CN101008074A - Heating apparatus and vacuum film coating equipment using the heating apparatus - Google Patents
Heating apparatus and vacuum film coating equipment using the heating apparatus Download PDFInfo
- Publication number
- CN101008074A CN101008074A CNA2006100334794A CN200610033479A CN101008074A CN 101008074 A CN101008074 A CN 101008074A CN A2006100334794 A CNA2006100334794 A CN A2006100334794A CN 200610033479 A CN200610033479 A CN 200610033479A CN 101008074 A CN101008074 A CN 101008074A
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- heating unit
- reflector
- fluorescent tube
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- reflection face
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Abstract
The invention relates to a heating device and a vacuum film coating equipment using said heating device. Said heating device comprises at least one tube, one rotary reflector and one external controller controlling the rotating direction of said reflector, said tube is fixed one side of workpiece, said relfector is located on one side of tube that away from workpiece, and it is provided with focusing reflection plane, and it is orientated to said tube. The vacuum film coating equipment is characterized by high homogeneity and fast speed for heating workpiece.
Description
[technical field]
The invention relates to a kind of heating unit and adopt the vacuum coating film equipment of this heating unit.
[background technology]
Vacuum coating technology is meant that the method for utilizing physics or chemistry in vacuum environment has the surface treatment method of special purpose rete at workpiece surface deposition one deck.For guaranteeing the film performance of workpiece surface, generally need in the vacuum plating process workpiece is heated to certain temperature.
At present, vacuum plating workpiece heating means commonly used are thermal resistance heating methods, and this method directly contacts the heating portion of thermistor with workpiece surface, and will be fixed in vacuum chamber after its electric wire connection, come heated parts with its energising and by heat passage then, belong to the Contact Heating method, the heating efficiency height.But, generally need rotational workpieces improve the homogeneity of plated film in the vacuum plating process, and when using this method heated parts, workpiece and thermistor are fixed and can't be moved, thereby the plated film homogeneity is not good.
For addressing the above problem, prior art has disclosed a kind of contactless heating means and has used the heating unit of these heating means.See also Fig. 1, the contactless heating unit 10 of prior art comprises a plurality of infrared lamps 11, and it is positioned at vacuum chamber 12, and over against by support 13 fixed workpiece 14 to be plated.This contactless heating unit 10 adopts infrared lamp 11 as thermal source, comes heated parts 14 by carrying out thermal radiation to workpiece 14 surfaces.When using these heating unit 10 heated partses 14, workpiece 14 can be driven in vacuum chamber 12 by support 13 and move, thereby the plated film homogeneity is better.Yet, this contactless heating unit 10, its fluorescent tube 11 radiating infrared rays are some directive workpiece 14 only, and other a part of infrared rays are wasted, and capacity usage ratio is not high, and heating efficiency is not high yet.
[summary of the invention]
In view of above-mentioned condition, the vacuum coating film equipment that is necessary to provide the heating unit of a kind of heating efficiency height and removable heated parts and adopts this heating unit.
A kind of heating unit, be used for heated parts, this heating unit comprises at least one fluorescent tube, it is positioned at a side of workpiece, this heating unit also comprises the external controller of a rotatable reflector and this reflector sense of rotation of control, this reflector is positioned at the side of fluorescent tube away from workpiece, and it has a focus reflection face, and this focus reflection face is towards this fluorescent tube.
A kind of vacuum coating film equipment, it comprises that a vacuum chamber, that is provided with an inlet system is positioned at the heating unit that rotatable support frame and that vacuum chamber is used to support workpiece to be plated is used to heat workpiece to be plated, this heating unit comprises at least one fluorescent tube, it is positioned at a side of workpiece, this heating unit also comprises the external controller of a rotatable reflector and this reflector sense of rotation of control, this reflector is positioned at the side of fluorescent tube away from workpiece, it has a focus reflection face, and this focus reflection face is towards this fluorescent tube.
Compare with prior art, described heating unit utilization has the reflector of focus reflection face, with fluorescent tube radiating part not the light reflect focalization of directive workpiece in workpiece, the capacity usage ratio height, heating efficiency is also high; And this heating unit reflector is designed to rotatable, thereby can adjust plane of reflection according to the workpiece movement direction in the heat-processed, and the light radiation that makes reflect focalization is in workpiece surface, thereby workpiece all has higher heating efficiency when being positioned at different positions.
[description of drawings]
Fig. 1 is the contactless heating unit diagrammatic cross-section of prior art.
Fig. 2 is the diagrammatic cross-section of heating unit preferred embodiment one of the present invention.
Fig. 3 is the use synoptic diagram of heating unit shown in Figure 2.
Fig. 4 is the schematic perspective view of focus reflection face shown in Figure 2.
Fig. 5 is the diagrammatic cross-section of heating unit preferred embodiment two of the present invention.
Fig. 6 is the schematic perspective view of focus reflection face shown in Figure 5.
Fig. 7 is the diagrammatic cross-section of vacuum coating film equipment preferred embodiment of the present invention.
[embodiment]
Below in conjunction with accompanying drawing and embodiment heating unit of the present invention is described in further detail.
See also Fig. 2, the heating unit 20 of preferred embodiment one of the present invention is used for the workpiece to be plated 22 in the vacuum plating process hot donut 21, and this workpiece 22 to be plated is supported by support 23 and can be driven in vacuum chamber 21 by this support 23 and moves.
This heating unit 20 comprises that a plurality of parallel fluorescent tubes 24, can be around the reflector 25 of these a plurality of parallel fluorescent tube 24 rotations and the external controller 26 of these reflector 25 sense of rotation of control.
These a plurality of parallel fluorescent tubes 24 are infrared lamp, and the inwall of vacuum chamber 21 is fixed in by a plurality of fixed links (figure do not show) in its two ends, and these a plurality of parallel fluorescent tubes 24 are over against workpiece 22.
Please consult Fig. 2 and Fig. 4 simultaneously, this reflector 25 is fixed in a connecting rod 254 of vacuum chamber 21 inwalls and a universal joint 253 rotatable being fixed in the vacuum chamber 21 that an end is connected in these connecting rod 254 the other ends by an end.This reflector 25 is connected in the other end of this universal joint 253, and is positioned at the side of fluorescent tube 24 away from workpiece 22.This reflector 25 has a focus reflection face 251 towards fluorescent tube 24, and this focus reflection face 251 is an arc-shaped curved surface, and it has a focal line (figure do not show), and this focal line is parallel with fluorescent tube 24.The infrared rays that this focus reflection face 251 has fluorescent tube 24 directive reflectors 25 is gathered in the focal line effect of (figure does not show), and for improving reflectivity, can be in the reflectance coating (figure does not show) of these focus reflection face 251 coating one deck tool high reflectances.The material of this reflector 25 is aluminium or stainless steel.
This external controller 26 is positioned at the outside of vacuum chamber 21, and it links to each other with reflector 25 by connecting rod 254 and universal joint 253.This external controller 26 has the effect of control reflector 25 sense of rotation.
During 20 work of this heating unit, fluorescent tube 24 is to all directions infrared radiation, and wherein the part infrared rays penetrates to the direction opposite with reflector 25, another part directive reflector 25, and by penetrating behind focus reflection face 251 reflect focalizations.
Please consult Fig. 2 and Fig. 3 simultaneously, when using these heating unit 20 heated partses 22, elder generation is according to the starting position A of workpiece 22
1Adjust the direction of the focus reflection face 251 of reflector 25, make workpiece 22 need heating place to be positioned on the focal line (figure does not show) of focus reflection face 251, and then according to workpiece 22 to second position A
2The direction that moves to adjust by external controller 26 sense of rotation of reflector 25, makes workpiece 22 from starting position A
1Move to second position A
2Process in, it need heating place be positioned on the focal line (figure does not show) of focus reflection face 251 always.In this process, workpiece 22 is heated simultaneously by direct projection infrared rays and reflected infrared two portions of fluorescent tube 24, so heat energy utilization rate height, and heating rate is fast.
Please consult Fig. 5 and Fig. 6 simultaneously, it is the diagrammatic cross-section of the heating unit 30 of preferred embodiment two of the present invention.This heating unit 30 is similar to heating unit 20, and its difference is in the focus reflection face 351 of: heating unit 30 and is recessed sphere to fluorescent tube 34, and this focus reflection face 351 has a focus 352; And these a plurality of fluorescent tubes 34 are fixed on the focus reflection face 351 of reflector 35, so this reflector 35 can not be subjected to the multi-direction rotation of restriction of fluorescent tube 34.In the present embodiment, this reflector 35 can be in horizontal plane 360 degree rotations, vertical plane 176 degree rotations.
When using the workpiece 32 in these heating unit 30 hot donuts 31,, its focus 352 needs heating place as long as being remained in workpiece 32.
See also Fig. 7, it is for the vacuum coating film equipment that is applied to chemical vapour deposition 50 of preferred embodiment of the present invention.This vacuum coating film equipment 50 comprises that a vacuum chamber 51, is positioned at the heating unit 54 that rotatable support frame 53 and that vacuum chamber 51 is used to support workpiece 52 to be plated is used to heat workpiece 52 to be plated.This vacuum chamber 51 is provided with an inlet system 511, and it is an inlet pipe of being located at vacuum chamber 51 locular walls, is used to feed reactant gases.And the locular wall of this vacuum chamber 51 is provided with an aspirating hole 512, one vacuum pumps 513 and is connected with the inside of vacuum chamber 51 by this aspirating hole 512.This heating unit 54 is positioned at a side of workpiece 52, and it is identical with aforementioned heating unit 20 structures, and use principle is also identical.Certainly, be fixed in the heating unit 30 that heating unit 54 in the vacuum coating film equipment 50 also can adopt preferred embodiment two.
When using this vacuum coating film equipment 50, by vacuum pump 513 vacuum chamber 51 is vacuumized earlier, and workpiece 52 to be plated is heated to certain temperature by heating unit 54, feed reactant gases by inlet system 511 then, reactions such as decomposition or chemical combination take place in the reactant gases that feeds, and its partial reaction product forms plated film at workpiece 52 surface depositions.
This vacuum coating film equipment 50, its workpiece 52 to be plated can be in moving in vacuum chamber 51 under the drive of support 53, the plated film good uniformity, and workpiece to be plated 52 all has higher heating rate when being positioned at the different positions of vacuum chamber 51.
Be understandable that the fluorescent tube of heating unit of the present invention also can be the general lighting fluorescent tube; When the focus reflection face of reflector was arc-shaped curved surface, fluorescent tube also can be fixed in this focus reflection face; Heating unit of the present invention not only is used for the vacuum plating process, also can be used for the workpiece heat-processed of other non-vacuum environments, as the drying course behind the workpiece baking vanish; In addition, vacuum coating film equipment of the present invention also can be provided with other elements such as vapor deposition source or high-frequency voltage in vacuum chamber, thereby is used for coating process such as vacuum evaporation or ion plating.
Claims (12)
1. heating unit, be used for heated parts, this heating unit comprises at least one fluorescent tube, it is positioned at a side of workpiece, it is characterized in that: this heating unit also comprises the external controller of a rotatable reflector and this reflector sense of rotation of control, this reflector is positioned at the side of fluorescent tube away from workpiece, and it has a focus reflection face, and this focus reflection face is towards this fluorescent tube.
2. heating unit as claimed in claim 1 is characterized in that: described fluorescent tube is an infrared lamp.
3. heating unit as claimed in claim 1 is characterized in that: described reflector is connected in this connecting rod by a connecting rod and universal joint links to each other with external controller.
4. heating unit as claimed in claim 1 is characterized in that: described focus reflection face is formed with the reflectance coating of high reflectance.
5. heating unit as claimed in claim 1 is characterized in that: described focus reflection face is an arc-shaped curved surface, and it has a focal line, and this focal line is parallel with fluorescent tube.
6. heating unit as claimed in claim 1 is characterized in that: described focus reflection face is recessed sphere to fluorescent tube, and this focus reflection mask has a focus.
7. heating unit as claimed in claim 1 is characterized in that: described fluorescent tube is fixed in the focus reflection face of reflector.
8. heating unit as claimed in claim 1 is characterized in that: the material of described reflector is aluminium or stainless steel.
9. vacuum coating film equipment, it comprises that a vacuum chamber, that is provided with an inlet system is positioned at the heating unit that rotatable support frame and that vacuum chamber is used to support workpiece to be plated is used to heat workpiece to be plated, this heating unit comprises at least one fluorescent tube, it is positioned at a side of workpiece, it is characterized in that: this heating unit also comprises the external controller of a rotatable reflector and this reflector sense of rotation of control, this reflector is positioned at the side of fluorescent tube away from workpiece, it has a focus reflection face, and this focus reflection face is towards this fluorescent tube.
10. vacuum coating film equipment as claimed in claim 9 is characterized in that: described vacuum coater also comprises an aspirating hole and a vacuum pump of being located at the vacuum chamber locular wall, and this vacuum pump links to each other with vacuum chamber by aspirating hole.
11. vacuum coating film equipment as claimed in claim 9 is characterized in that: described fluorescent tube is an infrared lamp.
12. vacuum coating film equipment as claimed in claim 9 is characterized in that: described reflector is connected in this connecting rod by a connecting rod and universal joint links to each other with external controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100334794A CN101008074A (en) | 2006-01-24 | 2006-01-24 | Heating apparatus and vacuum film coating equipment using the heating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100334794A CN101008074A (en) | 2006-01-24 | 2006-01-24 | Heating apparatus and vacuum film coating equipment using the heating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101008074A true CN101008074A (en) | 2007-08-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100334794A Pending CN101008074A (en) | 2006-01-24 | 2006-01-24 | Heating apparatus and vacuum film coating equipment using the heating apparatus |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215549A (en) * | 2012-01-23 | 2013-07-24 | 台湾积体电路制造股份有限公司 | Shielding design for metal gap filling |
| CN103668073A (en) * | 2012-08-31 | 2014-03-26 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Degassing cavity and physical vapor deposition equipment |
| CN103743254A (en) * | 2013-12-31 | 2014-04-23 | 深圳市华星光电技术有限公司 | Substrate heating device and method |
| CN103993270A (en) * | 2014-05-22 | 2014-08-20 | 无锡启晖光电科技有限公司 | Heating device of vacuum coating |
| EP3301707A1 (en) * | 2016-09-30 | 2018-04-04 | Shibaura Mechatronics Corporation | Substrate processing apparatus |
| WO2018087886A1 (en) * | 2016-11-11 | 2018-05-17 | 株式会社イデア | Heating treatment device and heating treatment method |
| CN108189996A (en) * | 2018-01-08 | 2018-06-22 | 程春丽 | A kind of multifunctional heating brucker survival capsule for fishing boat |
| CN109746142A (en) * | 2017-11-06 | 2019-05-14 | 张家港康得新光电材料有限公司 | Coating apparatus |
| CN110918418A (en) * | 2019-11-29 | 2020-03-27 | 西安航天动力测控技术研究所 | Curing device for high-temperature strain pasting of large test piece |
| CN111315917A (en) * | 2017-11-15 | 2020-06-19 | 应用材料公司 | Apparatus for thermally processing substrate, apparatus for transporting flexible substrate, and method for thermally processing substrate |
| CN112179661A (en) * | 2020-09-18 | 2021-01-05 | 中国航发四川燃气涡轮研究院 | Heating device for wheel disc test |
| CN112427854A (en) * | 2020-10-29 | 2021-03-02 | 贵阳飞腾时代科技有限公司 | Numerical control welding manipulator |
-
2006
- 2006-01-24 CN CNA2006100334794A patent/CN101008074A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215549A (en) * | 2012-01-23 | 2013-07-24 | 台湾积体电路制造股份有限公司 | Shielding design for metal gap filling |
| US9865478B2 (en) | 2012-01-23 | 2018-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Shielding design for metal gap fill |
| CN103668073A (en) * | 2012-08-31 | 2014-03-26 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Degassing cavity and physical vapor deposition equipment |
| CN103668073B (en) * | 2012-08-31 | 2016-08-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Remove gas chamber and Pvd equipment |
| CN103743254A (en) * | 2013-12-31 | 2014-04-23 | 深圳市华星光电技术有限公司 | Substrate heating device and method |
| WO2015100790A1 (en) * | 2013-12-31 | 2015-07-09 | 深圳市华星光电技术有限公司 | Substrate heating apparatus and method |
| CN103993270A (en) * | 2014-05-22 | 2014-08-20 | 无锡启晖光电科技有限公司 | Heating device of vacuum coating |
| EP3301707A1 (en) * | 2016-09-30 | 2018-04-04 | Shibaura Mechatronics Corporation | Substrate processing apparatus |
| WO2018087886A1 (en) * | 2016-11-11 | 2018-05-17 | 株式会社イデア | Heating treatment device and heating treatment method |
| CN109746142A (en) * | 2017-11-06 | 2019-05-14 | 张家港康得新光电材料有限公司 | Coating apparatus |
| CN109746142B (en) * | 2017-11-06 | 2021-04-02 | 张家港康得新光电材料有限公司 | Film coating device |
| CN111315917A (en) * | 2017-11-15 | 2020-06-19 | 应用材料公司 | Apparatus for thermally processing substrate, apparatus for transporting flexible substrate, and method for thermally processing substrate |
| CN108189996A (en) * | 2018-01-08 | 2018-06-22 | 程春丽 | A kind of multifunctional heating brucker survival capsule for fishing boat |
| CN110918418A (en) * | 2019-11-29 | 2020-03-27 | 西安航天动力测控技术研究所 | Curing device for high-temperature strain pasting of large test piece |
| CN112179661A (en) * | 2020-09-18 | 2021-01-05 | 中国航发四川燃气涡轮研究院 | Heating device for wheel disc test |
| CN112179661B (en) * | 2020-09-18 | 2022-04-22 | 中国航发四川燃气涡轮研究院 | Heating device for wheel disc test |
| CN112427854A (en) * | 2020-10-29 | 2021-03-02 | 贵阳飞腾时代科技有限公司 | Numerical control welding manipulator |
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Open date: 20070801 |