CN101812666B - 非制冷红外焦平面阵列用氧化钒薄膜材料的制备方法 - Google Patents
非制冷红外焦平面阵列用氧化钒薄膜材料的制备方法 Download PDFInfo
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- CN101812666B CN101812666B CN2010101430494A CN201010143049A CN101812666B CN 101812666 B CN101812666 B CN 101812666B CN 2010101430494 A CN2010101430494 A CN 2010101430494A CN 201010143049 A CN201010143049 A CN 201010143049A CN 101812666 B CN101812666 B CN 101812666B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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CN2010101430494A CN101812666B (zh) | 2010-04-09 | 2010-04-09 | 非制冷红外焦平面阵列用氧化钒薄膜材料的制备方法 |
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CN2010101430494A CN101812666B (zh) | 2010-04-09 | 2010-04-09 | 非制冷红外焦平面阵列用氧化钒薄膜材料的制备方法 |
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CN101812666A CN101812666A (zh) | 2010-08-25 |
CN101812666B true CN101812666B (zh) | 2012-05-23 |
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CN2010101430494A Expired - Fee Related CN101812666B (zh) | 2010-04-09 | 2010-04-09 | 非制冷红外焦平面阵列用氧化钒薄膜材料的制备方法 |
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CN103320751B (zh) * | 2013-06-25 | 2015-08-19 | 电子科技大学 | 一种脉冲反应磁控溅射制备氧化钒薄膜的方法 |
CN106086797B (zh) * | 2016-07-12 | 2018-12-11 | 京东方科技集团股份有限公司 | 氧化铟锡薄膜及其制备方法、含其的阵列基板、显示装置 |
CN112888129A (zh) * | 2020-12-14 | 2021-06-01 | 北京东方计量测试研究所 | 大气压气体放电均匀化的调制方法和装置 |
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CN1308482C (zh) * | 2004-08-25 | 2007-04-04 | 华中科技大学 | 相变温度可调的氧化钒薄膜的制备方法 |
CN100340699C (zh) * | 2005-07-12 | 2007-10-03 | 天津大学 | 对向靶反应磁控溅射制备氧化钒薄膜的方法 |
CN1966758A (zh) * | 2005-11-18 | 2007-05-23 | 电子科技大学 | 一种氧化钒薄膜的制备方法 |
JP4591705B2 (ja) * | 2006-01-20 | 2010-12-01 | セイコーエプソン株式会社 | ターゲット材料 |
CN101487113A (zh) * | 2009-02-16 | 2009-07-22 | 大连理工大学 | 掩模限位连续组分扩展薄膜材料库制备方法 |
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Inventor after: Wang Kaiying Inventor after: Dong Tao Inventor after: Liu Guohua Inventor after: Zhang Lei Inventor after: He Yong Inventor after: Zhang Mingming Inventor after: Su Yan Inventor after: Shi Qin Inventor before: Wang Kaiying Inventor before: Dong Tao Inventor before: Liu Guohua Inventor before: He Yong Inventor before: Zhang Mingming Inventor before: Su Yan Inventor before: Shi Qin |
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Free format text: CORRECT: INVENTOR; FROM: WANG KAIYING DONG TAO LIU GUOHUA HE YONG ZHANG MINGMING SU YAN SHI QIN TO: WANG KAIYING DONG TAO LIU GUOHUA ZHANG LEI HE YONG ZHANG MINGMING SU YAN SHI QIN |
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