CN104259671B - A kind of impulse-free robustness laser cutting method of non-crystaline amorphous metal - Google Patents
A kind of impulse-free robustness laser cutting method of non-crystaline amorphous metal Download PDFInfo
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- CN104259671B CN104259671B CN201410379347.1A CN201410379347A CN104259671B CN 104259671 B CN104259671 B CN 104259671B CN 201410379347 A CN201410379347 A CN 201410379347A CN 104259671 B CN104259671 B CN 104259671B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
Abstract
The present invention relates to the cutting technique field of non-crystaline amorphous metal, particularly relate to a kind of impulse-free robustness laser cutting method of non-crystaline amorphous metal, it comprises the following steps: under cooling inert atmosphere protection, pulse laser or continuous wave laser is adopted to carry out melt cut to the cutting part of non-crystaline amorphous metal, to form cut surface; When laser cutting, cooling inert atmosphere blows to the cutting part of non-crystaline amorphous metal along the direction identical with Laser emission direction, and, arrange at the opposite side of cutting part relative to the blowout of cooling inert atmosphere and opened getter device; The melted material of cutting part blows off by air-flow that cooling inert atmosphere and getter device are formed jointly, and cooling forms cut surface; And with TTT figure for benchmark, make the cutting part of non-crystaline amorphous metal complete cutting under the situation that crystallization does not occur.The impulse-free robustness laser cutting method of this non-crystaline amorphous metal, makes the complete impulse-free robustness of the cut surface of cut non-crystaline amorphous metal, and without adsorbing powder dust, the quality of cut surface is very good.
Description
Technical field
The present invention relates to the cutting technique field of non-crystaline amorphous metal, particularly relate to a kind of impulse-free robustness laser cutting method of non-crystaline amorphous metal.
Background technology
Non-crystaline amorphous metal is because having the good characteristic of the aspects such as intensity, hardness, toughness, wearability, corrosion resistance, soft magnetism and superconductivity, and it is obtained for extensive use in fields such as electronics, machinery, chemical industry.But the fragility of non-crystaline amorphous metal is very high, therefore easily cracked.Because non-crystaline amorphous metal has the high and easily cracked characteristic of hardness, thus it is very difficult that the processing of non-crystaline amorphous metal is cut.
The method of existing cutting non-crystaline amorphous metal comprises: (1) uses cutter or emery wheel to carry out machine cuts; (2) Linear cut; (3) laser cutting.In above-mentioned cutting method, for the machine cuts using cutter or emery wheel to carry out, due to non-crystaline amorphous metal hardness and fragility high, in cutting process, not only non-crystaline amorphous metal is easily cracked, and cutter very easily weares and teares, in addition, the machining accuracy of this machine cuts is lower, is difficult to reach micron order.For Linear cut, its shortcoming is that cutting surfaces quality is coarse, has and significantly cuts lines, and process velocity is comparatively slow, is not suitable for large-scale mass production.
For laser cutting; the pulse laser cutting method of block amorphous alloy is disclosed in CN102218607A; the method is when cutting non-crystaline amorphous metal; its cooling protection gas blows to this non-crystaline amorphous metal position to be cut along the direction identical with Laser emission direction; namely cooling protection gas is one-sidedly blow to cutting part; the quantity of the burr that this unidirectional blowing method makes cutting part stay is more, and the size of burr is comparatively large, thus greatly reduces the quality of cut surface.
In addition, laser cutting of the prior art, occur that cooling protection gas blows to the laser cutting method of the cutting part of described non-crystaline amorphous metal simultaneously along the both direction identical and contrary with Laser emission direction, although this laser cutting method is relative to laser cutting method disclosed in CN102218607A, greatly reduce burr quantity and the burr size of cut surface, make the burr size of cut surface very little, and greatly improve the quality of cut surface, but, still there is a small amount of burr in the cut surface that this laser cutting method obtains, though its burr thickness is little, but still make the quality of cut surface not ideal enough.
Summary of the invention
The object of the invention is to the impulse-free robustness laser cutting method that a kind of non-crystaline amorphous metal is provided for weak point of the prior art.
For achieving the above object, the present invention is achieved through the following technical solutions.
A kind of impulse-free robustness laser cutting method of non-crystaline amorphous metal is provided, comprises the following steps:
Under cooling inert atmosphere protection, pulse laser or continuous wave laser is adopted to carry out melt cut to the cutting part of non-crystaline amorphous metal, to form cut surface;
When laser cutting, described cooling inert atmosphere blows to the cutting part of described non-crystaline amorphous metal along the direction identical with Laser emission direction, and the opposite side blown out relative to described cooling inert atmosphere at described cutting part arranges and opened getter device; The melted material of described cutting part blows off by air-flow that described cooling inert atmosphere and described getter device are formed jointly, and cooling forms described cut surface;
The selection principle of parameters of laser cutting: with TTT figure for benchmark, selects laser cutting condition according to the thickness of the cutting part of described non-crystaline amorphous metal, completes cutting to make the cutting part of described non-crystaline amorphous metal under the situation that crystallization does not occur.
In technique scheme, the angle between the airflow direction that described getter device is formed and described cutting part is 10 degree ~ 60 degree.
Preferably, the angle between the airflow direction that formed of described getter device and described cutting part is 45 degree.
In technique scheme, described laser cutting condition comprises laser form, laser power, cutting speed, inspiratory flow, inert atmosphere protection gas kinds and pressure.
In technique scheme, when the thickness of the cutting part of described non-crystaline amorphous metal is 0.1mm ~ 20mm, described laser form is pulse laser or continuous wave laser, described laser power is 0.1KW ~ 8KW, described cutting speed is for being greater than 1mm/s, described inspiratory flow is 20L/min ~ 1000L/min, and the blow gas pressure of described inert atmosphere is 0.1Pa ~ 5Pa.
In technique scheme, described inert atmosphere is inert gas or nitrogen.
Described inert gas comprises helium, neon, argon gas, Krypton, xenon and radon gas.
In technique scheme, the cut surface of the non-crystaline amorphous metal of described cutting, is impulse-free robustness cut surface.
In technique scheme, the non-crystaline amorphous metal cut, utilizes X-ray diffraction analysis and metallography microscope sem observation cutting part, is still amorphous structure.
Wherein, TTT figure of the present invention refers to temperature-time transformation diagram, and TTT figure of the present invention as shown in Figure 4.When heating curves reaches Tm(fusing point) more than after cool, and heating curves and cooling curve all can not touch crystalline areas.Wherein, in welding process, only otherwise touch crystalline areas, namely the cutting part of non-crystaline amorphous metal completes cutting under there is not the situation of crystallization, namely in non-crystallization region, selects cutting parameter, and multiple cutting parameter all can make the quality of cut surface good.
Beneficial effect of the present invention:
(1) the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, due to when laser cutting, existing, cooling inert atmosphere blows to the cutting part of non-crystaline amorphous metal along the direction identical with Laser emission direction, have again, arrange at the opposite side of cutting part relative to the blowout of cooling inert atmosphere and opened getter device, namely, the melted material of cutting part blows off by air-flow jointly that simultaneously utilize cooling inert atmosphere and getter device to be formed, and cooling forms cut surface; Blow to the laser cutting method of the cutting part of described non-crystaline amorphous metal along the both direction identical and contrary with Laser emission direction relative to prior art cooling protection gas simultaneously, this laser cutting method of prior art, the cooling protection gas that two subtends are blown, make airflow direction contrary, cause two air-flows inconsistent, easily make the burr that cut surface is still residual a small amount of; And the laser cutting method of the application, because the direction of cooling inert atmosphere blowout is consistent with the airflow direction that getter device is formed, the melted material of cutting part can be made to be blown off completely, thus make the completely not residual burr of cut surface, drastically increase the quality of cut surface.
(2) the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, there is parameters of laser cutting range of choice widely, larger to the Selecting parameter scope of laser cutting condition, namely the restriction suffered by laser cutting condition is smaller, in cutting process, with TTT figure for benchmark, only otherwise touch crystallization region, namely the cutting part of non-crystaline amorphous metal completes cutting under the situation that crystallization does not occur, multiple cutting parameter all can make the completely not residual burr of cut surface, makes the quality of cut surface very good.
(3) the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, in the process of cutting, the dust produced during cutting also can be siphoned away by getter device simultaneously, thus avoids dust adhesion on product and equipment, further ensures cut surface and has good quality.
(4) the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, the non-crystaline amorphous metal cut, utilize XRD(X x ray diffraction) analyze and metallography microscope sem observation cutting part, find still to be amorphous structure, this phenomenon describes cut non-crystaline amorphous metal and crystallization does not occur, and the quality of cut surface is good.
(5) the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, has method simple, can be applicable to the feature of large-scale production.
Accompanying drawing explanation
Fig. 1 is the structural representation of impulse-free robustness laser cutting method at cutting non-crystaline amorphous metal of a kind of non-crystaline amorphous metal of the present invention.
Fig. 2 is the XRD figure of the cut surface utilizing XRD analysis non-crystaline amorphous metal.
Fig. 3 utilizes the cut surface of metallographic microscope to non-crystaline amorphous metal to amplify the result figure that 100 times are carried out metallographic observation.
Fig. 4 is the TTT figure of the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal of the present invention.
Include in Fig. 1 to Fig. 4:
1---non-crystaline amorphous metal, 11---cut surface,
2---tool,
3---laser beam emitting device,
4---getter device, 41---airflow direction,
5---crystalline areas,
6---non-crystallization region,
A---angle.
Detailed description of the invention
The impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal provided by the invention, comprises the following steps:
Under cooling inert atmosphere protection, pulse laser or continuous wave laser is adopted to carry out melt cut to the cutting part of non-crystaline amorphous metal, to form cut surface;
When laser cutting, cooling inert atmosphere blows to the cutting part of non-crystaline amorphous metal along the direction identical with Laser emission direction, and, arrange at the opposite side of cutting part relative to the blowout of cooling inert atmosphere and opened getter device; The melted material of cutting part blows off by air-flow that cooling inert atmosphere and getter device are formed jointly, and cooling forms described cut surface;
The selection principle of parameters of laser cutting: with TTT figure for benchmark, selects laser cutting condition according to the thickness of the cutting part of non-crystaline amorphous metal, completes cutting to make the cutting part of non-crystaline amorphous metal under the situation that crystallization does not occur.
Wherein, the concrete mode of above-mentioned laser cutting is, non-crystaline amorphous metal 1 is fixed on tool 2, laser is sent by laser beam emitting device 3, the inert atmosphere blowing to the cutting part of non-crystaline amorphous metal 1 along the direction identical with Laser emission direction is sprayed by laser beam emitting device 3 simultaneously, to arrange and opened getter device 4 at cutting part relative to the opposite side of laser beam emitting device 3; Included angle A between the airflow direction 41 that getter device 4 is formed and cutting part is 10 degree ~ 60 degree; The melted material of cutting part blows off by air-flow that cooling inert atmosphere and getter device 4 are formed jointly, and cooling forms cut surface 11.The specific embodiment of the present invention, see Fig. 1, but be not limited to this detailed description of the invention: laser beam emitting device 3 is arranged at the top of non-crystaline amorphous metal 1, and the outlet of the Laser emission of laser beam emitting device 3 and inert atmosphere jet exit all face the cutting part of non-crystaline amorphous metal 1, getter device 4 is arranged at the below of non-crystaline amorphous metal 1, and the included angle A between the airflow direction 41 of getter device 4 formation and cutting part is 10 degree ~ 60 degree, after having cut, final formation cut surface 11.Certainly, according to the needs of actual production, laser beam emitting device 3 and getter device 4 also can be arranged at the left and right sides of non-crystaline amorphous metal 1 respectively.
In order to make technical problem solved by the invention, technical scheme and beneficial effect clearly understand, below in conjunction with embodiment, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Wherein, non-crystaline amorphous metal of the present invention comprises the non-crystaline amorphous metal of all kinds, is not limited to the non-crystaline amorphous metal kind of illustrating in the embodiment of the present invention.
Wherein, when burr quantity is 1 ~ 2, on a small quantity; When burr quantity is 3, it is middle amount; Burr quantity is more than 4, is volume.The evaluation of quality of cut face be according to burr thickness and burr quantity be divided into excellent, good, in, poor.
embodiment 1.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is zirconium-base amorphous alloy, is specially Zr-Cu-Ni-Al-Nb system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 0.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is helium, and laser form is pulse laser, and laser power is 0.3KW, and cutting speed is 27mm/s, and inspiratory flow is 1000L/min, and inert atmosphere protection gas pressure is 0.25MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 2.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is zirconium-base amorphous alloy, is specially Zr-Cu-Ni-Al-Sn system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 0.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is neon, and laser form is continuous wave laser, and laser power is 0.3KW, and cutting speed is 27mm/s, and inspiratory flow is 20L/min, and inert atmosphere protection gas pressure is 0.25MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 3.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is cu-based amorphous alloys, is specially Cu-Zr-Ti-Ni system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 1mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is argon gas, and laser form is continuous wave laser, and laser power is 0.4KW, and cutting speed is 22mm/s, and inspiratory flow is 500L/min, and inert atmosphere protection gas pressure is 0.3MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 4.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is cu-based amorphous alloys, is specially Cu-Zr-Ti-Ni-Sn system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 1.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is Krypton, and laser form is continuous wave laser, and laser power is 0.5KW, and cutting speed is 17mm/s, and inspiratory flow is 100L/min, and inert atmosphere protection gas pressure is 0.3MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 5.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is titanium-based amorphous alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 2mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is xenon, and laser form is pulse laser, and laser power is 0.55KW, and cutting speed is 15mm/s, and inspiratory flow is 800L/min, and inert atmosphere protection gas pressure is 0.33MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 6.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is Fe-based amorphous alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 2mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is radon gas, and laser form is continuous wave laser, and laser power is 0.55KW, and cutting speed is 12mm/s, and inspiratory flow is 200L/min, and inert atmosphere protection gas pressure is 0.33MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 7.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is titanium-based amorphous alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 0.1mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is nitrogen, and laser form is pulse laser, and laser power is 0.1KW, and cutting speed is 6mm/s, and inspiratory flow is 400L/min, and inert atmosphere protection gas pressure is 0.1MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 8.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is Fe-based amorphous alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 20mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is helium, and laser form is continuous wave laser, and laser power is 8KW, and cutting speed is 30mm/s, and inspiratory flow is 300L/min, and inert atmosphere protection gas pressure is 5MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 9.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is cu-based amorphous alloys, is specially Cu-Zr-Ti-Ni-Sn system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 10mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is neon, and laser form is continuous wave laser, and laser power is 5KW, and cutting speed is 22mm/s, and inspiratory flow is 900L/min, and inert atmosphere protection gas pressure is 3MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
embodiment 10.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is zirconium-base amorphous alloy, is specially Zr-Cu-Ni-Al-Nb system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 15mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is xenon, and laser form is pulse laser, and laser power is 3KW, and cutting speed is 18mm/s, and inspiratory flow is 60L/min, and inert atmosphere protection gas pressure is 2MPa.
Cutting result: cut surface 11 is impulse-free robustness completely, and also without dust adhesion, quality of cut face is evaluated as excellent.
contrast experiment
For the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal of the present invention; by the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal of the present invention; blow to the laser cutting method of the cutting part of described non-crystaline amorphous metal along the both direction identical and contrary with Laser emission direction with prior art cooling protection gas simultaneously, carry out contrast experiment.Concrete contrast experiment is as follows:
contrast experiment 1.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is zirconium-base amorphous alloy, is specially Zr-Cu-Ni-Al-Nb system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 0.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is helium, and laser form is pulse laser, and laser power is 0.3KW, and cutting speed is 27mm/s, and inert atmosphere protection gas pressure is 0.25MPa.
Cutting result: the burr thickness of cut surface 11 is 0.01mm, and burr quantity is 1, and quality of cut face is evaluated as good.
contrast experiment 2.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is zirconium-base amorphous alloy, is specially Zr-Cu-Ni-Al-Sn system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 0.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is neon, and laser form is continuous wave laser, and laser power is 0.3KW, and cutting speed is 27mm/s, and inert atmosphere protection gas pressure is 0.25MPa.
Cutting result: the burr thickness of cut surface 11 is 0.02mm, and burr quantity is 1, and quality of cut face is evaluated as good.
contrast experiment 3.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is cu-based amorphous alloys, is specially Cu-Zr-Ti-Ni system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 1mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is argon gas, and laser form is continuous wave laser, and laser power is 0.4KW, and cutting speed is 22mm/s, and inert atmosphere protection gas pressure is 0.3MPa.
Cutting result: the burr thickness of cut surface 11 is 0.03mm, and burr quantity is 1, and quality of cut face is evaluated as good.
contrast experiment 4.
The non-crystaline amorphous metal 1 to be cut of the present embodiment is cu-based amorphous alloys, is specially Cu-Zr-Ti-Ni-Sn system alloy.Wherein, the thickness of the cutting part of non-crystaline amorphous metal 1 is 1.5mm.
The laser cutting condition of the present embodiment comprises: inert atmosphere is Krypton, and laser form is continuous wave laser, and laser power is 0.5KW, and cutting speed is 17mm/s, and inert atmosphere protection gas pressure is 0.3MPa.
Cutting result: the burr thickness of cut surface 11 is 0.05mm, and burr quantity is 2, and quality of cut face is evaluated as good.
comparing result:
(1) embodiment 1 and contrast experiment 1 are contrasted, detailed comparisons's data are in table 1.
The correction data table of table 1 embodiment 1 and contrast experiment 1
| Experiment | Embodiment 1 | Contrast experiment 1 |
| Cutting part thickness (mm) | 0.5 | 0.5 |
| Cutting speed (mm/s) | 27 | 27 |
| Peak power (KW) | 0.3 | 0.3 |
| Laser form | Pulse | Pulse |
| Protective gas pressure (Pa) | 0.25 | 0.25 |
| Burr thickness (mm) | 0 | 0.01 |
| Burr quantity | 0 | 1 |
| Quality of cut face (poor/in/good/excellent) | Excellent | Good |
As shown in Table 1, the laser cutting condition of contrast experiment 1 is identical with the laser cutting condition of embodiment 1, and contrast experiment 1 and embodiment 1 all adopt identical non-crystaline amorphous metal kind and inert atmosphere kind, but, still there is burr in the cut surface of contrast experiment 1, and the complete impulse-free robustness of the cut surface of embodiment 1.Therefore, the quality of cut face of contrast experiment 1 is good, and the quality of cut face of embodiment 1 is excellent.Thus describe the impulse-free robustness laser cutting method adopting a kind of non-crystaline amorphous metal of the present invention, the complete impulse-free robustness of cut surface of the non-crystaline amorphous metal cut, and without adsorbing powder dust, namely quality of cut face is very good.
(2) embodiment 2 and contrast experiment 2 are contrasted, detailed comparisons's data are in table 2.
The correction data table of table 2 embodiment 2 and contrast experiment 2
| Experiment | Embodiment 2 | Contrast experiment 2 |
| Cutting part thickness (mm) | 0.5 | 0.5 |
| Cutting speed (mm/s) | 27 | 27 |
| Peak power (KW) | 0.3 | 0.3 |
| Laser form | Continuous wave | Continuous wave |
| Protective gas pressure (Pa) | 0.25 | 0.25 |
| Burr thickness (mm) | 0 | 0.02 |
| Burr quantity | 0 | 1 |
| Quality of cut face (poor/in/good/excellent) | Excellent | Good |
As shown in Table 2, the laser cutting condition of contrast experiment 2 is identical with the laser cutting condition of embodiment 2, and contrast experiment 2 and embodiment 2 all adopt identical non-crystaline amorphous metal kind and inert atmosphere kind, but, still there is burr in the cut surface of contrast experiment 2, and the complete impulse-free robustness of the cut surface of embodiment 2.Therefore, the quality of cut face of contrast experiment 2 is good, and the quality of cut face of embodiment 2 is excellent.Thus describe the impulse-free robustness laser cutting method adopting a kind of non-crystaline amorphous metal of the present invention, the complete impulse-free robustness of cut surface of the non-crystaline amorphous metal cut, and without adsorbing powder dust, namely quality of cut face is very good.
(3) embodiment 3 and contrast experiment 3 are contrasted, detailed comparisons's data are in table 3.
The correction data table of table 3 embodiment 3 and contrast experiment 3
| Experiment | Embodiment 3 | Contrast experiment 3 |
| Cutting part thickness (mm) | 1 | 1 |
| Cutting speed (mm/s) | 22 | 22 |
| Peak power (KW) | 0.4 | 0.4 |
| Laser form | Continuous wave | Continuous wave |
| Protective gas pressure (Pa) | 0.3 | 0.3 |
| Burr thickness (mm) | 0 | 0.03 |
| Burr quantity | 0 | 1 |
| Quality of cut face (poor/in/good/excellent) | Excellent | Good |
As shown in Table 3, the laser cutting condition of contrast experiment 3 is identical with the laser cutting condition of embodiment 3, and contrast experiment 3 and embodiment 3 all adopt identical non-crystaline amorphous metal kind and inert atmosphere kind, but, still there is burr in the cut surface of contrast experiment 3, and the complete impulse-free robustness of the cut surface of embodiment 3.Therefore, the quality of cut face of contrast experiment 3 is good, and the quality of cut face of embodiment 3 is excellent.Thus describe the impulse-free robustness laser cutting method adopting a kind of non-crystaline amorphous metal of the present invention, the complete impulse-free robustness of cut surface of the non-crystaline amorphous metal cut, and without adsorbing powder dust, namely quality of cut face is very good.
(4) embodiment 4 and contrast experiment 4 are contrasted, detailed comparisons's data are in table 4.
The correction data table of table 4 embodiment 4 and contrast experiment 4
| Experiment | Embodiment 4 | Contrast experiment 4 |
| Cutting part thickness (mm) | 1.5 | 1.5 |
| Cutting speed (mm/s) | 17 | 17 |
| Peak power (KW) | 0.5 | 0.5 |
| Laser form | Continuous wave | Continuous wave |
| Protective gas pressure (Pa) | 0.3 | 0.3 |
| Burr thickness (mm) | 0 | 0.05 |
| Burr quantity | 0 | 2 |
| Quality of cut face (poor/in/good/excellent) | Excellent | Good |
As shown in Table 4, the laser cutting condition of contrast experiment 4 is identical with the laser cutting condition of embodiment 4, and contrast experiment 4 and embodiment 4 all adopt identical non-crystaline amorphous metal kind and inert atmosphere kind, but, still there is burr in the cut surface of contrast experiment 4, and the complete impulse-free robustness of the cut surface of embodiment 4.Therefore, the quality of cut face of contrast experiment 4 is good, and the quality of cut face of embodiment 4 is excellent.Thus describe the impulse-free robustness laser cutting method adopting a kind of non-crystaline amorphous metal of the present invention, the complete impulse-free robustness of cut surface of the non-crystaline amorphous metal cut, and without adsorbing powder dust, namely quality of cut face is very good.
performance test
1, X-ray diffraction analysis
Carry out X-ray diffraction analysis to the cut surface of non-crystaline amorphous metal in embodiment 1, see Fig. 2, it is still amorphous structure that this figure shows cut surface, describes non-crystaline amorphous metal and crystallization does not occur afterwards before cutting.
2, metallography microscope sem observation cut surface
Utilize the cut surface of metallographic microscope to the non-crystaline amorphous metal in embodiment 2 to amplify 100 times and carry out metallographic observation, see Fig. 3, it is still amorphous structure that this figure shows cut surface, illustrates that non-crystaline amorphous metal crystallization does not occur before cutting afterwards.
Finally should be noted that; above embodiment is only for illustration of technical scheme of the present invention but not limiting the scope of the invention; although be explained in detail the present invention with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can modify to technical scheme of the present invention or equivalent replacement, and not depart from essence and the scope of technical solution of the present invention.
Claims (9)
1. an impulse-free robustness laser cutting method for non-crystaline amorphous metal, is characterized in that: comprise the following steps:
Under cooling inert atmosphere protection, pulse laser or continuous wave laser is adopted to carry out melt cut to the cutting part of non-crystaline amorphous metal, to form cut surface;
When laser cutting, described cooling inert atmosphere blows to the cutting part of described non-crystaline amorphous metal along the direction identical with Laser emission direction, and the opposite side blown out relative to described cooling inert atmosphere at described cutting part arranges and opened getter device; The melted material of described cutting part blows off by air-flow that described cooling inert atmosphere and described getter device are formed jointly, and cooling forms described cut surface;
The selection principle of parameters of laser cutting: with TTT figure for benchmark, selects laser cutting condition according to the thickness of the cutting part of described non-crystaline amorphous metal, completes cutting to make the cutting part of described non-crystaline amorphous metal under the situation that crystallization does not occur.
2. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, is characterized in that: the angle between the airflow direction that described getter device is formed and described cutting part is 10 degree ~ 60 degree.
3. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 2, is characterized in that: the angle between the airflow direction that described getter device is formed and described cutting part is 45 degree.
4. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, is characterized in that: described laser cutting condition comprises laser form, laser power, cutting speed, inspiratory flow, inert atmosphere protection gas kinds and pressure.
5. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, it is characterized in that: when the thickness of the cutting part of described non-crystaline amorphous metal is 0.1mm ~ 20mm, described laser form is pulse laser or continuous wave laser, described laser power is 0.1KW ~ 8KW, described cutting speed is for being greater than 1mm/s, described inspiratory flow is 20L/min ~ 1000L/min, and the blow gas pressure of described inert atmosphere is 0.1Pa ~ 5Pa.
6. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, is characterized in that: described inert atmosphere is inert gas or nitrogen.
7. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 6, is characterized in that: described inert gas comprises helium, neon, argon gas, Krypton, xenon and radon gas.
8. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, is characterized in that: the cut surface of the non-crystaline amorphous metal of described cutting, is impulse-free robustness cut surface.
9. the impulse-free robustness laser cutting method of a kind of non-crystaline amorphous metal according to claim 1, is characterized in that: the non-crystaline amorphous metal cut, and utilizes X-ray diffraction analysis and metallography microscope sem observation cutting part, is still amorphous structure.
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| KR102450776B1 (en) * | 2017-10-27 | 2022-10-05 | 삼성전자주식회사 | Laser processing method, substrate dicing method, and substrate processing apparatus for performing the same |
| CN109773429B (en) * | 2019-03-01 | 2020-08-11 | 东莞市逸昊金属材料科技有限公司 | Precision cutting process for amorphous alloy |
| CN114193005B (en) * | 2022-01-23 | 2023-11-21 | 阳江市皓殷智造科技有限公司 | Stabilizer for laser cutting |
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