CN101829848B - Laser recticle dedusting plant and dedusting method - Google Patents
Laser recticle dedusting plant and dedusting method Download PDFInfo
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- CN101829848B CN101829848B CN2010101075242A CN201010107524A CN101829848B CN 101829848 B CN101829848 B CN 101829848B CN 2010101075242 A CN2010101075242 A CN 2010101075242A CN 201010107524 A CN201010107524 A CN 201010107524A CN 101829848 B CN101829848 B CN 101829848B
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- laser
- dust
- recticle
- dedusting
- filter element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
- B08B15/023—Fume cabinets or cupboards, e.g. for laboratories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2215/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B2215/003—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/007—Marks, e.g. trade marks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used
Abstract
The invention discloses a laser recticle dedusting plant. The laser recticle dedusting plant comprises a processing unit, a dust exhaust apparatus, a first filter unit, a high pressure exhaust fan and a plurality of electrostatic cleaning bars, wherein the processing unit comprises an inner cavity and an operating platform arranged in the inner cavity; the dust exhaust apparatus comprises a dust suction port and a dust-discharging port, the dust suction port is positioned under the operating platform, the dust-discharging port of the dust exhaust apparatus is communicated with the upper end of the first filter unit, the lower end of the first filter unit is communicated with the suction opening of the high pressure exhaust fan, a first filter net core is arranged between the upper end and the lower end of the first filter unit, the air outlet of the high pressure exhaust fan is communicated with the inner cavity, and the electrostatic cleaning bars are evenly arranged on the laser generator. The laser recticle dedusting plant has high dedusting efficiency, low noise and little energy consumption. The invention also discloses a laser recticle dedusting method.
Description
Technical field
The present invention relates to a kind of dust arrester, relate in particular to a kind of laser recticle dedusting plant and method for removing the dust that produces when laser generator carries out groove to the non-crystal silicon solar energy glass substrate.
Background technology
In the solar panels preparation process, especially each time evaporation (or sputter in the non-crystal silicon solar cell plate preparation process, or overlay film) rete all needs with laser generator it to be carried out laser scoring, and in the process of laser scoring, can produce a large amount of static electrifications or uncharged dust and adsorb or be deposited on groove groove and the plate, behind the groove as do not clear up the dust that produces in the groove process, at evaporation (or sputter next time, or overlay film) above-mentioned these dust will be capped in the process, and the circuit of layout is short-circuited on the plate thereby cause; The dust that is deposited on simultaneously glass surface also will affect film thickness and the uniformity in the evaporate process next time, and then reduce the photoelectric conversion rate of entire plate.
Be applied at present the mode that the dust that produces in the laser scoring is collected mainly contained and utilize high-power air exhauster enclosed environment drainage method and all standing formula air collecting box dust collection method, the first is about to the laser scoring workbench and seals with outer cover, utilization is installed in the high-power air exhauster of groove amorphous silicon solar energy plate both sides or its top the air-flow of enclosure space is drawn, and makes dust be extracted out enclosure space with air-flow by air exhauster; The second namely is that an infundibulate or trapezoidal air collecting box are installed above the groove amorphous silicon solar energy plate, an air exhauster is set again is communicated with air collecting box, and the casing of above-mentioned air collecting box covers amorphous silicon solar energy plate fully, utilizes air exhauster with in the dust inspiration air collecting box;
Although utilize the high-power air exhauster enclosed environment of above-mentioned the first drainage method to siphon away the dust of static electrification not, Jie can't absorb fully for the dust side that is adsorbed in the static electrification in film surface and the wire casing, efficiency of dust collection is low, on the one hand, be difficult to form large enclosure space and then produce enough air-flows of drawing; On the other hand, the high-power air exhauster that must introduce could be realized the function of dedusting, and high-power air exhauster can cause larger noise pollution and energy consumption to increase.
Utilize above-mentioned the second all standing formula air collecting box dust collection method, because the wind direction entrance is arranged at the amorphous silicon solar energy plate top, therefore need equally to introduce high-power air exhauster; And, no matter be to utilize the dedusting of high-power air exhauster enclosed environment drainage way, still adopt all standing formula air collecting box cleaning type dust collection method all can only absorb the dust in the groove space, for then absorbing because of the dust that is adsorbed in static in film surface and the wire casing, cause dedusting incomplete, cause efficiency of dust collection low.
Therefore, a kind of efficiency of dust collection of needs is high, noise is low and consume energy few laser recticle dedusting plant.
Summary of the invention
The object of the present invention is to provide that a kind of efficiency of dust collection is high, noise is low and consume energy few laser recticle dedusting plant.
Another object of the present invention is to provide that a kind of efficiency of dust collection is high, noise is low and consume energy few laser recticle dedusting method.
For achieving the above object, the invention provides a kind of laser recticle dedusting plant, carry out dedusting when being applicable to laser generator to non-crystal silicon solar energy glass substrate groove, described laser recticle dedusting plant comprises machining cell, dust exhaust apparatus, the first filter element, the high pressure air exhauster, several electrostatic precipitations rod and the constant temperature and humidity unit of steady temperature and constant humidity environment is provided, described machining cell comprises inner chamber and workbench, described workbench and laser generator all place in the described inner chamber, described non-crystal silicon solar energy glass substrate bearing is on the lower surface of described workbench, described laser generator places the top of described workbench, described dust exhaust apparatus has suction port and dust mouth, described suction port be positioned at described workbench under, the dust mouth of described dust exhaust apparatus is connected with the upper end of described the first filter element, the lower end of described the first filter element is connected with the suction opeing of described high pressure air exhauster, be provided with first between the top and bottom of described the first filter element and filter web-roll core, one end of described constant temperature and humidity unit is communicated with the air outlet of described high pressure air exhauster, the other end of described constant temperature and humidity unit is communicated with described inner chamber and forms blowing mouth, evenly distributed being arranged on the described laser generator of described electrostatic precipitation rod.
Preferably, described laser recticle dedusting plant also comprises making-up air device, and described making-up air device is communicated with the upper end of described the first filter element, and described making-up air device injects air and flows into the upper end of described the first filter element from the external world.Described making-up air device can fill into fresh air to described the first filter element, can reduce the load of high pressure air exhauster, has improved the life-span of high pressure air exhauster.
Because described laser generator carries out groove to described non-crystal silicon solar energy glass substrate for a long time, described inner chamber have higher temperature and very dry in, described constant temperature and humidity unit is processed by the gas that is transported to inner chamber being carried out constant temperature and humidity, make inner chamber can keep specific temperature and humidity, the distortion of like this can establishment described non-crystal silicon solar energy glass substrate Yin Gaowen and producing improves the accuracy that described laser generator is processed described non-crystal silicon solar energy glass substrate simultaneously.Particularly, described laser recticle dedusting plant also comprises the second filter element, described the second filter element has and is placed in second in the described inner chamber and filters web-roll core, and described second filters that web-roll core is covered in the top of described laser generator and between laser generator and blowing mouth.Described the second filter element filters again to air, guarantees to be blown into the cleaning of the air of described inner chamber, has ensured that also described laser generator processes the accuracy of described non-crystal silicon solar energy glass substrate.
Preferably, the suction port area of described dust exhaust apparatus is conducive to cleaner up hill and dale dust suction like this more than or equal to the area of described non-crystal silicon solar energy glass substrate.Particularly, the dust mouth of described dust exhaust apparatus is communicated with by sweep-up pipe with the upper end of described the first filter element; Described sweep-up pipe is bellows, easily bending and can keep the smooth and easy of passage when bending of bellows.
To achieve these goals, the invention provides a kind of laser recticle dedusting method, the dust that produces when being applicable to remove laser generator to non-crystal silicon solar energy glass substrate groove comprises the steps: the described dust neutralization with static electrification; Blow to described non-crystal silicon solar energy glass substrate, make described dust break away from described non-crystal silicon solar energy glass substrate; Siphon away the air with described dust; Filter bag has the air of described dust to close the discharge clean gas; Described clean gas is carried out constant temperature and humidity to be processed; The top that described clean gas is transported to the non-crystal silicon solar energy glass substrate forms blowing.
Compared with prior art, because the present invention utilizes described electrostatic precipitation rod that dust charged in the described inner chamber is removed static, make described dust and automatically drop because of deadweight, and the suction port of described dust exhaust apparatus is placed under the described glass substrate one, utilize described high pressure high pressure air exhauster to make described dust exhaust apparatus produce the high velocity air of negative pressure with dust absorption, through after described the first filter element filtration the air pressurized that sucks being transmitted back to described inner chamber, whole process forms a loop, both can be described laser generator and described non-crystal silicon solar energy glass substrate provides a high velocity air, make described dust break away from described laser generator and described non-crystal silicon solar energy glass substrate, convenient described dust exhaust apparatus dust suction, can carry out cooling to described inner chamber again, need not to use the dust in the removing inner chamber that the high-power high voltage air exhauster just can be very clean, efficiency of dust collection is high and reduced the energy consumption of equipment, has reduced noise.
Description of drawings
Fig. 1 is the structural representation of laser recticle dedusting plant of the present invention.
Fig. 2 is the schematic flow sheet of laser recticle dedusting method of the present invention.
The specific embodiment
As shown in Figure 1, laser recticle dedusting plant 100 of the present invention comprises machining cell 1, dust exhaust apparatus 2, the first filter element 3, high pressure air exhauster 4, making-up air device 5, constant temperature and humidity unit 6, the second filter element 7 and several electrostatic precipitation rods 8.
Described machining cell 1 comprises inner chamber 11 and workbench 12, described workbench 12 and laser generator 200 all place in the described inner chamber 11, described non-crystal silicon solar energy glass substrate 300 is carried on the lower surface of described workbench 12, and described laser generator 200 places the top of described workbench 12.
Described dust exhaust apparatus 2 has a suction port 21, dust mouth 22 and sweep-up pipe 23, described suction port 21 also covers described non-crystal silicon solar energy glass substrate 300 fully over against the below of described workbench 12, the area of described suction port 21 is conducive to cleaner up hill and dale dust suction like this greater than the area of described non-crystal silicon solar energy glass substrate 300.Described dust suction fills 2 dust mouths of putting 22 and is communicated with by sweep-up pipe 23 with the upper end of described the first filter element 3, and described sweep-up pipe 23 is bellows, easily bending and can keep the smooth and easy of passage when bending of bellows.
The lower end of described the first filter element 3 is connected with the suction opeing of described high pressure air exhauster 4, be provided with first between the top and bottom of described the first filter element 3 and filter web-roll core 31, obtain clean gas after the air filtration that described the first filtration web-roll core 31 will pass through.
Described making-up air device 5 is installed on described the first filter element 3 and with the upper end of described the first filter element 3 and is communicated with, described making-up air device 5 can be with the upper end of described the first filter element 3 of air Injection, can reduce like this load of described high pressure air exhauster 4, the life-span of having improved described high pressure air exhauster 4.
Described high pressure air exhauster 4 is connected by a forcing pipe 41 with described constant temperature and humidity unit 6, and described high pressure air exhauster 4 is by utilizing forcing pipe 41 to deliver in the described constant temperature and humidity unit 6 after the gas pressurized with described cleaning.
Described constant temperature and humidity unit 6 one ends are connected with the forcing pipe 41 of described high pressure air exhauster 4, and described constant temperature and humidity unit 6 other ends are communicated with formation blowing mouth 11a with described inner chamber 11.Because described laser generator 200 carries out groove to described non-crystal silicon solar energy glass substrate 300 for a long time, described inner chamber 11 have higher temperature and very dry in, described constant temperature and humidity unit 6 is processed by the gas that is transported to described inner chamber 11 being carried out constant temperature and humidity, make described inner chamber 11 can keep specific temperature and humidity, the distortion that like this can the described non-crystal silicon solar energy glass substrate 300 of establishment produces because of high temperature improves the accuracy of the described non-crystal silicon solar energy glass substrate 300 of described laser generator 200 processing simultaneously.
Described the second filter element 7 has and is placed in second in the described inner chamber and filters web-roll core 71, and described second filters that web-roll core 71 is covered in the top of described laser generator 200 and between laser generator 200 and blowing mouth 11a.The filtration grade of described the second filter element 7 is higher than described the first filter element 3,7 pairs of air of described the second filter element filter again, assurance is blown into the cleaning of the air of described inner chamber 11, has also ensured the accuracy of the described non-crystal silicon solar energy glass substrate 300 of described laser generator 200 processing.
8 evenly distributed being arranged on the described laser generator 200 of described electrostatic precipitation rod will be by being absorbed by described dust exhaust apparatus 2 with rear in the described electrostatic precipitation rod 8 with the dust granules on the described non-crystal silicon solar energy glass substrate of being adsorbed in of static 300 surfaces.
Comprehensive above-mentioned and in conjunction with Fig. 1, the below is described in detail the operation principle of laser recticle dedusting plant 200 of the present invention, and is as follows:
During work, motor 9 starts, and described high pressure air exhauster 4 rotates, and described dust exhaust apparatus 2 siphons away the air in the described inner chamber 11.Described laser generator 200 generation laser move along trapped orbit and make rete 301 surfaces on the described non-crystal silicon solar energy glass substrate 300 form grooves, in the groove process, produce dust, and wherein a part of dust is not charged with static another part, described dust exhaust apparatus 2 with disperse in suction port 21 near the dust of not static electrification siphon away, and with the adsorbing powder dust of static in the wire casing of described non-crystal silicon solar energy glass substrate 300 and rete 301.At this moment, described electrostatic precipitation rod 8 attracts charged dust and neutralization, and the dust side after the neutralization siphons away from described electrostatic precipitation rod 8 free droppings and by described dust exhaust apparatus 2, and dust is with described the first filter element 3 of air process.Simultaneously, described making-up air device 5 replenishes ozone and filters with the air with dust from the external world, produce clean gas after filtering, gas is by described high pressure air exhauster 4, be transmitted back to described inner chamber 11 after 6 pairs of gas treatment of 4 pairs of gas pressurized of described high pressure air exhauster and described constant temperature and humidity unit, gas is at inner chamber 11 interior shapes one air-flow from top to down, air-flow filters web-roll core 71 through second of described the second filter element 7 and again filters after-blow on described laser generator 200 and machining cell 1, the dust that processing is produced blows to downwards near the described suction port 21, convenient described dust exhaust apparatus 2 dust suctions.
As shown in Figure 2, laser recticle dedusting method of the present invention comprises the steps:
Step (101) is with the described dust neutralization of static electrification;
Step (102) blows to described non-crystal silicon solar energy glass substrate, makes described dust break away from described non-crystal silicon solar energy glass substrate;
Step (103) siphons away the air with described dust;
Step (104) is injected the step that air mixes with air with dust from the external world.；
Step (105) filter bag has the air of described dust and discharges clean gas;
Step (106) is carried out constant temperature and humidity to described clean gas and is processed;
Step (107) is filtered described clean gas;
Step (108) forms blowing with the top that described clean gas is transported to described non-crystal silicon solar energy glass substrate.
Because the present invention utilizes 8 pairs of described inner chamber 11 interior charged dust of described electrostatic precipitation rod to remove static, make described dust and automatically drop because of deadweight, and the suction port 21 of described dust exhaust apparatus 2 is placed under the described non-crystal silicon solar energy glass substrate 300 1, utilize described high pressure air exhauster 4 to make described dust exhaust apparatus 2 produce the high velocity air of negative pressure with dust absorption, through after 3 filtrations of described the first filter element the air pressurized that sucks being transmitted back to described inner chamber 11, whole process forms a loop, both can be described laser generator 200 and described non-crystal silicon solar energy glass substrate 300 provides a high velocity air, make described dust break away from described laser generator 200 and described non-crystal silicon solar energy glass substrate 300, convenient described dust exhaust apparatus 2 dust suctions, can carry out cooling to described inner chamber 11 again, need not to use the dust in the removing inner chamber 11 that high-power air exhauster just can be very clean, efficiency of dust collection is high and reduced the energy consumption of equipment, has reduced noise.
The operation principle of size, installation method and the constant temperature and humidity unit 6 of the dust exhaust apparatus 2 that laser recticle dedusting plant of the present invention 100 is involved is well known to those of ordinary skill in the art, no longer is described in detail at this.
Above disclosed only is preferred embodiments of the present invention, certainly can not limit with this interest field of the present invention, and the equivalent variations of therefore doing according to the present patent application claim still belongs to the scope that the present invention is contained.
Claims (9)
1. laser recticle dedusting plant, carry out dedusting when being applicable to laser generator to non-crystal silicon solar energy glass substrate groove, it is characterized in that: described laser recticle dedusting plant comprises machining cell, dust exhaust apparatus, the first filter element, the high pressure air exhauster, several electrostatic precipitations rod and the constant temperature and humidity unit of steady temperature and constant humidity environment is provided, described machining cell comprises inner chamber and workbench, described workbench and laser generator all place in the described inner chamber, described non-crystal silicon solar energy glass substrate bearing is on the lower surface of described workbench, described laser generator places the top of described workbench, described dust exhaust apparatus has suction port and dust mouth, described suction port be positioned at described workbench under, the dust mouth of described dust exhaust apparatus is connected with the upper end of described the first filter element, the lower end of described the first filter element is connected with the suction opeing of described high pressure air exhauster, be provided with first between the top and bottom of described the first filter element and filter web-roll core, one end of described constant temperature and humidity unit is communicated with the air outlet of described high pressure air exhauster, the other end of described constant temperature and humidity unit is communicated with described inner chamber and forms blowing mouth, evenly distributed being arranged on the described laser generator of described electrostatic precipitation rod.
2. laser recticle dedusting plant as claimed in claim 1, it is characterized in that: described laser recticle dedusting plant also comprises making-up air device, described making-up air device is communicated with the upper end of described the first filter element, and described making-up air device injects air and flows into the upper end of described the first filter element from the external world.
3. laser recticle dedusting plant as claimed in claim 1, it is characterized in that: described laser recticle dedusting plant also comprises the second filter element, described the second filter element has and is placed in second in the described inner chamber and filters web-roll core, and described second filters that web-roll core is covered in the top of described laser generator and between laser generator and blowing mouth.
4. laser recticle dedusting plant as claimed in claim 1, it is characterized in that: the suction port area of described dust exhaust apparatus is more than or equal to the area of described non-crystal silicon solar energy glass substrate.
5. laser recticle dedusting plant as claimed in claim 4, it is characterized in that: the dust mouth of described dust exhaust apparatus is communicated with by sweep-up pipe with the upper end of described the first filter element.
6. laser recticle dedusting plant as claimed in claim 5, it is characterized in that: described sweep-up pipe is bellows.
7. laser recticle dedusting method, the dust that produces when being applicable to remove laser generator to non-crystal silicon solar energy glass substrate groove is characterized in that, comprises the steps:
(1) the described dust with static electrification neutralizes;
(2) to described non-crystal silicon solar energy glass substrate blowing, make described dust break away from described non-crystal silicon solar energy glass substrate;
(3) siphon away air with described dust;
(4) filter bag has the air of described dust and discharges clean gas;
(5) described clean gas being carried out constant temperature and humidity processes;
(6) the top formation that described clean gas is transported to described non-crystal silicon solar energy glass substrate is dried.
8. laser recticle dedusting method as claimed in claim 7 is characterized in that, also comprises before in described step (4) and injects the step that air mixes with air with dust from the external world.
9. laser recticle dedusting method as claimed in claim 7 is characterized in that, also comprises before the step that described clean gas is filtered in described step (6).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101075242A CN101829848B (en) | 2010-01-29 | 2010-01-29 | Laser recticle dedusting plant and dedusting method |
| PCT/CN2010/074933 WO2011091650A1 (en) | 2010-01-29 | 2010-07-02 | Laser marking dust-removal device and dust-removal method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101075242A CN101829848B (en) | 2010-01-29 | 2010-01-29 | Laser recticle dedusting plant and dedusting method |
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| Publication Number | Publication Date |
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| CN101829848A CN101829848A (en) | 2010-09-15 |
| CN101829848B true CN101829848B (en) | 2013-04-10 |
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| CN2010101075242A Expired - Fee Related CN101829848B (en) | 2010-01-29 | 2010-01-29 | Laser recticle dedusting plant and dedusting method |
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| CN (1) | CN101829848B (en) |
| WO (1) | WO2011091650A1 (en) |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201168707Y (en) * | 2008-01-23 | 2008-12-24 | 东莞丰裕电机有限公司 | Electrostatic dust remover |
| CN101402229A (en) * | 2008-10-30 | 2009-04-08 | 东莞宏威数码机械有限公司 | Laser scribing dust collector and operation method thereof |
| WO2010011088A2 (en) * | 2008-07-24 | 2010-01-28 | (주)미래컴퍼니 | Apparatus and method for manufacturing solar cell panel |
| CN201693293U (en) * | 2010-01-29 | 2011-01-05 | 东莞宏威数码机械有限公司 | Laser reticle dust removal equipment |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3212928C2 (en) * | 1982-04-07 | 1984-01-26 | Lambda Physik GmbH, 3400 Göttingen | Discharge pumped laser |
| US4477263A (en) * | 1982-06-28 | 1984-10-16 | Shaver John D | Apparatus and method for neutralizing static electric charges in sensitive manufacturing areas |
| JPH05115858A (en) * | 1991-05-09 | 1993-05-14 | Orion Mach Co Ltd | Air cleaner |
| JP2806323B2 (en) * | 1995-08-24 | 1998-09-30 | 日本電気株式会社 | Excimer laser dust remover |
| JPH10165334A (en) * | 1996-12-11 | 1998-06-23 | Tec Corp | Electric vacuum cleaner |
| US6689699B2 (en) * | 2000-09-21 | 2004-02-10 | Kabushiki Kaisha Toshiba | Method for manufacturing a semiconductor device using recirculation of a process gas |
| JP2002222796A (en) * | 2001-01-12 | 2002-08-09 | Applied Materials Inc | Wafer chucking device and its driving method |
| KR100640186B1 (en) * | 2004-10-06 | 2006-10-30 | 박민경 | Fan filter unit with ion bars for clean room |
| CN2873333Y (en) * | 2005-12-23 | 2007-02-28 | 比亚迪股份有限公司 | Static removing and dust removing device |
| JP2009113028A (en) * | 2007-10-19 | 2009-05-28 | Nidec Sankyo Corp | Cleaning method and cleaning apparatus |
| CN201291526Y (en) * | 2008-10-30 | 2009-08-19 | 东莞宏威数码机械有限公司 | Laser reticle dust collector |
-
2010
- 2010-01-29 CN CN2010101075242A patent/CN101829848B/en not_active Expired - Fee Related
- 2010-07-02 WO PCT/CN2010/074933 patent/WO2011091650A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201168707Y (en) * | 2008-01-23 | 2008-12-24 | 东莞丰裕电机有限公司 | Electrostatic dust remover |
| WO2010011088A2 (en) * | 2008-07-24 | 2010-01-28 | (주)미래컴퍼니 | Apparatus and method for manufacturing solar cell panel |
| CN101402229A (en) * | 2008-10-30 | 2009-04-08 | 东莞宏威数码机械有限公司 | Laser scribing dust collector and operation method thereof |
| CN201693293U (en) * | 2010-01-29 | 2011-01-05 | 东莞宏威数码机械有限公司 | Laser reticle dust removal equipment |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2000-141075A 2000.05.23 |
| JP特开2005-144454A 2005.06.09 |
Also Published As
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| CN101829848A (en) | 2010-09-15 |
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