacuum coating tank bodies are arranged in the middles of the upper parts of the frames; two groups of vacuum buffer tank bodies are arranged on the frames at the two ends of the vacuum coating tank body respectively; pneumatic rotary plate valves are arranged between the vacuum buffer tank bodies and between the vacuum buffer tank body and the vacuum coating tank body; the two ends of the frames are provided with the automatic loading and unloading piece mechanisms; the lower parts of the frames, the bottoms of the vacuum buffer tank bodies and the bottoms of the vacuum coating tank bodies are provided with the substrate frame delivery mechanisms which are connected with the automatic loading and unloading piece mechanisms; and target guns and heaters are also arranged in the vacuum coating tank bodies. The production line has the advantages of reasonable structure, stable glass delivery, high temperature resistance, suitability for performing high-temperature vacuum coating on the surface of large-size glass, industrial production, and capability of replacing the conventional vertical vacuum coating production line and realizing large-size glass high-temperature vacuum coating.
Description
Technical field
The invention discloses a kind of horizontal high-temperature vacuum coating production line, belong to machinofacture, electronics spraying plating, vacuum technique field.
Background technology
Coated glass is divided into normal temperature vacuum coated glass and high-temperature vacuum coating glass, is applied to the coated glass on the skin, normally the normal temperature vacuum coated glass; The coated glass that solar panel is used (TCO), normally high-temperature vacuum coating glass.In the prior art, vacuum coating production line is divided into horizontal vacuum coating film production line and vertical vacuum coating film production line.Two kinds of vacuum coating production lines are to be distributed with a plurality of vacuum chambers on same horizontal plane,, are handled through each vacuum chamber under the conveying of transport unit by glass plating, realize surface coating; In the prior art, the transport unit of horizontal vacuum coating film production line is the transmission of adopting the delivery track realization glass of a plurality of rubber rollers compositions that be arranged in parallel, and when glass transmits and vacuum chamber bottom surface is in the state that is parallel to each other; The horizontal vacuum coating film production line because. adopt rubber rollers to transmit glass, its bearing capacity is big, transmit steadily, to the glass size size without limits, the output height; But because the resistance to elevated temperatures of rubber rollers is relatively poor, therefore, existing horizontal vacuum coating film production line can only be used to produce the normal temperature vacuum coated glass.The transport unit of vertical vacuum coating production line then is that the structure that stepper-motor drives, magnetic steering is adopted on top is adopted in the bottom, realizes the transmission of glass; When glass transmits and vacuum chamber bottom surface is in orthogonal state; Described magnetic steering device is on the substrate frame top of bearing glass magnet steel to be set, then, making substrate frame top be installed on the two side is provided with in the unitary U-lag of many group magnetic steerings, the effect that utilizes the magnet steel homopolarity to repel, realization has and transmits the advantage steady, high temperature resistant, pollution-free, that institute's coatings homogeneity is high the contactless location of substrate frame, guiding purpose; But, because transport unit top adopts the magnetic steering structure to guarantee the vertical position precision of glass in the vacuum plating casing, just adopt the positional precision between magnetic steering structure assurance glass and the electron beam gun, there is following problem in actual the use: at first, there is certain clearance between the substrate frame of contactless magnetic steering U-lag and bearing glass, though the effect that utilizes the magnet steel homopolarity to repel can be to the contactless location of substrate frame, guiding; Because glass inevitably can shake in when operation, when glass height is big, when own wt is also big, its amplitude of rocking is bigger, and at this moment, the instant bearing accuracy of the contactless location of magnetic steering structure, guiding obviously reduces, thereby, influence institute's coatings homogeneity.Therefore, existing vertical vacuum coating film production line can only be applied to the production of small size TCO coated glass usually, and on the one hand, output is limited, on the other hand, has restricted the development of photovoltaic industry.
Summary of the invention
The objective of the invention is to overcome the deficiency of prior art, provide a kind of rational in infrastructure, production efficiency is high, stable glass delivery, high temperature resistant, coating quality good, energy-conservation, the horizontal high-temperature vacuum coating production line that is applicable to large-size glass surface high-temperature vacuum coating.
The present invention adopts following proposal to realize: a kind of horizontal high-temperature vacuum coating production line, comprise frame, four vacuum buffer casings and at least one vacuum plating casing, the substrate frame transporting mechanism, automatic loading and unloading sheet mechanism, described at least one vacuum plating casing is arranged in the middle of the described upper rack, described four vacuum buffer casings are divided into two groups, be separately positioned on the frame of described vacuum plating tank ends, be provided with pneumatic rotary plate valve between the described vacuum buffer casing and between vacuum buffer casing and the vacuum plating casing, respectively be provided with an automatic loading and unloading sheet mechanism at described frame two ends; In the bottom of described frame and described vacuum buffer casing and vacuum plating bottom half be respectively equipped with described automatic loading and unloading sheet mechanism and refute the substrate frame transporting mechanism that connects; Also be provided with target rifle, well heater in the described vacuum plating casing.
Among the present invention, be connected with on the described vacuum buffer casing and vacuumize lobe pump or unit contruction pump.
Among the present invention, be connected with on the described vacuum plating casing and vacuumize molecular pump, the top is provided with target door or bleeding point door.
Among the present invention, described well heater is arranged on the described substrate frame transporting mechanism upper and lower in the described vacuum plating casing, is provided with the mirror reflective plate of two-layer at least minute surface towards described well heater between described well heater and described vacuum plating casing.
Among the present invention, described substrate frame transporting mechanism comprises driving motor, synchronous major axis, transmission shaft, synchronous band, synchronizing wheel, friction wheel, described synchronous major axis is installed between described vacuum plating casing two side box plates and by described driving motor and drives, and described synchronous major axis two ends respectively are provided with a synchronizing wheel; Described transmission shaft is a plurality of, parallel being distributed on described vacuum plating casing two side box plates, and the axis of described a plurality of transmission shafts is on the same straight line; One end of described each transmission shaft is provided with described synchronizing wheel, drives by described synchronous band between the adjacent in twos transmission shaft, and the other end of described each transmission shaft is provided with described friction wheel; The synchronizing wheel that described synchronous major axis two ends are provided with drives the transmission shaft of being located on this distolateral boxboard of vacuum plating casing by synchronous band respectively; Described friction wheel outer circumference surface is provided with guiding annular groove or the guiding annular steps with described friction wheel coaxial line, and the cross section of described guiding annular groove is a semicircular arc, and the cross section of described annular steps is 1/4 circular arc.
Among the present invention, described automatic loading and unloading sheet mechanism comprises frame, the first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism, the 3rd substrate frame transporting mechanism, second substrate delivery mechanism, end in described frame is provided with described first substrate delivery mechanism, is provided with the described first substrate frame transporting mechanism at the described frame the other end; Be provided with guiding polished rod and screw mandrel in described frame, described guiding polished rod and screw mandrel are perpendicular to described frame bottom surface and be parallel to each other; On described frame, be provided with the motor that drives described screw mandrel rotating; The described second substrate frame transporting mechanism is provided with screw and through hole, described screw spinning on the described screw mandrel, described through hole is sleeved on the described guiding polished rod; Also be provided with through hole on described second substrate delivery mechanism, be set on described screw mandrel and the guiding polished rod, described second substrate delivery mechanism is connected by steam cylinder piston and the described second substrate frame transporting mechanism and is in described second substrate frame transporting mechanism below; Described second substrate delivery mechanism is provided with a plurality of friction drive wheels, and the installation dimension of described friction drive wheel is in the rectangular through-hole orthographicprojection scope of described second substrate frame transporting mechanism center setting; Be respectively arranged with drive-motor on described second substrate delivery mechanism and the described second substrate frame transporting mechanism; Described first substrate frame transporting mechanism top is arranged with the 3rd substrate frame transporting mechanism in parallel, and the described first substrate frame transporting mechanism, the 3rd substrate frame transporting mechanism are at regular intervals along described bracket height direction.
The present invention compared with prior art, has following advantage owing to adopt said structure:
1, adopted automatic loading and unloading sheet mechanism, realization is automatically plugged into the substrate cleaning equipment, compares with traditional production line, has reduced the manual intervention in this stage, can effectively avoid the secondary pollution to substrate.
2, vacuum buffer casing and vacuum plating bottom half are provided with the substrate frame transporting mechanism, realize that horizontal-type high temperature transmits glass, solved the technology barrier that the large-size glass high temperature plated film that solves is wished in this area for a long time, and substrate transmit stationarity.
3, the withdrawal of currency from circulation of refuting the substrate frame transporting mechanism realization substrate frame that connects with automatic loading and unloading sheet mechanism is set in the bottom of frame, can effectively reduces complete machine production line occupation space.
4, the mirror reflective plate of well heater is set in the vacuum plating casing, utilize the counter radiation effect of minute surface, the radiant heat of well heater is blocked and the reflected back substrate, effectively improve well heater heating of substrate efficient, simultaneously, can effectively reduce the heat that is radiated the box side surface; Reach the purpose of effective control spin manifold temperature; And heating heat is evenly distributed, and is energy-saving and cost-reducing, economizes on resources, and improves being heated evenly property of substrate, prolongs the work-ing life of vacuum plating case sealing member.
In sum, the present invention is rational in infrastructure, production efficiency is high, stable glass delivery, high temperature resistant, coating quality good, energy-conservation, be applicable to large-size glass surface high-temperature vacuum coating, can realize suitability for industrialized production, substitute existing vertical vacuum coating film production line, realized the high-temperature vacuum coating of large-size glass.
Description of drawings
Accompanying drawing 1-1, accompanying drawing 1-2 are front view of the present invention.
Accompanying drawing 2-1, accompanying drawing 2-2 are vertical view of the present invention.
Accompanying drawing 3 is well heater reflector mounting structure synoptic diagram among the present invention.
Accompanying drawing 4 is substrate frame transporting mechanism structural representation in the invention.
Among the figure: 1-frame, 2,3,4,5-vacuum buffer casing, 6,7-vacuum plating casing, 8-substrate frame transporting mechanism, 9-automatic loading and unloading sheet mechanism, 10-target door or bleeding point door, 11-target rifle, 12-well heater, 13-mirror reflective plate.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
Referring to accompanying drawing 1,2,3, a kind of horizontal high-temperature vacuum coating production line of the present invention, comprise frame 1, four vacuum buffer casings 2,3,4,5, two vacuum plating casings 6,7, substrate frame transporting mechanism 8, automatic loading and unloading sheet mechanism 9, described two vacuum plating casings 6,7, be arranged in the middle of described frame 1 top, described four vacuum buffer casings 2,3,4,5 are divided into two groups, be separately positioned on described vacuum plating casing 6, on the frame 1 at 7 two ends, described vacuum buffer casing 2,3,4, reach vacuum buffer casing 3 between 5,4 with vacuum plating casing 6, be provided with pneumatic rotary plate valve 15 between 7, respectively be provided with an automatic loading and unloading sheet mechanism 9 at described frame 1 two ends; In the bottom of described frame 1 and described vacuum buffer casing 2,3,4,5 and vacuum plating casing 6,7 bottoms be respectively equipped with described automatic loading and unloading sheet mechanism 9 and refute the substrate frame transporting mechanism 8 that connects; Also be provided with target rifle 11, well heater 12 in the described vacuum plating casing 6,7; Be connected with on the described vacuum buffer casing 2,3,4,5 and vacuumize lobe pump or unit contruction pump 14; Be connected with on the described vacuum plating casing 6,7 and vacuumize molecular pump 16, the top is provided with target door or bleeding point door 10.
Well heater described in the present embodiment 12 is arranged on described substrate frame transporting mechanism 8 upper and lowers in the described vacuum plating casing, is provided with the mirror reflective plate 13 of two-layer at least minute surface towards described well heater between described well heater 12 and described vacuum plating casing.
Referring to accompanying drawing 4, substrate delivery mechanism described in the embodiment of the invention 8 comprise driving motor 16, synchronously major axis 17, transmission shaft 18, be with 19 synchronously, synchronizing wheel 20, friction wheel 21, described synchronous major axis 17 is installed between 6 liang of side box plates of described vacuum plating casing and by described driving motor 16 and drives, and described synchronous major axis 17 two ends respectively are provided with a synchronizing wheel 20-1; Described transmission shaft 18 is a plurality of, parallel being distributed on 6 liang of side box plates of described vacuum plating casing, and the axis of described a plurality of transmission shafts 18 is on the same straight line; One end of described each transmission shaft 18 is provided with described synchronizing wheel 20-3, is with 19 to drive synchronously by described between the adjacent in twos transmission shaft 18, and the other end of described each transmission shaft 18 is provided with described friction wheel 21; The synchronizing wheel 20-2 that described synchronous major axis 17 two ends are provided with is respectively by driving the transmission shaft of being located on vacuum plating casing 6 these distolateral boxboards 18 with 19 synchronously; Described friction wheel 21 outer circumference surfaces are provided with guiding annular groove 22 or the guiding annular steps 23 with described friction wheel 21 coaxial lines, and the cross section of described guiding annular groove 22 is a semicircular arc, and the cross section of described annular steps 23 is 1/4 circular arc.
Referring to accompanying drawing 5, the sheet of automatic loading and unloading described in embodiment of the invention mechanism 9 comprises frame 24, the first substrate frame transporting mechanism 25, the second substrate frame transporting mechanism 26, first substrate delivery mechanism 27, the 3rd substrate frame transporting mechanism 28, second substrate delivery mechanism 29, end in described frame 24 is provided with described first substrate delivery mechanism 27, is provided with the described first substrate frame transporting mechanism 25 at described frame 24 the other ends; Be provided with guiding polished rod 30 and screw mandrel 31 in described frame 24, described guiding polished rod 30 and screw mandrel 31 are perpendicular to described frame 24 bottom surfaces and be parallel to each other; On described frame 24, be provided with the motor 32 that drives described screw mandrel 31 rotatings; The described second substrate frame transporting mechanism 26 is provided with screw and through hole, described screw spinning on the described screw mandrel 31, described through hole is sleeved on the described guiding polished rod 30; Also be provided with through hole on described second substrate delivery mechanism 29, be set on described screw mandrel 31 and the guiding polished rod 30, described second substrate delivery mechanism 29 is connected by steam cylinder piston 33 and the described second substrate frame transporting mechanism 26 and is in the described second substrate frame transporting mechanism 26 belows; Described second substrate delivery mechanism 29 is provided with a plurality of friction drive wheels 34, and the installation dimension of described friction drive wheel 34 is in the rectangular through-hole orthographicprojection scope of the described second substrate frame transporting mechanism 26 centers setting; Be respectively arranged with drive-motor on described second substrate delivery mechanism 29 and the described second substrate frame transporting mechanism 26; The described first substrate frame transporting mechanism 25 tops are arranged with the 3rd substrate frame transporting mechanism 28 in parallel, and the described first substrate frame transporting mechanism 25, the 3rd substrate frame transporting mechanism 28 are at regular intervals along described frame 24 short transverses.
Claims (6)
1. horizontal high-temperature vacuum coating production line, comprise frame, four vacuum buffer casings and at least one vacuum plating casing, the substrate frame transporting mechanism, automatic loading and unloading sheet mechanism, it is characterized in that: described at least one vacuum plating casing is arranged in the middle of the described upper rack, described four vacuum buffer casings are divided into two groups, be separately positioned on the frame of described vacuum plating tank ends, be provided with pneumatic rotary plate valve between the described vacuum buffer casing and between vacuum buffer casing and the vacuum plating casing, respectively be provided with an automatic loading and unloading sheet mechanism at described frame two ends; In the bottom of described frame and described vacuum buffer casing and vacuum plating bottom half be respectively equipped with described automatic loading and unloading sheet mechanism and refute the substrate frame transporting mechanism that connects; Also be provided with target rifle, well heater in the described vacuum plating casing.
2. a kind of horizontal high-temperature vacuum coating production line according to claim 1 is characterized in that: be connected with on the described vacuum buffer casing and vacuumize lobe pump or unit contruction pump.
3. a kind of horizontal high-temperature vacuum coating production line according to claim 2 is characterized in that: be connected with on the described vacuum plating casing and vacuumize molecular pump, the top is provided with target door or bleeding point door.
4. a kind of horizontal high-temperature vacuum coating production line according to claim 3, it is characterized in that: described well heater is arranged on the described substrate frame transporting mechanism upper and lower in the described vacuum plating casing, is provided with the mirror reflective plate of two-layer at least minute surface towards described well heater between described well heater and described vacuum plating casing.
5. a kind of horizontal high-temperature vacuum coating production line according to claim 4, it is characterized in that: described substrate frame transporting mechanism comprises driving motor, synchronous major axis, transmission shaft, synchronous band, synchronizing wheel, friction wheel, described synchronous major axis is installed between described vacuum plating casing two side box plates and by described driving motor and drives, and described synchronous major axis two ends respectively are provided with a synchronizing wheel; Described transmission shaft is a plurality of, parallel being distributed on described vacuum plating casing two side box plates, and the axis of described a plurality of transmission shafts is on the same straight line; One end of described each transmission shaft is provided with described synchronizing wheel, drives by described synchronous band between the adjacent in twos transmission shaft, and the other end of described each transmission shaft is provided with described friction wheel; The synchronizing wheel that described synchronous major axis two ends are provided with drives the transmission shaft of being located on this distolateral boxboard of vacuum plating casing by synchronous band respectively; Described friction wheel outer circumference surface is provided with guiding annular groove or the guiding annular steps with described friction wheel coaxial line, and the cross section of described guiding annular groove is a semicircular arc, and the cross section of described annular steps is 1/4 circular arc.
6. a kind of horizontal high-temperature vacuum coating production line according to claim 5, it is characterized in that: described automatic loading and unloading sheet mechanism comprises frame, the first substrate frame transporting mechanism, the second substrate frame transporting mechanism, first substrate delivery mechanism, the 3rd substrate frame transporting mechanism, second substrate delivery mechanism, end in described frame is provided with described first substrate delivery mechanism, is provided with the described first substrate frame transporting mechanism at the described frame the other end; Be provided with guiding polished rod and screw mandrel in described frame, described guiding polished rod and screw mandrel are perpendicular to described frame bottom surface and be parallel to each other; On described frame, be provided with the motor that drives described screw mandrel rotating; The described second substrate frame transporting mechanism is provided with screw and through hole, described screw spinning on the described screw mandrel, described through hole is sleeved on the described guiding polished rod; Also be provided with through hole on described second substrate delivery mechanism, be set on described screw mandrel and the guiding polished rod, described second substrate delivery mechanism is connected by steam cylinder piston and the described second substrate frame transporting mechanism and is in described second substrate frame transporting mechanism below; Described second substrate delivery mechanism is provided with a plurality of friction drive wheels, and the installation dimension of described friction drive wheel is in the rectangular through-hole orthographicprojection scope of described second substrate frame transporting mechanism center setting; Be respectively arranged with drive-motor on described second substrate delivery mechanism and the described second substrate frame transporting mechanism; Described first substrate frame transporting mechanism top is arranged with the 3rd substrate frame transporting mechanism in parallel, and the described first substrate frame transporting mechanism, the 3rd substrate frame transporting mechanism are at regular intervals along described bracket height direction.
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CN2010101950431A CN101838799B (en) | 2010-06-08 | 2010-06-08 | Horizontal high-temperature vacuum coating production line |
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CN2010101950431A CN101838799B (en) | 2010-06-08 | 2010-06-08 | Horizontal high-temperature vacuum coating production line |
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CN101838799B CN101838799B (en) | 2012-07-04 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101956177A (en) * | 2010-10-21 | 2011-01-26 | 湖南玉丰真空科学技术有限公司 | Rotary bin for vacuum continuous coating production line |
CN101974737A (en) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
CN101974733A (en) * | 2010-10-21 | 2011-02-16 | 湖南玉丰真空科学技术有限公司 | Rotary mechanism for vacuum continuous coating production line |
CN102176169A (en) * | 2010-12-27 | 2011-09-07 | 东莞劲胜精密组件股份有限公司 | Electric eye tracking device of EMI (electron-magnetic interference) film plating machine |
CN106801219A (en) * | 2017-03-10 | 2017-06-06 | 肇庆市前沿真空设备有限公司 | A kind of horizontal vacuum coating film production line |
CN107130225A (en) * | 2017-06-06 | 2017-09-05 | 深圳先进技术研究院 | A kind of vertical plated film pedestal of spinning and filming equipment |
CN110643968A (en) * | 2019-11-07 | 2020-01-03 | 湘潭宏大真空技术股份有限公司 | Substrate transportation transmission device for horizontal vacuum coating production line |
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CN2573490Y (en) * | 2002-09-12 | 2003-09-17 | 鲍冠中 | Apparatus for producing magnetic-controlled sputtered hot-bend film-coated glass |
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Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101974737A (en) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
CN101974737B (en) * | 2010-07-28 | 2014-04-16 | 常州亿晶光电科技有限公司 | Graphite boat anti-seize transmission device |
CN101956177A (en) * | 2010-10-21 | 2011-01-26 | 湖南玉丰真空科学技术有限公司 | Rotary bin for vacuum continuous coating production line |
CN101974733A (en) * | 2010-10-21 | 2011-02-16 | 湖南玉丰真空科学技术有限公司 | Rotary mechanism for vacuum continuous coating production line |
CN101974733B (en) * | 2010-10-21 | 2012-07-04 | 湖南玉丰真空科学技术有限公司 | Rotary mechanism for vacuum continuous coating production line |
CN101956177B (en) * | 2010-10-21 | 2012-08-22 | 湖南玉丰真空科学技术有限公司 | Rotary bin for vacuum continuous coating production line |
CN102176169A (en) * | 2010-12-27 | 2011-09-07 | 东莞劲胜精密组件股份有限公司 | Electric eye tracking device of EMI (electron-magnetic interference) film plating machine |
CN106801219A (en) * | 2017-03-10 | 2017-06-06 | 肇庆市前沿真空设备有限公司 | A kind of horizontal vacuum coating film production line |
CN106801219B (en) * | 2017-03-10 | 2019-08-20 | 肇庆市前沿真空设备有限公司 | A kind of horizontal vacuum coating film production line |
CN107130225A (en) * | 2017-06-06 | 2017-09-05 | 深圳先进技术研究院 | A kind of vertical plated film pedestal of spinning and filming equipment |
CN110643968A (en) * | 2019-11-07 | 2020-01-03 | 湘潭宏大真空技术股份有限公司 | Substrate transportation transmission device for horizontal vacuum coating production line |
CN110643968B (en) * | 2019-11-07 | 2022-05-31 | 湘潭宏大真空技术股份有限公司 | Substrate transportation transmission device for horizontal vacuum coating production line |
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Address after: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Applicant after: Xiangtan Hongda Vacuum Technology Co., Ltd. Address before: 411100 Hunan province Xiangtan City Jiuhua Industrial Park Shengshi Road No. 8 Applicant before: Xiangtan Hongda Vacuum Equipment Co., Ltd. |
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