CN101687322B - 抓具、特别是伯努利吸盘 - Google Patents
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- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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Abstract
本发明涉及一种抓具、特别是伯努利吸盘(1),用于抓取平面的构件如硅基的晶片(2),包括:一个与一可控制的机械手臂(3)连接的夹紧环(4);一个经由一喇叭形构件(5)与夹紧环(4)连接的挡盘(6),该挡盘包括一抓取面(7),其与一穿过喇叭形构件(5)和挡盘(6)的流动系统(8)连通,经由该流动系统在伯努利吸盘(1)上施加一超压以后在挡盘(6)的抓取面(7)上产生一负压,用于吸取待抓取的晶片(2);一个支承环(10)的涂橡胶的支承面(9),该支承面内置在抓取面(7)中,通过该支承面提供在抓取面(7)上被吸住的晶片(2)的防滑的移动;和一个传感器(11),用以识别在抓取面(7)上被吸住的晶片(2)。为了实现待抓取的晶片特别防撞击地贴靠在抓具的抓取面上,按本发明设有一环绕地与抓具(1)匹配的缓冲装置(12),该缓冲装置朝抓具(2)的俯视图看去的轮廓在外轮廓上环绕地突出于抓具并且其对于待抓取的晶片(2)在其由吸取引起的向抓取面(7)的接近时形成一个这样的缓冲阻力,使得晶片(2)防撞击地贴靠在支承环(10)的涂橡胶的支承面(9)上。
Description
技术领域
本发明涉及一种抓具、特别是伯努利吸盘,用于抓取平面的构件如硅基的晶片,包括:一个与一可控制的机械手臂连接的夹紧环;一个经由一喇叭形构件与夹紧环连接的挡盘,该挡盘包括一抓取面,该抓取面与一穿过喇叭形构件和挡盘的流动系统连通,经由该流动系统在伯努利吸盘上施加一超压以后在挡盘的抓取面上产生一负压,用于吸取待抓取的晶片;一个支承环的内置在抓取面中的支承面,通过该支承面提供在抓取面上被吸住的晶片的防滑的移动;和一个环绕地与抓具匹配的缓冲装置,该缓冲装置朝抓具的俯视图看去的轮廓在外轮廓上环绕地突出于抓具的全部其余的构件,并且该缓冲装置对于待抓取的晶片在其由吸取引起的向抓取面的接近时形成这样的缓冲阻力,使得晶片防撞击地贴靠在支承环的支承面上。
背景技术
例如已知,在有断裂危险的硅基的晶片或太阳能电池的自动化的制造中,为了各种各样的使用目的采用具有基于伯努利原理的抓具的抓取系统,利用它通过在抓具的抓取面上的产生负压,能够在正好现存的位置上单独地无接触地抓住晶片。但在这方面已证明相应抓取的晶片在抓具的抓取面上由吸取引起的无制动的冲击是晶片损坏的危险源。
发明内容
因此本发明的目的在于,提供一种开头所述型式的抓具,利用它用于在无接触地抓住平面的构件如硅基的晶片时减小废品,实现待抓取的晶片在抓具的抓取面上特别防撞击的贴靠。
按照本发明,通过以下技术措施达到该目的,即:环绕地与抓具匹配的缓冲装置由一具有弹性刷毛的毛刷构成,所述刷毛朝抓具的侧视图看去突出于抓具的全部其余的构件一段在1.5mm至3.5mm范围内的距离并且对于待抓取的晶片在由吸取引起的向抓取面的接近时作为第一接触形成缓冲阻力,以及在抓具上设置一电容式传感器,用以识别在抓取面上被吸住的晶片。
与自由伸出的刷毛端相反的刷毛端可以固定在一环绕的毛刷边缘中,毛刷边缘可更换地固定在抓具的一个环绕的夹紧槽中,该夹紧槽由夹紧环和喇叭形构件构成。
还可设想,抓具的缓冲装置构成为一圆形的由塑料制成的薄膜坯件的形式,其具有从后者的圆周径向向内延伸的、通过开口彼此分离的弹性的薄片,它们保证在被抓住的平面构件由吸取引起的接近时所需要的缓冲,等价的实施形式同样是可能的。
优选,朝抓具的俯视图看去,挡盘的抓取面的轮廓和毛刷的轮廓是圆形的并且挡盘和毛刷同心于抓具的轴线设置。此外毛刷的弹性的刷毛朝抓具的俯视图看去可以构成一开口的约340°的圆环,其中为用于识别被吸住的晶片的电容式传感器在空间上配置毛刷的无刷毛的环形部分。毛刷的刷毛也可以相对于挡盘的抓取面的平面成16.5°±1°的角度向下倾斜地延伸。优选毛刷的弹性的刷毛由聚酰胺构成。
按照本发明的抓具确保待吸取的晶片在任何情况下首先与毛刷的弹性的刷毛发生接触并因此在由吸取引起的向抓具的抓取面的接近时几乎可以说小心地以机械的方式被缓冲并接着防撞击地贴靠在支承环的涂橡胶的支承面上。在这种情况下,无论平面的构件平行于或不平行于支承面是无关紧要的,更确切地说在任何情况下减少有断裂危险的晶片在其操纵中损坏的危险并因此显著地减少其废品。涂橡胶的支承面在待抓取的晶片与抓具的抓取面之间保证对于快速的侧向移动所需要的摩擦。
上述目的按本发明通过以下技术措施实现,即:支承环的支承面是涂橡胶的,环绕地与抓具匹配的缓冲装置由一本身封闭的、密封唇式的、由软材料制成的橡胶环构成,通过该橡胶环在晶片由吸取引起地贴靠在支承环的涂橡胶的内置在抓取面中的支承面上时在周向上相对于由流动系统穿过的挡盘气密地密封晶片,以及在抓具设置一电容式传感器,用以识别在抓取面上被吸住的晶片。在该实施例中,伯努利吸盘的操作紧接在晶片的吸取引起的紧贴涂橡胶的支承面之后通过接通一在流动系统的空气接头上连接的真空泵转为真空操作,而同时断开流动系统的一第二空气接头,其为了产生用于吸取晶片的压力差供给空气。在伯努利吸取晶片时,密封唇式的橡胶环拉紧并且与晶片一起形成一完整的密封圈。在密封圈内可以建立真空,从而通过大气的外部压力将晶片压在涂橡胶的支承面上并防滑地固定。按这种方式在支承环的涂橡胶的支承面上可靠地固定晶片时可以显著地减少空气消耗量。
附图说明
现在借助附图描述按照本发明的抓具的优选的实施形式。其中:
图1示意示出的伯努利吸盘与一待抓取的晶片相配的剖开的侧视图;
图2从下面看去的伯努利吸盘的透视图,无待抓取的晶片;
图3从上面看去的伯努利吸盘的透视图,无待抓取的晶片;以及
图4相当于图2的伯努利吸盘的透视图,但其中抓具的缓冲装置由一本身封闭的橡胶环构成。
具体实施方式
如由图1至3可看出的,用于无接触抓取平面的构件如硅基的晶片2的伯努利吸盘1基本上包括一夹紧环4,其连接于至少一个可控制的机械手臂3;一挡盘6,其与夹紧环4经由一喇叭形构件5相连接并且具有一抓取面7,在其中内置一支承环10的一涂橡胶的支承面9;一穿过喇叭形构件5和挡板6的流动系统8,其与抓具1的抓取面7连通;一在抓具1上环绕适应的、以一具有弹性刷毛19的毛刷形式的缓冲装置12和一电容式传感器,用以识别一由抓具1被吸住的晶片2。
在伯努利吸盘1上施加一超压时,经由流动系统8在挡盘6的抓取面7上产生一负压,以便由于形成压力差吸取待抓取的晶片2。如图1最好说明的,由于同心于抓具1的纵轴线18设置挡盘6和构成缓冲装置的毛刷12并且毛刷的圆形轮廓,朝抓具1的俯视图看出,按外轮廓环绕地突出于抓具并从而突出于挡盘6的圆形的抓取面7,待抓取的晶片2在吸取引起的向抓取面7的接近时在任何情况下首先与毛刷12的弹性刷毛13发生接触,毛刷朝抓具1的侧视图看去,突出于抓具1的夹紧环4、喇叭形构件5和挡盘6一个在1.5mm至3.5mm范围内的尺寸。毛刷12的刷毛13按图1可以相对于挡盘6的抓取面7的平面成16.5°±1°向下倾斜地延伸,所述刷毛对于晶片2的吸取引起的接近施加一这样的缓冲阻力,使其防撞击地贴靠在支承环10的涂橡胶的支承面9上。因此以机械的和同时节省能量的方式显著地减少晶片2的断裂危险。
如由图1还可得出的,相反于自由伸出的刷毛端14的刷毛端15固定于一环绕的毛刷边缘16中,毛刷边缘16可更换地保持在抓具1的环绕的夹紧槽17中,其由夹紧环4和喇叭形构件5构成。因此能够按照待抓取的晶片2的面积尺寸在需要时以适当的方式更换缓冲装置。
图2和3示出,在抓具1的所示的实施形式中,毛刷12的弹性刷毛13朝抓具1的俯视图看去构成一开口的约340°的圆环,其中毛刷12的无刷毛的环部分19在空间上与电容式传感器11相配,用以识别被吸住的晶片2。
按照图4,抓具1的缓冲装置12环绕地与抓具匹配并且在外轮廓上环绕地突出于抓具1,所述缓冲装置由一本身封闭的、密封唇式的、由适合的弹性的很软的材料构成的橡胶环,借助于该橡胶环在晶片由吸取引起地贴靠在支承环10的涂橡胶的支承面9上时在周向上相对于由流动系统8穿过的挡盘气密地密封晶片2。伯努利吸盘1的操作紧接在晶片2的吸取引起的贴紧支承环10的涂橡胶的支承面9之后立即通过接通一在流动系统8的空气接头上连接的真空泵转为真空操作,而同时断开流动系统8的一第二空气接头,其为了产生用于吸取晶片2的压力差供给空气。在伯努利吸盘1吸取晶片2时,密封唇式的橡胶环12拉紧并且与晶片2一起形成一完整的密封圆。在密封圆内可以建立真空,从而通过大气压力将晶片2压在涂橡胶的支承面9上并防滑地保持。按这种方式在支承环10的支承面9上可靠地固定晶片2时显著地减少空气消耗量。
附图标记清单
1 抓具,伯努利吸盘
2 平面的构件,硅基的晶片
3 机械手臂
4 夹紧环
5 喇叭形构件
6 挡盘
7 抓取面
8 流动系统
9 涂橡胶的支承面
10 支承环
11 传感器
12 缓冲装置,毛刷,橡胶环
13 刷毛
14 自由伸出的刷毛端
15 固定的刷毛端
16 毛刷边缘
17 夹紧槽
18 抓具的纵轴线
19 毛刷的无刷毛的环部分
d 一定的尺寸
Claims (9)
1.用于抓取平面的构件的抓具,包括:一个与一可控制的机械手臂(3)连接的夹紧环(4);一个经由一喇叭形构件(5)与夹紧环(4)连接的挡盘(6),该挡盘包括一抓取面(7),该抓取面与一穿过喇叭形构件(5)和挡盘(6)的流动系统(8)连通,经由该流动系统在抓具(1)上施加一超压以后在挡盘(6)的抓取面(7)上产生一负压,用于吸取待抓取的晶片(2);一个支承环(10)的内置在抓取面(7)中的支承面(9),通过该支承面提供在抓取面(7)上被吸住的晶片(2)的防滑的移动;和一个环绕地与抓具(1)匹配的缓冲装置(12),该缓冲装置朝抓具(1)的俯视图看去的轮廓在外轮廓上环绕地突出于抓具(1)的全部其余的构件(4、5、6),并且该缓冲装置对于待抓取的晶片(2)在其由吸取引起的向抓取面(7)的接近时形成这样的缓冲阻力,使得晶片(2)防撞击地贴靠在支承环(10)的支承面(9)上;其特征在于,
支承环(10)的支承面(9)是涂橡胶的,
环绕地与抓具(1)匹配的缓冲装置(12)由一具有弹性刷毛(13)的毛刷(12)构成,所述刷毛朝抓具(1)的侧视图看去突出于抓具(1)的全部其余的构件(4、5、6)一段在1.5mm至3.5mm范围内的距离(d)并且对于待抓取的晶片(2)在由吸取引起的向抓取面(7)的接近时作为第一接触形成缓冲阻力,以及
在抓具(1)上设置一电容式传感器(11),用以识别在抓取面(7)上被吸住的晶片(2)。
2.按照权利要求1所述的抓具,其特征在于,与自由伸出的刷毛端(14)相反的刷毛端(15)固定在一环绕的毛刷边缘(16)中,该毛刷边缘可更换地保持在抓具(1)的一环绕的夹紧槽(17)中,该夹紧槽通过夹紧环(4)和喇叭形构件(5)形成。
3.按照权利要求1或2所述的抓具,其特征在于,朝抓具(1)的俯视图看去,挡盘(6)的抓取面(7)的轮廓和毛刷(12)的轮廓是圆形的,并且挡盘(6)和毛刷(12)与抓具(1)的纵轴线(18)同轴地设置。
4.按照权利要求1或2所述的抓具,其特征在于,毛刷(12)的弹性刷毛(13)朝抓具(1)的俯视图看去构成一开口的约340°的圆环,其中,用于识别被吸住的晶片(2)的电容式传感器(11)在空间上与毛刷(12)的无刷毛的环部分(19)相配。
5.按照权利要求1或2所述的抓具,其特征在于,毛刷(12)的刷毛(13)相对于挡盘(6)的抓取面(7)的平面成16.5°±1°的角度向下倾斜地延伸。
6.按照权利要求1或2所述的抓具,其特征在于,毛刷(12)的弹性的刷毛(13)由聚酰胺构成。
7.按照权利要求1或2所述的抓具,其特征在于,该抓具是用于抓取硅基的晶片的伯努利吸盘。
8.用于抓取平面的构件的抓具,包括:一个与一可控制的机械手臂(3)连接的夹紧环(4);一个经由一喇叭形构件(5)与夹紧环(4)连接的挡盘(6),该挡盘包括一抓取面(7),该抓取面与一穿过喇叭形构件(5)和挡盘(6)的流动系统(8)连通,经由该流动系统在抓具(1)上施加一超压以后在挡盘(6)的抓取面(7)上产生一负压,用于吸取待抓取的晶片(2);一个支承环(10)的内置在抓取面(7)中的支承面(9),通过该支承面提供在抓取面(7)上被吸住的晶片(2)的防滑的移动;和一个环绕地与抓具(1)匹配的缓冲装置(12),该缓冲装置朝抓具(1)的俯视图看去的轮廓在外轮廓上环绕地突出于抓具(1)的全部其余的构件(4、5、6)并且该缓冲装置对于待抓取的晶片(2)在其由吸取引起的朝向抓取面(7)的接近时形成这样的缓冲阻力,使得晶片(2)防撞击地贴靠在支承环(10)的支承面(9)上;其特征在于,
支承环(10)的支承面(9)是涂橡胶的,
环绕地与抓具(1)匹配的缓冲装置(12)由一本身封闭的、密封唇式的、由软材料制成的橡胶环构成,通过该橡胶环在晶片由吸取引起地贴靠在支承环(10)的涂橡胶的内置在抓取面(7)中的支承面(9)上时在周向上相对于由流动系统(8)穿过的挡盘(6)气密地密封晶片(2),以及
在抓具(1)上设置一电容式传感器(11),用以识别在抓取面(7)上被吸住的晶片(2)。
9.按照权利要求8所述的抓具,其特征在于,该抓具是用于抓取硅基的晶片的伯努利吸盘。
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DE202007007721.1 | 2007-05-31 | ||
DE202007007721U DE202007007721U1 (de) | 2007-05-31 | 2007-05-31 | Greifer, insbesondere Bernoulli-Greifer |
PCT/DE2008/000789 WO2008145085A1 (de) | 2007-05-31 | 2008-05-05 | Greifer, insbesondere bernoulli-greifer |
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CN101687322B true CN101687322B (zh) | 2012-09-19 |
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US (1) | US8172288B2 (zh) |
EP (1) | EP2167285B1 (zh) |
JP (1) | JP5100829B2 (zh) |
KR (1) | KR101423362B1 (zh) |
CN (1) | CN101687322B (zh) |
CA (1) | CA2688226C (zh) |
DE (1) | DE202007007721U1 (zh) |
MY (1) | MY174425A (zh) |
RU (1) | RU2466857C2 (zh) |
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- 2008-05-05 CN CN2008800180717A patent/CN101687322B/zh not_active Expired - Fee Related
- 2008-05-05 EP EP08758047.8A patent/EP2167285B1/de not_active Not-in-force
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RU2466857C2 (ru) | 2012-11-20 |
US20100171331A1 (en) | 2010-07-08 |
KR101423362B1 (ko) | 2014-07-24 |
WO2008145085A1 (de) | 2008-12-04 |
EP2167285A1 (de) | 2010-03-31 |
CN101687322A (zh) | 2010-03-31 |
KR20100018514A (ko) | 2010-02-17 |
RU2009148775A (ru) | 2011-07-10 |
JP2010527805A (ja) | 2010-08-19 |
JP5100829B2 (ja) | 2012-12-19 |
TW200849460A (en) | 2008-12-16 |
CA2688226A1 (en) | 2008-12-04 |
CA2688226C (en) | 2016-03-15 |
TWI433259B (zh) | 2014-04-01 |
US8172288B2 (en) | 2012-05-08 |
DE202007007721U1 (de) | 2007-08-09 |
WO2008145085A4 (de) | 2009-02-05 |
MY174425A (en) | 2020-04-17 |
EP2167285B1 (de) | 2018-04-18 |
WO2008145085A8 (de) | 2009-12-23 |
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