CN101736302B - 一种同质多层纳米金属薄膜材料的制备方法 - Google Patents
一种同质多层纳米金属薄膜材料的制备方法 Download PDFInfo
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CN101736302B true CN101736302B (zh) | 2012-07-04 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102443777A (zh) * | 2010-10-12 | 2012-05-09 | 无锡华润上华半导体有限公司 | 金属层淀积方法 |
CN102409309B (zh) * | 2011-11-01 | 2013-07-10 | 西安交通大学 | 一种共格/半共格结构的Al/W 多层膜制备方法 |
CN102925869B (zh) * | 2012-10-26 | 2015-01-07 | 西安交通大学 | 一种制备非晶/纳米晶多层结构薄膜的方法 |
CN105088140A (zh) * | 2015-08-04 | 2015-11-25 | 中山泰维电子有限公司 | 一种铜铝合金晶振片镀膜工艺 |
WO2020093375A1 (zh) * | 2018-11-09 | 2020-05-14 | 深圳市元子科技有限公司 | 膜及制备工艺 |
CN110331372A (zh) * | 2019-08-19 | 2019-10-15 | 西安稀有金属材料研究院有限公司 | 一种制备高硬度体心立方纳米金属Mo薄膜的方法 |
CN112111717A (zh) * | 2020-09-01 | 2020-12-22 | 星弧涂层新材料科技(苏州)股份有限公司 | 轴瓦复合涂层加工方法及基于pvd技术的轴瓦复合涂层 |
CN112746256B (zh) * | 2020-12-22 | 2022-05-20 | 南京理工大学 | 高强度高塑性层状异构铝基复合材料及其制备方法 |
CN114540752B (zh) * | 2022-03-02 | 2023-10-03 | 西安工业大学 | 具有导电耐蚀涂层的燃料电池金属极板及其制备方法 |
CN114908386B (zh) * | 2022-05-18 | 2024-05-28 | 江西理工大学 | 极薄多层结构型纳米孪晶铜箔及其制备方法和应用 |
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Application publication date: 20100616 Assignee: Xi'an Fuke Materials Technology Co., Ltd. Assignor: Xi'an Jiaotong University Contract record no.: 2013610000066 Denomination of invention: Preparation method of homogeneous multilayer nanometer metallic film material Granted publication date: 20120704 License type: Exclusive License Record date: 20130628 |
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