CN211689220U - Coating system with bidirectional loading track - Google Patents
Coating system with bidirectional loading track Download PDFInfo
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- CN211689220U CN211689220U CN202020284011.8U CN202020284011U CN211689220U CN 211689220 U CN211689220 U CN 211689220U CN 202020284011 U CN202020284011 U CN 202020284011U CN 211689220 U CN211689220 U CN 211689220U
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Abstract
A coating system with a bidirectional material loading track is suitable for forming coatings on a plurality of workpieces and comprises a reaction cavity, two material loading cavities and two conveying units. The reaction cavity comprises a reaction chamber for coating, at least one target, a first gate and a second gate. The material loading cavities are respectively arranged on the first gate and the second gate, and each material loading cavity comprises a material loading chamber. The conveying unit is used for conveying workpieces to move along a first material loading track and a second material loading track respectively, the first material loading track enters the reaction chamber from one material loading chamber and then returns to one material loading chamber from the reaction chamber, and the second material loading track enters the reaction chamber from the other material loading chamber and then returns to the other material loading chamber from the reaction chamber. Through adopting the material loading cavity to cooperate with the two-way alternate material loading mode of the conveying unit, one or two production lines can be selected and matched according to the actual operation requirement for use, and the applicability is better.
Description
Technical Field
The utility model relates to a coating equipment using physical deposition, in particular to a coating system with a bidirectional loading track.
Background
The film deposition technology is an important technology indispensable in the semiconductor and optical industries, and is used for specific purposes such as diffusion prevention, adhesion layer, wear resistance improvement, transmittance increase of optical lens, infrared ray filtering, etc. by the characteristics of the film.
The existing continuous sputtering machine is used for sputtering a workpiece and forming a multilayer coating on the workpiece, and comprises a plurality of chambers which are sequentially connected, wherein the pressure of the chambers is controlled and gradually reduced from a feeding area to the sputtering chamber so as to achieve the required vacuum degree during sputtering. Through sputtering operation, the film can be rapidly deposited on the workpiece, and the film thickness and the components can be accurately controlled.
Although the continuous sputtering machine has the use characteristics, the continuous sputtering machine can only be used with one production line, and the applicability is poor. In addition, if multiple layers of coatings are formed on the same workpiece, multiple sputtering chambers are required to be additionally arranged to mount targets made of different materials, so that the length of the whole equipment is increased, and meanwhile, the multiple sputtering chambers are required to be respectively vacuumized, the operation time is prolonged, and the problem of reduction of the productivity is caused.
Disclosure of Invention
An object of the utility model is to provide a coating system that has two-way material track of carrying of suitability preferred.
The utility model discloses a coating film system with two-way material orbit that carries is applicable to and forms the coating film on a plurality of work pieces, coating film system with two-way material orbit that carries contains reaction cavity, two and carries material cavity and two conveying unit.
The reaction cavity comprises a reaction chamber with high vacuum degree and used for coating, at least one target material arranged in the reaction chamber, and a first gate and a second gate which are used for sealing the reaction chamber. The material loading cavities are respectively arranged on the first gate and the second gate, and each material loading cavity comprises a material loading chamber with low vacuum degree and a decompression gate for sealing the material loading chamber. The conveying units respectively correspond to the material loading cavities and are used for conveying the workpieces to move along a first material loading track and a second material loading track, the first material loading track enters the reaction chamber from one material loading chamber and returns to one material loading chamber from the reaction chamber, the second material loading track enters the reaction chamber from the other material loading chamber and returns to the other material loading chamber from the reaction chamber, and the conveying units alternately convey the workpieces to achieve bidirectional feeding and discharging.
The utility model discloses a coating film system with two-way year material orbit still contains two preparation districts, the preparation district is connected respectively the decompression gate of year material cavity, first year material orbit by one of them the preparation district removes to adjacent year material room, moves extremely again behind the reacting chamber and reverse return, the second year material orbit is by another the preparation district removes to adjacent year material room, moves extremely again behind the reacting chamber and reverse return.
The utility model discloses a coating film system with two-way material orbit of carrying, carry the material cavity arrange along the first direction in the double-phase contralateral of reaction cavity.
The utility model discloses a coating film system with two-way year material orbit, each preparation district including connect in the respective conveying platform who carries the material room, and two connect respectively in conveying platform's double-phase contralateral load-bearing platform.
The utility model discloses a coating film system with two-way material orbit of carrying, carry the material cavity along the first direction arrange in the double-phase contralateral of reaction cavity, each preparation district the bearing platform sets up in respective conveying platform's double-phase contralateral along the second direction, the first direction is perpendicular to in essence the second direction.
The coating system with bidirectional loading track of the utility model also comprises two conveying groups in each preparation area, wherein the conveying groups are respectively used for conveying the workpieces to respective conveying platforms alternatively conveyed by the bearing platforms.
The utility model discloses a coating film system with two-way material track that carries, the preparation district is atmospheric environment.
The coating system with bidirectional loading track of the utility model comprises a rotatable steering seat in each preparation area.
The utility model discloses a coating system with two-way material orbit of carrying, the reaction chamber still have can for an at least target pivoted roating seat.
The coating system with the bidirectional loading track of the utility model comprises a plurality of targets.
The beneficial effects of the utility model reside in that: adopt carry the material cavity cooperation the two-way material mode of carrying in turn of conveying unit makes the utility model discloses can select one or two production lines of collocation to use, the suitability preferred according to the actual operation demand.
Drawings
Other features and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments with reference to the accompanying drawings, in which:
FIG. 1 is a schematic front view of a first embodiment of a coating system with a bi-directional loading trajectory according to the present invention;
FIG. 2 is a schematic top view of the first embodiment, illustrating a conveying unit for carrying a plurality of workpieces along a first loading path;
FIG. 3 is a view similar to FIG. 2, illustrating another transport unit for carrying a plurality of workpieces along a second loading trajectory;
fig. 4 is a schematic top view of a second embodiment of the present invention, illustrating a loading manner of one of the preparation areas of the second embodiment;
FIG. 5 is a view similar to FIG. 4 illustrating another loading of one of the preparation areas of the second embodiment;
FIG. 6 is a view similar to FIG. 4 illustrating the loading of another preparation area of the second embodiment;
fig. 7 is a schematic top view of a third embodiment of the present invention; and
fig. 8 is a schematic top view of a fourth embodiment of the present invention.
Detailed Description
Before describing the present invention in detail, it should be noted that like components are identified by like reference numerals throughout the following description. For purposes of clarity, the following description of an orientation or direction will refer to the referenced figure as it is oriented, and when referring to the right side, will refer to the right side of the referenced figure.
Referring to fig. 1 to 3, the first embodiment of the coating system with bidirectional loading track of the present invention is suitable for forming a coating on a plurality of workpieces 91, and the following description is given by taking sputtering a multi-layer coating on an optical lens as an example, but not limited thereto, as long as the physical vapor deposition technique is used to form a thin film on the surface of an object, which falls within the application scope of the present invention. In the first embodiment, the hanging operation of mounting the workpiece 91 on the plurality of disc-shaped jigs 9 is performed before the sputtering operation, so that the sputtering operation can sputter the plurality of workpieces 91 at each time, and the productivity can be improved. The coating system with the bidirectional loading track comprises a reaction cavity 1, two loading cavities 2, two preparation areas 3 and two conveying units 4.
The reaction chamber 1 includes a high vacuum reaction chamber 10, a plurality of targets 11 mounted on the reaction chamber 10, a rotating base 12 capable of rotating relative to the targets 11, and a first gate 13 and a second gate 14 for closing the reaction chamber 10. The reaction chamber 10 is used for coating the workpiece 91. Each target 11 is made of different materials, and is selectively used and sputtered in several times according to the operation requirement to form several coating films with different compositions. The rotary base 12 can rotate in both directions or in one direction, so long as the rotary base 12 can rotate continuously and rotate the workpiece 91 during coating, the coating thickness distribution can be uniform. When the first gate 13 or the second gate 14 is opened to transfer the workpiece 91, the rotation of the rotary seat 12 is stopped, so as to facilitate feeding and discharging.
It can be understood that when the first embodiment is used to form a single-layer coating film and only one target 11 is provided, the target 11 can be provided at the center position, and the workpiece 91 does not need to be rotated and the film thickness distribution of the coating film can be made uniform, in which case the rotary base 12 can be omitted from the reaction chamber 1.
The loading cavities 2 are respectively connected to the first gate 13 and the second gate 14, and each loading cavity 2 includes a loading chamber 20 with a low vacuum degree and a decompression gate 21 for closing the loading chamber 20. It should be noted that the loading chamber 20 only needs to be kept in a vacuum state during the coating operation, and the pressure of the loading chamber 20 is raised to an atmospheric pressure state when any of the decompression gates 21 is opened to charge and discharge. In the first embodiment, the material loading cavities 2 are arranged on two opposite sides of the reaction cavity 1 along a first direction X, which is called as a left-right direction of the drawing in the first embodiment, that is, the two material loading cavities 2 are respectively connected to the left and right sides of the reaction cavity 1. Each load lock chamber 20 can be used for surface treatment such as plasma cleaning of the workpiece 91, in addition to serving as a buffer before entering the reaction chamber 10. The connection and arrangement referred to in this embodiment includes direct connection, direct arrangement, indirect connection, and indirect arrangement, that is, one or more vacuum chambers may be further disposed between the loading chamber 20 and the reaction chamber 10, so as to perform more pre-treatments on the workpiece 91 or gradually increase the vacuum degree of the vacuum chamber.
The preparation areas 3 are respectively connected to the pressure relief gates 21 of the loading cavity 2 along the first direction X, and each preparation area 3 is communicated with the outside and is in an atmospheric environment.
The conveying units 4 correspond to the loading cavities 2 and are disposed in the preparation area 3 and the loading cavities 2, in the first embodiment, each conveying unit 4 includes a plurality of conveying belts 41 disposed at intervals, and two adjacent conveying belts 41 can drive the workpiece 91 to reciprocate between the adjacent preparation area 3 and the loading chamber 20 and the reaction chamber 10.
The conveying unit 4 is used for conveying the workpiece 91 to move along a first loading track P1 and a second loading track P2, as shown in fig. 2, the first loading track P1 sequentially enters the reaction chamber 10 from the preparation area 3 on the left side and the loading chamber 20 on the left side, and performs a coating operation in the reaction chamber 10, and after the coating operation is completed, the workpiece reversely passes through the reaction chamber 10, passes through the loading chamber 20 on the left side, and then returns to the preparation area 3 on the left side. As shown in fig. 3, the second loading track P2 sequentially enters the reaction chamber 10 from the right-hand preparation area 3 and the right-hand loading chamber 20, and after the coating operation is completed, the second loading track P2 reversely passes through the reaction chamber 10 via the right-hand loading chamber 20 and then returns to the right-hand preparation area 3, that is, the first loading track P1 and the second loading track P2 of the first embodiment alternately reciprocate on the left and right sides of the reaction chamber 10 along the first direction X, so that the conveying unit 4 can alternately convey the workpieces 91 to be alternately fed from the left and right sides of the reaction chamber 10, thereby achieving the effect of bidirectional feeding and discharging.
It can be understood that the first embodiment can omit the preparation area 3 and feed and discharge the work pieces 91 from the loading chamber 20, or have a bidirectional feeding and discharging function.
Therefore, the preparation area 3 on the left side of the first embodiment is connected to a first production line (not shown), and the preparation area 3 on the right side is connected to a second production line (not shown), when the left side performs the coating operation, the right side operator can firstly perform the hanging operation on the workpiece 91, and after the left side coating operation is completed, the right side coating operation can be immediately performed, and the operator can select to wait for the workpiece 91 in the preparation area 3 on the right side or first enter the right loading chamber 20 to wait according to the actual requirement, thereby reducing the waiting time and improving the utilization rate of the equipment.
The utility model discloses coating system with two-way material orbit that carries adopts carry material cavity 2 cooperation carry material mode in turn in two-way of conveying unit 4, can select one or two production lines of collocation to use according to the actual operation demand, consequently, the suitability preferred.
In addition, in the first embodiment, the targets 11 of different materials are simultaneously disposed in the reaction chamber 10, and the rotating base 12 is used to continuously rotate the workpiece 91 during the coating process, so that multiple layers of coatings with different compositions can be formed in the reaction chamber 10 in several times.
Referring to fig. 4 to 6, a second embodiment of the present invention is similar to the first embodiment, and the difference lies in:
each preparation area 3 comprises a transfer platform 31 connected to a respective loading compartment 20, two loading platforms 32 connected to opposite sides of said transfer platform 31, and two transport groups 33. The loading platforms 32 of each preparation area 3 are disposed on two opposite sides of the respective conveying platform 31 along a second direction Y, and the first direction X is substantially perpendicular to the second direction Y. The conveying groups 33 are respectively used for alternately conveying the workpieces 91 from the carrying platforms 32 to the respective conveying platforms 31, and then after being respectively conveyed to the conveying units 4, the workpieces are alternately loaded along the first loading track P1 and the second loading track P2, and the bidirectional feeding and discharging functions are also provided.
For the workpiece with smaller size, since the hanging amount of each operation is increased to prolong the hanging time, the second embodiment has four carrying platforms 32, and during the coating operation, the other three carrying platforms 32 can be used for hanging in advance, thereby reducing the waiting time and greatly improving the productivity.
It can be understood that each preparation area 3 of the second embodiment can be loaded from one of the loading platforms 32 into the reaction chamber 10 and then from the other loading platform 32, so that the second embodiment can be installed between the two working stations of the same production line, thereby achieving the effect of automatic production.
Referring to fig. 7, a third embodiment of the present invention is similar to the first embodiment, and the difference lies in:
each preparation area 3 comprises a rotatable turning seat 34, and the turning seat 34 can rotate in two directions or in one direction, and the two-way rotation is illustrated in fig. 7. Therefore, two jigs 9 can be installed on two sides of the turning seat 34, and the coating operation can be performed on one of the jigs 9 which has been coated first, during which the coating operation can be performed on the other jig 9 at the same time, and after the previous coating operation is completed, the turning seat 34 is rotated to drive the other jig 9 to rotate to the feeding position together with the workpiece 91.
Referring to fig. 8, a fourth embodiment of the present invention is similar to the first embodiment, and the difference lies in:
one of the material loading cavities 2 and one of the preparation areas 3 are arranged on one side of the reaction cavity 1 along the first direction X, and the other of the material loading cavities 2 and the other of the preparation areas 3 are arranged on the other side of the reaction cavity 1 along the second direction Y, so that the first material loading track P1 reciprocates along the first direction X, and the second material loading track P2 reciprocates along the second direction Y, thereby the fourth embodiment is suitable for being installed on a production line which needs to turn. It should be noted that the first direction X of the fourth embodiment is substantially perpendicular to the second direction Y, but in other variations, the first direction X and the second direction Y may also form an acute angle or an obtuse angle, and the design may vary according to actual requirements.
To sum up, the utility model discloses coating system who has two-way material orbit of carrying adopts carry material cavity 2 cooperation carry material mode in turn in two-way of conveying unit 4, can select one or two production lines of collocation to use according to the actual operation demand, consequently, the suitability preferred. In addition, the embodiments also utilize the circular movement of the workpiece 91 in the reaction chamber 10 to complete the multi-layer film coating operation, compared with the prior art that the workpiece is moved linearly, the embodiments can further reduce the volume of the equipment and increase the productivity, so the purpose of the present invention can be achieved.
The above description is only an example of the present invention, and the scope of the present invention should not be limited thereby, and all the simple equivalent changes and modifications made according to the claims and the description of the present invention are still within the scope of the present invention.
Claims (10)
1. A coating system with a bidirectional loading track is suitable for forming coatings on a plurality of workpieces, and is characterized in that: the coating system with the bidirectional loading track comprises:
the reaction chamber comprises a high-vacuum reaction chamber for coating, at least one target material arranged in the reaction chamber, and a first gate and a second gate for sealing the reaction chamber;
the two loading cavities are respectively arranged on the first gate and the second gate, and each loading cavity comprises a loading chamber with low vacuum degree and a decompression gate for sealing the loading chamber; and
the two conveying units respectively correspond to the material loading cavities and are used for conveying the workpieces to move along a first material loading track and a second material loading track, the first material loading track enters the reaction chamber from one material loading chamber and returns to one material loading chamber from the reaction chamber, the second material loading track enters the reaction chamber from the other material loading chamber and returns to the other material loading chamber from the reaction chamber, and the conveying units alternately convey the workpieces to achieve bidirectional feeding and discharging.
2. The coating system with bidirectional loading tracks as set forth in claim 1, wherein: the device comprises a reaction chamber, a material loading cavity, a pressure reduction gate, a preparation area, a first material loading track, a second material loading track and a control panel, wherein the reaction chamber is arranged in the reaction chamber, the pressure reduction gate is arranged in the preparation area, the preparation area is connected with the material loading cavity, the first material loading track is moved to an adjacent material loading chamber from one preparation area and then is moved to the reaction chamber and then is returned reversely, and the second material loading track is moved to the adjacent material loading chamber from the other preparation area and then is moved to the reaction chamber and then is returned reversely.
3. The coating system with bidirectional loading tracks as set forth in claim 2, wherein: the material loading cavities are arranged on two opposite sides of the reaction cavity along a first direction.
4. The coating system with bidirectional loading tracks as set forth in claim 2, wherein: each preparation area comprises a conveying platform connected with the corresponding material loading chamber and two bearing platforms respectively connected to two opposite sides of the conveying platform.
5. The coating system with bidirectional loading tracks as set forth in claim 4, wherein: the material loading cavities are arranged on two opposite sides of the reaction cavity along a first direction, the bearing platforms of each preparation area are arranged on two opposite sides of the conveying platform along a second direction, and the first direction is substantially perpendicular to the second direction.
6. The coating system with bidirectional loading tracks as set forth in claim 4, wherein: each preparation area further comprises two transport groups for alternately carrying the workpieces from the load-bearing platforms to the respective transport platforms.
7. The coating system with bidirectional loading tracks as set forth in claim 2, wherein: the preparation area is in an atmospheric environment.
8. The coating system with bidirectional loading tracks as set forth in claim 2, wherein: each preparation area comprises a rotatable steering seat.
9. The coating system with bidirectional loading tracks as set forth in claim 1, wherein: the reaction cavity is also provided with a rotating seat which can rotate relative to the at least one target.
10. The coating system with bidirectional loading tracks as set forth in claim 9, wherein: comprises a plurality of the targets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020284011.8U CN211689220U (en) | 2020-03-10 | 2020-03-10 | Coating system with bidirectional loading track |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020284011.8U CN211689220U (en) | 2020-03-10 | 2020-03-10 | Coating system with bidirectional loading track |
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| CN211689220U true CN211689220U (en) | 2020-10-16 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652665A (en) * | 2021-08-18 | 2021-11-16 | 杨智仁 | Vacuum coating system with cleaning device |
| CN115354280A (en) * | 2022-09-19 | 2022-11-18 | 陕西理工大学 | Film coating jig for semiconductor chip |
-
2020
- 2020-03-10 CN CN202020284011.8U patent/CN211689220U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652665A (en) * | 2021-08-18 | 2021-11-16 | 杨智仁 | Vacuum coating system with cleaning device |
| CN115354280A (en) * | 2022-09-19 | 2022-11-18 | 陕西理工大学 | Film coating jig for semiconductor chip |
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