CN101704187B - 钽靶材的织构形成方法 - Google Patents
钽靶材的织构形成方法 Download PDFInfo
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- CN101704187B CN101704187B CN 200910117586 CN200910117586A CN101704187B CN 101704187 B CN101704187 B CN 101704187B CN 200910117586 CN200910117586 CN 200910117586 CN 200910117586 A CN200910117586 A CN 200910117586A CN 101704187 B CN101704187 B CN 101704187B
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- tantalum
- heat treatment
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- tantalum target
- forging
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CN 200910117586 CN101704187B (zh) | 2009-11-13 | 2009-11-13 | 钽靶材的织构形成方法 |
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CN 200910117586 CN101704187B (zh) | 2009-11-13 | 2009-11-13 | 钽靶材的织构形成方法 |
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CN101704187A CN101704187A (zh) | 2010-05-12 |
CN101704187B true CN101704187B (zh) | 2011-08-17 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102658346A (zh) * | 2012-04-06 | 2012-09-12 | 宁夏东方钽业股份有限公司 | 一种大规格钽靶材的锻造方法 |
CN102699247B (zh) * | 2012-05-18 | 2014-06-18 | 宁夏东方钽业股份有限公司 | 一种超导钽棒的锻造方法 |
CN102989767B (zh) * | 2012-08-16 | 2015-12-16 | 宁夏东方钽业股份有限公司 | 高性能钽靶材的热轧工艺 |
CN103028898A (zh) | 2012-08-16 | 2013-04-10 | 宁夏东方钽业股份有限公司 | 一种高性能钽靶材的制备方法 |
CN102909299B (zh) * | 2012-08-16 | 2015-08-26 | 宁夏东方钽业股份有限公司 | 高性能钽靶材的热锻工艺 |
CN102794617A (zh) * | 2012-09-09 | 2012-11-28 | 西安方科新材料科技有限公司 | 一种磁控溅射用管状铌靶材的制备方法 |
CN104451567B (zh) * | 2014-12-29 | 2017-11-10 | 宁夏东方钽业股份有限公司 | 一种钽靶材及其制备方法 |
CN106756832B (zh) * | 2016-12-27 | 2019-03-12 | 宁夏东方钽业股份有限公司 | 一种靶材的制备方法 |
CN110735068B (zh) * | 2019-11-21 | 2020-08-11 | 中南大学 | 一种钴钽锆合金靶材的制备方法及其应用 |
CN113649771B (zh) * | 2021-08-16 | 2022-10-28 | 宁波江丰电子材料股份有限公司 | 一种铜蒸发料的制备方法 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: DONGFANG TANTALUM INDUSTRY CO. LTD., NINGXIA Free format text: FORMER OWNER: XIBEI INST. OF RARE METAL MATERIAL Effective date: 20110307 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20110307 Address after: 753000 Dawukou Road, Shizuishan, the Ningxia Hui Autonomous Region metallurgical Road, No. 119 Applicant after: Dongfang Tantalum Industry Co., Ltd., Ningxia Address before: 753000 Dawukou Road, Shizuishan, the Ningxia Hui Autonomous Region metallurgical Road, No. 119 Applicant before: Xibei Inst. of Rare Metal Material |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |