CN101749928A - Special baking oven and special movable material rack thereof for silicon material - Google Patents
Special baking oven and special movable material rack thereof for silicon material Download PDFInfo
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- CN101749928A CN101749928A CN201010018230A CN201010018230A CN101749928A CN 101749928 A CN101749928 A CN 101749928A CN 201010018230 A CN201010018230 A CN 201010018230A CN 201010018230 A CN201010018230 A CN 201010018230A CN 101749928 A CN101749928 A CN 101749928A
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Abstract
The invention relates to a special baking oven and a special material rack thereof for silicon material. The baking oven comprises a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor, a temperature sensor, a frame body, idler wheels and a silicon material box, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the baking oven, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, and the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven. The movable baking shelf thereof can facilitate loading/unloading and in/out of silicon material, save baking preparation time, and has the advantages of high baking efficiency and low energy consumption. The whole silicon material box can be directly moved in the baking oven for baking, thereby greatly shortening technology preparation time and reducing labor strength of operators.
Description
Technical field:
The present invention relates to the semi-conducting material technical field of drying, relate in particular to silicon material drying plant.
Background technology:
Along with constantly developing of semiconductor and solar energy industry, the demand of silicon material is increasing.The purity of silicon material is most important to the quality of final products, and some silicon material surface is subsidiary a lot of impurity, to must surface impurity be removed with the method for pickling, and then clean.The silicon material that cleaned is throwing the stokehold palpus through the oven dry processing, to remove attached to the moisture content on the silicon material.Conventional method is after the silicon material is installed with the Turnover Box branch, pack in a conventional oven with stacked system, heater is arranged on the below of hopper, processing is dried in the energising heating, adopt conventional bottom heated oven to dry, the silicon material that is positioned at bottom is dried soon, the silicon material that is positioned at the middle and upper levels then is difficult for oven dry, steam in the baking oven is difficult for discharging simultaneously, temperature in the baking oven is wayward, and being heated of silicon material is inhomogeneous, and silicon material drying efficiency is low, the energy consumption height presses for the high-efficiency and energy-saving type special baking oven for silicon material.But the applicant has developed the special baking oven for silicon material that a kind of silicon material layering oven dry and material frame can move freely for this reason.
The utility model content:
The invention provides a kind of special baking oven for silicon material and portable silicon material is dried special-purpose material frame.It is the drying efficiency height not only, and energy consumption is low, and FCL silicon material can directly move in the baking oven and dry, and has compressed the technological preparation time significantly, can alleviate operator's labour intensity simultaneously.
The technical solution adopted in the present invention is:
Special baking oven for silicon material of the present invention, comprise insulation shell, inner bag, logical hot-flow flue, heater, circulating fan, dehumidifier blower fan, dehumidification tube, humidity sensor and temperature sensor, inner bag places in the insulation shell, be provided with the High Temperature Gas body cavity at the top of inner bag, the High Temperature Gas body cavity is enclosed by the top of inner bag and the interior top of chamber of insulation shell, and the High Temperature Gas body cavity communicates with the inner chamber of inner bag by air-vent; Described logical hot-flow flue is surrounded by the inner chamber of insulation shell and inner bag and forms, and heater is arranged in the logical hot-flow flue, and logical hot-flow flue communicates with the inner chamber of inner bag by air-vent; Between High Temperature Gas body cavity and logical hot-flow flue circulating fan is housed, the dehumidifier blower fan is installed in the top of insulation shell, and the inlet scoop of dehumidifier blower fan communicates with the inner chamber of inner bag; Be provided with in the bottom of baking oven and be convenient to the guide rail that portable silicon material is dried special-purpose material frame turnover; Be provided with temperature sensor and humidity sensor in the inner chamber of inner bag, heater is controlled by temperature sensor, and humidity sensor is controlled whole baking oven.
Further, described logical hot-flow flue is made up of left air channel, right air channel, air channel, back and lower air duct, all is provided with heater in left air channel, right air channel, air channel, back and lower air duct, and the dehumidifier blower fan communicates with the inner chamber of inner bag by dehumidification tube.
Described portable silicon material is dried special-purpose material frame, comprise frame body, roller and fold the silicon hopper that forms by the stainless steel web plate, described frame body is integrally welded by four root posts and crosspiece, crosspiece distributes equally spacedly along the column short transverse, top at each root crosspiece is provided with limited block, corresponding limited block on all crosspieces is arranged in a straight line at vertical direction, the silicon hopper places on the crosspiece and is spacing by limited block, after frame body is filled the silicon hopper, form many transverse air channels and vertical air flue, roller is installed in the bottom of frame body.
Owing in baking oven, be provided with the logical hot-flow flue and the warm and humid air chamber of enclosing by insulation shell and inner bag, warm and humid air chamber is arranged on the inner top of baking oven, logical hot-flow flue is arranged on the medial surface of baking oven, in logical hot-flow flue, heater is housed, on three medial surfaces of inner bag, offered air-vent equably, the circulated air function forces the high temperature hot gas in the logical hot-flow flue to enter in the inner bag from the side air-vent of inner bag, from the material frame in length and breadth air flue and the silicon hopper silicon material fully contact, be heated attached to the moisture content on the silicon material and be vaporized into steam, by the dehumidifier blower fan that places the baking oven top steam of interior gallbladder intracavity is extracted out outside the baking oven, entered in the warm and humid air chamber high-temperature gas and then send into and realize in the logical hot-flow flue that hot gas cycle uses by circulating fan.In drying course, owing to be provided with humidity sensor and temperature sensor in baking oven, heater is controlled by temperature sensor, when the temperature in the baking oven is lower than preset temperature, temperature sensor promptly sends the signal of telecommunication, and control heater is guaranteed the temperature stabilization predetermined value in the baking oven; When the humidity in the baking oven is scheduled to predetermined moisture, illustrate that the oven dry of silicon material has reached requirement, humidity sensor promptly sends the signal of telecommunication, closes baking oven automatically, on the contrary baking oven then can normally be dried.This special baking oven for silicon material has overcome the shortcoming that existing a conventional oven exists, and the setting of circulating fan makes the thermal current of oven interior to form backflow in baking oven, and the thermal current of being more convenient for fully contacts with silicon material on placing the material frame.The automation that has realized silicon material baking oven of setting up of temperature sensor and humidity sensor is controlled.Mobile material frame can make things convenient for the loading and unloading and the turnover of silicon material, save and dry time, alleviate labor intensity of operating personnel, this special baking oven for silicon material structural design is simple, the hot gas operating path is unimpeded, be more conducive to the heating and the oven dry of silicon material, and can automation control, can not only improve drying efficiency, and can cut down the consumption of energy significantly, human cost is low.
Description of drawings:
Fig. 1, Fig. 2 are structural representation of the present invention; Fig. 2 is an A-A cutaway view among Fig. 1.
The 1-insulation shell; The 2-inner bag; 3-leads to hot-flow flue; The 4-heater; The 5-circulating fan; 6-dehumidifier blower fan; The 7-dehumidification tube; The 8-humidity sensor; The 9-temperature sensor; 10-High Temperature Gas body cavity; The 13-air-vent; The 14-guide rail; 15-material frame; The 151-column; The 152-crosspiece; 153-silicon hopper; The 154-limited block; The 155-roller; Air channel, a 31-left side; The right air channel of 32-; Air channel behind the 33-; The 34-lower air duct.
The specific embodiment:
As accompanying drawing 1, shown in Figure 2, special baking oven for silicon material of the present invention, comprise insulation shell 1, inner bag 2, logical hot-flow flue 3, heater 4, circulating fan 5, dehumidifier blower fan 6, dehumidification tube 7, humidity sensor 8 and temperature sensor 9, inner bag 2 places in the insulation shell 1, be provided with High Temperature Gas body cavity 10 at the top of inner bag 2, High Temperature Gas body cavity 10 is enclosed by the top of inner bag 2 and the interior top of chamber of insulation shell 1, and High Temperature Gas body cavity 10 communicates by the inner chamber of air-vent 13 with inner bag 2; Described logical hot-flow flue 3 is surrounded by the inner chamber of insulation shell 1 and inner bag 2 and forms, it is made up of left air channel 31, right air channel 32, air channel 33, back and lower air duct 34, all be provided with heater 4 in left air channel 31, right air channel 32, air channel 33, back and lower air duct 34, all logical hot-flow flues 3 communicate by the inner chamber of air-vent 13 with inner bag 2; Between High Temperature Gas body cavity 10 and logical hot-flow flue 3 circulating fan 5 is housed, promptly the air inlet of circulating fan 5 communicates with High Temperature Gas body cavity 10, and air outlet communicates with logical hot-flow flue 3; Dehumidifier blower fan 6 is installed in the top of insulation shell 1, and dehumidifier blower fan 6 communicates by the inner chamber of dehumidification tube 7 with inner bag 2; Be provided with in the bottom of baking oven and be convenient to the guide rail 14 that portable silicon material is dried special-purpose material frame 15 turnover; Be provided with temperature sensor 9 and humidity sensor 8 in the inner chamber of inner bag 2, heater 4 is by temperature sensor 9 controls, and humidity sensor 8 is controlled whole baking oven.Described portable silicon material is dried special-purpose material frame 15 by frame body, roller and fold the silicon hopper that forms by the stainless steel web plate and form, described frame body is integrally welded by four root posts 151 and crosspiece 152, crosspiece 152 distributes equally spacedly along column 151 short transverses, be provided with limited block 154 in the top of each root crosspiece 152, corresponding limited block 154 on all crosspieces 152 is arranged in a straight line at vertical direction, silicon hopper 153 places on the crosspiece 152 and is spacing by limited block 154, after frame body is filled silicon hopper 153, form many transverse air channels and vertical air flue, roller 155 is installed in the bottom of frame body.
Claims (3)
1. special baking oven for silicon material, it is characterized in that: comprise insulation shell (1), inner bag (2), logical hot-flow flue (3), heater (4), circulating fan (5), dehumidifier blower fan (6), dehumidification tube (7), humidity sensor (8) and temperature sensor (9), inner bag (2) places in the insulation shell (1), be provided with High Temperature Gas body cavity (10) at the top of inner bag (2), High Temperature Gas body cavity (10) is enclosed by the top of inner bag (2) and the interior top of chamber of insulation shell (1), and High Temperature Gas body cavity (10) communicates by the inner chamber of air-vent (13) with inner bag (2); Described logical hot-flow flue (3) is surrounded by the inner chamber of insulation shell (1) and inner bag (2) and forms, it is made up of left air channel (31), right air channel (32), air channel (33), back and lower air duct (34), all be provided with heater (4) in left air channel (31), right air channel (32), air channel (33), back and lower air duct (34), all logical hot-flow flues (3) communicate by the inner chamber of air-vent (13) with inner bag (2); Between High Temperature Gas body cavity (10) and logical hot-flow flue (3), circulating fan (5) is housed, i.e. the air inlet of circulating fan (5) and High Temperature Gas body cavity (10), air outlet communicates with logical hot-flow flue (3); Dehumidifier blower fan (6) is installed in the top of insulation shell (1), and dehumidifier blower fan (6) communicates by the inner chamber of dehumidification tube (7) with inner bag (2); Be provided with in the bottom of baking oven and be convenient to the guide rail (14) that portable silicon material is dried special-purpose material frame (15) turnover; Be provided with temperature sensor (9) and humidity sensor (8) in the inner chamber of inner bag (2), heater (4) is by temperature sensor (9) control, and humidity sensor (8) is controlled whole baking oven.
2. according to the described special baking oven for silicon material of claim 1, it is characterized in that: described logical hot-flow flue (3) is made up of left air channel (31), right air channel (32), air channel (33), back and lower air duct (34), all be provided with heater (4) in left air channel (31), right air channel (32), air channel (33), back and lower air duct (34), dehumidifier blower fan (6) communicates by the inner chamber of dehumidification tube (7) with inner bag (2).
3. the described portable silicon material of claim 1 is dried special-purpose material frame (15), it is characterized in that: it is by frame body, roller and fold the silicon hopper that forms by the stainless steel web plate and form, described frame body is integrally welded by four root posts (151) and crosspiece (152), crosspiece (152) distributes equally spacedly along column (151) short transverse, be provided with limited block (154) in the top of each root crosspiece (152), corresponding limited block (154) on all crosspieces (152) is arranged in a straight line at vertical direction, silicon hopper (153) places crosspiece (152) last and spacing by limited block (154), after frame body is filled silicon hopper (153), form many transverse air channels and vertical air flue, roller (155) is installed in the bottom of frame body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010018230A CN101749928A (en) | 2010-01-20 | 2010-01-20 | Special baking oven and special movable material rack thereof for silicon material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010018230A CN101749928A (en) | 2010-01-20 | 2010-01-20 | Special baking oven and special movable material rack thereof for silicon material |
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| CN101749928A true CN101749928A (en) | 2010-06-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201010018230A Pending CN101749928A (en) | 2010-01-20 | 2010-01-20 | Special baking oven and special movable material rack thereof for silicon material |
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| CN102564077A (en) * | 2010-11-23 | 2012-07-11 | 南通新景华企业管理服务有限公司 | Electric drying stove |
| CN103105045A (en) * | 2012-12-12 | 2013-05-15 | 常州市立威刀具有限公司 | Drying machine |
| CN103123209A (en) * | 2013-03-15 | 2013-05-29 | 东兴市怡诚食品开发有限公司 | Double-door hot air circulating oven |
| CN103245171A (en) * | 2012-02-12 | 2013-08-14 | 葛月红 | Slide specimen drying box |
| CN103499187A (en) * | 2013-09-11 | 2014-01-08 | 唐道雁 | Fan framework drying device |
| CN103591782A (en) * | 2013-10-10 | 2014-02-19 | 四川南充首创科技开发有限公司 | Rotary drying room |
| CN103940202A (en) * | 2014-04-30 | 2014-07-23 | 全椒海丰印刷包装有限公司 | Convection wind force paper pipe oven |
| CN104223597A (en) * | 2014-09-11 | 2014-12-24 | 温州碧戈之都鞋业有限公司 | Oven device for automatic shoemaking |
| CN104654757A (en) * | 2015-02-02 | 2015-05-27 | 湖南农业大学 | Drying system for dark green tea |
| CN104949476A (en) * | 2015-06-25 | 2015-09-30 | 芜湖鸣人热能设备有限公司 | Heat energy drying equipment |
| CN105202668A (en) * | 2015-10-23 | 2015-12-30 | 无锡溥汇机械科技有限公司 | Simple constant temperature circulating device |
| CN105222565A (en) * | 2015-10-29 | 2016-01-06 | 桂林斯壮微电子有限责任公司 | A kind of circulation baking oven |
| CN105371609A (en) * | 2015-11-30 | 2016-03-02 | 湖州优创科技有限公司 | Wood drying box with detection device for solid wood floors |
| CN105387694A (en) * | 2015-11-30 | 2016-03-09 | 湖州优创科技有限公司 | Wood drying box used for solid wood floor |
| CN105651019A (en) * | 2016-03-23 | 2016-06-08 | 叶侃 | Ceramic product processing oven |
| CN105716385A (en) * | 2016-03-08 | 2016-06-29 | 宿迁市天彩玻璃纤维有限公司 | Glass fiber drying treatment device |
| CN107756696A (en) * | 2017-09-26 | 2018-03-06 | 中国科学院长春光学精密机械与物理研究所 | Composite samming solidification equipment |
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| CN108844296A (en) * | 2018-05-15 | 2018-11-20 | 界首市皖俊轴承有限公司 | A kind of drying unit for bearing |
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| CN103245171A (en) * | 2012-02-12 | 2013-08-14 | 葛月红 | Slide specimen drying box |
| CN103105045A (en) * | 2012-12-12 | 2013-05-15 | 常州市立威刀具有限公司 | Drying machine |
| CN103123209A (en) * | 2013-03-15 | 2013-05-29 | 东兴市怡诚食品开发有限公司 | Double-door hot air circulating oven |
| CN103123209B (en) * | 2013-03-15 | 2014-12-03 | 东兴市怡诚食品开发有限公司 | Double-door hot air circulating oven |
| CN103499187A (en) * | 2013-09-11 | 2014-01-08 | 唐道雁 | Fan framework drying device |
| CN103591782B (en) * | 2013-10-10 | 2016-04-06 | 四川南充首创科技开发有限公司 | Rotate drying room |
| CN103591782A (en) * | 2013-10-10 | 2014-02-19 | 四川南充首创科技开发有限公司 | Rotary drying room |
| CN103940202B (en) * | 2014-04-30 | 2016-03-23 | 全椒海丰印刷包装有限公司 | Convection current wind-force paper tube bake oven |
| CN103940202A (en) * | 2014-04-30 | 2014-07-23 | 全椒海丰印刷包装有限公司 | Convection wind force paper pipe oven |
| CN104223597A (en) * | 2014-09-11 | 2014-12-24 | 温州碧戈之都鞋业有限公司 | Oven device for automatic shoemaking |
| CN104223597B (en) * | 2014-09-11 | 2016-05-25 | 温州碧戈之都鞋业有限公司 | A kind of automation shoemaking bake oven device |
| CN104654757A (en) * | 2015-02-02 | 2015-05-27 | 湖南农业大学 | Drying system for dark green tea |
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| CN105222565A (en) * | 2015-10-29 | 2016-01-06 | 桂林斯壮微电子有限责任公司 | A kind of circulation baking oven |
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| CN105387694B (en) * | 2015-11-30 | 2018-05-11 | 徐海军 | A kind of solid wooden floor board timber stoving case |
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| CN105651019A (en) * | 2016-03-23 | 2016-06-08 | 叶侃 | Ceramic product processing oven |
| CN108317818A (en) * | 2017-01-16 | 2018-07-24 | 科峤工业股份有限公司 | It can the apparatus for baking that falls of anti-object |
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| CN108844296A (en) * | 2018-05-15 | 2018-11-20 | 界首市皖俊轴承有限公司 | A kind of drying unit for bearing |
| CN111043847B (en) * | 2018-10-11 | 2022-05-10 | 云南师范大学 | Multi-variable control drying device of solar heat collector |
| CN111043847A (en) * | 2018-10-11 | 2020-04-21 | 云南师范大学 | Multi-variable control drying device of solar heat collector |
| CN111197917A (en) * | 2018-11-20 | 2020-05-26 | 新特能源股份有限公司 | Silicon material drying device |
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Application publication date: 20100623 |