CN101784878B - 用于鉴别气体的化学组成的方法及设备 - Google Patents

用于鉴别气体的化学组成的方法及设备 Download PDF

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CN101784878B
CN101784878B CN2008801020772A CN200880102077A CN101784878B CN 101784878 B CN101784878 B CN 101784878B CN 2008801020772 A CN2008801020772 A CN 2008801020772A CN 200880102077 A CN200880102077 A CN 200880102077A CN 101784878 B CN101784878 B CN 101784878B
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gas
plasma
atom
power
emission
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CN101784878A (zh
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J·R·曼考斯基
B·蓝
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Pivotal Systems Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN2008801020772A 2007-08-07 2008-08-01 用于鉴别气体的化学组成的方法及设备 Active CN101784878B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US96397407P 2007-08-07 2007-08-07
US60/963,974 2007-08-07
US2045708P 2008-01-11 2008-01-11
US61/020,457 2008-01-11
PCT/US2008/072008 WO2009020881A1 (en) 2007-08-07 2008-08-01 Method and apparatus for identifying the chemical composition of a gas

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CN101784878A CN101784878A (zh) 2010-07-21
CN101784878B true CN101784878B (zh) 2012-08-08

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US (2) US7940395B2 (enExample)
EP (1) EP2185909A4 (enExample)
JP (1) JP2010539443A (enExample)
KR (1) KR20100065321A (enExample)
CN (1) CN101784878B (enExample)
TW (1) TWI396224B (enExample)
WO (1) WO2009020881A1 (enExample)

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US8440473B2 (en) * 2011-06-06 2013-05-14 Lam Research Corporation Use of spectrum to synchronize RF switching with gas switching during etch
US8609548B2 (en) 2011-06-06 2013-12-17 Lam Research Corporation Method for providing high etch rate
JP6095901B2 (ja) * 2012-05-24 2017-03-15 株式会社Ihi 物質特定装置および物質特定方法
KR101791870B1 (ko) * 2013-02-19 2017-11-02 세메스 주식회사 검사 방법, 이를 포함하는 기판 처리 방법 및 기판 처리 장치
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CA3000982A1 (en) * 2014-10-10 2016-04-14 Orthobond, Inc. Method for detecting and analzying surface films
CN108028214B (zh) * 2015-12-30 2022-04-08 玛特森技术公司 用于毫秒退火系统的气体流动控制
US10504720B2 (en) 2016-11-29 2019-12-10 Taiwan Semiconductor Manufacturing Company, Ltd. Etching using chamber with top plate formed of non-oxygen containing material
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
WO2018217466A2 (en) * 2017-05-25 2018-11-29 Applied Materials, Inc. Measuring concentrations of radicals in semiconductor processing
JP2020136473A (ja) * 2019-02-19 2020-08-31 株式会社東芝 半導体装置の製造方法
TWI897405B (zh) * 2019-03-25 2025-09-11 日商亞多納富有限公司 半導體製造系統、其控制方法及控制該系統的電腦程式
US20220093428A1 (en) * 2020-09-21 2022-03-24 Applied Materials, Inc. Atomic oxygen detection in semiconductor processing chambers

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CN1380541A (zh) * 2001-04-10 2002-11-20 华邦电子股份有限公司 以光学方法测量温度并监控蚀刻率的方法
US7052943B2 (en) * 2001-03-16 2006-05-30 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
CN1898547A (zh) * 2003-10-28 2007-01-17 兰姆研究有限公司 用于蚀刻终点检测的方法和设备
CN1967786A (zh) * 2005-11-17 2007-05-23 东京毅力科创株式会社 等离子体蚀刻方法

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US5405488A (en) * 1993-09-13 1995-04-11 Vlsi Technology, Inc. System and method for plasma etching endpoint detection
JP3333657B2 (ja) * 1995-02-10 2002-10-15 サイエンステクノロジー株式会社 気相エッチング装置及び気相エッチング方法
US5711843A (en) * 1995-02-21 1998-01-27 Orincon Technologies, Inc. System for indirectly monitoring and controlling a process with particular application to plasma processes
JPH11102895A (ja) * 1997-09-29 1999-04-13 Fujitsu Ltd 半導体装置の製造方法
US5986747A (en) * 1998-09-24 1999-11-16 Applied Materials, Inc. Apparatus and method for endpoint detection in non-ionizing gaseous reactor environments
AU6116400A (en) * 1999-07-23 2001-02-13 Philip C. Efthimion A continuous emissions monitor of multiple metal species in harsh environments
JP3565774B2 (ja) * 2000-09-12 2004-09-15 株式会社日立製作所 プラズマ処理装置及び処理方法
JP2002270574A (ja) * 2001-03-07 2002-09-20 Hitachi Kokusai Electric Inc プラズマエッチング装置
KR100426988B1 (ko) * 2001-11-08 2004-04-14 삼성전자주식회사 반도체 제조장비의 식각 종말점 검출장치 및 그에 따른검출방법
US20030129117A1 (en) * 2002-01-02 2003-07-10 Mills Randell L. Synthesis and characterization of a highly stable amorphous silicon hydride as the product of a catalytic hydrogen plasma reaction
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US8580076B2 (en) * 2003-05-22 2013-11-12 Lam Research Corporation Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith
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Publication number Priority date Publication date Assignee Title
US7052943B2 (en) * 2001-03-16 2006-05-30 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
CN1380541A (zh) * 2001-04-10 2002-11-20 华邦电子股份有限公司 以光学方法测量温度并监控蚀刻率的方法
CN1898547A (zh) * 2003-10-28 2007-01-17 兰姆研究有限公司 用于蚀刻终点检测的方法和设备
CN1967786A (zh) * 2005-11-17 2007-05-23 东京毅力科创株式会社 等离子体蚀刻方法

Also Published As

Publication number Publication date
KR20100065321A (ko) 2010-06-16
TWI396224B (zh) 2013-05-11
WO2009020881A1 (en) 2009-02-12
TW200917330A (en) 2009-04-16
CN101784878A (zh) 2010-07-21
US20110177625A1 (en) 2011-07-21
US7940395B2 (en) 2011-05-10
US8237928B2 (en) 2012-08-07
US20090180113A1 (en) 2009-07-16
EP2185909A1 (en) 2010-05-19
EP2185909A4 (en) 2015-08-05
JP2010539443A (ja) 2010-12-16

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