CN101767306B - 硅片线切割机的切割总成 - Google Patents
硅片线切割机的切割总成 Download PDFInfo
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- CN101767306B CN101767306B CN2009102169545A CN200910216954A CN101767306B CN 101767306 B CN101767306 B CN 101767306B CN 2009102169545 A CN2009102169545 A CN 2009102169545A CN 200910216954 A CN200910216954 A CN 200910216954A CN 101767306 B CN101767306 B CN 101767306B
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CN2009102169545A CN101767306B (zh) | 2009-12-29 | 2009-12-29 | 硅片线切割机的切割总成 |
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CN2009102169545A CN101767306B (zh) | 2009-12-29 | 2009-12-29 | 硅片线切割机的切割总成 |
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CN101767306A CN101767306A (zh) | 2010-07-07 |
CN101767306B true CN101767306B (zh) | 2013-11-13 |
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CN2009102169545A Expired - Fee Related CN101767306B (zh) | 2009-12-29 | 2009-12-29 | 硅片线切割机的切割总成 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102248612A (zh) * | 2011-07-25 | 2011-11-23 | 营口晶晶光电科技有限公司 | 一种超薄单晶硅片和制作该硅片的线切割装置及切割方法 |
CN102501324A (zh) * | 2011-11-03 | 2012-06-20 | 昆山翰辉电子科技有限公司 | 线形切割机的导轮的线槽结构 |
CN103085177B (zh) * | 2011-11-04 | 2016-04-20 | 上海日进机床有限公司 | 一种用于切割蓝宝石硅棒的切片机 |
CN106994640B (zh) * | 2017-04-18 | 2022-12-20 | 天津大学 | 一种活动式线带磨削加工装置 |
CN109333847A (zh) * | 2018-12-06 | 2019-02-15 | 中电工业互联网有限公司 | 一种新型的多线切割机主轴系统 |
CN116198039B (zh) * | 2023-04-28 | 2023-07-21 | 苏州晨晖智能设备有限公司 | 半导体单晶硅片切割设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1180328A (zh) * | 1996-02-28 | 1998-04-29 | 东京制纲株式会社 | 钢丝式切断加工装置及方法 |
CN201566060U (zh) * | 2009-12-29 | 2010-09-01 | 洛阳神合电子科技有限责任公司 | 硅片线切割机的切割总成 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1180328A (zh) * | 1996-02-28 | 1998-04-29 | 东京制纲株式会社 | 钢丝式切断加工装置及方法 |
CN201566060U (zh) * | 2009-12-29 | 2010-09-01 | 洛阳神合电子科技有限责任公司 | 硅片线切割机的切割总成 |
Non-Patent Citations (3)
Title |
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JP昭61-182759A 1986.08.15 |
JP特开2004-262179A 2004.09.24 |
JP特开平6-122117A 1994.05.06 |
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CN101767306A (zh) | 2010-07-07 |
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Inventor after: Liu Gangtian Inventor after: Cao Huimin Inventor after: Wu Bin Inventor after: Huo Yinlei Inventor after: Wang Shanshan Inventor after: Liu Lina Inventor after: Yang Xiaofan Inventor after: Xu Jingfei Inventor before: Shang Chunxiang |
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Free format text: CORRECT: ADDRESS; FROM: 471000 LUOYANG, HENAN PROVINCE TO: 471039 LUOYANG, HENAN PROVINCE Free format text: CORRECT: INVENTOR; FROM: SHANG CHUNXIANG TO: LIU GANGTIAN CAO HUIMIN WU BIN HUO YINLEI WANG SHANSHAN LIU LINA YANG XIAOFAN XU JINGFEI |
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Effective date of registration: 20131018 Address after: 471039 No. 48, Xiyuan Road, Jianxi District, Henan, Luoyang Applicant after: Henan University of Science and Technology Address before: 471000, Henan, Luoyang Province High-tech Zone Xin town after the village of Luoyang Jing Tong Electronic Technology Co., Ltd. Applicant before: Luoyang Shenhe Electronic Technology Co., Ltd. |
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