CN102329084A - Glass coating equipment and multiple groups of switch rooms therein - Google Patents
Glass coating equipment and multiple groups of switch rooms therein Download PDFInfo
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- CN102329084A CN102329084A CN201110170652A CN201110170652A CN102329084A CN 102329084 A CN102329084 A CN 102329084A CN 201110170652 A CN201110170652 A CN 201110170652A CN 201110170652 A CN201110170652 A CN 201110170652A CN 102329084 A CN102329084 A CN 102329084A
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Abstract
The invention discloses glass coating equipment which comprises a coating room, a waiting room and multiple groups of switch rooms, wherein the multiple groups of switch rooms comprise a molecular pump exhausting switch room, a refined exhausting switch room and a rough exhausting switch room; and the refined exhausting switch room and the rough exhausting switch room are two independent switch rooms. The equipment has high production efficiency and yield and good vacuum degree, and the quality of the produced product is high.
Description
Technical field
The present invention relates to a kind of glass coating equipment and vacuum extractor.
Background technology
Vacuum-pumping system all is employed in the mode of bleeding in the vacuum pump two ends in the present glass coating equipment, promptly in the vacuum pump right ends suction port is set, and the aspirating chamber that is used to vacuumize is also referred to as switch room.In the prior art, switch room generally is two, and one is that molecular pump is taken out switch room; Another be slightly take out, essence takes out switch room, slightly take out, essence takes out in same chamber and accomplish.Specifically, be that essence is taken out, slightly taken out switch room and begins slightly to take out when glass substrate gets into first switch room exactly, treat slightly to exhaust complete, carry out essence again and take out, have two time courses.After essence is taken out, get into molecular pump again and take out.Adopt the shortcoming of this mode following: 1, production efficiency is low, and output is little: vacuumize at every turn and must slightly take out earlier, carry out essence again and take out, so just caused the pumpdown time longer, thereby limited the raising of output.2, vacuum tightness is low, and there is flaw in quality product: need under the environment of high vacuum, carry out owing to produce coated glass, but can not make vacuum tightness reach ideal effect in the prior art.So quality product does not reach ideal effect yet, also can cause some row product quality problems sometimes, for example rete is inhomogeneous, and glossiness, slickness and planeness are not enough, and aberration is bigger, and product performance are unstable or the like.
Summary of the invention
The present invention is intended to solve the big defective of one in the glass coating equipment in the prior art, and the time of promptly bleeding is long, production efficiency is low, output is little.
The invention discloses a kind of glass coating equipment; It comprises coating chamber, waiting room and organizes switch room more; Wherein many group switch rooms comprise that molecular pump is taken out switch room, essence is taken out switch room and slightly taken out switch room, and essence is taken out switch room and slightly taken out switch room is two independently switch rooms.
The invention also discloses a kind of many groups switch room that is used for glass coating equipment, it comprises that molecular pump is taken out switch room, essence is taken out switch room and slightly taken out switch room, and essence is taken out switch room and slightly taken out switch room is two independently switch rooms.
Glass coating efficiency of equipment of the present invention and output are high, and vacuum tightness is good, and the quality product of being produced is high.
Description of drawings
Fig. 1 is the structural representation that is used for many groups switch room of glass coating equipment of the present invention.
Embodiment
In order to make those skilled in the art more be expressly understood the technical scheme of glass coating equipment of the present invention and the switch room of many groups wherein, its embodiment is described below in conjunction with accompanying drawing.
As shown in Figure 1, glass coating equipment comprises coating chamber 1, waiting room 2 and organizes switch room 3 more.
Many group switch rooms comprise that molecular pump is taken out switch room 4, essence is taken out switch room 5 and slightly taken out switch room 6, and essence is taken out switch room 5 and slightly taken out switch room 6 is two independently switch rooms.
Arrow has indicated the order of glass substrate each treatment chamber in glass coating equipment among Fig. 1.Behind the glass coating device start, first glass substrate is introduced into slightly to be taken out switch room 6 and slightly takes out, and after slightly taking out, gets into essence and takes out switch room 5 and carry out essence and take out, and at this moment, second glass substrate got into slightly to be taken out switch room 6 and slightly take out.
First glass substrate gets into molecular pump and takes out switch room 4 and carry out molecular pump and take out after essence is taken out, and at this moment, second glass substrate gets into essence and take out switch room 5 and carry out essence and take out, and the 3rd glass substrate gets into slightly to be taken out switch room 6 and slightly take out.
Glass substrate gets into waiting room after taking out through molecular pump, gets into coating chamber then glass substrate is carried out plated film, for example carries out plated film through methods such as magnetron sputterings.
Carry out so successively, slightly take out operation and essence and take out operation and can carry out simultaneously, thereby saved the time that vacuumizes greatly, improved production efficiency and output.
In addition, the glass coating equipment claimed is carried out under the environment of high vacuum, and many group switch rooms of the present invention can make vacuum tightness reach ideal effect.So the coated glass quality product of production is guaranteed, even film layer for example, glossiness, slickness and good planeness, no color differnece, product performance are stable or the like.
Above-mentioned embodiment only is used to explain the preferred embodiment of technical scheme of the present invention; Those skilled in the art are in the scope of spirit of the present invention; Can carry out various conspicuous combinations or modification to it, so protection scope of the present invention is as the criterion with claims.
Claims (2)
1. glass coating equipment; It comprises coating chamber, waiting room and organizes switch room more; It is characterized in that said many group switch rooms comprise that molecular pump is taken out switch room, essence is taken out switch room and slightly taken out switch room, said essence takes out switch room and the said switch room of slightly taking out is two independently switch rooms.
2. the many groups switch room that is used for glass coating equipment is characterized in that, said many group switch rooms comprise that molecular pump is taken out switch room, essence is taken out switch room and slightly taken out switch room, and said essence takes out switch room and the said switch room of slightly taking out is two independently switch rooms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110170652A CN102329084A (en) | 2011-06-23 | 2011-06-23 | Glass coating equipment and multiple groups of switch rooms therein |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110170652A CN102329084A (en) | 2011-06-23 | 2011-06-23 | Glass coating equipment and multiple groups of switch rooms therein |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102329084A true CN102329084A (en) | 2012-01-25 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110170652A Pending CN102329084A (en) | 2011-06-23 | 2011-06-23 | Glass coating equipment and multiple groups of switch rooms therein |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102329084A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2734773Y (en) * | 2004-10-10 | 2005-10-19 | 黄国兴 | Double-chamber vacuum coating machine |
| CN201056539Y (en) * | 2007-06-22 | 2008-05-07 | 王百新 | Improved plated film producing device for macrotype sheet glass |
| US20090159429A1 (en) * | 2007-12-13 | 2009-06-25 | Naoki Tsukamoto | Reactive sputtering apparatus and reactive sputtering method |
| CN101560645A (en) * | 2009-05-08 | 2009-10-21 | 深圳大学 | Large vacuum coating equipment |
| CN201343569Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Continuous plane magnetron sputtering filming device |
| CN201447502U (en) * | 2009-05-11 | 2010-05-05 | 钟肇兰 | Continuous vacuum coater with multiple chambers |
-
2011
- 2011-06-23 CN CN201110170652A patent/CN102329084A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2734773Y (en) * | 2004-10-10 | 2005-10-19 | 黄国兴 | Double-chamber vacuum coating machine |
| CN201056539Y (en) * | 2007-06-22 | 2008-05-07 | 王百新 | Improved plated film producing device for macrotype sheet glass |
| US20090159429A1 (en) * | 2007-12-13 | 2009-06-25 | Naoki Tsukamoto | Reactive sputtering apparatus and reactive sputtering method |
| CN201343569Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Continuous plane magnetron sputtering filming device |
| CN101560645A (en) * | 2009-05-08 | 2009-10-21 | 深圳大学 | Large vacuum coating equipment |
| CN201447502U (en) * | 2009-05-11 | 2010-05-05 | 钟肇兰 | Continuous vacuum coater with multiple chambers |
Non-Patent Citations (2)
| Title |
|---|
| 刘志海等: "《加工玻璃生产操作问答》", 30 September 2009, 化学工业出版社 * |
| 汉斯•琼彻•格雷瑟: "《大面积玻璃镀膜》", 30 April 2006, 上海交通大学出版社 * |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120125 |