CN2734773Y - Double-chamber vacuum coating machine - Google Patents
Double-chamber vacuum coating machine Download PDFInfo
- Publication number
- CN2734773Y CN2734773Y CN 200420068899 CN200420068899U CN2734773Y CN 2734773 Y CN2734773 Y CN 2734773Y CN 200420068899 CN200420068899 CN 200420068899 CN 200420068899 U CN200420068899 U CN 200420068899U CN 2734773 Y CN2734773 Y CN 2734773Y
- Authority
- CN
- China
- Prior art keywords
- chamber
- vacuum
- essence
- slightly
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- 238000001704 evaporation Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000007747 plating Methods 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000005086 pumping Methods 0.000 abstract 2
- 239000000686 essence Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 4
- 210000005241 right ventricle Anatomy 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a vacuum coating machine for decorative coating which mainly comprises two vacuum chambers and adopts a two-way exhaust system with a rough pumping system and an extractive pumping system which are separated to alternately exhaust to the two vacuum chambers. The utility model has small floor area, lower cost of equipment and electric force equipment than the cost of equipment and electric force equipment of the existing coating machines, and output increased from the traditional 24-30 shafts per hour to 60 shafts per hour.
Description
Technical field
The utility model relates to a kind of vacuum plating unit that is used to decorate plating, particularly a kind of double-chamber vacuum coating equipment.
Background technology
As everyone knows, utilize vacuum evaporation technique or sputtering technology to reach the purpose of decorating or reflecting or conducting electricity at the plastic workpiece surface metallizing, now maturation is applied to industrial production, and this traditional vacuum plating unit as shown in Figure 1.In order to improve output, the existing practice is to strengthen the diameter of vacuum chamber, and diameter is from 1.2 meters to 1.4 meters, 1.6 meters, and 1.8 meters, in addition bigger.Join pump for this reason and also join bigger and bigger, roughing vacuum pump closes by one and becomes two, and essence is taken out diffusion pump and become K800 by the K600 pump, K1000 or two K600 and usefulness, though output can improve like this, the maximization of equipment must cause facility investment to increase, distribution increases, and takes up an area of to increase.Table 1 is the relevant data table look-up of traditional type.
The relevant data of several traditional coating equipments of table 1
| Type | Diameter (rice) | Vacuum chamber internal volume (cubic meter) | The workpiece number of axle | Workpiece spindle diameter (millimeter) | Space availability ratio (%) |
| ZZ-1200 | 1.2 | 2.26 | 6 | 360 | 45 |
| ZZ-1400 | 1.4 | 3.08 | 6 | 410 | 43 |
| ZZ-1600 | 1.6 | 4 | 6 | 480 | 46 |
| ZZ-1700 | 1.7 | 4.54 | 6 | 510 | 46 |
| ZZ-1800 | 1.8 | 5.1 | 8 | 450 | 42 |
There is following defective in this conventional art: 1. space availability ratio is low, data by table 1 are learnt, the space availability ratio (workpiece spindle cumulative volume/vacuum chamber internal volume) of tradition type is all not enough half, the work rest central shaft is along the circumferential direction uniform in its vacuum chamber, and the vacuum chamber diameter is big more, need row's redundant space many more, therefore the big more vacuum chamber of diameter must be taken out pump by the bigger powder of configuration capacity: 2. the utilization ratio of pump is low, diffusion pump is inoperative when slightly taking out, big volumetrical roughing vacuum pump is only made the prime of diffusion pump when essence is taken out, and this has wasted very much.Very in the chamber amplify, the workpiece loading capacity increases, this is unfavorable to plated film, in order to guarantee coating quality, must strengthen the power of evaporation power supply or the power of magnetic control power supply, the utilization ratio of these power supplys is lower, to the increase of equipment cost clearly.
Summary of the invention:
The purpose of this utility model is to provide a kind of can realize high yield double-chamber vacuum coating equipment cheaply.
The purpose of this utility model is achieved through the following channels: the double-chamber vacuum coating equipment, comprise vacuum chamber and exhaust system, the vacuum chamber [11] that work rest [12] and evaporation electrode or controlled sputtering source [13] are housed has two, and exhaust system adopts slightly, essence is taken out isolating two-way exhaust system [15], [14] are communicated with two vacuum chambers [11] respectively it is replaced exhaust alternately plating or sputter plating, cross bleed and workpiece loading and unloading frame are slightly taken out system [15] and are connect by slide valve pump [18] and connect that valve [16] is slightly taken out on a left side, the right side is slightly taken out valve [19] and formed behind the lobe pump [17] respectively; Essence is taken out system [14] and is connect by sliding vane rotary pump [23] and connect that left essence is taken out valve [20], right essence is taken out valve [22] and formed after the diffusion pump [21] respectively.Work rest [12] in the vacuum chamber [11] is equipped with more than one or one, and the work rest more than [12] is arranged by its work rest central shaft mode of being parallel to each other.The central shaft of the work rest [12] in the vacuum chamber [11] preferably is arranged in parallel two.
The beneficial effects of the utility model are: adopt two vacuum chambers, take out isolating two-way exhaust system by thick, essence two vacuum chambers are replaced exhaust, compare with ZZ-1400 type in the table 1, the pump of its exhaust system, and vacuum chamber in evaporation electrode or the magnetic power of throwing shielding power supply little, its equipment cost and electric power are equipped with and descend, floor space is little, and day output is by traditional 24-30 axle/hour bring up to 60 spools/hour.
Description of drawings
Accompanying drawing has provided an embodiment of the present utility model:
Fig. 1 is the structural representation of traditional vacuum plating unit;
Fig. 2 is the structural representation of the utility model embodiment 1;
Fig. 3 is the vertical view of the utility model embodiment 1:
Fig. 4, Fig. 5 are respectively that the work rest central shaft is arranged synoptic diagram in the vacuum chamber.
Embodiment:
With reference to the accompanying drawings the utility model is described in further detail:
With reference to Fig. 1, be the structural representation of traditional vacuum plating unit; It has a great circle tubular vacuum chamber 1, and general diameter is a 1.2-2 rice, 2 meters of tube lengths; There is one group of evaporation electrode 3 at the vacuum chamber center, six workpiece spindles 2 of uniform distribution around the evaporation electrode 3, and its vacuum evacuating system 4 is by diffusion pump 10, lobe pump 17, sliding vane rotary pump 9 reaches and goes up valve 6, valve 7 essences are taken out valve 5 compositions down, slightly take out with essence and take out as a whole system, finishes slightly taking out with essence of vacuum chamber and takes out.
With reference to Fig. 2, Fig. 3, structural representation and vertical view for the utility model embodiment 1, it adopts two vacuum chambers 11, one group of evaporation electrode 13 is equipped with in each vacuum chamber 11 inside, evaporation electrode 13 also can replace with controlled sputtering source, the parallel two shaft-like work framves 12 that are equipped with in each vacuum chamber 11, its exhaust system takes out system 14 by Gao Zhenjing and rough vacuum is slightly taken out system's 15 combinations, valve 20 is taken out by left essence by the smart system 14 of high vacuum, right essence is taken out valve 22, diffusion pump 21, add sheet pump 23 and form, lowly wherein slightly take out system 15 and slightly take out valve 16 by a left side, valve 19 is slightly taken out on the right side, lobe pump 17, slide valve pump 18 is formed.14 and 15 is systems fully independently, and its working process is slightly to take out valve 16 when a left side to open, and when slightly took out left chamber, the essence of right ventricle was taken out valve and opened, and essence is taken out and plated film.Slightly take out valve when a left side and close, left chamber slightly exhausts when finishing, and left essence is taken out valve 20 and opened, and at this moment left chamber changes essence over to and take out, and ventricle is exitted, and change work rest 12, so this utilization ratio that high vacuum essence is taken out system 14 is very high.Equally, when the right ventricle more finished changing workpiece 12 and needs slightly take out again, left chamber had entered essence and has taken out the stage, and rough vacuum is slightly taken out system 15 and immediately the right ventricle slightly taken out, and is very sufficient so rough vacuum is slightly taken out the utilization ratio of system 15.When exhaust reaches certain vacuum and spends, the moving work rest 12 of motor 27 rotating bands rotates, then vaporizer 13 (or magnetic control source) is started working, and plated film begins, after plated film begins to finish, purging valve 25 is opened, vacuum chamber amplifies gas, and door car 28 is pulled out, and work rest 12 is taken out of thereupon, it newly vacuumizes specially 11 completed loading again, carries out foregoing slightly taking out and smart exhaust process of taking out.Its working process of slightly, slightly taking out system is by automatic sequence control, and with reference to Fig. 4, Fig. 5, but work rest central shaft multiaxis becomes two rows or many rows to arrange, or triangulation is arranged.
Claims (4)
1, a kind of double-chamber vacuum coating equipment that is used to decorate plating, chamber and exhaust system in comprising very, it is characterized in that: the vacuum chamber [11] that work rest [12] and evaporation electrode or controlled sputtering source [13] are housed has two, and exhaust system adopts thick, essence to take out isolating two-way exhaust system [15] [14] to be communicated with two vacuum chambers [11] respectively and it is replaced exhaust to replace evaporation or sputter plating; Cross bleed and workpiece loading and unloading frame.
2, its sky coating equipment of two according to claim 1 chamber, it is characterized in that: the work rest [12] in the vacuum chamber [11] is equipped with more than one or one, and the work rest more than [12] is arranged by its work rest central shaft mode of being parallel to each other.
3, double-chamber vacuum coating equipment according to claim 1 is characterized in that: the central axes of the work rest [12] in the vacuum chamber [11] is arranged two.
4, double-chamber vacuum coating equipment according to claim 1 is characterized in that: slightly take out system [15] and connect by slide valve pump [18] and connect that valve [16] is slightly taken out on a left side, the right side is slightly taken out valve [19] and formed behind the lobe pump [17] respectively; Essence is taken out system [14] and is connect by sliding vane rotary pump [23] and connect left essence after the diffusion pump [21] respectively and take out valve [20], right essence and take out valve [22] and form, and takes out slightly that system [15] is independent fully takes out system [14] with essence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420068899 CN2734773Y (en) | 2004-10-10 | 2004-10-10 | Double-chamber vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420068899 CN2734773Y (en) | 2004-10-10 | 2004-10-10 | Double-chamber vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2734773Y true CN2734773Y (en) | 2005-10-19 |
Family
ID=35264655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420068899 Expired - Lifetime CN2734773Y (en) | 2004-10-10 | 2004-10-10 | Double-chamber vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2734773Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101838799A (en) * | 2010-06-08 | 2010-09-22 | 湘潭宏大真空设备有限公司 | Horizontal high-temperature vacuum coating production line |
| CN102329084A (en) * | 2011-06-23 | 2012-01-25 | 江苏宇天港玻新材料有限公司 | Glass coating equipment and multiple groups of switch rooms therein |
| CN103263357A (en) * | 2013-05-21 | 2013-08-28 | 上海大学 | Device and method for preparing magnetic drug particles |
-
2004
- 2004-10-10 CN CN 200420068899 patent/CN2734773Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101838799A (en) * | 2010-06-08 | 2010-09-22 | 湘潭宏大真空设备有限公司 | Horizontal high-temperature vacuum coating production line |
| CN102329084A (en) * | 2011-06-23 | 2012-01-25 | 江苏宇天港玻新材料有限公司 | Glass coating equipment and multiple groups of switch rooms therein |
| CN103263357A (en) * | 2013-05-21 | 2013-08-28 | 上海大学 | Device and method for preparing magnetic drug particles |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101353782B (en) | Large area anti-reflection conductive film continuous magnetron sputtering film coating production line | |
| CN100392147C (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| CN102245799B (en) | Apparatus for treating and/or coating surface of substrate component | |
| CN2734773Y (en) | Double-chamber vacuum coating machine | |
| CN201447502U (en) | Continuous vacuum coater with multiple chambers | |
| CN1311348A (en) | Vacuum coating machine | |
| CN111286705B (en) | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating equipment | |
| CN209493624U (en) | The more targets of three station of dual chamber splash magnetic-controlled sputtering coating equipment altogether | |
| CN202415682U (en) | Continuous vehicle lamp glass film-coating device | |
| CN114769761A (en) | Double-electrode electrolytic machining device and method for dynamic deformation of flexible electrode | |
| CN104806535A (en) | Complex radial flow pump, combined radial flow pump and air extraction system | |
| CN106232859A (en) | Produce the method and system of coated steel parts | |
| CN211689220U (en) | Coating system with bidirectional loading track | |
| CN110527966B (en) | Horizontal magnetron sputtering equipment for long pipe coating | |
| CN111286706B (en) | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating method | |
| CN209428594U (en) | A kind of magnetron sputtering energy saver | |
| CN210065900U (en) | Intermediate frequency reaction magnetron sputtering coating equipment | |
| CN116497339A (en) | Automatic continuous vacuum coating production line with revolution and rotation of 3D special-shaped workpiece | |
| CN206308411U (en) | The crystal grain roll-in device for thinning of rotating silver target material | |
| CN110629206A (en) | N-type single crystal heterojunction solar cell thin film deposition equipment and deposition method thereof | |
| CN108179397B (en) | Parallel circumferential continuous plasma coating device | |
| CN205024315U (en) | Reciprocating type sputtering equipment of level | |
| CN216337924U (en) | Film coating machine | |
| CN108642455B (en) | Vacuum coating sample table | |
| CN212287955U (en) | Gauze mask gear hobbing cuts off processing subassembly with PVD coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: XIANGTAN HONGDA VACUUM EQUIPMENT CO., LTD. Free format text: FORMER OWNER: HUANG GUOXING Effective date: 20100108 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20100108 Address after: Hunan province Xiangtan City prosperous economic zone Jiuhua Road No. 8, zip code: 411100 Patentee after: Xiangtan Hongda Vacuum Equipment Co., Ltd. Address before: Hongxing Village, Tam Tam Township, Yuhu District, Yuhu District, Hunan, Xiangtan province 411100 Patentee before: Huang Guoxing |
|
| C56 | Change in the name or address of the patentee |
Owner name: XIANGTAN HONGDA VACUUM TECHNOLOGY CO., LTD. Free format text: FORMER NAME: XIANGTAN HONGDA VACUUM EQUIPMENT CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Hunan Shengshi road 411100 Xiangtan Jiuhua Economic Zone No. 8 Patentee after: Xiangtan Hongda Vacuum Technology Co., Ltd. Address before: Hunan Shengshi road 411100 Xiangtan Jiuhua Economic Zone No. 8 Patentee before: Xiangtan Hongda Vacuum Equipment Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20141010 Granted publication date: 20051019 |